Abstract: The invention relates to a vibrating wire sensor (20, 30, 40 and 50) having a vibrating wire (21, 31, 41 and 51), which is tensioned accordingly differently under measurement conditions of a current factor to be detected, and having an exciter arrangement for exciting the vibrating wire (21, 31, 41 and 51) in the range of the respective natural frequency thereof, wherein the exciter arrangement has at least one exciter layer (22, 32, 42 and 52) provided on a longitudinal portion of the vibrating wire (21, 31, 41 and 51), having a piezoelectric activation layer (33, 46 and 54), which has a different length depending on the activation state, and thus creates a correspondingly different vibration position of the vibrating wire (21, 31, 41 and 51). A vibrating wire sensor can thus be designed to be more robust, wherein the power consumption is additionally considerably less. The invention further relates to a vibrating wire having an exciter layer (22, 32, 42 and 52), which has a piezoelectric activation layer.

Abstract: Provided in accordance with the herein described exemplary embodiments are piezo micro-machined ultrasonic transducers (pMUTs) each having a first electrode that includes a first electrode portion and a second electrode portion. The second electrode portion is separately operable from the first electrode portion. A second electrode is spaced apart from the first electrode and defines a space between the first electrode and the second electrode. A piezoelectric material is disposed in the space. Also provided are arrays of pMUTs wherein individual pMUTs have first electrode portions operably associated with array rows and second electrode portions operably associated with array columns.

Abstract: A transducer includes first and second piezoelectric layers made of corresponding different first and second piezoelectric materials and three or more electrodes, implemented in two or more conductive electrode layers. The first piezoelectric layer is sandwiched between a first pair of electrodes and the second piezoelectric layer is sandwiched between a second pair of electrodes. The first and second pairs of electrodes contain no more than one electrode that is common to both pairs.

Abstract: A Fin Bulk Acoustic Resonator (FinBAR) includes a fin integrally fabricated on a substrate of a glass or a semiconductor, an inner electrode deposited on the fin, a piezoelectric layer disposed on the inner electrode, an outer electrode deposited on the piezoelectric layer, a first electrode and a second electrode formed on the top surface of the substrate and connected to the inner and outer electrodes respectfully. The fin is characterized with a larger height than its width. A FinBAR array including a number of the FinBARs with different fin widths sequentially located on one chip is capable of continuously filtering frequencies in UHF and SHF bands.

Abstract: In a piezoelectric element, shift of a resonance point to a low-pitched sound side is achieved. A resonance point of a piezoelectric element moves to a low-pitched sound side when an active region is configured to be surrounded by an inactive region as in the configuration of the piezoelectric element. According to the piezoelectric element whose resonance point is moved to a low-pitched sound side, the piezoelectric element can realize a sound pressure that is sufficiently high for practical use when it is applied to an acoustic device.

Abstract: To measure the weight of an excavated object, with a simple configuration at low cost, a scraper vehicle includes a coupler having a first portion to be coupled to a driving vehicle and a first detection device provided at at least one of the first portion of the coupler and a first supporting member that supports the first portion. The first detection device is configured to detect a variation in a physical quantity of the first portion.

Abstract: A semiconductor device includes a first semiconductor layer having a first surface and a second surface. A first metal film is disposed on the first surface. An outer portion of the first surface beyond an outer periphery of the first metal film is left uncovered by the first metal film. A semiconductor substrate has an inner region of a first thickness and a peripheral region of a second thickness, greater than the first thickness. A portion of the first semiconductor layer is between the inner region and the first metal layer. The peripheral region of the semiconductor substrate is below the outer portion of the first surface of the first semiconductor layer. A second metal film is below the inner region of the semiconductor substrate and adjacent to the peripheral region of the semiconductor substrate.

Abstract: Filter devices. A first chip includes a first interdigital transducer (IDT) of a first acoustic resonator formed on a surface of a first piezoelectric wafer having a first thickness, interleaved fingers of the first IDT disposed on a portion of the first piezoelectric wafer spanning a first cavity in a first base. A second chip includes a second IDT of a second acoustic resonator formed on a surface of a second piezoelectric wafer having a second thickness less than the first thickness, interleaved fingers of the second IDT disposed on a portion of the second piezoelectric wafer spanning a second cavity in a second base. A circuit card coupled to the first chip and the second chip includes at least one conductor for making an electrical connection between the first IDT and the second IDT.

Abstract: Various methods and systems are provided for an ultrasound transducer structure for an ultrasound probe and methods of manufacturing thereof. In one example, the ultrasound transducer structure may include a lens, an acoustic stack disposed on the lens, and an acoustic backing material bonded to a side of the acoustic stack facing away from the lens without any intervening layer between the acoustic backing material and the acoustic stack, such that the acoustic backing material is in face-sharing contact with the side of the acoustic stack, wherein the acoustic backing material is composed of a solidified blend comprising a backing polymer.

Abstract: Acoustic filters, resonators and methods are disclosed. An acoustic filter device includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces, the back surface attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer is formed on the front surface of the piezoelectric plate with interleaved fingers of the IDT disposed on the diaphragm. At least a portion of a perimeter of the cavity is curved, and the perimeter of the cavity is corner-less.

Abstract: A bulk acoustic wave sensor includes a delay layer. The sensor includes an acoustic mirror and a base resonator. The base resonator includes a piezoelectric layer and two electrodes. One or more delay layers are disposed adjacent to the base resonator. A delay layer may be disposed between the base resonator and the acoustic mirror, a delay layer may be disposed on the base resonator opposite to the acoustic mirror, or both. Each delay section is formed of high quality-factor material. The sensor may define a resonant frequency, and the thickness of each delay section may be an integer multiple of half-wavelengths of the resonant frequency.

Abstract: Acoustic filters, resonators and methods are disclosed. An acoustic resonator device includes a substrate having a surface. A back surface of a single-crystal piezoelectric plate is attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. A conductor pattern is formed on the front surface of the piezoelectric plate, the conductor pattern including an interdigital transducer (IDTs), interleaved fingers of the IDT disposed on the diaphragm. A pitch of the interleaved fingers and a mark of the interleaved fingers are set in combination such that a resonance frequency of the acoustic resonator is equal to a predetermined target frequency.

Abstract: A compound acoustic wave filter device comprises a support substrate having an including two or more circuit connection pads. An acoustic wave filter includes a piezoelectric filter element and two or more electrodes. The acoustic wave filter is micro-transfer printed onto the support substrate. An electrical conductor electrically connects one or more of the circuit connection pads to one or more of the electrodes.

Abstract: An external component including a vibratory portion configured to vibrate in response to a sound signal to evoke a hearing percept via bone conduction and including a coupling portion configured to removably attach the external component to an outer surface of skin of a recipient of the hearing prosthesis while imparting deformation to the skin of the recipient at a location of the attachment, in a one-gravity environment, of an amount that is about equal to or equal to that which results from the external component having mass.

Abstract: A filter comprising first and second BAW resonators. The first BAW resonator having a piezoelectric layer, located between a top electrode and a bottom electrode, and a dielectric layer located between the bottom electrode and an additional electrode. Wherein the dielectric layer, the bottom electrode and the additional electrode are configured to provide an additional capacitance in the resonator. The second BAW resonator having at least one less electrode than the first BAW resonator.

Abstract: Embodiments of the invention include microelectronic devices, resonators, and methods of fabricating the microelectronic devices. In one embodiment, a microelectronic device includes a substrate and a plurality of cavities integrated with the substrate. A plurality of vertically oriented resonators are formed with each resonator being positioned in a cavity. Each resonator includes a crystalline or single crystal piezoelectric film.

Abstract: A method of manufacture for an acoustic resonator or filter device. In an example, the present method can include forming metal electrodes with different geometric areas and profile shapes coupled to a piezoelectric layer overlying a substrate. These metal electrodes can also be formed within cavities of the piezoelectric layer or the substrate with varying geometric areas. Combined with specific dimensional ratios and ion implantations, such techniques can increase device performance metrics. In an example, the present method can include forming various types of perimeter structures surrounding the metal electrodes, which can be on top or bottom of the piezoelectric layer. These perimeter structures can use various combinations of modifications to shape, material, and continuity. These perimeter structures can also be combined with sandbar structures, piezoelectric layer cavities, the geometric variations previously discussed to improve device performance metrics.

Abstract: A resonator device may include a stacked first resonator and second resonator. The first resonator may be configured to resonate at a first operating frequency, and the second resonator may be configured to resonate at a second operating frequency different from the first operating frequency. The first resonator may include a first electrode and a first active layer arranged over the first electrode. The second resonator may include a second active layer arranged over the first active layer, and a second electrode arranged over the second active layer. The stacked first resonator and second resonator may be coupled to a reconfiguration switch for selectively operating at the first operating frequency or the second operating frequency. One of the first resonator and the second resonator is active upon selection by the reconfiguration switch, while the other resonator is inactive.

Abstract: A scanning lidar system includes a fixed frame, a first platform, and a first electro-optic assembly. The first electro-optic assembly includes a first laser source and a first photodetector mounted on the first platform. The scanning lidar system further includes a first flexure assembly flexibly coupling the first platform to the fixed frame, and a drive mechanism configured to scan the first platform with respect to the fixed frame in two dimensions in a plane substantially perpendicular to an optical axis of the lidar system. The scanning lidar system further includes a controller coupled to the drive mechanism. The controller is configured to cause the drive mechanism to scan the first platform in a first direction with a first frequency and in a second direction with a second frequency. The second frequency is similar but not identical to the first frequency.

Abstract: A physical quantity sensor includes a pivoting mass having a first plate on one side of a rotation axis, a second plate on the other side of the rotation axis, and a link connecting the first plate to the second plate. The link includes a first slit, a second slit on one side of the first slit toward the first plate, and a third slit on the other side of the first slit toward the second plate. The second and third slits are also deviated toward a peripheral edge of the link with respect to the first slit.

Abstract: Embodiments of the invention include a piezoelectric package integrated filtering device that includes a film stack. In one example, the film stack includes a first electrode, a piezoelectric material in contact with the first electrode, and a second electrode in contact with the piezoelectric material. The film stack is suspended with respect to a cavity of an organic substrate having organic material and the film stack generates an acoustic wave to be propagated across the film stack in response to an application of an electrical signal between the first and second electrodes.

Abstract: An opposite-side dielectric ceramic layer is in contact with a first opposite-surface electrode layer and a second opposite-surface electrode layer. A mounting-side dielectric ceramic layer is in contact with a first mounting-surface electrode layer and a second mounting-surface electrode layer. A mounting-side inner electrode layer is separated from the first mounting-surface electrode layer and the second mounting-surface electrode layer by the mounting-side dielectric ceramic layer, disposed on the mounting-side dielectric ceramic layer, extending from a first side-surface electrode layer, and separated from a second side-surface electrode layer. In a cross-sectional view including a lamination direction and a length direction, a position in which the second mounting-surface electrode layer has a maximum thickness is shifted toward a second side surface in the length direction with respect to a position in which the second opposite-surface electrode layer has a maximum thickness.

Abstract: Embodiments of the invention include a filtering device that includes a first electrode, a piezoelectric material in contact with the first electrode, and a second electrode in contact with the piezoelectric material. The piezoelectric filtering device expands and contracts laterally in a plane of an organic substrate in response to application of an electrical signal between the first and second electrodes.

Abstract: There is provided a signaling apparatus including a plurality of LED elements provided in a signal lamp body; a transparent panel provided in the LED elements and configured to transmit outgoing light from the LED elements on a rear side to a front surface to which snow adheres; a frame unit provided on an outer periphery of the panel; and vibration generators provided in the frame unit and configured to vibrate the panel.

Abstract: Acoustic resonators with enhanced boundary conditions are disclosed. In an example aspect, a resonator includes a volume of piezoelectric material including an upper surface and a lower surface. The resonator also includes a bottom electrode extending along a portion of the lower surface of the volume of piezoelectric material. The resonator further includes a multi-layered top electrode extending along a portion of the upper surface of the volume of piezoelectric material. The multi-layered top electrode includes an active region including an interface layer of a first thickness, where the active region overlaps a portion of the bottom electrode. The multi-layered top electrode also includes a frame region including the interface layer of a second thickness, where the second thickness is greater than the first thickness. The multi-layered top electrode further includes an outer region including the interface layer of a third thickness, where the third thickness is less than the second thickness.

Abstract: An acoustic resonator includes: a substrate; a resonance part mounted on the substrate and including resonance part electrodes, the resonance part being configured to generate acoustic waves; a cavity disposed between the resonance part and the substrate; a frame part disposed on at least one electrode among the resonance part electrodes, and being configured to reflect the acoustic waves; and a connection electrode configured to connect the at least one electrode to an external electrode, and having a thickness less than a thickness of the at least one electrode.

Abstract: A resonator including a vibrating portion with first and second electrodes and a piezoelectric film formed therebetween. Moreover, a frame surrounds the vibrating portion with a pair of holding units opposite to each other and connecting the vibrating portion with the frame. An extended electrode extends from the holder to the holding unit and either the first or second electrode extends to the holding unit, and is connected to the extended electrode. Furthermore, the resonator includes an electrical resistance value per unit area of the extended electrode that is smaller than an electrical resistance value per unit area of the first electrode or the second electrode that extends to the holding unit.

Abstract: A piezoelectric two-dimensional mode resonator suited for high frequency filtering applications, with the ability to simultaneously excite lateral and vertical acoustic waves.

Abstract: A suction extraction device has a fan, a suction head, a channel leading from the suction head to the fan, a dust filter and a collection container to hold the dust that has been deposited on the dust filter. The suction head has a tubular cavity that is arranged around the working axis and that serves to accommodate the connection section of the suction drill bit. Arranged in the cavity is a flow sensor that has a sensor surface facing the working axis and that serves to emit a measuring signal that is indicative of the air flow that is striking the sensor surface. An evaluation unit emits an error signal in response to the measuring signal if the measuring signal is lower than a threshold value for at least a prescribed period of time, whereas it suppresses the error signal if the measuring signal exceeds the threshold value during the prescribed period of time. A signaling unit displays the error signal to a user.

Abstract: An acoustic resonator including a substrate, an active vibration region including, sequentially stacked on the substrate, a lower electrode, a piezoelectric layer, and an upper electrode, and a horizontal resonance suppressing part formed from and disposed in the piezoelectric layer, the horizontal resonance suppressing part having piezoelectric physical properties that are different from piezoelectric physical properties of the piezoelectric layer.

Abstract: Devices and methods for treating human cranial hair loss using extracorporeal acoustic shock waves are disclosed. The shock wave device optionally includes a proximal surface, a plurality of shock wave generators disposed on the surface, and a coupling assembly configured to transmit shock waves to a user's scalp.

Abstract: A gas turbine engine assembly includes a static component and a rotatable component configured to rotate about a central axis of the gas turbine engine assembly relative to the static component. The gas turbine engine assembly further includes a vibration-dampening system configured to dampen vibration of the gas turbine engine assembly.

Abstract: Electromechanical detection device, particularly for gravimetric detection, and method for manufacturing the device. The electromechanical detection device includes a support including a face defining a plane, at least one beam that can move relative to the support, and means of detecting beam displacement, outputting a signal that depends on the displacement. The beam is anchored to the support through an end and is approximately perpendicular to the plane, and the other end of the beam includes at least one reception zone that can receive one or several particles causing or modifying displacement of the beam, in order to determine at least one physical property of the particle(s) from the signal. According to the invention, the detection means are located between the reception zone and the support.

Abstract: A resonance device is provided having a resonator with opposing upper and lower lids. The resonator includes a base, and multiple vibration arms that are connected to a front end of the base so as to extend away from the base. Moreover, a frame surrounds a periphery of the base portion and the vibration arms and one or more holding arms connect the base to the frame. The base, the vibration arms, and the holding arm include a substrate and a temperature characteristics correction layer laminated on the substrate and having a material with a coefficient of thermal expansion different from that of the substrate. The base, the vibration arms, and the holding arm are formed integrally with the substrate and the temperature characteristics correction layer.

Abstract: A piezoelectric vibration module includes a vibration plate adapted to have one end fixed and the other end not fixed and driven in a vertical direction based on the fixed first end, a first piezoelectric element attached to the top or bottom of the vibration plate and adapted to generate a vibration power when power is applied, and a weight formed in the other end of the top or bottom of the vibration plate and adapted to control the vibration frequency of the piezoelectric vibration module. The first piezoelectric element is attached to the top or bottom of the vibration plate with a predetermined interval from a fixed point at the one end of the vibration plate.

Abstract: The disclosure relates to a hand-held power tool comprising a percussion mechanism, especially a rotary hammer and/or percussion hammer. According to the disclosure, at least one sensor unit comprising at least sensor for at least one mechanical measurement variable is provided for detecting at least one percussion parameter.

Abstract: A method for manufacturing a piezoelectric device that includes a substrate, a piezoelectric layer directly or indirectly supported by the substrate and arranged above the substrate, a heater, and a heater electrode for driving the heater. Moreover, the method includes forming the piezoelectric layer, the heater, and the heater electrode and subjecting the piezoelectric device to heat treatment with heat generated from the heater by driving the heater by feeding electric power to the heater electrode.

Abstract: A BAW device includes a substrate, a first reflector, and at least two BAW transducers. The first reflector resides over the substrate and has a plurality of reflector layers. A first BAW transducer resides over a first section of the first reflector, has a first series resonance frequency, and has a first piezoelectric layer of a first thickness between a first top electrode and a first bottom electrode. The second BAW transducer resides over a second section of the first reflector, has a second series resonance frequency that is different than the first series resonance frequency, and has a second piezoelectric layer of a second thickness, which is different than the first thickness, between a second top electrode and a second bottom electrode.

Abstract: A bulk acoustic wave (BAW) filter for passing through electric signals in a preset frequency range is provided. The BAW filter includes: a diamond substrate; a passivation layer formed on the diamond substrate; a first metal layer formed on the passivation layer; a piezoelectric layer formed on the first metal layer; a second metal layer formed on a piezoelectric layer and a metal pad formed on the first metal layer. The metal pad, first metal layer, piezoelectric layer and second metal layer form an electrical path that allows an electrical signal within a preset frequency range to pass therethrough.

Abstract: A piezoelectric device that includes a substrate defining an opening therein; a piezoelectric layer arranged above the substrate such that at least part of the piezoelectric layer extends over the opening and forms a membrane part that is not superimposed with the substrate; a lower electrode arranged below the piezoelectric layer in at least the membrane part; and an upper electrode that is arranged above the piezoelectric layer so as to face at least part of the lower electrode with the piezoelectric layer interposed therebetween in the membrane part. A heater is arranged above the piezoelectric layer so as to be separate from the upper electrode or at least part of the upper electrode doubles as a heater.

Abstract: The present disclosure relates to a Wafer-level-packaged Bulk Acoustic Wave (BAW) device, which includes a bottom electrode, a top electrode, a top electrode lead, a piezoelectric layer sandwiched between the bottom and the top electrodes, an enclosure, and an anti-reflective layer (ARL). Herein, an active region for a resonator is formed where the bottom electrode and the top electrode overlap. The top electrode lead is over the piezoelectric layer and extending from the top electrode. The enclosure includes a cap and an outer wall that extends from the cap toward the piezoelectric layer to form a cavity. The top electrode resides in the cavity and a first portion of the outer wall resides over the top electrode lead. The ARL, with a reflectance less than 40% R, is between the first portion of the outer wall and the top electrode lead.

Abstract: A micro-resonator includes a first electrode positioned on a piezoelectric plate at a first end of the piezoelectric plate, the first electrode including a first set of fingers and a second electrode positioned on the piezoelectric plate at a second end of the piezoelectric plate. The second electrode including a second set of fingers interdigitated with the first set of fingers with an overlapping distance without touching the first set of fingers, the overlapping distance being less than seven-tenths the length of one of the first set of fingers or the second set of fingers. At least one of the first end or the second end of the piezoelectric plate may define a curved shape.

Abstract: An oscillator having a dielectric wave guiding resonant cavity and an oscillator circuit operatively coupled to the dielectric wave guiding resonant cavity having at least one transistor, the two being of a unitary construction.

Abstract: A data processing apparatus includes: a plurality of power supplies; a nonvolatile logic configured to be driven with power output from the plurality of power supplies; and a plurality of detection parts configured to detect output states of the plurality of power supplies, wherein the nonvolatile logic performs data processing based on a result of the detection of the plurality of detection parts.

Abstract: A sensor assembly is provided includes a sensor housing, a first sensor, and a second sensor. The sensor housing operatively connected to a body having a first end and a second end. The first sensor is disposed within the sensor housing. The second sensor is disposed within the sensor housing and is spaced apart from the first sensor. The first sensor and the second sensor face towards a first position feature and a second position feature that is disposed on a movable member that is received within the body.

Abstract: Described herein are reduced-power electronic circuits with wide-band energy recovery using non-interfering topologies. A digital logic driver comprising a pulldown switch, an energy saving component (e.g., inductor) coupled in series with the pulldown switch, and a reference supply connected in series with the energy saving component that is configured to enable the digital logic driver to resonate with a load capacitance and reuse electrical energy at the load capacitance without interfering with a signal path of the digital logic driver.

Abstract: An electrical circuit comprising at least two negative capacitance insulators connected in series, one of the two negative capacitance insulators is biased to generate a negative capacitance. One of the negative capacitance insulators may include an air-gap which is part of a nanoelectromechnical system (NEMS) device and the second negative capacitance insulator includes a ferroelectric material. Both of the negative capacitance insulators may be located between the channel and gate of a field effect transistor. The NEMS device may include a movable electrode, a dielectric and a fixed electrode and arranged so that the movable electrode is attached to at least two points and spaced apart from the dielectric and fixed electrode, and the ferroelectric capacitor is electrically connected to either of the electrodes.

Abstract: A thin vibration wave motor is provided by thinning a friction member of the vibration wave motor. In a vibration wave motor including: a vibrator including a piezoelectric element and a vibration plate; and a friction member including a frictional contact surface to be brought into contact with the vibrator, the vibrator and the friction member being moved relative to each other using vibration generated in the vibrator, the vibration plate includes a flat plate portion to which the piezoelectric element is fixed and projection portions to be brought into contact with the friction member, and the friction member includes at least one reinforcing portion that increases a strength of the friction member along a direction of the relative movement, in a region between the flat plate portion and the friction member.

Abstract: A bulk acoustic wave (BAW) resonator includes: an acoustic reflector disposed in a substrate; a lower electrode disposed over the acoustic reflector; a piezoelectric layer disposed over the lower electrode; and an upper electrode disposed over the piezoelectric layer. A contacting overlap of the lower electrode, the piezoelectric layer and the upper electrode over the acoustic reflector comprising an active area of the BAW resonator. An opening exists in the upper electrode in a region of the BAW resonator susceptible to unacceptable overheating.

Abstract: A piezoelectric device and a method of manufacturing a piezoelectric device are provided. The piezoelectric device includes first and second electrodes disposed on a first surface of a piezoelectric layer; third and fourth electrodes disposed on a second surface of the piezoelectric layer, a first conductor electrically connecting the first and fourth electrodes, and a second conductor electrically connecting the second and third electrodes, in a cross-link with the first conductor.