Abstract: A capacitive electromechanical transducer in which a reception characteristic is hardly affected by an elastic wave intruding into a substrate is provided. The capacitive electromechanical transducer includes a first electric connection portion that is connected to a second electrode disposed on a surface of a substrate to draw the second electrode onto a side of a surface of the first substrate on a side opposite from a surface in which a first electrode and the second electrodes are provided. With respect to a thickness direction of a first substrate, a diaphragm with which the first electric connection portion is covered is formed on the side of the surface of the first substrate, in which the first and second electrodes are provided.

Abstract: The present invention relates to an electromechanical transducer capable of arbitrarily varying the amount of deflection of a vibrating membrane for every element. The electromechanical transducer includes a plurality of elements including at least one cell that includes a first electrode and a second electrode opposed to the first electrode with a gap sandwiched therebetween and a direct-current voltage applying unit configured to be provided for each element and to separately apply a direct-current voltage to the first electrodes in each element. The first electrodes and the second electrodes are electrically separated for every element.

Abstract: Micromechanical resonating devices, as well as related methods, are described herein. The resonating devices can include a micromechanical resonating structure, an actuation structure that actuates the resonating structure, and a detection structure that detects motion of the resonating structure.

Abstract: An electroacoustic transducer including a first electrode formed on a substrate capable of transmitting ultrasounds, a membrane formed above the first electrode and separated therefrom by a cavity, a second electrode formed on the membrane, a first insulating layer on the second electrode, and a third electrode formed on the first insulating layer.

Abstract: In a MEMS device having a substrate 1, a sealing membrane 7, and a movable portion 3 of beam and an electrode 5 which have a region wherein they overlap with a gap in perpendicular to a substrate 1 surface, a first cavity 9 is on the side of the movable portion 3 in the direction perpendicular to the surface of the substrate, and a second cavity is the other cavity, and an inner surface a of a side wall A in contact with the electrode 5, of the first cavity 9, is positioned more inside than an inner surface b of a side wall B in contact with the electrode 5, of the second cavity 10, in the direction parallel to the substrate surface, such that the movable portion 3 does not collide with the electrode 5 when mechanical stress is applied from outside to the sealing membrane 7.

Abstract: The present invention relates to a method for producing an electromechanical, for example piezoelectric, transducer in which a first polymer layer comprising cutouts is applied to a first continuous polymer layer by means of a printing and/or coating method, a cover is applied to the first polymer layer comprising cutouts in such a way that the cutouts of the first polymer layer comprising cutouts are closed off with the formation of cavities, and the cover is connected to the first polymer layer comprising cutouts. The invention also relates to electromechanical transducers produced by the method according to the invention, and the use of said electromechanical transducers.

Abstract: A capacitive micromachined ultrasonic transducer (CMUT) is described, including a substrate, a conductive film disposed over the substrate, a conductive membrane suspended over the conductive film with a vacuum space underneath, and at least one anchoring post disposed under a middle of the conductive membrane and supporting the conductive membrane.

Abstract: The receive sensitivity of an ultrasound array transducer structured with a diaphragm electro-acoustic transducer (101) being a basic unit is affected by change in a charge amount with elapsed time due to leakage or the like, which causes drift of the primary beam sensitivity, degradation in the acoustic SN ratio due to a rise in the acoustic noise level, and degradation in the directivity of an ultrasound beam. To addressing this problem, a charge controller (charge monitor 211) is provided to control charge in an electro-acoustic transducer (101). A charge monitoring section (102) monitors the change in the charge amount. When change in the charge amount is small, transmit sensitivity or receive sensitivity is calibrated by a controller (104) by, for example, multiplying a receive signal by a calibration coefficient corresponding to the change amount. Further, when the change in the charge amount is large, for example, charges can be re-emitted from a charge emitter (103).

Abstract: An electrostatic induction generation device comprising a first fixed electrode substrate having a first electret electrode, a second fixed electrode substrate having a second electret electrode, a movable electrode substrate having a movable electrode, a holding frame formed separately from the movable electrode, a first pair of electrode support beams and a second pair of electrode support beams connected with the movable electrode and the holding frame, and wherein the movable electrode substrate is formed between the first fixed electrode substrate and the second fixed electrode substrate, and the movable electrode is opposed to the first electret electrode and the second electret electrode.

Abstract: The various embodiments of the present invention are directed to floating floor systems and to methods of making and using the floor systems. The floating floor systems generally include a floating flooring unit (704) and a mechanical-energy-harvesting device (710). The mechanical-energy-harvesting device can be incorporated into the flooring unit component at a variety of locations. The floor systems can further include an energy storage device (712) and/or an electronic component that will be actuated or driven by the electricity generated.

Abstract: Artifacts due to lateral wave that occurs in a substrate of a Capacitive Micro-machined Ultrasonic Transducer is reduced. The substrate thickness of the ultrasonic transducer is set in an optimum range to efficiently radiate the energy of lateral wave in the sensitive band 91 of the ultrasonic transducer to the outside so that the lateral wave is attenuated thereby reducing the artifacts in ultrasonic imaging.

Abstract: A micromechanical component is described having a substrate which has a movable mass which is connected via at least one spring to the substrate so that the movable mass is displaceable with respect to the substrate, and at least one fixedly mounted stator electrode. The movable mass and the at least one spring are structured from the substrate. At least one separating trench which at least partially surrounds the movable mass is formed in the substrate. The at least one stator electrode is situated adjacent to an outer surface of the movable mass which is at least partially surrounded by the separating trench, with the aid of at least one supporting connection which connects the at least one stator electrode to an anchor situated on the substrate and spans a section of the separating trench. Also described is a manufacturing method for a micromechanical component.

Abstract: An expansion and contraction actuator has a first long actuator portion and a second long actuator portion that face each other and connection members that connect the long sides of each of the first long actuator portion and the second long actuator portion to each other, in which a part of the first long actuator portion and a part of the second long actuator portion are apart from each other to thereby form a hollow structure, the first long actuator portion and the second long actuator portion each have a pair of long electrodes and a long electrolyte layer having an electrolyte, long internal electrodes thereof are the same cathode or anode electrodes, long external electrodes thereof are counter electrodes thereto, and the actuator expands and contracts in the direction of the screw axis by voltage application.

Abstract: A piezoresistive MEMS oscillator comprises a resonator body, first and second drive electrodes located adjacent the resonator body for providing an actuation signal; and at least a first sense electrode connected to a respective anchor point. The voltages at the electrodes are controlled and/or processed such that the feedthrough AC current from one drive electrode to the sense electrode is at least partially offset by the feedthrough AC current from the other drive electrode to the sense electrode.

Abstract: Disclosed is an apparatus for monitoring a material configured to perform one or more functions or for actuating the material. One or more electrodes are coupled to the material. An electronic device is coupled to the one or more electrodes and is configured to detect an electrical characteristic of the material to monitor the material or to apply an electrical stimulus to actuate the material.

Abstract: An electrostatic acting device in which leakage of charge from an electret film is suppressed. The electrostatic acting device comprises a movable electrode section (20) having a movable electrode (22), a fixed electrode section (10) having an electret film (12) opposed to the movable section (20) at a predetermined distance and capable of storing charge and a conductive layer (14) formed on a predetermined region on the upper surface of the electret film (12), and an insulating film (13) interposed between the electret film (12) and the conductive layer (14).

Abstract: A micro-electro-mechanical transducer (such as a cMUT) having a non-flat surface is disclosed. The non-flat surface may include a variable curve or slope in an area where a spring layer contacts a support, thus making a variable spring model as the spring layer vibrates. The non-flat surface may be that of a non-flat electrode optimized to compensate the dynamic deformation of the other electrode during operation and thus enhance the uniformity of the dynamic electrode gap during operation. Methods for fabricating the micro-electro-mechanical transducer are also disclosed. The methods may be used in both conventional membrane-based cMUTs and cMUTs having embedded springs transporting a rigid top plate.

Abstract: A method and device for gasflow, e.g. airflow, energy harvesting is disclosed. In one aspect, the device includes a cavity resonator such as a Helmholtz resonator which has a membrane for converting gasflow in vibration. The device may further include a vibrational energy harvester for converting the converted vibration into electrical energy. The device for gasflow energy harvesting is adapted such that the movement of the vibrational energy harvester is decoupled from the movement of the membrane. This allows to obtain a good output power of e.g. more than about 10 ?W.

Abstract: Fibrous micro-composite materials are formed from micro fibers. The fibrous micro-composite materials are utilized as the basis for a new class of MEMS. In addition to simple fiber composites and microlaminates, fibrous hollow and/or solid braids, can be used in structures where motion and restoring forces result from deflections involving torsion, plate bending and tensioned string or membrane motion. In one embodiment, fibrous elements are formed using high strength, micron and smaller scale fibers, such as carbon/graphite fibers, carbon nanotubes, fibrous single or multi-ply graphene sheets, or other materials having similar structural configurations. Cantilever beams and torsional elements are formed from the micro-composite materials in some embodiments.

Abstract: An electrostatic acting device in which leakage of charge from an electret film is suppressed. The electrostatic acting device comprises a movable electrode section (20) having a movable electrode (22) and a fixed electrode section (10) having an electret film (12) opposed to the movable electrode section (20) at a predetermined distance and capable of storing charge and a conductive layer (13) formed on a predetermined region on the upper surface of the electret film (12). The conductive layer (13) is formed on the surface of a region of the electret film (12), and the region is projected.

Abstract: The present invention provides a vibration power generator that does not require a complicated structure and process and improves mechanical reliability, and copes with frequency reduction, a vibration power generating device, and an electronic device and a communication device that have the vibration power generating device mounted thereon.

Abstract: A microresonator for use as a resonator in a detector is disclosed. In one aspect, the microresonator has a first predetermined resonance mode. The microresonator has an integrated electronic transducer for measuring deformation of the microresonator in the first predetermined resonance mode of the microresonator. The transducer is located at a local deformation of the predetermined resonance mode to measure the deformation of the microresonator at such location. The first predetermined resonance mode may be one of higher order resonance modes.

Abstract: Disclosed is an art for a capacitive micromachined ultrasonic transducer (CMUT), which suppresses deformation in a cavity, non-uniformity in the thickness of an insulating film enclosing the cavity, and deterioration in the flatness of the surface profile of a membrane, even when the bottom electrode of the ultrasonic transducer is electrically connected from the bottom of the bottom electrode. The ultrasonic transducer is provided with: a bottom electrode (306); an electric connection part (304) which is connected to the bottom electrode from the bottom of the bottom electrode; a first insulating film which is formed so as to cover the bottom electrode; a cavity (308) which is formed on the first insulating film so as to overlap the bottom electrode when seen from above; a second insulating film which is formed so as to cover the cavity (308); and a top electrode (310) which is formed on the second insulating film so as to overlap the cavity (308) when seen from above.

Abstract: The present invention provides for replacement of conventionally-used metal electrodes in NEMS devices with electrodes that include non-metallic materials comprised of diamond-like carbon or a dielectric coated metallic film having greater electrical contact resistance and lower adhesion with a contacting nanostructure. This reduces Joule heating and stiction, improving device reliability.

Abstract: The invention relates to a method for producing double or multilayer ferroelectret with defined cavities by: structuring at least one first surface of a first polymer film (1) forming a height profile, applying ate least one second polymer film (5, 1?) to the structured surface on the first polymer film formed in step a), joining the polymer films (1, 1?, 5) to give a polymer film composite with the formation of cavities (4, 4?) and electrically charging of the inner surfaces of the cavities (4, 4?) formed in step c) with opposing electrical charges. The invention further relates to ferroelectret multilayer composites, optionally produced by said method, comprising at least two polymer films, arranged one over the other and connected to each other, wherein cavities are formed between the polymer films. A piezoelectric element comprising a said ferroelectret multilayer composite is also disclosed.

Abstract: A two-dimensional comb-drive actuator and manufacturing method thereof are described. The two-dimensional comb-drive actuator includes a supporting base, a frame and a movable body. The supporting base has first comb electrodes and the frame has internal comb electrodes and external comb electrodes. The external comb electrodes of the frame are interdigitated to the first comb electrodes of the supporting base. The movable body has second comb electrodes which are interdigitated to the internal comb electrodes of the frame. The thicknesses of the second comb electrodes of the movable body are unequal to the internal comb electrodes of the frame and the external comb electrodes of the frame are unequal to the first comb electrodes of the supporting base. The two-dimensional comb-drive actuator utilizes a conducting layer for the above-mentioned comb electrodes in order to increase the rotation angle and operation frequency thereof.

Abstract: An electro-osmotic pump includes a pump chamber having a wall fabricated of an electric double layer material, the surface area of the electric double layer material being high relative to the volume of the chamber. An electric potential applied across the material causes a fluid in the chamber to be transported through the wall. A nastic actuator includes the electro-osmotic pump and an actuator chamber, having a variable volume, coupled to the pump chamber. A superabsorbent polymer is disposed in the pump and actuator chambers, such that transport of the fluid into the pump chamber results in absorption of the fluid by the superabsorbent polymer, causing the actuator chamber to increase in volume. When the electric potential is applied across the superabsorbent polymer, the superabsorbent polymer expands, further causing the actuator chamber to increase in volume.

Abstract: An acoustic sensor includes a semiconductor substrate with a back chamber, a conductive diaphragm arranged on an upper side of the semiconductor substrate, an insulating fixed film fixed on an upper surface of the semiconductor substrate covering the conductive diaphragm with a gap, a conductive fixed electrode film arranged on the insulating fixed film facing the diaphragm, an extraction wiring extracted from the conductive fixed electrode film, and an electrode pad to which the extraction wiring is connected. The acoustic sensor converts an acoustic vibration to change electrostatic capacitance between the conductive diaphragm and the conductive fixed electrode film. A plurality of acoustic perforations are opened in a back plate including the insulating fixed film and the conductive fixed electrode film. An opening rate of the plurality of acoustic perforations is smaller in the extraction wiring and a region in the vicinity thereof than in other regions.

Abstract: A sensor assembly includes a transducer and a control module coupled with the transducer. The control module is configured to selectively switch the sensor assembly between a first mode of operation wherein the sensor assembly measures an amount of energy induced to the sensor assembly, and a second mode of operation wherein the sensor assembly stores an amount of energy induced to the sensor assembly.

Abstract: There is provided an electrostatic induction conversion device which is small, has high conversion efficiency between electric energy and kinetic energy, and can prevent degradation of an electret. The electret is formed by injecting an electric charge into the vicinity of the surface of an insulating material, is disposed between two conductors, and is constructed so that it moves relatively to at least one of the conductors opposite to the electret and converts between electric energy and kinetic energy. As the insulating material forming the electret, it is preferable to use a polymer having a fluorine-containing aliphatic cyclic structure.

Abstract: A current source and method of producing the current source are provided. The current source includes a metal source, a buffer layer, a filter and a collector. An electrical connection is provided to the metal layer and semiconductor layer and a magnetic field applier may be also provided. The source metal has localized states at a bottom of the conduction band and probability amplification. The interaction of the various layers produces a spontaneous current. The movement of charge across the current source produces a voltage, which rises until a balancing reverse current appears. If a load is connected to the current source, current flows through the load and power is dissipated. The energy for this comes from the thermal energy in the current source, and the device gets cooler.

Abstract: A power generating apparatus (100) is provided with first substrates (2b, 2c) whereupon a first electrode (3) is arranged on one surface; a second substrate (1a) which includes a second electrode (6) arranged to face a first electrode on the one surface side of the first substrate; and sliding mechanisms (10, 11, 12, 13 and 14) arranged at least on the one surface side or the other surface side of the first substrate. The sliding mechanism holds the first substrate so that the first substrate moves relatively to the second substrate in a second direction (X direction) while suppressing movement of the first substrate in a first direction (Z direction).

Abstract: An electromechanical transducer includes a first electromagnetic element and a second electromagnetic element, such as electrodes, disposed opposite to each other with a sealed cavity therebetween. The sealed cavity is formed by removing a sacrifice layer and then performing sealing. A sealing portion is formed by superposing a film of a hardened second sealing material that has fluidity at normal temperature on a film of a first sealing material that does not have fluidity at normal temperature.

Abstract: An electrostatic drive is described having an inner frame, at least one intermediate frame, which encloses the inner frame, and an outer frame, which encloses the inner frame and the at least one intermediate frame, each two adjacent frames of the inner, intermediate, and outer frames being connected to one another via at least one spring element, the spring elements, via which each two adjacent frames of the inner, intermediate, and outer frames are connected to one another, being situated in such a way that the longitudinal directions of the spring elements lie on a common longitudinal spring axis, and electrode fingers being situated on frame bars, which are oriented parallel to the longitudinal spring axis, of the inner frame, the at least one intermediate frame, and the outer frame. A manufacturing method for an electrostatic drive, a micromechanical component, and a manufacturing method for a micromechanical component, are also described.

Abstract: An electromechanical transducer includes a plurality cells that are electrically connected to form a unit. Each of the cells includes a first electrode and a second electrode provided with a gap being disposed therebetween. Dummy cells that are not electrically connected to the cells are provided around the outer periphery of the unit of the cells.

Abstract: A cascaded micromechanical actuator structure for rotating a micromechanical component about a rotation axis is described. The structure includes a torsion spring device which, on the one hand, is attached to a mount and to which, on the other hand, the micromechanical component is attachable. The torsion spring device has a plurality of torsion springs which run along or parallel to the rotation axis. The structure includes a rotary drive device having a plurality of rotary drives which are connected to the torsion spring device in such a way that each rotary drive contributes a fraction to an overall rotation angle of a micromechanical component about the rotation axis.

Abstract: A resonator element includes: at least one resonating arm which performs flexural vibration; a base portion connected to an end of the resonating arm; and a tapered portion which is axisymmetrical with respect to a centerline which bisects the width of the resonating arm, and which has a width increasing toward a portion of the tapered portion connected to the base portion from a portion of the tapered portion connected to the resonating arm, wherein assuming that the length and width of the resonating arm are L and W and the length and width of the tapered portion are Lt and Wt, the shape of the tapered portion is controlled to satisfy a taper length occupancy ?=Lt/L and a taper width occupancy ?=2 Wt/W.

Abstract: One or more superconductive cells are connected in series to provide voltage arising from the Hall effect when cooled to superconductor temperatures and immersed in a magnetic field. The magnetic field causes the Hall-effect voltage to develop across the London penetration depth, normal to the surface of each superconductive cell. Conductors connect the back side of one cell with the front side of the adjacent cell. Each superconductive cell is at least the thickness of one London penetration depth.

Abstract: A cMUT-type capacitive electroacoustic transducer including: at least one membrane configured to oscillate under effect of an electric field and/or an acoustic wave, wherein the membrane is formed from one or more layers of juxtaposed nanotubes or nanowires or nanorods, and an acoustic imaging device or UHF sonar including such transducers.

Abstract: A vibration piece includes: a base portion; a first driving arm which extends in a first axis direction from one end of the base portion in the first axis direction; a second driving arm which extends in the first axis direction from the other end of the base portion in the first axis direction; driving electrodes which are respectively provided in the first driving arm and the second driving arm; a detection arm which extends in a second axis direction perpendicular to the first axis direction from the base portion; a detection electrode which is provided in the detection arm; and a support portion which extends from the base portion, wherein the support portion is provided so as to surround the detection arm.

Abstract: A variable capacitance system including a first electrode, a second electrode, and a layer of elastically deformable dielectric material positioned between the first and the second electrode. An electret forms with the first electrode a first capacitor, and the electret forms with the second electrode a second capacitor. Capacitances of the first and second capacitors vary with deformation of the dielectric layer. The first electrode, the second electrode, and the first electret follow deformations of the dielectric layer and a deformation of the dielectric layer causes an inverse variation of capacitances of the first and of the second capacitor. The first electrode includes slots in which the electret is located, wherein the edge of the slots forms with the electret located inside the slots the first capacitor, wherein the electret is made on or in the dielectric layer.

Abstract: A vibration actuator includes an elastic body on which at least one projection is formed and a vibrating body including an electromechanical conversion device, and drives a driven member that is in contact with a contact portion of the projection by causing an end portion of the projection to perform an ellipsoidal movement in response to a combination of two vibration modes generated in the vibrating body when an alternating driving voltage is applied. The elastic body is formed integrally with the projection and a bonding portion between the projection and the electromechanical conversion device. A space is provided between the contact portion and the electromechanical conversion device to which the projection is bonded. The spring portion is provided between the bonding portion and the contact portion and causes the projection to exhibit a spring characteristic when the contact portion is pressed by the driven member.

Abstract: An oscillatory wave motor includes an oscillator having an oscillation body and an electro-mechanical energy-converting element, and a flexible heat-conducting member configured to dissipate heat generated by the oscillatory wave motor. The oscillatory wave motor drives a moving body in contact with a contact portion formed in the oscillation body by an elliptical movement of the oscillator, and the heat-conducting member is provided in addition to a heat-conducting path that conducts heat generated by the oscillatory wave motor through an oscillator supporting member that supports the oscillator or a heat-conducting path that conducts heat through the moving body.

Abstract: Provided is a Micro-Electro-Mechanical Systems (MEMS) device for actuating a gimbaled element, the device including a symmetric electromagnetic actuator for actuating one degree of freedom (DOF) and a symmetric electrostatic actuator for actuating the second degree of freedom.

Abstract: Electricity generated by a vibration power generator 200 can be extracted efficiently by providing the vibration power generator 200, a rectifier circuit bridge 205, an output controlling circuit 201, a load detecting circuit 202 and a frequency detecting circuit 204 and detecting a frequency of the vibration power generator 200 and then controlling an impedance of an output controlling circuit 101 depending on the frequency.

Abstract: An apparatus is configured to drive a transduction apparatus including a cell with a first electrode and a second electrode disposed so as to oppose each other via a gap. The apparatus includes a timing detection unit and a control unit. The timing detection unit detects a timing of outputting of an electromagnetic wave from an electromagnetic wave source configured to output the electromagnetic wave to irradiate an object to be measured. The control unit drives and controls the transduction apparatus in synchronization with the detected timing such that the capacitive electromechanical transduction apparatus is put in a receiving state only for a period in which an acoustic wave generated in an inside of the object irradiated with the electromagnetic wave is received.

Abstract: A driving method for driving an electrostatic actuator including a fixed electrode and a movable electrode opposing each other with a dielectric layer interposed therebetween, includes applying a first voltage, between the fixed electrode and the movable electrode, to bring the movable electrode into contact with the dielectric layer, and applying a second voltage, between the fixed electrode and the movable electrode, after application of the first voltage is stopped and before the movable electrode moves away from the dielectric layer. Here, the second voltage has a polarity opposite to a polarity of the first voltage and an absolute value smaller than an absolute value of the first voltage.

Abstract: A MEMS device includes: a semiconductor substrate; a vibrating film formed on the semiconductor substrate with a restraining portion interposed between the vibrating film and the semiconductor substrate, and including a lower electrode, and a fixed film formed on the semiconductor substrate with a support portion interposed between the fixed film and the semiconductor substrate to cover the vibrating film, and including an upper electrode. A gap formed between the vibrating film and the fixed film opposed to each other forms an air gap. The restraining portion provides partial coupling between the semiconductor substrate and the vibrating film, and the vibrating film has a multilayer structure in which the lower electrode and a compressive stress inducing insulating film are laminated. The insulating film is located within the perimeter of the lower electrode.

Abstract: Moving fluid energy conversion device (90) converts mechanical energy contained in moving fluid (16) to electrical energy. Moving fluid energy conversion device (90) comprises one or more transducers (10), a charge exchange means (600), a charge element (62) and a recovery element (65). Transducer (10) is comprised of one or polymer spacers (502) sandwiched between one or more top electrodes (504) and bottom electrode (506) pairs. Moving fluid energy conversion device (90) produces electrical energy by transferring electric charge from charge element (62), through charge exchange means (600) to transducer (10) in stretched state (6). Transducer (10) is then allowed to return to relaxed state (8). The charge in transducer (10) increases in energy when the transducer (10) returns to relaxed state (8). The increased energy electric charge flows to recovery element (65) through charge exchange means (600).

Abstract: Carbon nanofiber resonator devices, methods for use, and applications of said devices are disclosed. Carbon nanofiber resonator devices can be utilized in or as high Q resonators. Resonant frequency of these devices is a function of configuration of various conducting components within these devices. Such devices can find use, for example, in filtering and chemical detection.