Abstract: An object information acquiring apparatus according to the present invention includes: an acoustic wave detecting element which detects an acoustic wave propagating from an object and which outputs an acoustic signal; a reference element which receives an input of electrical noise corresponding to electrical noise input to the acoustic wave detecting element and which outputs a reference signal; a noise reducer which reduces a component derived from the electrical noise by subtracting the reference signal from the acoustic signal; and a processor which generates image data representing characteristic information of the object using the acoustic signal in which the component derived from the electrical noise has been reduced.

Abstract: In one example, a camera is provided that includes: a plurality of MEMS electrostatic comb actuators, each actuator operable to exert a force on at least one lens; and an optical image stabilization (OIS) algorithm module operable to command the plurality of actuators to actuate the at least one lens responsive to motion of the camera.

Abstract: Embodiments of the present disclosure provide a detection device. The detection device includes: a fixed member fixedly mounted to a target position; a first movable member arranged to face towards and in parallel with the fixed member, and movably connected to the fixed member by a first elastic member; at least one first electrode, having one end being fixed to the fixed member and the other end extending towards the first movable member along a first direction; and at least one second electrode, having one end being fixed to the first movable member and the other end extending towards the fixed member in a second direction, the second direction being parallel to the first direction. Embodiments of the present disclosure also provide a fatigue detection system.

Abstract: A switched capacitive device includes a stationary portion including a plurality of first electrodes extending at least partially in a longitudinal dimension. Each first electrode has a first substantially active electrode volume. The device also includes a translatable portion including a plurality of second electrodes proximate the plurality of first electrodes. Each second electrode has a second substantially active electrode volume. The first active electrode volume is greater than the second active electrode volume. The second electrodes are translatable with respect to the first electrodes. The second electrodes extend at least partially in the longitudinal dimension. The first electrodes are configured to induce substantially linear motion of the second electrodes in the longitudinal dimension through the use of an electric field induced by at least a portion of the first electrodes.

Abstract: An embodiment device includes a body structure having an interior cavity, a control chip disposed on a first interior surface of the interior cavity, and a sensor attached, at a first side, to a second interior surface of the interior cavity opposite the first interior surface. The sensor has a mounting pad on a second side of the sensor that faces the first interior surface, and the sensor is vertically spaced apart from the control chip by an air gap, with the sensor is aligned at least partially over the control chip. The device further includes an interconnect having a first end mounted on the mounting pad, the interconnect extending through the interior cavity toward the first interior surface, and the control chip is in electrical communication with the sensor by way of the interconnect.

Abstract: A curved touch panel and a display device including the same are provided. The touch panel includes a flat region in which first sensing cells are arranged; and a curved region in which second sensing cells are arranged that are different from the first sensing cells in terms of at least one of an arrangement pattern and a shape.

Abstract: A gripping device 18 is provided at the front end of an arm of an assembly robot 2. The gripping device 18 includes a pair of grippers 20 and 22 capable of opening and closing. The side configured to come into contact with a part 4, of each gripper 20, 22 includes a pressure-sensitive sensor 24. The pressure-sensitive sensor 24 includes a first electrode and a second electrode serving as a pair of electrodes and an intermediate layer formed of rubber or a rubber composition between the pair of electrodes. The intermediate layer is configured to generate electricity when deformed by contact with an object (part 4). The side configured to come into contact with the object, of the intermediate layer is subjected to a surface modification treatment and has a higher hardness than the opposite side.

Abstract: The present invention discloses a speaker system with a moving voice coil. A conductive material layer is disposed on a front cover of the speaker system and constitutes a fixed electrode plate. A vibrating component comprises a flexible circuit board secured to one side of a vibrating diaphragm. A metal layer is disposed in the middle of the flexible circuit board and constitutes a movable electrode plate. The fixed electrode plate is electrically connected to an external circuit by means of an external terminal disposed on a front cover solder pad. The flexible circuit board extends to the outside of the speaker system and is provided with a solder pad electrically connected to the external circuit. A capacitance monitoring chip is disposed in the speaker system and electrically connected to a capacitor.

Abstract: A tunable reactance device and methods of manufacturing and using the same are disclosed. The tunable reactance device includes a substrate, a microelectromechanical (MEM) structure supported on the substrate and comprising a conductive material, and a driver configured to move the MEM structure with respect to the substrate upon application of an electrostatic force to the driver. A gap between the MEM structure and the substrate is maintained when the driver moves the MEM structure. The tunable reactance device has (i) a first reactance and a first electromagnetic field topology when the electrostatic force is applied to the driver and (ii) a different reactance and a different electromagnetic field topology when a different electrostatic force is applied to the driver.

Abstract: A triboelectric generator includes a first contact charging member and a second contact charging member. The first contact charging member includes a first contact layer and a conductive electrode layer. The first contact layer includes a material that has a triboelectric series rating indicating a propensity to gain electrons due to a contacting event. The conductive electrode layer is disposed along the back side of the contact layer. The second contact charging member is spaced apart from and disposed oppositely from the first contact charging member. It includes an electrically conductive material layer that has a triboelectric series rating indicating a propensity to lose electrons when contacted by the first contact layer during the contacting event. The electrically conductive material acts as an electrode. A mechanism maintains a space between the first contact charging member and the second contact charging member except when a force is applied thereto.

Abstract: An actuator comprising two devices each comprising an out-of-plane deformable element, said deformable element comprising a first fixed end anchored on a substrate and a second free end relative to the substrate, said device also comprising means to guide the second free end in in-plane translation along a first direction, the first deformable element being capable of deforming out-of-plane through application of a stimulus so that the second free end draws close to the first fixed end following in-plane translational movement. The actuator also comprises an element mobile in rotation about an axis orthogonal to the plane and mechanically linked to the free ends of the deformable elements, and a translationally mobile element mechanically linked to the rotationally mobile element.

Abstract: An object is to improve insulation in a bonding layer and to improve a bonding strength of a supporting body and piezoelectric single crystal substrate, in a bonded body having the supporting body made of a polycrystalline material or single crystal material, the piezoelectric single crystal substrate and the bonding layer provided between the supporting body and piezoelectric single crystal substrate, wherein the bonded body includes the supporting body, piezoelectric single crystal substrate and the bonding layer provided between the supporting body and piezoelectric single crystal substrate, and the bonding layer has a composition of Si(1-x)Ox (0.008?x?0.408).

Abstract: CMOS Ultrasonic Transducers and processes for making such devices are described. The processes may include forming cavities on a first wafer and bonding the first wafer to a second wafer. The second wafer may be processed to form a membrane for the cavities. Electrical access to the cavities may be provided.

Abstract: A device for generating electricity by friction and a manufacturing method thereof. The device comprises a first substrate and a second substrate arranged oppositely, and a plurality of elastic columns arranged between the first substrate and the second substrate to support them. A surface of the first substrate facing the second substrate is provided with a first conductive electrode and an insulating polymeric membrane layer which are stacked. A surface of the second substrate facing the first substrate is provided with a second conductive electrode. At least one surface of the two opposite surfaces of the second conductive electrode and the insulating polymeric membrane layer is formed into a surface with a concave-convex structure. The friction area between the second conductive electrode and the insulating polymeric membrane layer can be increased upon relative movement between the first substrate and the second substrate.

Abstract: Power generated by a vibration power generator utilizing an electret is efficiently supplied to a power supply load. A vibration power generator includes a first substrate and a second substrate configured to be moved relative to each other by external vibration while remaining opposite each other, a group of a plurality of electrets arranged in the relative movement direction on one surface side of the first substrate, and a group of electrodes arranged in the relative movement direction on a surface side of the second substrate opposite to the group of electrets, and including a first current collecting electrode and a second current collecting electrode. A power supply load to which power generated by the external vibration is supplied and which has an impedance lower than an internal impedance of the vibration power generator is electrically connected to each of the first and second current collecting electrodes.

Abstract: The present disclosure provides a non-linear capacitor comprising a first electrode, a second electrode, and a dielectric layer disposed between said first and second electrodes. The dielectric layer comprises at least one organic compound selected from copolymer, homo-polymer, Sharp polymers, NLSD compounds and combination thereof which have at least one electro-polarizable aromatic polycyclic conjugated core. A relationship between a capacity C of the capacitor and a voltage V between the electrodes is characterized by the monotonously increasing polynomial dependence C0+?i=1m CiVi, when the voltage V satisfies by following inequality 0<V?Vmax, where the voltage Vmax is a maximum working voltage that does not exceed a breakdown voltage Vbd and which is selected out of safety reasons, where at least one coefficient Ci is not equal to 0 when the index i ranges from 2 to m, and m=2, 3, 4, 5, or 6.

Abstract: An electromechanical transducer element includes a first electrode; an electromechanical transducer film stacked on one surface of the first electrode; a second electrode stacked on the electromechanical transducer film; and wiring formed on the second electrode. In an at least one cross section, each of a boundary, on a second electrode side, of the electromechanical transducer film and a boundary, on a side opposite to the electromechanical transducer film, of the second electrode is a curved shape protruding away from the first electrode. In the at least one cross section, each of a film thickness of the electromechanical transducer film and a film thickness of the second electrode becomes thinner toward end portions from a maximum height portion.

Abstract: An integrated circuit (IC) with an integrated microelectromechanical systems (MEMS) structure is provided. In some embodiments, the IC comprises a semiconductor substrate, a back-end-of-line (BEOL) interconnect structure, the integrated MEMS structure, and a cavity. The BEOL interconnect structure is over the semiconductor substrate, and comprises wiring layers stacked in a dielectric region. Further, an upper surface of the BEOL interconnect structure is planar or substantially planar. The integrated MEMS structure overlies and directly contacts the upper surface of the BEOL interconnect structure, and comprises an electrode layer. The cavity is under the upper surface of the BEOL interconnect structure, between the MEMS structure and the BEOL interconnect structure.

Abstract: The present invention describes methods to fabricate actuators that can be remotely controlled in an addressable manner, and methods to provide remote control such micro-actuators. The actuators are composites of two permanent magnet materials, one of which is has high coercivity, and the other of which switches magnetization direction by applied fields. By switching the second material's magnetization direction, the two magnets either work together or cancel each other, resulting in distinct “on” and “off” behavior of the devices. The device can be switched “on” or “off” remotely using a field pulse of short duration.

Abstract: A wireless powering and communication system is provided that includes a base unit, and an external unit that is separate from the base unit, where the base unit includes a single transducer circuit configured for uplink data communication to the external unit, where the transducer circuit is configured for power recovery from the external unit, a multiplexer circuit, a power recovery and conditioning circuit, a controller circuit, and a communication circuit, where the multiplexer circuit is configured to decouple power and data paths to enable operation with the single transducer circuit, the power recovery and conditioning circuit is configured to recover and optionally store power from power received by the single transducer circuit, the power recovery and conditioning circuit is configured to power the controller circuit and the communication circuit, the controller circuit is configured to control the multiplexer circuit, the communication circuit is configured to provide data to the multiplexer circuit

Abstract: A pellicle that includes graphene is constructed and arranged for an EUV reticle. A multilayer mirror includes graphene as an outermost layer.

Abstract: A micro-electro-mechanical pressure sensor device, formed by a cap region and by a sensor region of semiconductor material. An air gap extends between the sensor region and the cap region; a buried cavity extends underneath the air gap, in the sensor region, and delimits a membrane at the bottom. A through trench extends within the sensor region and laterally delimits a sensitive portion housing the membrane, a supporting portion, and a spring portion, the spring portion connecting the sensitive portion to the supporting portion. A channel extends within the spring portion and connects the buried cavity to a face of the second region. The first air gap is fluidically connected to the outside of the device, and the buried cavity is isolated from the outside via a sealing region arranged between the sensor region and the cap region.

Abstract: A MEMS structure that provides an improved way to selectively control electromechanical properties of a MEMS device with an applied voltage. The MEMS structure includes a capacitor element that comprises at least one stator element, and at least one rotor element suspended for motion parallel to a first direction in relation to the stator element. The stator element and the rotor element form at least one capacitor element, the capacitance of which varies according to displacement of the rotor element from an initial position. The stator element and the rotor element are mutually oriented such that in at least one range of displacements of the rotor element from an initial position, the second derivative of the capacitance with respect to the displacement has negative values.

Abstract: A charge pump includes a capacitor, a first transistor that is electrically connected between a first terminal of the first capacitor and ground, and a second transistor that is electrically connected between a second terminal of the first capacitor and an output node. During a first operation mode of the charge pump, a voltage that is boosted using the capacitor is output through the output node, and during a second operation mode of the charge pump, the first transistor and the second transistor are maintained in an ON state.

Abstract: A heat transfer device that includes a thermionic power generator, a wiring, a load circuit, and a switch circuit. The thermionic power generator includes an emitter electrode and a collector electrode facing each other with an inter-electrode gap distance, and converts heat energy into electric energy by capturing, with the collector electrode, a thermoelectron that is emitted from the emitter electrode. The wiring electrically connects the emitter electrode and the collector electrode. The load circuit is connected to an electric current path of by wiring between the emitter electrode and the collector electrode. The switch circuit switches between an ON state and an OFF state.

Abstract: The present invention provides a polymeric actuator which has excellent flexibility and elongation rate; low temperature dependability of physical properties such as an elastic modulus and high dielectric breakdown strength, and which can drive in a low electric field. The present invention relates to a polymeric actuator, wherein the polymeric dielectric has a storage elastic modulus at 20° C. [E?(20° C.)] determined by a dynamic viscoelastic measurement at a frequency of 1 Hz of not more than 0.5 MPa, a ratio [E?(?20° C.)/E?(20° C.)] of a storage elastic modulus at ?20° C. [E?(?20° C.)] determined by a dynamic viscoelastic measurement at a frequency of 1 Hz to the [E?(20° C.)] of not more than 5.0, and a ratio [E?(40° C.)/E?(20° C.)] of a storage elastic modulus at 40° C. [E?(40° C.)] determined by a dynamic viscoelastic measurement at a frequency of 1 Hz to the [E?(20° C.)] of not less than 0.5.

Abstract: The present invention provides a shock recording device includes: an electric power source; a vibration energy harvester including a first electrode and a second electrode, the vibration energy harvester converting an energy of a shock applied thereto into a potential difference between the first electrode and the second electrode; a first transistor including a first gate electrode, a first source electrode, and a first drain electrode, the first transistor further including a stacked structure of a ferroelectric layer and a semiconductor layer; and a second transistor including a second gate electrode, a second source electrode, and a second drain electrode. The second gate electrode is electrically connected to the first electrode. The second drain electrode is electrically connected to the electric power source. The second source electrode is electrically connected to the first gate electrode. The first source electrode is electrically connected to the second electrode.

Abstract: The present invention relates to a wafer (100) being subdivided and separable into a plurality of dies. Each die (110) comprises an array of capacitive micro-machined transducer cells (1). Each cell comprises a substrate (10) comprising a first electrode (11), a membrane (13) comprising a second electrode (14), and a cavity (12) between the substrate (10) and the membrane (13). Each cell (1) of at least a part of the dies (110) comprises a compensating plate (15) on the membrane (13), each compensating plate (15) having a configuration for influencing a bow (h) of the membrane (13). The configurations of the compensating plates (13) vary across the wafer (100). The present invention further relates to a method of manufacturing such a wafer and a method of manufacturing such a die.

Abstract: A process for producing a corrugated electrode for use in an electroactive polymer cartridge is disclosed. A laminated web comprising a support sheet laminated to a dielectric elastomer film is positioned. The support sheet defines areas exposing portions of the dielectric elastomer film. A force is applied to the positioned laminated web to stretch the laminated support sheet-dielectric elastomer film web in a direction that is orthogonal to a plane defined by the web. An electrically conductive material is applied to the laminated support sheet-dielectric elastomer film web while the laminated support sheet-dielectric elastomer film web is in a stretched state. The laminated support sheet-dielectric elastomer film web is relaxed to form the corrugated electrode on the dielectric elastomer film portion of the web.

Abstract: An embodiment provides a working medium to be used in a circular osmotic pressure electric power generation system. The working medium comprises water and an inducing-liquid. The working medium, under conditions of a temperature of 5° C. to 35° C. and a pressure of 1 atmosphere, is in (1) a state of a liquid-liquid mutually dissolved two-component mixed solution when a concentration of the water or the inducing-liquid in the total amount of the water and the inducing-liquid is 10% by weight or lower, and (2) a state of being separated into the water phase and the inducing-liquid phase when the concentration of the water or the inducing-liquid in the total amount of the water and the inducing-liquid is higher than 10% by weight.

Abstract: An illustrative electrostatic machine includes a shaft that is configured to rotate about an axis, a rotor electrode, and a stator electrode. The rotor electrode and the stator electrode are separated by a gap and form a capacitor. The rotor electrode is fixed to the shaft. The electrostatic machine can also include a housing that is configured to enclose the rotor electrode, the stator electrode, and at least a portion of the shaft. The stator electrode is fixed to the housing. A dielectric fluid fills a void defined by the housing, the rotor electrode, and the stator electrode.

Abstract: Provided are: an ultrasound probe with excellent characteristic stability; and ultrasound equipment that uses the ultrasound probe. The ultrasound probe has an ultrasonic transmitting and receiving element provided with a substrate, an insulating film formed on the substrate, a cavity formed between the substrate and the insulating film, and a pair of electrodes disposed parallel to the substrate so as to sandwich the cavity. The ultrasound probe is characterized in that the ultrasonic transmitting and receiving element has a beam part with a multilayer structure formed by laminating films made of materials different in stress, the beam part being disposed on the electrode distant from the substrate out of the pair of electrodes, and the beam part is formed by laminating a film that applies tensile stress and a film that applies compressive stress.

Abstract: A vibration power generator in which an electret group including a plurality of electrets and an electrode group including a plurality of electrodes are displaced in a relative movement direction by an external vibration, and vibration power generation is thereby performed, has a housing portion that accommodates the electret group and the electrode group, a fixed member that is fixed to a bottom surface side of the housing portion and has one of the electret group and the electrode group as a fixed member-side power generation element, a movable member that is accommodated in the housing portion so as to be capable of relative movement by the external vibration while opposing the fixed member, and has the other of the electret group and the electrode group as a movable member-side power generation element, and a plurality of support members.

Abstract: A scanner apparatus includes: a scanner having a mirror that is driven into resonance in a first direction; a scanner holder holding the scanner and rotatable about an axis extending in a direction parallel to the first direction; and a driver that oscillates the scanner holder, and the scanner holder includes: a first holding portion holding the scanner; a second holding portion connected to the first holding portion and holding the driver; a connecting portion connected to the second holding portion; and an elastic portion connected to the connecting portion and having elasticity.

Abstract: A transducer includes an element disposed on a substrate, where the element includes an electrode, and a connection electrode electrically connected to the electrode of the element. A conductive portion disposed on an insulating film of a flexible print circuit board is electrically connected to the connection electrode. Part of the conductive portion is exposed so as to face a surface of the substrate having the element disposed thereon. An insulation layer is disposed on part of the surface of the substrate facing the flexible print circuit board.

Abstract: A heat-dissipation structure includes a first carbon nanotube layer and a thermal interface material layer. The first carbon nanotube layer and the thermal interface material layer are stacked on each other. The first carbon nanotube layer includes at least one first carbon nanotube paper, and the density of the first carbon nanotube paper ranges from about 0.3 g/cm3 to about 1.4 g/cm3. An electronic device applying the heat-dissipation structure is also disclosed.

Abstract: A transducer, and a method for manufacturing the transducer are provided. The transducer includes a substrate-side electrode provided in one side of an insulative substrate and an opposite plate including an opposite electrode disposed opposite to the substrate-side electrode, and which performs a function such as a reduction in impedance, conversion of capacitance, signal amplification, thereby achieving size reduction of the transducer itself. An upper plate is made of a silicon monocrystal and is arranged so as to face a substrate-side electrode. In the upper plate, an integrated circuit section which is an impurity region of an IC circuit is formed by a thermal diffusion method or an ion implantation method. By this transducer, an improvement in conversion efficiency, an improvement in productivity, and a size reduction of a mount system are achieved.

Abstract: An ink jet head includes: a pressure chamber to be filled with ink formed in a pressure chamber structure, the pressure chamber in which an etching limiter made of a material different from a material of the pressure chamber structure is formed on an inner wall surface of the pressure chamber; a nozzle plate comprising a nozzle that leading to the pressure chamber and a movable range fitted to the etching limiter; and a flat driver comprising a piezoelectric body to operate the movable range and arranged on the nozzle plate.

Abstract: A vibration power generator comprises: a fixed substrate; a vibrating body having a surface opposed to the fixed substrate, the vibrating body being vibratable to the fixed substrate; electret electrodes aligned in a vibration direction on one of the surface of the fixed substrate and the surface of the vibrating body; and first fixed electrodes and second fixed electrodes alternately aligned in the vibration direction on the other thereof, wherein when the vibrating body is at a resting position, each of the electret electrodes overlaps with both electrodes of a corresponding fixed electrode pair, the corresponding fixed electrode pair being one of the first fixed electrodes and one of the second fixed electrodes that are opposed to the electret electrode, and when the vibrating body is not at a resting position, each of the electret electrodes always overlaps with at least one electrode of the corresponding fixed electrode pair.

Abstract: An electrostrictive composite includes a flexible polymer matrix and a carbon nanotube film structure. The carbon nanotube film structure is at least partially embedded into the flexible polymer matrix through a first surface. The carbon nanotube film structure includes a plurality of carbon nanotubes combined by van der Waals attractive force therebetween.

Abstract: Methods for aligning nanoscale fibers are provided. One method comprises providing a network of nanoscale fibers and mechanically stretching the network of nanoscale fibers in a first direction. The network of nanoscale fibers is substantially devoid of a liquid. A network of aligned nanoscale fibers and a composite comprising a network of aligned nanoscale fibers are also provided.

Abstract: A method for making an actuator includes forming a substantially planar actuator device of an electrically conductive material, the device incorporating an outer frame, a fixed frame attached to the outer frame, a moveable frame disposed parallel to the fixed frame, a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement relative to the outer frame and the fixed frame, and an actuator incorporating a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame, moving the moveable frame to a deployed position that is coplanar with, parallel to and spaced at a selected distance apart from the fixed frame and fixing the moveable frame at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame.

Abstract: The patent application discloses a capacitive micromachined ultrasound transducer, comprising a silicon substrate; a cavity; a first electrode, which is arranged between the silicon substrate and the cavity; wherein the first electrode is arranged under the cavity; a membrane, wherein the membrane is arranged above the cavity and opposite to the first electrode; a second electrode, wherein the second electrode is arranged above the cavity and opposite to the first electrode; wherein the second electrode is arranged in or close to the membrane, wherein the first electrode and the second electrode are adapted to be supplied by a voltage; and a first isolation layer, which is arranged between the first electrode and the second electrode, wherein the first isolation layer comprises a dielectric. It is also described a system for generating or detecting ultrasound waves, wherein the system comprises a transducer according to the patent application.

Abstract: Embodiments relate to structures, systems and methods for more efficiently and effectively etching sacrificial and other layers in substrates and other structures. In embodiments, a substrate in which a sacrificial layer is to be removed to, e.g., form a cavity comprises an etch dispersion system comprising a trench, channel or other structure in which etch gas or another suitable gas, fluid or substance can flow to penetrate the substrate and remove the sacrificial layer. The trench, channel or other structure can be implemented along with openings or other apertures formed in the substrate, such as proximate one or more edges of the substrate, to even more quickly disperse etch gas or some other substance within the substrate.

Abstract: The present invention relates to a piezoelectric device of a multi-layered structure on which first electrodes and second electrodes are sequentially stacked on a piezoelectric polymer and single surfaces or both surfaces of piezoelectric polymer. In accordance with the present invention, the vibration response characteristics of the piezoelectric polymer can be improved by using the graphene or the composite thereof as a surface electrode material to the piezoelectric polymer; and, there are effects that the response characteristics of the piezoelectric device are excellent and the reliability thereof is excellent by forming a second electrode having an excellent conductivity and a protection electrode thereof.

Abstract: The present invention provides an actuator large in the amounts of displacement and generative force. The actuator includes a pair of electrode layers and an electrolyte-containing electrolyte layer interposed between the pair of electrode layers, and transforms upon application of a voltage thereto to cause ions in the electrolyte to migrate, wherein the electrolyte layer includes at least one polymer fiber layer made of polymer fibers and at least some of the polymer fibers of the polymer fiber layer are uniaxially oriented within a plane of the electrolyte layer.

Abstract: The present invention relates to a wafer (100) being subdivided and separable into a plurality of dies. Each die (110) comprises an array of capacitive micro-machined transducer cells (1). Each cell comprises a substrate (10) comprising a first electrode (11), a membrane (13) comprising a second electrode (14), and a cavity (12) between the substrate (10) and the membrane (13). Each cell (1) of at least a part of the dies (110) comprises a compensating plate (15) on the membrane (13), each compensating plate (15) having a configuration for influencing a bow (h) of the membrane (13). The configurations of the compensating plates (13) vary across the wafer (100). The present invention further relates to a method of manufacturing such a wafer and a method of manufacturing such a die.

Abstract: Power generated by a vibration power generator utilizing an electret is efficiently supplied to a power supply load. A vibration power generator includes a first substrate and a second substrate configured to be moved relative to each other by external vibration while remaining opposite each other, a group of a plurality of electrets arranged in the relative movement direction on one surface side of the first substrate, and a group of electrodes arranged in the relative movement direction on a surface side of the second substrate opposite to the group of electrets, and including a first current collecting electrode and a second current collecting electrode. A power supply load to which power generated by the external vibration is supplied and which has an impedance lower than an internal impedance of the vibration power generator is electrically connected to each of the first and second current collecting electrodes.

Abstract: A sensor assembly including one or more capacitive micromachined ultrasonic transducer (CMUT) microarray modules which are provided with a number of individual transducers. The microarray modules are arranged to simulate or orient individual transducers in a hyperbolic paraboloid geometry. The transducers/sensor are arranged in a rectangular or square matrix and are activatable individually, selectively or collectively to emit and received reflected beam signals at a frequency of between about 100 to 170 Hz.

Abstract: Paste which is prepared by any solid concentration and is excellent in terms of handleability, applicability, and storage stability; an electrolyte film or electrode film which is an even and highly flexible coating film formed in a desired thickness from the paste through a few repetitions of an application/drying step; and a polymer transducer which can be industrially and economically produced and shows excellent performance. The paste comprises: a solid polyelectrolyte (A) consisting of a block copolymer containing; a polymer block (a-1) which is represented by chemical formula (1) and a polymer block (a-2) which has substantially no ionic group and is rubbery at room temperature; an organic solvent (B) having a boiling point at 150° C. or higher; and non-dissociable particles (C) which are insoluble in the organic solvent (B) and have a major-axis length of 1-100 ?m and an aspect ratio of 5 or less.