Abstract: A vibration power generator comprises: a fixed substrate; a vibrating body having a surface opposed to the fixed substrate, the vibrating body being vibratable to the fixed substrate; electret electrodes aligned in a vibration direction on one of the surface of the fixed substrate and the surface of the vibrating body; and first fixed electrodes and second fixed electrodes alternately aligned in the vibration direction on the other thereof, wherein when the vibrating body is at a resting position, each of the electret electrodes overlaps with both electrodes of a corresponding fixed electrode pair, the corresponding fixed electrode pair being one of the first fixed electrodes and one of the second fixed electrodes that are opposed to the electret electrode, and when the vibrating body is not at a resting position, each of the electret electrodes always overlaps with at least one electrode of the corresponding fixed electrode pair.

Abstract: A MEMS vibrator includes a wafer substrate, a fixed lower electrode (first electrode) disposed on a principal surface of the wafer substrate, a support member whose one end is fixed to the wafer substrate, and a movable upper electrode (second electrode) joined to the other end of the support member and having a region overlapping the fixed lower electrode with a gap. The support member has a reinforcing region where the thickness of the support member in a thickness direction of the wafer substrate is larger than the thickness of the movable upper electrode in the thickness direction of the wafer substrate.

Abstract: In various electrohydrodynamic (EHD) fluid mover designs disclosed herein, electric field strength may be locally reduced in peripheral regions of an emitter-to-collector electrode gap. As a result, detrimental accumulations of silica, dust and other airborne contaminants can be reduced on surfaces in such peripheral regions, which may otherwise be susceptible to accumulations and/or difficult to clean or condition. In some cases, localized reduction in electric field near sidewall surfaces can provide desirable localized reductions in susceptibility to contaminant related spark or shunting current paths. In some cases, such as when a field blunting structure is employed and (as a result) a generally more uniform electric field pattern is provided locally, an engineered or purposeful local reduction both electric field strength and ion generation in peripheral regions of an emitter-to-collector electrode gap may be quite desirable.

Abstract: Transducer assemblies and associated methods are provided for facilitating alignment of ultrasonic transducers with respect to pipes onto which the transducers are installed. The transducer assembly can include a transducer housing having a track on along which the transducers can be slidingly engaged. The transducer assembly can include attachment structures having alignment features used to align the transducers parallel to the axial centerline of the pipe while ensuring that the reception/emission sides of the transducers are oriented normal to the outer surface of the pipe. In some embodiments a transducer assembly alignment system can be used to align two transducer assemblies on circumferentially opposite sides of a pipe.

Abstract: A micromechanical device has a functional layer. One or more layers are provided between the functional layer and the micromechanical device to provide stress relief.

Abstract: A power generating device includes a first substrate having a first electrode and a first positioning electrode being chargeable with a first polarity on a first surface, and a second substrate movable within a predetermined range from a static position in the planar direction of the first substrate and having a second electrode and a second positioning electrode being chargeable with a second polarity opposite to the first polarity on a second surface opposing the first surface. Overlapping the first positioning electrode and the second positioning electrode at least partially in plan view of the first substrate in the static position can cause the second substrate to return to the static position due to electrostatic attraction generated between the first positioning electrode and the second positioning electrode.

Abstract: The present invention relates to electromechanical converters at least comprising a polymer layer composite with voids (5) formed therein, wherein the polymer layer composite at least comprises a polymer layer base element (1) comprising a carrier layer (1a) having a softening temperature TgA and en electret layer (1b), extensively bonded thereto, having a softening temperature TgE, wherein TgA>TgE, and a second polymer layer element (2), wherein the polymer layer base element (1) is at least partially bonded with its electret layer (1b) to the second polymer layer element (2) to form voids (5). The invention relates further to a process for the production of an electromechanical, for example piezoelectric, converter and to the use thereof.

Abstract: A triboelectric generator includes a first contact charging member and a second contact charging member. The first contact charging member includes a first contact layer and a conductive electrode layer. The first contact layer includes a material that has a triboelectric series rating indicating a propensity to gain electrons due to a contacting event. The conductive electrode layer is disposed along the back side of the contact layer. The second contact charging member is spaced apart from and disposed oppositely from the first contact charging member. It includes an electrically conductive material layer that has a triboelectric series rating indicating a propensity to lose electrons when contacted by the first contact layer during the contacting event. The electrically conductive material acts as an electrode. A mechanism maintains a space between the first contact charging member and the second contact charging member except when a force is applied thereto.

Abstract: A vibration power generator is provided that increases output power by improving the electrostatic capacitance when the area of the overlap between electret electrodes and counter electrodes is maximum while having the function of limiting the spread of the electric field from the electret electrodes.

Abstract: A vibration power generating device includes a first substrate and a second substrate, a first electrode formed on the first substrate, a fixed structural body, elastic structural bodies which connect the first substrate and the fixed structural body with each other, and a second electrode formed on the second substrate. Since the overlapping area of the electrodes is increased by arranging rectangular or square conductor parts of the first electrode and rectangular or square conductor parts of the second electrode in a checkerboard pattern, a generation region where power is generated by vibration is increased.

Abstract: There is provided a vibration power generator for converting vibration energy into electric power. The vibration power generator includes a fixed substrate, and a vibrator capable of vibrating with respect to the fixed substrate. Fixed electrode pieces are disposed on the fixed substrate, and electret electrode pieces opposed to the fixed electrode pieces are disposed on the vibrator. The vibration power generator is adapted to generate electricity, through changes in capacitances between the fixed electrode pieces and the electret electrode pieces, due to the vibration of the vibrator. The electret electrode pieces have opposite end portions in the vibration direction which have a higher average electric-charge density per unit area than that of middle portions, in the vibration direction, of the electret electrode pieces.

Abstract: An electrokinetic actuator for a propulsion system is described. The actuator includes an array of channels, with each channel having an inlet and an outlet. A reservoir is included that contains an ionic solution of particles. A first electrode proximate to (or deposited at) the inlet and a second electrode proximate to (or deposited at) the outlet are connected to a voltage source. The voltage source and electrodes apply a voltage across the length of the channels to generate an electric field parallel to each channel. The electric field causes an electro-osmotic flow of ions from the reservoir to the outlet producing electrokinetic thrust at the outlet. By varying the concentration of the ionic solution and the magnitude of the electric field, the electro-osmotic flow of ions is controlled.

Abstract: A vibration power generator 110 including a first fixed substrate 111L, a second fixed substrate 111U, a movable substrate 112 which is vibratory relative to the first and second fixed substrates, a plurality of first electrodes 119a formed over the second fixed substrate, a plurality of second electrodes 119b formed on the movable substrate and opposed to the first electrodes, wherein one of the first electrode 119a and the second electrode 119b includes a film holding a charge, is fixed to a rotating body such that the first fixed substrate 111L, the second fixed substrate 111U and the movable substrate 112 are perpendicular to a radial direction of the rotating body and the first fixed substrate is disposed nearer to a rotational axis side of the rotating body.

Abstract: The present disclosure includes structures and methods of forming structures for restricting out-of-plane travel.

Abstract: A MEMS device is a MEMS device having a MEMS vibrator which includes a plurality of MEMS constituent elements laminated and formed above a first foundation portion which is laminated above a main surface of a wafer substrate, and the MEMS constituent elements are laminated above a first oxide film and a nitride film so as to cover an opening which is formed in the nitride film and exposes a second foundation portion above which the nitride film is laminated.

Abstract: A micro-electro-mechanical (MEMs) devices including a compound hot electrode, which increases the tilting range of the MEMs device. A substantially vertical hot electrode is mounted adjacent to the end or the sides of a pivoting ground electrode, formed of the underside of a pivoting mirror, and combine with a conventional horizontal hot electrode to make up the compound hot electrode.

Abstract: The present invention concerns a MEMS device comprising an under bump metallization (4)—UBM—to contact the device via flip-chip bonding with a substrate. The UBM (4) is placed on the surface of the MEMS device and close to the corners of the surface. Further, the shape of the UBM (4) is adapted to the shape of the corners.

Abstract: A method and a device for converting energy uses chemical reactions in close proximity to or on a surface to convert a substantial fraction of the available chemical energy of the shorter lived energized products, such as vibrationally excited chemicals and hot electrons, directly into a useful form, such as longer lived charge carriers in a semiconductor. The carriers store the excitation energy in a form that may be converted into other useful forms, such as electricity, nearly monochromatic electromagnetic radiation or carriers for stimulating other surface reactions.

Abstract: A method and apparatus generates kinetic and electrical energy using sound waves and is believed to be particularly useful in high efficiency motors and electrical generators. In particular, the method and apparatus uses sound waves as a catalyst to convert ambient heat energy into kinetic and/or electrical energy. In one embodiment, sound waves at particular frequencies are propagated across one side of a plate or other barrier element, causing flow of fluid (e.g. air) across the surface of the plate which, in turn, causes a reduction in the ambient fluid (air) pressure near the surface of the plate. The difference in fluid pressure on opposite sides of the plate results in net positive thrust on the plate, thereby causing movement of the plate. This movement can be harnessed using, for example, a windmill type of rotor and stator arrangement to generate useful kinetic and electrical energy.

Abstract: The present disclosure relates to a system for monitoring a structural component. The system may include an electromechanical device to generate guided waves having a measurement surface and a bonding agent disposed on the measurement surface and configured to engage with the surface of the structural component. The system may also include a heating element for heating the measurement surface, the bonding agent, and capable of heating a portion 100 of the structural component surface. In addition, the system may include a clamp for retaining the measurement surface relative to the structural component.

Abstract: The present application relates to energy harvesting. More particularly, the present application relates to harvesting energy from non-stationary, multi-frequency mechanical vibrations using a tunable electrical circuit.

Abstract: A method for producing an electronic component module prevents a space from collapsing. The method includes a step of preparing an electronic component including an element substrate, a drive device formed on a principal surface of the element substrate, and a protection device covering the drive device so as to form a space around the drive device; a step of fixing the electronic component on a common substrate such that a principal surface of the common substrate and another principal surface of the element substrate face each other; a step of fixing a reinforcing plate on the protection device of the electronic component; and a step of forming a resin layer on the principal surface of the common substrate such that the electronic component is contained therein.

Abstract: An electrostatic induction generation device comprising a first fixed electrode substrate having a first electret electrode, a second fixed electrode substrate having a second electret electrode, a movable electrode substrate having a movable electrode, a holding frame formed separately from the movable electrode, a first pair of electrode support beams and a second pair of electrode support beams connected with the movable electrode and the holding frame, and wherein the movable electrode substrate is formed between the first fixed electrode substrate and the second fixed electrode substrate, and the movable electrode is opposed to the first electret electrode and the second electret electrode.

Abstract: An carbon nanotube based electrostrictive element includes two electrostrictive layers spaced with each other, an electrical connector, and two electrodes. The two electrostrictive layers are electrically connected to each other at a first side, and spaced and insulated from each other at a second side via the electrical connector. The two electrodes are located at the second side and electrically connected respectively to the two electrostrictive layers.

Abstract: An electronic device includes a substrate, an electrode formed on the substrate, and a movable portion provided above the electrode, the movable portion being elastically deformable, in which the movable potion includes a shape memory alloy film.

Abstract: An electronic device has an electronic signal source electrically connected to a signal routing circuit, an electrically activated transducer to receive electronic signals through the signal routing circuit, and an anisotropic conductive film to provide electrical continuity between the signal routing circuit and the transducer, the anisotropic conductive film having material removed adjacent the transducer to reduce mechanical loading of the transducer.

Abstract: Resonator structures and electrodes are described, as well as methods for manufacturing the same. Resonator electrodes may be formed using two or more photolithographic steps and masks, with different masks being used to define different features of the electrodes. The masks may create self-aligned electrodes, which can be aligned with one or more anchors of the resonator.

Abstract: Microelectronic devices for harvesting kinetic energy and/or detecting motion, and associated systems and methods. Particular embodiments include an energy harvesting device for generating electrical energy for use by microelectronic devices, where the energy harvesting device converts to electrical energy the kinetic energy among or within the microelectronic devices and their packaging, and provides this electrical energy to power the microelectronic devices.

Abstract: A vibration type driving device comprising an electromechanical energy conversion element, an elastic member to which the electromechanical energy conversion element is attached, a driven member wherein a relative displacement is generated between the elastic member and the driven member, and a contact member between the elastic member and the driven member, wherein the elastic member is formed of non-metal material, the driven member is formed of non-metal material, and the contact member is formed of at least one of resin, non-oxide ceramics, and ceramics added with filler.

Abstract: The present invention provides meta-materials with an actively controllable mechanical property. The meta-material includes a deformable structure and a set of activation elements. The activation elements are controllable between multiple states. The meta-material includes a first value for a mechanical property when one or more of the activation elements is in the first activation state and includes a second value for the mechanical property when the activation elements have been activated to the second activation state. In one aspect, the meta-material resembles a composite material where the connectivity between the component materials or shape and arrangement of the component materials is dynamically controllable so as to affect a mechanical property of the meta-material.

Abstract: A polymer actuator device system includes: a polymer actuator which includes an electrolyte layer, a first electrode layer and a second electrode layer provided to oppose each other with the electrolyte layer interposed therebetween in a thickness direction of the electrolyte layer, and deforms in response to a voltage between the first and second electrode layers; and a sealing member which coats an entirety of the polymer actuator to be enclosed therein. The sealing member has two layers of a resin layer and an inorganic layer, a thickness of the sealing member is 1 to 5 microns, and an outer side of the sealing member in the thickness direction has a wear preventing body.

Abstract: A power supply includes a rotor having an undulated surface (658, 858, 958, 10, 58) and a magnetostrictive material disposed adjacent to the undulated surface. The undulated surface alternatingly compresses the magnetostrictive material as the rotor rotates, inducing an electric current in a conductor coupled to the magnetostrictive material.

Abstract: A device can have an outer frame and an actuator. The actuator can have a movable frame and a fixed frame. At least one torsional flexure and at least one hinge flexure can cooperate to provide comparatively high lateral stiffness between the outer frame and the movable frame and can cooperate to provide comparatively low rotational stiffness between the outer frame and the movable frame.

Abstract: An electronic device includes a first base body, a second base body, a third base body held between the first base body and the second base body, a first functional element disposed in a first cavity surrounded by the first base body and the third base body, and a second functional element disposed in a second cavity surrounded by the second base body and the third base body.

Abstract: Methods, apparatuses, and systems are disclosed for forming a transducer. The transducer may include a bottom plate formed from a first sheet of material, a top plate formed from a second sheet of material, and a middle portion. The middle portion includes a mid-upper element formed from a third sheet of material, the mid-upper element having a mid-upper frame, a mid-upper mass, and a plurality of mid-upper attachment members coupling the mid-upper mass to the mid-upper frame. The middle portion also may include a central element formed from a fourth sheet of material, the central element having a central frame and a central mass.

Abstract: An actuator that operates by electrostatic attraction and repulsion and can have fixed and moving electrodes is disclosed for one or more embodiments. The fixed and moving electrodes can be inclined relative to each other at an acute angle. The actuator can be radially symmetric and mirrored about the moving electrode. The moving electrode can have a central aperture over which is placed an optical element such as a lens. The optical element can be part of an optical train that permits the focus of an electronic camera to be modified by changing the displacement of the lens along the optical axis of the camera.

Abstract: A graphene sheet is provided. The graphene sheet includes a carbon lattice and a spatial distribution of defects in the carbon lattice. The spatial distribution of defects is configured to tailor the buckling properties of the graphene sheet.

Abstract: The invention relates to an electromechanical converter, comprising at least one dielectric elastomer layer (1), electret layers (4, 5), and electrodes (2, 3), wherein the dielectric elastomer layer (1) is contacted by the at least one electret layer (4), the at least one electret layer (4) carries an electric charge and is contacted by a first electrode (2) and a second electrode (3) is arranged on the side of the dielectric elastomer layer (1) opposite the first electrode (2). The invention further relates to a method for producing same, to the use thereof, and to the generation of electrical energy in which the converter according to the invention can be applied. Operation of the converter for generating energy is possible in the planar mode (d31 mode).

Abstract: A power generation device includes: a composite layer formed by a dielectric elastomer with ferroelectric particles dispersed therein; and a pair of electrodes disposed on opposite sides of the composite layer, the pair of electrodes being stretchable and compressible along with stretch and compression of the composite layer. The ferroelectric particles have crystal orientability and are orientationally dispersed in the dielectric elastomer, and are polarized in the layer thickness direction of the composite layer.

Abstract: The force on the electrodes of an electrostatic field is used so that lateral tensile or compressive forces result which can deform a deformable element or can strongly deflect a deflectable structure. For this, a micromechanical device includes, apart from an electrode and a deformable element, an insulating spacer layer via which the electrode is fixed to the deformable element, wherein the insulating spacer layer is structured into several spaced-apart segments along a lateral direction, so that by applying an electric voltage between the electrode and the deformable element lateral tensile or compressive forces bending the deformable element along the lateral direction result. Thereby, the problem that normally accompanies electrostatic drives, namely the problem of the pull-in effect, is overcome. The deflection of the deformable element can be much larger than the gaps of the two electrodes, i.e. the above-mentioned electrode and the deformable element. A usage as a sensor is also possible.

Abstract: A dielectric film includes an elastomer, and metallic oxide particles having a particle diameter of 100 nm or less that are chemically bonded to the elastomer and are dispersed in the elastomer in a state of primary particles. A method for manufacturing the dielectric film includes: a chelating process of adding a chelating agent to an organometallic compound to produce a chelate compound of the organometallic compound; a sol manufacturing process of adding an organic solvent and water to the chelate compound to obtain a sol of metallic oxide particles produced by the hydrolytic reaction of the organometallic compound; a mixed solution preparing process of mixing the sol of the metallic oxide particles and a polymer solution containing a rubber polymer having functional groups that optionally react with hydroxy groups; and a film forming process of applying the mixed solution onto a substrate, and curing the resultant coating film.

Abstract: Embodiments of the invention include micromechanical resonators. These resonators can be fabricated from thin silicon layers. Both rotational and translational resonators are disclosed. Translational resonators can include two plates coupled by two resonate beams. A stable DC bias current can be applied across the two beams that causes the plates to resonate. In other embodiments, disk resonators can be used in a rotational mode. Other embodiments of the invention include using resonators as timing references, frequency sources, particle mass sensors, etc.

Abstract: A method and system for providing an engine for producing mechanical energy through the absorption and evaporation of moisture uses a hygroscopic material in one or more configurations to do mechanical work. The hygroscopic material can include microbial spores, plant cells and cell materials, silk and hydrogel materials that absorb moisture and expand or swell when exposed to high relative humidity environments and shrink or return to nearly their original size or shape when exposed to low relative humidity environments wherein the moisture evaporates and is released. By exposing the hygroscopic material to a cycle of high relative humidity environments and low relative humidity environments, useful work can be done. One or more transmission elements can be used to couple the hygroscopic material to a generator that converts the mechanical energy to, for example, electrical energy.

Abstract: In one embodiment, an electrostatic actuator includes a generally planar fixed frame, a generally planar moving frame coupled to the fixed frame by a flexure for substantially coplanar, perpendicular movement relative to the fixed frame, a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moving frame, and an elongated output shaft having opposite input and output ends, the input end being coupled to the moving frame.

Abstract: Techniques are disclosed for systems and methods to provide shock impact mitigation for MEMS structures. A MEMS structure may include one or more actuators. An actuator may include a first frame having a spine, where the spine includes a body and a tip. The actuator may include a second frame connected to the first frame and including a shock stop, where the shock stop includes a surface in proximity to the spine tip. An actuator may include a shock cushion spring fixed relative to the spine tip and situated substantially between the spine tip and the shock stop surface, where the shock cushion spring is adapted to protect the spine tip from contact with the shock stop surface.

Abstract: According to one embodiment, a drive device comprises a first generating unit which moves in straightly movable manner or rotatable manner and generates precharge pressure, a sliding guide unit which has a sliding guide surface that comes into contact with a sliding surface of the first generating unit and to which the precharge pressure is given, a vibration unit which gives vibration to the first generating unit, and a second generating unit. When the vibration is given to the first generating unit, the second generating unit generates driving force for driving the first generating unit in a predetermined direction so that the driving force is more than frictional force between the sliding surface and the sliding guide surface. When the vibration is not given to the first generating unit, the second generating unit generates the driving force so that the driving force is less than the frictional force.

Abstract: This document discusses, among other things, apparatus and methods for a front-end charge amplifier. In certain examples, a front-end charge amplifier for a microelectromechanical system (MEMS) device can include a charge amplifier configured to couple to the MEMS device and to provide sense information of a proof mass of the MEMS device, a feedback circuit configured to receive the sense information and to provide feedback to an input of the charge amplifier, and wherein the charge amplifier includes a transfer function having a first pole at a first frequency, a second pole at a second frequency, and one zero at a third frequency.

Abstract: A plate, a transducer, a method for making a transducer, and a method for operating a transducer are disclosed. An embodiment comprises a plate comprising a first material layer comprising a first stress, a second material layer arranged beneath the first material layer, the second material layer comprising a second stress, an opening arranged in the first material layer and the second material layer, and an extension extending into opening, wherein the extension comprises a portion of the first material layer and a portion of the second material layer, and wherein the extension is curved away from a top surface of the plate based on a difference in the first stress and the second stress.

Abstract: A micro-electro-mechanical actuator consists of a first semiconductor layer comprising a movable element with comb electrodes, a support element with inner and outer comb electrodes and a stationary element with comb electrodes, an electrical insulation layer, and a second semiconductor layer with a cavity to allow out-of-plane rotation of the movable and support elements. The movable element is mounted to the support element by a first pair of torsional hinges whereas the support element is mounted to the stationary element by a second pair of torsional hinges such that the actuator is in gimbaled structure. Inner comb electrodes of the support element interdigitate with comb electrodes of the movable element, and outer comb electrodes of the support element interdigitate with comb electrodes of the stationary element in the same plane defined by the first semiconductor layer to form in-plane comb-drive actuators.

Abstract: The present invention provides systems, devices, and related methods, involving electrochemical actuation. In some cases, application of a voltage or current to a system or device of the invention may generate a volumetric or dimensional change, which may produce mechanical work. For example, at least a portion of the system may be constructed and arranged to be displaced from a first orientation to a second orientation. Systems such as these may be useful in various applications, including pumps (e.g., infusion pumps) and drug delivery devices, for example.