Abstract: The disclosure provides a structure for a microelectromechanical system (MEMS)-based resonator device. The structure for the MEMS-based resonator device includes at least one resonator unit. The at least one resonator unit comprises a substrate having a trench therein. A pair of first electrodes is disposed on a pair of sidewalls of the trench. A piezoelectric material fills the trench, covering the pair of first electrodes. A second electrode is embedded in the piezoelectric material, separated from the pair of first electrodes by the piezoelectric material. The second electrode disposed in the trench is parallel to the pair of first electrodes.

Abstract: A method and devices comprise a low frequency high energy ultrasound system having at least one sonotrode projecting into a reactor vessel through which the liquid passes via at least one inlet orifice and at least one outlet orifice. To avoid cavitation at the sonotrode, in a close region of the oscillation-transducing sonotrode surface a pressure/amplitude combination close to or above the pressure-amplitude characteristic line is generated at which considerably reduced or no cavitation occurs and in the adjacent region in the vessel at least in a region and at least at times a pressure/amplitude combination is maintained below the pressure-amplitude characteristic line at which cavitation is generated. A device has an inlet orifice arranged such that the liquid impacts directly onto the oscillation-transducing sonotrode surface, and is shaped that in the close region of the oscillation-transducing sonotrode surface a pressure close to or above the pressure-amplitude characteristic line prevails.

Abstract: A resonator element includes a substrate that vibrates in a thickness shear vibration, a first excitation electrode that is provided on one main surface of the substrate and has a shape in which at least three corners of a virtual quadrangle are cut out, and a second excitation electrode that is provided on the other main surface of the substrate, and a ratio (S2/S1) of an area S1 of the virtual quadrangle and an area S2 of the first excitation electrode satisfies a relationship of 69.2%?(S2/S1)?80.1%.

Abstract: A piezoelectric valve has a body with an input passage and an output passage each configured to connect to a fluid flow system, a flow control member movable with respect to the valve seat between a fully open position and a closed position and a piezoelectric motor directly connected to the flow control member. The piezoelectric motor has a piezoelectric resonator in which two orthogonal vibrational modes across a length and a width of the piezoelectric resonator are excited, a working element and one or more contact sites providing frictional contact between the working element and the piezoelectric resonator. One of the working element and the piezoelectric resonator is connected to the flow control member and configured to move relative to the other of the working element and the piezoelectric resonator due to the frictional contact, thereby moving the flow control member.

Abstract: Disclosed herein is a method of manufacturing an inertial sensor using a polling method of a piezoelectric element performing a polling after packaging the piezoelectric element, the method of manufacturing an inertial sensor including: forming a driving electrode and a sensing electrode on a flexible substrate on which a piezoelectric material is deposited; electrically connection the driving electrode and the sensing electrode; packaging the flexible substrate; polling by applying voltage and heat to the driving electrode and the sensing electrode; and electrically separating the driving electrode from the sensing electrode by applying heat to the driving electrode and the sensing electrode.

Abstract: Embodiments related to a piezoelectric bender that comprises a spring and mass element to provide additional constructive resonance.

Abstract: A superlattice crystal resonator having a substrate of a dielectric acoustic superlattice material, both sides of which substrate are plated with electrodes. The resonator can be a one-port resonator if the electrode on both sides is a single electrode, or it can be a two-port resonator if the electrode on one side is a single electrode and the electrode on the other side is a bipolar electrode. The superlattice crystal resonator can be used as a superlattice crystal filter, either in the form of a monolithic superlattice crystal filter formed by a two-port superlattice crystal filter, or in the form of a combined superlattice crystal filter where a number of one-port superlattice crystal resonators are interconnected in various circuitry configurations with or without other electronic components, such as capacitors, inductors, and resisters.

Abstract: A resonant transducer includes a silicon single crystal substrate, a silicon single crystal resonator disposed over the silicon single crystal substrate, a shell made of silicon, surrounding the resonator with a gap, and forming a chamber together with the silicon single crystal substrate, an exciting module configured to excite the resonator, a vibration detecting module configured to detect vibration of the resonator, a first layer disposed over the chamber, the first layer having a through-hole over the resonator, a second layer disposed over the first layer, the second layer covering a gap being positioned above the through-hole and being communicated with the through-hole, and a third layer covering the first layer and the second layer, and the third layer sealing the gap.

Abstract: A piezoelectric vibrating piece includes a vibrator, a framing portion that surrounds the vibrator, and a connecting portion that connects the vibrator and the framing portion together. At least one of a front surface and a back surface of the connecting portion is formed at a depth of 5 ?m to 15 ?m with respect to the framing portion.

Abstract: A vibrator element includes a base portion, a vibrating arm extending from the base portion, a first electrode provided on the vibrating arm, a second electrode provided above the first electrode, a piezoelectric body arranged between the first electrode and the second electrode, and an insulating film arranged between the first electrode and the piezoelectric body, in which the material of the first electrode contains TiN, the material of the insulating film contains SiO2, and the material of the piezoelectric body contains AlN.

Abstract: A transponder including a first resonator and a series of one or more second resonators with coupling of evanescent waves exhibiting at least one first resonant mode and one second resonant mode, said first resonator being connected via a first port, to a first means allowing an interrogation, wherein said second resonators are connected via at least one second port, to at least one variable load element capable of modifying coupling conditions of the resonant modes and consequently a response measured on said first port.

Abstract: Systems and methods for providing haptic feedback at multiple resonance frequencies are disclosed. For example, one disclosed apparatus includes a resonator with a base and a plurality of projections, a first projection of the plurality of projections having a first resonance frequency and a second projection of the plurality of projections having a second resonance frequency, and a piezoelectric actuator coupled to the resonator and operable to output a haptic feedback effect at the first resonance frequency and at the second resonance frequency.

Abstract: A bulk acoustic wave resonator structure that isolates the core resonator from both environmental effects and aging effects. The structure has a piezoelectric layer at least partially disposed between two electrodes. The structure is protected against contamination, package leaks, and changes to the piezoelectric material due to external effects while still providing inertial resistance. The structure has one or more protective elements that limit aging effects to at or below a specified threshold. The resonator behavior is stabilized across the entire bandwidth of the resonance, not just at the series resonance. Examples of protective elements include a collar of material around the core resonator so that perimeter and edge-related environmental and aging phenomena are kept away from the core resonator, a Bragg reflector formed above or below the piezoelectric layer and a cap formed over the piezoelectric layer. The resonator structure is suspended in a cavity in a cap structure.

Abstract: Inertial sensor having a body with first and second cavities on opposite sides thereof, a sensing element in the first cavity, electronic circuitry in the second cavity, electrical conductors interconnecting the sensing element and the circuitry, and leads connected electrically to the circuitry and extending from the body for mounting the sensor and making connections with the circuitry.

Abstract: A piezoelectric resonator including a base part, a first support part fixed to the base part, a beam part fixed to the first support part, a weight part fixed to the beam part, a drive unit provided on the beam part, and an adjusting magnet movable on a main surface of the base part. Furthermore, the weight part is formed of a magnet or a magnetic body, and the beam part extends in a direction along the main surface of the base part. With this configuration, displacement of the resonance frequency generated due to variation in a manufacturing process can be adjusted easily. Even when the resonance frequency is displaced from desired resonance frequency due to variation in the manufacturing process of a power generating element, the displacement can be easily adjusted and maximum efficiency can be obtained.

Abstract: An ultrasonic transducer device includes a base, a first electrode film, a piezoelectric film, a second electrode film and a first conductive film. The base has a plurality of vibrating film portions arranged in an array pattern. The first electrode film is disposed on each of the vibrating film portions. The piezoelectric film is disposed on the first electrode film. The second electrode film is disposed on the piezoelectric film. The first conductive film is connected to the first electrode film. The first conductive film has a film thickness larger than a film thickness of the first electrode film.

Abstract: The present invention provides a sensor system for measuring an elastic modulus and a shear modulus and a method for using the sensor system to evaluate a tissue by determining the presence of and/or characterizing abnormal growths. The method involves applying a set of forces of different magnitudes to one or more locations of tissue, detecting the corresponding displacements due to said applied forces, determining the forces acting on those locations of tissue which are a combination of forces from the applied voltages and the countering forces from tissue deformation, obtaining the elastic modulus and/or shear modulus for a plurality of locations, and determining abnormal growth invasiveness, malignancy or the presence of a tumor from said elastic and/or shear moduli.

Abstract: A piezoelectric resonator includes a resonator substrate having a resonating body with a thickness that is associated with a resonant frequency, a conductor disposed on the resonating body and having a body electrode, a base having a groove aligned with the body electrode and defined by a groove-defining wall, a base electrode disposed on the groove-defining wall and cooperating with the body electrode and the base to form a capacitor load, and a cap disposed on the resonator substrate in a manner that the resonator substrate is sandwiched between the cap and the base.

Abstract: A piezoelectric generator includes a fixing part; a cantilever formed at a front edge of the fixing part; a weight part formed at a front end of the cantilever; a centroid adjustment part by which a position of a centroid of the weight part is adjusted; and a piezoelectric generating cell formed on top of the cantilever.

Abstract: Matching layers configured for use with ultrasound transducers are disclosed herein. In one embodiment, a transducer stack can include a capacitive micromachined ultrasound transducer (CMUT), an acoustic lens, and a matching layer therebetween. The matching layer can be made from a compliant material (e.g. an elastomer and/or an liquid) and configured for use with CMUTs. The matching layer can include a bottom surface overlying a top surface of the transducer and a top surface underlying a bottom surface of the lens.

Abstract: This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, a resonator structure includes a first conductive layer of electrodes and a second conductive layer of electrodes. A piezoelectric layer including a piezoelectric material is disposed between the first conductive layer and the second conductive layer. One or more trenches can be formed in the piezoelectric layer on one or both sides in space regions between the electrodes. In some implementations, a process for forming the resonator structure includes removing an exposed portion of the piezoelectric layer to define a trench, for instance, by partial etching or performing an isotropic release etch using a XeF2 gas or SF6 plasma. In some other implementations, a portion of a sacrificial layer is removed to define a trench in the piezoelectric layer.

Abstract: A method of forming a piezoelectric actuator on a vibration plate to provide a driving force to each of a plurality of pressure chambers includes forming a lower electrode on the vibration plate, forming a piezoelectric layer on the lower electrode at a position corresponding to each of the pressure chambers, forming a supporting pad on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, forming an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad, and bonding the upper electrode to a driving circuit above the supporting pad to receive a voltage from the driving circuit.

Abstract: The various embodiments of the present disclosure relate generally bulk-acoustic-wave resonators. An exemplary embodiment of the present invention provides a bulk-acoustic-wave resonator comprising an acoustic reflector, a substantially c-axis oriented hexagonal crystal structure, and a plurality of electrodes. The crystal structure is solidly-mounted to the acoustic reflector. The bulk-wave resonator resonates in at least two non-harmonically-related operational modes.

Abstract: An inter-digital bulk acoustic resonator including a resonating structure, one or more input electrodes, one or more output electrodes, a substrate, and a supporting structure disposed on the substrate is provided. The resonating structure includes one or more resonating beams and a coupling beam. The resonating beams are connected at opposite two sides of the coupling beam respectively. The input electrodes and the output electrodes are arranged among the resonating beams in interlace. The input electrodes, the output electrodes, and the resonating beams are parallel to each other. Two ends of the coupling beam are connected to the supporting structure, such that the resonating structure is supported on the substrate.

Abstract: A method for manufacturing a resonator is presented in the present application. The method includes providing a handle substrate, providing a host substrate, providing a quartz substrate comprising a first surface opposite a second surface, applying interposer film to the first surface of the quartz substrate, bonding the quartz substrate to the handle substrate wherein the interposer film is disposed between the quartz substrate and the handle substrate, thinning the second surface of the quartz substrate, removing a portion of the bonded quartz substrate to expose a portion of the interposer film, bonding the quartz substrate to the host substrate, and removing the handle substrate and the interposer film, thereby releasing the quartz substrate.

Abstract: A piezoelectric bulk wave device that includes a piezoelectric thin plate that is made of LiTaO3, and first and second electrodes that are provided in contact with the piezoelectric thin plate. The piezoelectric bulk wave device utilizes the thickness shear mode of the piezoelectric thin plate made of LiTaO3. The first and second electrodes are each formed by a conductor having a specific acoustic impedance higher than the specific acoustic impedance of a transversal wave that propagates in LiTaO3. When the sum of the film thicknesses of the first and second electrodes is defined as an electrode thickness, and the thickness of the piezoelectric thin plate made of LiTaO3 is defined as an LT thickness, the electrode thickness/(electrode thickness+LT thickness) is not less than 5% and not more than 40%.

Abstract: There is provided an apparatus for generating vibrations including: a housing having an internal space; a direction changing member installed in the housing so as to be disposed in the internal space; a piezoelectric actuator including a piezoelectric element fixed to the direction changing member such that a horizontal deformation thereof is restrained, and deforming the direction changing member by a horizontal deformation thereof; and a vibrator fixed to the direction changing member and vertically displaced in a vertical direction according to a vertical deformation of the piezoelectric actuator.

Abstract: Contour-mode piezoelectric devices and methods of forming contour mode piezoelectric devices. The contour mode piezoelectric device includes a piezoelectric film having first and second surfaces and suspended so that it is spaced away from a substrate. The contour mode piezoelectric device also includes first and second patterned electrodes respectively disposed on the first and second surfaces of the piezoelectric film, at least one of the first and second patterned electrodes having variable width along a length thereof.

Abstract: An acoustic wave device includes: an electrode that excites an acoustic wave and is located on a substrate; and a silicon oxide film that is located so as to cover the electrode and is doped with an element or molecule displacing O in a Si—O bond, wherein the element or molecule is F, H, CH3, CH2, Cl, C, N, P, or S.

Abstract: Disclosed are a slim self-powering power supplier using a flexible PCB for a wireless sensor network and a sensor node using the same, and a fabrication method thereof. An exemplary embodiment of the present disclosure provides a self-powering power supplier including: a flexible PCB; a lower electrode positioned on the flexible PCB; a piezoelectric body having a cantilever structure deposited on the lower electrode; and an upper electrode formed on the piezoelectric body.

Abstract: Disclosed is an apparatus used in an electronic device for providing haptic feedback. The apparatus includes a main board defining a mounting surface, a vibration unit mounted on the mounting surface of the main board, the vibration unit being capable of vibrating along a direction parallel to the mounting surface and defining at least two fastening portions at two distal ends thereof. At least two screws are provided to fix the vibration unit on the main board through the fastening portions along a direction perpendicular to the mounting surface.

Abstract: An oscillation structure of micro actuator is described. In the oscillation structure, a pair of torsion bars is disposed along a first axis perpendicular to a second axis. The first frame is connected to the pair of torsion bars wherein the torsion bars are disposed on the outer periphery of a first frame along the first axis and a second frame is disposed inside the first frame. Each of the first connection members connects the first frame to the second frame therebetween, and each of the second connection members connects the second frame to the oscillation body therebetween such that the first frame, the second frame and the oscillation body are allowed to rotate about the first axis by the torsion bars as a structure assemblies at an identical angle. The oscillation structure effectively reduces the dynamic deformation of micro actuator.

Abstract: An ultrasonic oscillating device with a detachable ultrasonic oscillating assembly is mounted inside a case having a detachable lid and applied in a humidifier. The ultrasonic oscillating device has a circuit board, a supporting board, a connecting structure and the ultrasonic oscillating assembly. The detachable ultrasonic oscillating assembly is placed between the supporting board and the lid. The connecting structure is mounted on a bottom of the lid and electrically connected to the ultrasonic oscillating assembly and the circuit board. When the ultrasonic oscillating assembly is broken, users easily replace the broken ultrasonic oscillating assembly by the detachable ultrasonic oscillating assembly and the detachable lid of the case, so other unbroken parts remain useful.

Abstract: An acoustical fluid control mechanism and a method of controlling fluid flow of a working fluid with the acoustical fluid control mechanism are provided. The mechanism comprises a resonance chamber that defines a cavity. The resonance chamber has a port. The cavity is sealed from the ambient but for the port for enabling oscillatory flow of a working fluid into and out of the cavity upon exposure of the resonance chamber to an acoustic signal containing a tone at a frequency that is substantially similar to a particular resonance frequency of the resonance chamber. The mechanism further includes a rectifier for introducing directional bias to the oscillatory flow of the working fluid through the port. The rectifier has an inlet connected to the port and an outlet for transmitting the directional flow of the working fluid away from the cavity. The outlet is in fluid communication with the port of the resonance chamber at least during transmission of the directional flow of the working fluid therethrough.

Abstract: Resonator structures and electrodes are described, as well as methods for manufacturing the same. Resonator electrodes may be formed using two or more photolithographic steps and masks, with different masks being used to define different features of the electrodes. The masks may create self-aligned electrodes, which can be aligned with one or more anchors of the resonator.

Abstract: A tunable acoustic resonator device has a piezoelectric medium as a first thin film layer and a tunable crystal medium as a second thin film layer. The tunable crystal medium has a first acoustic behavior over an operating temperature range under a condition of relatively low applied stress and a second acoustic behavior under a condition of relatively high applied stress. The acoustic behaviors are substantially different and, consequently, the different levels of applied stress are used to tune the acoustic resonator device. Compared with the tunable resonator device consisting of only tunable crystal medium, a device having both the piezoelectric and tunable crystal medium has advantages such as larger inherent bandwidth and less nonlinearity with AC signals. The device also requires a smaller applied stress (i.e. bias voltage) to achieve the required frequency tuning.

Abstract: In one aspect of the invention, an acoustic wave device includes a substrate, and at least one acoustic wave resonator having a bottom electrode adjacent to the substrate, a top electrode, a piezoelectric layer sandwiched between the bottom and top electrodes, a passivation layer formed on the top electrode, and a mass load layer sandwiched between the substrate and the bottom electrode, or between the bottom electrode and the piezoelectric layer.

Abstract: Systems and methods for providing haptic feedback at multiple resonance frequencies are disclosed. For example, one disclosed apparatus includes a resonator with a base and a plurality of projections, a first projection of the plurality of projections having a first resonance frequency and a second projection of the plurality of projections having a second resonance frequency, and a piezoelectric actuator coupled to the resonator and operable to output a haptic feedback effect at the first resonance frequency and at the second resonance frequency.

Abstract: A method of actuating a system comprising a movable component and an actuator configured to move the movable component comprises providing a control signal representative of a desired motion of the movable component. The control signal is supplied to one or more resonators. Each of the one or more resonators has a mode of oscillation representative of at least one elastic mode of oscillation of the system. The control signal is modified by subtracting from the control signal a signal representative of a response of the one or more resonators to the control signal. The actuator is operated in accordance with the modified control signal. Thus, undesirable elastic oscillations of the system which might occur if the system were operated with the original control system can be reduced.

Abstract: A graphene sheet is provided. The graphene sheet includes a carbon lattice and a spatial distribution of defects in the carbon lattice. The spatial distribution of defects is configured to tailor the buckling properties of the graphene sheet.

Abstract: First vibrating arms extend along a first direction from a base portion. Second vibrating arms extend along a second direction from the base portion. First suspension arms extend from a fixed portion and are connected to first connecting parts of the base portion. Second suspension arms extend from the fixed portion and are connected to second connecting parts of the base portion.

Abstract: A heated resonator includes a base substrate, a piezoelectric piece having a thickness and a top side and a bottom side, a first electrode on the top side, a second electrode opposite the first electrode on the bottom side, an anchor connected between the piezoelectric piece and the base substrate, and a heater on the piezoelectric material. A thermal resistor region in the piezoelectric piece is between the heater and the anchor.

Abstract: In a method for influencing, in particular damping or suppressing, mechanical vibrations occurring during operation in a turbomachine blade (10), the mechanical vibratory energy of the turbomachine blade (10) is first converted into electrical energy and the electrical energy generated is then converted into heat loss. Effective damping which can be used especially simply and in a versatile way is achieved in that the piezoelectric effect is used in order to convert mechanical vibratory energy into electrical energy.

Abstract: A piezoelectric actuator unit includes a piezoelectric layer, a first electrode and a second electrode which are arranged to be sandwiching the piezoelectric layer, and which form an active portion of the piezoelectric layer by sandwiching the piezoelectric layer, a capacitor which is connected in series to the active portion, and a voltage applying mechanism which applies a first voltage to the capacitor, and a second voltage between the first electrode and the second electrode to cause a piezoelectric deformation in the active portion of the piezoelectric layer.

Abstract: The present invention provides a sensor system for measuring an elastic modulus and a shear modulus and a method for using the sensor system to evaluate a tissue by determining the presence of and/or characterizing abnormal growths. The method involves applying a set of forces of different magnitudes to one or more locations of tissue, detecting the corresponding displacements due to said applied forces, determining the forces acting on those locations of tissue which are a combination of forces from the applied voltages and the countering forces from tissue deformation, obtaining the elastic modulus and/or shear modulus for a plurality of locations, and determining abnormal growth invasiveness, malignancy or the presence of a tumor from said elastic and/or shear moduli.

Abstract: According to one embodiment, a drive device comprises a first generating unit which moves in straightly movable manner or rotatable manner and generates precharge pressure, a sliding guide unit which has a sliding guide surface that comes into contact with a sliding surface of the first generating unit and to which the precharge pressure is given, a vibration unit which gives vibration to the first generating unit, and a second generating unit. When the vibration is given to the first generating unit, the second generating unit generates driving force for driving the first generating unit in a predetermined direction so that the driving force is more than frictional force between the sliding surface and the sliding guide surface. When the vibration is not given to the first generating unit, the second generating unit generates the driving force so that the driving force is less than the frictional force.

Abstract: A piezoelectric resonator includes: a piezoelectric plate having a vibrating portion surrounded by a peripheral portion; and an excitation electrode on the piezoelectric plate, wherein long sides of the vibrating portion and excitation electrode are parallel to a piezoelectric plate long side. Assuming a piezoelectric plate long side length X, a vibrating portion thickness t, a vibrating portion long side length Mx, an excitation electrode long side length Ex, and a piezoelectric plate flexure vibration wavelength ?, ?/2=(1.332/f)?0.0024 (piezoelectric resonator resonance frequency f), (Mx?Ex)/2=?/2, Mx/2={(A/2)+(1/4)}? (where, A is a positive integer), and X?20t. A protruding portion is disposed on a vibrating portion extension line and parallel to a vibrating portion short side. Assuming a protruding portion length Dx, Dx=(?/2)×m (where, m is a positive integer). Assuming a distance Sx between the vibrating and protruding portions, Sx=(?/2)×n±0.1? (where, n is a positive integer).

Abstract: An apparatus (200) comprising: a first electrode (204), wherein the first electrode comprises at least one layer of graphene; a second electrode (208); and a layer of piezoelectric material (206) disposed between the first electrode (204) and the second electrode (208), wherein the piezoelectric material (206) is able to resonate at a resonant frequency in response to application of an oscillating electrical signal to the first or second electrode (204, 208).

Abstract: A piezoelectric actuator unit includes a piezoelectric layer, a first electrode and a second electrode which are arranged to be sandwiching the piezoelectric layer, and which form an active portion of the piezoelectric layer by sandwiching the piezoelectric layer, a capacitor which is connected in series to the active portion, and a voltage applying mechanism which applies a first voltage to the capacitor, and a second voltage between the first electrode and the second electrode to cause a piezoelectric deformation in the active portion of the piezoelectric layer.

Abstract: An acoustic wave device includes: a piezoelectric thin film resonator including: a substrate; a lower electrode formed on the substrate; at least two piezoelectric films formed on the lower electrode; an insulating film sandwiched by the at least two piezoelectric films; and an upper electrode formed on the at least two piezoelectric films, wherein an area of the insulating film within a resonance region, in which the lower electrode and the upper electrode face each other across the at least two piezoelectric films, is different from an area of the resonance region.