Abstract: A dielectric device has a first electrode film having a non-oriented or amorphous structure, a dielectric film provided on the first electrode film and having a preferentially oriented structure, and a second electrode film provided on the dielectric film and having a non-oriented or amorphous structure.

Abstract: A piezoelectric device has a first electrode film, a piezoelectric film provided on the first electrode film, and a second electrode film provided on the piezoelectric film. At least one of the pair of electrode films is composed of an alloy, and a major component of the alloy is a metal selected from the group consisting of Ti, Al, Mg, and Zn.

Abstract: There is provided a dielectric composition, including: a basic powder including BamTiO3(0.995?m?1.010); a first subcomponent including 0.1 to 0.6 mole of zirconium (Zr) oxide or carbide, based on 100 moles of the basic powder; a second subcomponent including 0.8 to 6.0 moles of oxide or carbide including at least one of magnesium (Mg), strontium (Sr), and barium (Ba); a third subcomponent including 0.2 to 1.8 moles of oxide including at least one rare earth element; a fourth subcomponent including 0.05 to 0.30 mole of oxide including at least one transition metal; a fifth subcomponent including 0.05 to 0.35 mole of oxide including at least one of vanadium (V), niobium (Nb), and tantalum (Ta); and a sixth subcomponent including 0.5 to 4.0 moles of oxide including at least one of silicon (Si) and aluminum (Al).

Abstract: A method for manufacturing a piezoelectric actuator is provided. The method includes: forming a diffusion-preventive layer having an electrical conductivity on a partial surface thereof on a surface of a vibration plate formed of a metallic material; forming a piezoelectric layer on the surfaces of the diffusion-preventive layer and the vibration plate; forming an electrode in an area of the piezoelectric layer which overlaps the partial surface of the diffusion-preventive layer having the electrical conductivity; forming an extraction electrode in an area of the piezoelectric layer which does not overlap the diffusion-preventive layer; and heating the piezoelectric layer and the vibration plate after the piezoelectric layer is formed so as to diffuse metallic atoms of the metallic material of which the vibration plate is formed to the piezoelectric layer, thereby making the extraction electrode be in conduction with the partial surface of the diffusion-preventive layer having the electrical conductivity.

Abstract: A gripper includes a support and a plurality of gripping arms fixed on the support. One of the plurality of gripping arms includes a base and a carbon nanotube film structure to define a conductive circuit. The conductive circuit receives current to heat the base and the carbon nanotube film structure to actuate the gripper for gripping an object.

Abstract: A stacked bulk acoustic resonator includes a first piezoelectric layer stacked on a first electrode, a second electrode stacked on the first piezoelectric layer; a second piezoelectric layer stacked on the second electrode, and a third electrode stacked on the second piezoelectric layer. The stacked bulk acoustic resonator further includes an inner raised region formed in an inner portion on a surface of at least one of the first, second and third electrodes, and an outer raised region formed along an outer perimeter on the surface of the at least one of the first, second or third electrodes. The outer raised region surrounds the inner raised region and defines a gap between the inner raised region and the outer raised region.

Abstract: An electrical generating device for use with a shoe worn by a user may include a shoe insert to be positioned within the shoe, and the shoe insert may include an elastomer electrode to apply an electrical signal to the user. The elastomer electrode may include a metal integral conductive silicon rubber conductive surface. The elastomer electrode may include silver, silver plated copper, or conductive metal plated material filled silicon filled silicon sheet or a conductive adhesive gel layer. The elastomer electrode may include a conductive carbon film or a conductive metal sheet. The elastomer electrode may include a conductive silver sheet or may include a conductive metal sheet.

Abstract: There is provided a lead-free piezoelectric ceramic having a high and stable piezoelectric constant and a high and stable mechanical quality factor in a wide operating temperature range. A method for manufacturing the lead-free piezoelectric ceramic is also provided. the general formula (1) (Ba1-xCax)a(Ti1-y-zSnyZrz)O3 (0.08?x?0.20, 0.01?y?0.04, 0?z?0.04)??(1) A piezoelectric ceramic includes a main component containing a perovskite type metal oxide having the following general formula (1); and Mn as a first auxiliary component. The amount b (mol) of Mn per mole of the metal oxide is in the range of 0.0048?b?0.0400, and the value a of the general formula (1) or (2) is in the range of 0.9925+b?a?1.0025+b.

Abstract: A multilayered electroactive polymer (EAP) device and a method of manufacturing the same is provided. The multilayered EAP device includes a plurality of unit layers. Each unit layer includes an EAP layer formed of an electroactive polymer (EAP), a protecting layer configured to prevent a material from penetrating into the EAP layer, and an active electrode formed using a conductive material. The protecting layer may be formed below the active layer or above the active layer. The active electrode may be interposed between two protecting layers.

Abstract: Provided are an electrode having high conductivity and high durability to driving deformation, and an actuator including the electrode, the actuator having a large amount of displacement. The actuator includes a pair of electrodes arranged oppositely and an intermediate layer arranged between the pair of electrodes, the intermediate layer containing an electrolyte, and the actuator being deformed by applying a voltage to the pair of electrodes, in which at least one of the pair of electrodes includes a porous structure containing a first conductive material and having conductivity, a second conductive material, and an electrolyte, pores of the porous structure being filled with the second conductive material and the electrolyte.

Abstract: A method for manufacturing a piezoelectric actuator is provided. The method includes: forming a diffusion-preventive layer having an electrical conductivity on a partial surface thereof on a surface of a vibration plate formed of a metallic material; forming a piezoelectric layer on the surfaces of the diffusion-preventive layer and the vibration plate; forming an electrode in an area of the piezoelectric layer which overlaps the partial surface of the diffusion-preventive layer having the electrical conductivity; forming an extraction electrode in an area of the piezoelectric layer which does not overlap the diffusion-preventive layer; and heating the piezoelectric layer and the vibration plate after the piezoelectric layer is formed so as to diffuse metallic atoms of the metallic material of which the vibration plate is formed to the piezoelectric layer, thereby making the extraction electrode be in conduction with the partial surface of the diffusion-preventive layer having the electrical conductivity.

Abstract: Provided are a polymer and a polymer actuator including the polymer. The polymer is cross-linked by a cross-linking agent. When the polymer is used in the polymer actuator, the polymer actuator shows a high strain and may be stably operated at high temperatures.

Abstract: There is provided a piezoelectric vibrating piece including: a piezoelectric plate that includes a pair of vibrating arm portions, and a base portion which integrally fixes the base end portions of the pair of vibrating arm portions along a length direction; excitation electrodes which are formed on the vibrating arm portions and vibrate the vibrating arm portions; mounting electrodes which are formed on the base portion and mount the piezoelectric plate on external portions using a joining member; and leading-out electrodes which connect the excitation electrodes and the mounting electrodes, in which the leading-out electrodes are formed by folding back several times between the excitation electrodes and the mounting electrodes.

Abstract: Piezoelectric devices are disclosed that are mountable on the surface of a printed circuit board or the like. An exemplary device comprises a piezoelectric vibrating piece enclosed and sealed within a package including at least a cover and a base-substrate formed of glass or piezoelectric material. The package includes frame-shaped metallic films formed in peripheral regions of inner main surfaces of the cover and/or the base substrate. The frame-shaped metallic films are used for sealing the package using a eutectic material (e.g., solder). At least one mounting terminal is provided on the outer (bottom) main surface of the base-substrate. At least one of the frame-shaped metallic films and mounting terminals includes a chromium foundation layer formed on the surface of the glass or piezoelectric material, a middle layer of NiW alloy formed on the surface of the chromium layer, and a gold layer formed on the surface of the middle layer.

Abstract: Microelectromechanical resonators include a resonator body having a first piezoelectric layer on a upper surface thereof, which is configured to support actuation and sensing through a transverse piezoelectric effect (e31), and a second piezoelectric layer on at least a portion of a first sidewall thereof, which is configured to support actuation and sensing through a longitudinal piezoelectric effect (e33), where e33 is greater than e31. These resonators may further include a first bottom electrode extending between the first piezoelectric layer and the upper surface of the resonator body and a second bottom electrode extending between the second piezoelectric layer and the first sidewall of the resonator body. These first and second bottom electrodes may be contiguous as a single bottom electrode and the first and second piezoelectric layers may be contiguous as a single piezoelectric layer.

Abstract: Systems and methods of harvesting and converting naturally occurring energy are described that include exposing a material to an ambient condition and harvesting at least a portion of energy that is created. Energy harvesting from fluidic and flow environments or vibration can be accomplished using types of energy harvesters, such as flexible polymers. Active materials or Electro-Active Polymer (EAP)-metal composite thin films like Ionic Polymers, Piezoceramic materials, and electromagnetic systems may be used as mechanical to electrical energy transducers. One type of an ionic EAP is ionic polymer-metal composite (IPMC), which includes a base polymer membrane that may be coated with a metal to act as a surface electrode. The surface electrode may be silver (Ag) nanoparticles. The silver nanoparticle functionalized IPMC can be used to convert mechanical vibrations and fluidic flow to electrical energy to power wireless devices and microelectronic systems, for example.

Abstract: A thin film bulk acoustic resonator (FBAR) includes a first electrode, a first piezoelectric layer having a first c-axis orientation and on the first electrode, a second piezoelectric layer having a second c-axis orientation over the first piezoelectric layer, and a second electrode on the second piezoelectric layer. The first and second piezoelectric layers are made of respective different piezoelectric materials. The FBAR can be set to have different resonance frequencies by selecting the first and second c-axis orientations to be respectively the same or different. The high and low frequency range of the FBAR can thus be extended.

Abstract: A liquid-ejecting head includes a pressure-generating chamber communicatively connected to a nozzle opening and also includes a piezoelectric transducer including a first electrode, a piezoelectric layer disposed on the first electrode, and a second electrode disposed on the piezoelectric layer. The first electrode contains platinum and titanium oxide with a rutile content of 76.5 to 100 mole percent.

Abstract: A piezoelectric multilayer actuator includes a stack of piezoelectric layers arranged one above another and first electrode layers and second electrode layers arranged alternately one above another between said piezoelectric layers. The electrode layers extend into the stack from a first and a second lateral face of the stack and overlapping in the stack. The first lateral face holds a first contact element in electrical contact with the first electrode layers and the second lateral face (5) holds a second contact element in electrical contact with the second electrode layers. The first and second contact elements each have a wire mesh, wherein at least one wire mesh has a twill-weave structure.

Abstract: A piezoelectric actuator according to an embodiment of the present invention includes a base substrate provided with cantilevers and a piezoelectric element formed on each cantilever. The piezoelectric element includes: a lower electrode layer; a piezoelectric layer formed on the lower electrode layer; and an upper electrode layer having a conductive oxide layer formed on the piezoelectric layer. Because the conductive oxide layer has covalent bonds or ionic bonds, and therefore produces little plastic deformation, relaxation of the stress is less likely to occur. Thus, even with repetitive motion in the piezoelectric actuator, the as-deposited internal stress (film stress) can be stably maintained for a long period of time.

Abstract: There is provided a multilayer ceramic electronic component, including: a ceramic element having a plurality of dielectric layers laminated therein; and first and second internal electrodes formed within the ceramic element, wherein the first and second internal electrodes include 80 to 99.9 wt % of copper (Cu) and 0.1 to 20 wt % of nickel (Ni), and a frequency therefor is 1000 MHz or less.

Abstract: Provided is a Bi-based piezoelectric material having good piezoelectric properties. The piezoelectric material includes a perovskite-type metal oxide represented by the following general formula (1): Ax(ZnjTi(1-j))l(MgkTi(1-k))mMnO3??General formula (1) where: A represents a Bi element, or one or more kinds of elements selected from the group consisting of trivalent metal elements and containing at least a Bi element; M represents at least one kind of an element selected from the group consisting of Fe, Al, Sc, Mn, Y, Ga, and Yb; and 0.9?x?1.25, 0.4?j?0.6, 0.4?k?0.6, 0.09?l?0.49, 0.19?m?0.64, 0.13?n?0.48, and l+m+n=1 are satisfied.

Abstract: There is provided a dielectric composition, including; a base powder including BamTiO3 (0.995?m?1.010); a first sub-component including 0.05 to 4.00 moles of an oxide or carbonate containing at least one rare-earth element based on 100 moles of the base powder; a second sub-component including 0.05 to 0.70 moles of an oxide or carbonate containing at least one transition metal; a third sub-component including 0.20 to 2.00 moles of a Si oxide; a fourth sub-component including 0.02 to 1.00 mole of an Al oxide; and a fifth sub-component including 20 to 140% of an oxide containing at least one of Ba and Ca, based on the third sub-component.

Abstract: In a multilayer piezoelectric element in which a plurality of piezoelectric layers and a plurality of metal layers are stacked alternately, the plurality of metal layers include a plurality of low-filled metal layers having a lower filling rate of metal composing the metal layers than oppositely disposed metal layers adjacent to each other in a stacking direction. In a multilayer piezoelectric element in which a plurality of piezoelectric layers and a plurality of metal layers are stacked alternately, the plurality of metal layers include a plurality of thin metal layers having a smaller thickness than oppositely disposed metal layers adjacent to each other in a stacking direction.

Abstract: An electrostrictive structure includes a flexible polymer matrix and a carbon nanotube film structure at least partly embedded into the flexible polymer matrix. The carbon nanotube film structure includes a number of carbon nanotubes combined by van der Waals attractive force therebetween. The carbon nanotube film structure extends in a curve in the flexible polymer matrix.

Abstract: The invention provides a transducer for converting between mechanical and electrical energies. The transducer comprises an EAP laminate with a layer of an elastomer material arranged between two electrode layers, each electrode layer comprising a second layer of a plastically deformable material, e.g. metal or a thermoplastic material, and a third layer of an electrically conductive material. Due to the layer of plastically deformable material, the electrode layers can be shaped into various shapes which can provide anisotropic characteristics of the transducer.

Abstract: A piezoelectric actuator is provided, including a piezoelectric layer which is joined to a joining member and which has a coefficient of linear expansion smaller than a coefficient of linear expansion of the joining member; a first electrode which is arranged on one surface of the piezoelectric layer; a second electrode which is arranged on a portion of the one surface of the piezoelectric layer different from the first electrode and which is in conduction with the first electrode; and a low dielectric layer which is formed between the piezoelectric layer and the second electrode and which has a dielectric constant lower than a dielectric constant of the piezoelectric layer.

Abstract: There are provided a multilayer ceramic electronic component that does not require a heat treatment under a reduction atmosphere, and a manufacturing method thereof, wherein a conductive oxide is used as a material of internal and external electrodes and conductive layers having elasticity are formed on the external electrodes. In the case of the multilayer ceramic electronic component, a firing process may be performed under an air atmosphere, such that a manufacturing process may be simplified and manufacturing costs may be reduced.

Abstract: A piezoelectric actuator is provided, including a piezoelectric layer arranged on one surface of a base member; a plurality of driving electrodes arranged on one surface of the piezoelectric layer; a plurality of leading electrodes led from the driving electrodes to apply a voltage to the driving electrodes; and a low dielectric layer arranged between the piezoelectric layer and the leading electrode, and having a dielectric constant lower than that of the piezoelectric layer. Surroundings of driving areas of the piezoelectric layer including areas facing the plurality of driving electrodes are joined to the base member. The plurality of leading electrodes extend to outside of the driving areas, respectively, some of the plurality of leading electrodes being led in a predetermined first direction, and others of the plurality of leading electrodes being led in a second direction different from the first direction.

Abstract: A piezoceramic transducer (PZT transducer) and a method for manufacturing the same are provided. The PZT transducer includes a piezoceramic substrate and an electrode unit. The piezoceramic substrate has a first surface and a second surface opposite the first surface, and has a mechanical quality factor (Qm) greater than 1400. The electrode unit has a first electrode and a second electrode. The first electrode is disposed on the first surface and has a first diameter. The second electrode covers the second surface and extends to cover a part of the surface at a periphery of the first surface, and the part of the second electrode covering the second surface has a second diameter. The ratio of the first diameter to the second diameter is 0.498 to 0.502. The PZT transducer has a large mist amount and a long service life.

Abstract: A laminate includes a ceramic substrate, a piezoelectric element, and an intermediate layer. The piezoelectric element includes a lower electrode. The intermediate layer is formed between the substrate and the lower electrode of the piezoelectric element. The intermediate layer contains a metal or an oxide thereof as a main component. The metal is different from a metal contained in the lower electrode. The intermediate layer further contains holes.

Abstract: Disclosed is an electromechanical conversion element, including an electromechanical conversion film including a PIT, an upper electrode formed on a top of the electromechanical conversion film and including a first strontium ruthenium oxide, and a lower electrode formed on a bottom of the electromechanical conversion film and including a second strontium ruthenium oxide, wherein Sr-pzt/Sr-sr?0.01, wherein Sr-pzt is a SIMS intensity for a secondary ion of strontium of the PZT at a position of ½ of a thickness of the electromechanical conversion film and Sr-sr is a SIMS intensity for a secondary ion of strontium of the second strontium ruthenium oxide at a position of ½ of a thickness of the lower electrode.

Abstract: In accordance with a representative embodiment, a BAW resonator structure, comprises a first BAW resonator, comprising: a first lower electrode having a first electrical resistance; a first upper electrode having a second electrical resistance; and a first piezoelectric layer disposed between the first lower electrode and the first upper electrode. The BAW resonator structure also comprises a second BAW resonator, comprising: a second lower electrode having the second electrical resistance; a second upper electrode having the first electrical resistance; and a second piezoelectric layer disposed between the second lower electrode and the second upper electrode. The BAW resonator structure also comprises an acoustic coupling layer disposed between the first BAW resonator and the second BAW resonator. The first electrical resistance is less than the second electrical resistance. An communication device comprising a coupled resonator filter (CRF) is also disclosed.

Abstract: A manufacturing method of a piezoelectric film element includes forming a piezoelectric film including a lead-free alkali niobate based compound having a perovskite structure represented by a compositional formula of (K1-xNax)NbO3 on a substrate, and dry-etching the piezoelectric film by using a low-pressure plasma including a fluorine system reactive gas.

Abstract: Actuator elements can be used for mechatronic, adaptive applications under the most varied conditions of use. These actuator elements have improved properties and can be manufactured inexpensively. The actuator elements are formed with at least one dielectric separation layer which is encompassed by two electrically conductive electrodes. The electrodes and the separation layer are in this respect formed using the same visco-elastically deformable plastic. The plastic forms a matrix in which carbon nanotubes are embedded at least in the electrodes.

Abstract: A surface acoustic wave device includes an electrode and a dielectric layer laminated on a piezoelectric substrate, in which the electrode includes a first electrode film containing Pt, Au, Ag, or Cu and a second electrode film containing Al, the normalized film thickness h/? of the first electrode film is about 0.005 or more and at most about 0.015 in the case of Pt, the normalized film thickness h/? of the Al film is about 0.06 or more and at most about 0.185, and the normalized film thickness h/? of the dielectric layer is about 0.2 or less.

Abstract: A piezoelectric actuator comprises a co-fired stack of piezoelectric elements formed from a piezoelectric material and a plurality of positive internal electrodes interdigitated with a plurality of negative internal electrodes throughout the stack to define active regions of the piezoelectric material which are responsive to a voltage applied across the internal electrodes, in use. An external positive electrode connects with the positive internal electrodes and an external negative electrode connects with the negative internal electrodes. The actuator is characterized in that the stack further comprises means for deliberately creating artificial cracks within the stack at a location at which the artificial cracks do not give rise to a short circuit between the internal electrodes but serve to relieve stresses within the piezoelectric material.

Abstract: First and second piezoelectric element overlapped portions of an insulating layer of a flexure part is formed with first and second connecting openings, respectively. There are provided on an upper surface of the insulating layer, first and second lower conductive adhesive agents that electrically connect lower electrode layers of first and second piezoelectric elements to a voltage supply wiring through the first and second connecting openings, and a surrounding insulative adhesive agent that is arranged so as to surround the first and second lower conductive adhesive agents in a plan view.

Abstract: To provide a multi-layer piezoelectric element having high strength against breakage, high insulation and excellent displacement performance, and an injection apparatus that incorporates the same. The multi-layer piezoelectric element comprising a stack 4 constituted from a plurality of piezoelectric layers 1 stacked one on another via internal electrode layers 2, wherein at least a part of peripheral areas 31, that are disposed between two piezoelectric layers 1, 1 located adjacently in the stacking direction and are located between an edge 2a of the internal electrode layer 2 and side face 4a of the stack 4, is dispersed areas where a plurality of metallic regions are dispersed via voids 21.

Abstract: A method for producing a piezoelectric multilayer component is disclosed. Piezoelectric green films and electrode material are provided, arranged alternately on top of one another and sintered. The electrode material is provided with a PbO-containing coating and/or PbO is mixed into the electrode material.

Abstract: A method for manufacturing a piezoelectric element that includes a piezoelectric ceramic body containing an internal electrode. The piezoelectric ceramic body is mainly made of a perovskite complex oxide containing an alkali metal niobate-based compound containing at least one element selected from among K, Li, and Na. The internal electrode is made of a base metal material, such as Ni or Cu. The piezoelectric element is produced by co-sintering the internal electrode and the piezoelectric ceramic body in a reducing atmosphere.

Abstract: The present invention relates to a polymer blend composition comprising a dielectric elastomer, an actuator film manufactured using the same, and an actuator comprising the film. The polymer blend composition according to the present invention comprises a block copolymer having excellent compatibility with the dielectric elastomer and excellent dielectric properties, and thus displacement values suitable for the purpose can be obtained by a simple method of adjusting a composition of the polymer blend. Moreover, the film manufactured using the same has high dielectric constant, low dielectric loss and high electromechanical displacement, and thus the film exhibits excellent dielectric properties when it is applied in a dielectric layer for an actuator.

Abstract: An actuator includes an ion-conductive polymer layer made of a first ion-conductive polymer, a pair of electrode layers provided one on each side of the ion-conductive polymer layer and made of a second ion-conductive polymer and conductive powder, and ions contained in the ion-conductive polymer layer and electrode layers. The first and second ion-conductive polymers differ in functional group type from each other.

Abstract: It is an object of the present invention to provide a lead-free piezoelectric film including a lead-free ferroelectric material and having low dielectric loss and high piezoelectric performance comparable to that of PZT, and a method of manufacturing the lead-free piezoelectric film. The present invention is directed to a piezoelectric film comprising a (NaxBiy)TiO0.5x+1.5y+2-BaTiO3 layer with a (111) orientation, where 0.30?x?0.46 and 0.51?y?0.62.

Abstract: It is an object of the present invention to provide a lead-free piezoelectric film including a lead-free ferroelectric material and having low dielectric loss and high piezoelectric performance comparable to that of PZT, and a method of manufacturing the lead-free piezoelectric film. The present invention is directed to a piezoelectric film comprising a (NaxBiy)TiO0.5x+1.5y+2?BaTiO3 layer with a (110) orientation, where 0.30?x?0. 46 and 0.51?y?0.62.

Abstract: To provide a method of manufacturing a quartz resonator element having a small CI value, a quartz resonator element manufactured by this method, a quartz resonator, and a quartz oscillator. In a method of manufacturing a quartz resonator element in which on a surface of a plate-shaped quartz piece, a thin film-shaped electrode in order to excite the quartz piece is provided, a first metal layer that is composed of chromium and whose thickness is not less than 20 ? nor more than 45 ? is formed on the surface of the quartz piece (P4), and next, a second metal layer that is composed of gold or silver and whose thickness is not less than 500 ? nor more than 950 ? is formed on an upper surface of the first metal layer (P5), and then, the electrode made up of the first metal layer and the second metal layer is provided (P6). Thereafter, a quartz substrate on which the electrode is formed is heated at a temperature range of not less than 200° C. nor more than 400° C.

Abstract: An electromechanical converter comprises a dielectric elastomer layer (1) designed as one piece and having a first side and a second side opposite the first side. The first and the second side of the dielectric elastomer layer (1) are corrugated in the same direction as each other with the formation of ridges (2) and furrows (3). The dielectric elastomer layer (1) comprises a polyurethane polymer, the first side of the dielectric elastomer layer (1) being in contact with a first electrode (4) and the second side of the dielectric elastomer layer (1) being in contact with a second electrode (5) and the first and second electrode (4, 5) having a same-directional corrugated design corresponding to the first and second side of the dielectric elastomer layer (1).

Abstract: A stacked bulk acoustic resonator includes a first piezoelectric layer stacked on a first electrode, a second electrode stacked on the first piezoelectric layer; a second piezoelectric layer stacked on the second electrode, and a third electrode stacked on the second piezoelectric layer. The stacked bulk acoustic resonator includes further includes an inner raised region formed in an inner portion on a surface of at least one of the first, second and third electrodes, and an outer raised region formed along an outer perimeter on the surface of the at least one of the first, second or third electrodes. The outer raised region surrounds the inner raised region and defines a gap between the inner raised region and the outer raised region.

Abstract: An electrode material capable of making more satisfactory the dispersion at the time of production and the aging property of a resonator than Au and capable of reducing the price as compared to Au. An resonator electrode material including a ternary alloy composed of Au and two metals M1 and M2, and being used as an excitation electrode to excite oscillation in a piezoelectric element, wherein the two metals M1 and M2 are, respectively, (a) metal M1: a metal exhibiting a tendency to decrease the temporal frequency property (?f1/f1) from the reference value f1, and (b) metal M2: a metal exhibiting a tendency to increase the temporal frequency property (?f1/f1) from the reference value f1. The metal M1 is preferably at least any one of Ag, Al and Ni, and the metal M2 is preferably at least any one of Pd, Ru, Pt, Ir, Rh and Cu.

Abstract: A method of forming a device is provided. The method includes providing a substrate, forming a sacrificial layer over the substrate, and forming an field layer around the sacrificial layer. After formation, both the sacrificial layer and the field layer are planarized. A component is then formed over the planarized sacrificial layer and the planarized field layer. The component has a first electrode and a second electrode and a single crystal wafer disposed between the first electrode and the second electrode. The component also includes anchors disposed substantially over the field layer. Once the component is formed, the sacrificial layer is released with an etchant having a selectivity for the sacrificial layer such that a cavity is formed beneath the component. The cavity allows free movement component within the cavity during operation of the device. In addition, the etchant does not release the field layer and the component such that the field layer remains below the anchors.