Abstract: A piezoelectric device comprises a piezoelectric body and electrodes for applying an electric field in a predetermined direction across the piezoelectric body. The piezoelectric body contains an inorganic compound polycrystal, which contains first ferroelectric substance crystals having orientational characteristics at the time free from electric field application and has characteristics such that, with application of at least a predetermined electric field E1, at least part of the first crystals undergoes phase transition to second ferroelectric substance crystals of a crystal system different from the crystal system of the first crystals. The piezoelectric device is actuated under conditions such that a minimum applied electric field Emin and a maximum applied electric field Emax satisfy Emin<E1<Emax.

Abstract: A piezoelectric device (X) includes a substrate (11) a piezoelectric film (12), a first electrode (13), and a second electrode (14). At least one of the first electrode (13) and the second electrode (14) is interposed between the substrate (11) and the piezoelectric film (12), and made of an Al alloy containing 0.1 to 3 wt % of at least one metal selected from the group consisting of Ti, Cr, Ni, Cu, Zn, Pd, Ag, Hf, W, Pt and Au.

Abstract: Disclosed are layered films having a combination of piezoelectric layers that change dimension with applied voltage and non-piezoelectric layers. The layered structures can form a wide range of electrically switchable optical films. These films have applications in displays, polarizers, optical compensators, aesthetic films, and “hot” and “cold” mirrors that selectively reflect only certain wavelengths. Also disclosed are monochromatic and multicolor displays using these films.

Abstract: The invention relates to a piezoelectric multiple-layer component with a base body, which comprises a stack of piezoelectric layers (5) lying one above the other and electrode layers (3, 4) lying in-between, wherein an electrically conductive contact element (1, 2), which comprises a porous material and which contacts the electrode layers, extends transverse to the electrode layers (3, 4).

Abstract: A piezoelectric perovskite mixed oxide compound has the general formula (BiFeO3)x—(PbTiO3)1-X and contains up to 5 at % lanthanum or other rare earth substitution, in which x has a value in the range 0.5 to 0.9. Such compounds are capable of withstanding gas turbine operating temperatures and are suitable for use in sensing and actuation functions in aerospace and other applications.

Abstract: An actuator device includes: a layer provided on a single crystal silicon (Si) substrate, and made of silicon dioxide (SiO2); at least one buffer layer provided on the layer made of silicon dioxide (SiO2); a base layer provided on the buffer layer, and made of lanthanum nickel oxide (LNO) having the (100m) plane orientation; and a piezoelectric element. The piezoelectric element includes: a lower electrode provided on the base layer, and made of platinum (Pt) having the (100) plane orientation; a piezoelectric layer made of a ferroelectric layer whose plane orientation is the (100) orientation, the piezoelectric layer formed on the lower electrode by epitaxial growth where a crystal system of at least one kind selected from a group consisting of a tetragonal system, a monoclinic system and a rhombohedral system dominates the other crystal systems; and an upper electrode provided on the piezoelectric layer.

Abstract: A bulk acoustic wave resonator which has excellent elasticity and high electromechanical energy conversion efficiency. A bulk acoustic wave resonator comprises a substrate, a lower electrode formed on the substrate, an interlayer formed on the lower electrode layer, a piezoelectric layer formed on the interlayer, and an upper electrode layer formed on the piezoelectric layer.

Abstract: A piezoelectric thin-film resonator includes: a lower electrode that is formed on a substrate; a piezoelectric film that is formed on the lower electrode; and an upper electrode that is formed on the piezoelectric film. In the piezoelectric thin-film resonator, the upper electrode has a greater film thickness than the lower electrode.

Abstract: A piezoelectric vibrating piece having a first and a second surface at an opposing side of the first surface is comprised of an piezoelectric piece having designated coefficient of thermal expansion; a first electrode film having bigger coefficient of thermal expansion than the designated coefficient of thermal expansion and formed on the first surface; and a second electrode film having smaller coefficient of thermal expansion than the designated coefficient of thermal expansion and formed on the second surface.

Abstract: A piezo-electric substrate is mainly comprised of a base material and a film formed on one main surface of the base material. In the base material, the main surface on which the film is formed is a roughed main surface. The piezo-electric substrate is obtained by forming the film comprised of a material with a coefficient of linear expansion smaller than a coefficient of linear expansion of the base material on the roughened main surface using a thermal spraying method.

Abstract: A boundary acoustic wave device includes a piezoelectric substance, a dielectric substance laminated on the piezoelectric substance, and an electrode film disposed at a boundary between the piezoelectric substance and a dielectric substance, the device utilizing a boundary acoustic wave propagating along the boundary, wherein the electrode film is any one Au alloy electrode film of an Au alloy electrode film including Cu at a ratio of about 0.01% to about 4.8% by weight, an Au alloy electrode film including Pd at a ratio of about 0.01% to about 6.8% by weight, and an Au alloy electrode film including Ni at a ratio of about 0.01% to about 3.5% by weight.

Abstract: A multi-layer piezoelectric element having high durability which allows it to increase the amount of displacement of a piezoelectric actuator under high voltage and high pressure and does not undergo a change in the amount of displacement during continuous operation in a high electric field and under a high pressure over a long time period is provided. The multi-layer piezoelectric element comprises a stack of at least one piezoelectric layer and a plurality of internal electrodes consisting of first and second internal electrodes placed one on another, a first external electrode formed on a first side face of the stack and connected to the first internal electrode and a second external electrode formed on a second side face of the stack and connected to the second internal electrode, wherein the bonding strength between the piezoelectric layer and the internal electrode is weaker than the bending strength of the piezoelectric layer.

Abstract: A multilayer composite includes at least two composites, each composite having a film and an electronically conductive layer. Several composites are laminated to provide an increased conversion between mechanical and electrical energies not only due to the multiplication of the effect of each layer, but also due to the fact that the multilayer structure itself renders the multilayer composite more rigid. In addition, the multilayer structure facilitates application of an electrical field over thinner portions of the structure, thereby requiring much less potential difference between electrodes.

Abstract: A composition for ferroelectric thin film formation, comprising at least a colloidal solution containing metals serving as materials constituting a ferroelectric thin film, the colloidal solution having an average colloidal particle diameter of 1 to 100 nm, and obtaining a particle size distribution having two or more peaks; a ferroelectric thin film formed from the composition for ferroelectric thin film formation, and a liquid-jet head equipped with a piezoelectric element having the ferroelectric thin film.

Abstract: An electronic component has a structure which prevents corrosion caused by moisture intrusion through an electrode pattern extending inwardly from an edge connecting a side and one of main surfaces of a substrate and, therefore, deterioration of a characteristic rarely occurs over time. The electronic component includes, on the first main surface of the substrate, the first electrode pattern extending inwardly from an edge connecting the side of the substrate and the first main surface of the substrate, the second electrode pattern that is opposite to the end of the first electrode pattern through the gap, and the third electrode pattern that is disposed on the first electrode pattern and the second electrode pattern such that it covers the gap. The third electrode pattern is formed from a metal film that is highly resistant to corrosion, the corrosion resistance of which is superior to that of metal films forming the first electrode pattern and the second electrode pattern.

Abstract: A multi-layer piezoelectric actuator with conductive polymer electrodes is described. The piezoelectric actuator comprises a stack of alternating conductive electrode layers and piezoelectric layers. The conductive electrode layers are comprised of a polymeric electrically conductive material. A device for cooling by forced-air convection may comprise the piezoelectric actuator, a fan blade and an alternating current supply. The piezoelectric actuator coupled with the fan blade and the alternating current supply, which is provided for vibrating the fan blade. A method of cooling by forced-air convection comprises supplying an alternating current to the piezoelectric actuator, wherein the alternating current has a frequency and causes the fan blade to vibrate with the same frequency.

Abstract: A multilayer piezoelectric device has a laminated body having piezoelectric layers laminated in the direction of a given axis “A” and positive and negative internal electrode layers are alternatively disposed between neighboring piezoelectric layers. The device further has a underlying layer disposed on a side of the laminated body and electrically connected to one of the internal electrode layers, a first conductive reinforcing layer joined to the underlying layer, a second conductive reinforcing layer joined to the first conductive reinforcing layer, and a conductive joining material joining the underlying layer to the first conductive reinforcing layer. The second conductive reinforcing layer is not directly joined to the underlying layer by means of the conductive joining material.

Abstract: A piezoelectric element includes: a lower electrode film provided on a substrate; a piezoelectric layer provided on the lower electrode film; and an upper electrode film provided on the piezoelectric layer, wherein the lower electrode film includes columnar crystals of platinum, and an oxide exists in the grain boundaries of the crystals of platinum.

Abstract: To provide a quartz crystal vibrator, an oscillator and an electronic apparatus capable of preventing a bonding electrode from being corroded and easily maintaining soundness of the bonding electrode over a long period of time, a quartz crystal vibrator is provided with a quartz crystal vibrating plate formed by surrounding a quartz crystal vibrating piece by a frame-like portion, a hermetically closed vessel including a lid member and a base member in a plate-like shape for interposing the quartz crystal vibrating plate in a thickness direction, bonding electrodes provided between the lid member and the quartz crystal vibrating plate and between the base member and the quartz crystal vibrating plate and electrically connected to an inner electrode, and a protecting film for protecting the bonding electrode, provided with a recess portion recessed to an inner side of the hermetically closed vessel from an outer edge portion between the lid member and the quartz crystal vibrating plate and an outer edge portio

Abstract: A stacked piezoelectric element obtained by alternately stacking a piezoelectric ceramic layer and an electrode layer, wherein said electrode layer mainly comprises an electrically conducting base metal electrode material, and the region held between the electrode layer positioned at the top of each ceramic layer and the electrode layer positioned at the bottom of each ceramic layer contains a material having no piezoelectricity, in which a constituent element of said material having no piezoelectricity is uniformly dispersed so as not to have local distribution of a distributed strength exceeding 2 times the distributed strength which is distributed in a largest number of places and is not 0.

Abstract: A piezoelectric ceramic composition includes: a composite oxide, as a main component thereof, represented by the composition formula, Pba[(Zn1/3Nb2/3)xTiyZrz]O3, wherein a, x, y and z satisfy the following relations, 0.96?a?1.03, 0.005?x?0.047, 0.42?y?0.53, 0.45?z?0.56, and x+y+z=1, and the following additives in the indicated percentages by mass in relation to the main component, Cu as a first additive, in a content ?, in terms of Cu2O, falling within a range 0<??0.5%; at least one of Li, Co, Ni, Ga and Mg, as a second additive, in a content ?, in terms of carbonate for Li, falling within a range 0<??0.1%, in a content ?1, in terms of oxide for Co, Ni and Ga, falling within a range 0<?1?0.2%, and in a content ?2, in terms of carbonate for Mg, falling within a range 0<?2?0.2%; and at least one of Ta, Nb, W and Sb, as a third additive, in a content ?, in terms of oxide, falling within a range 0<??0.6%.

Abstract: Disclosed is a piezoelectric/electrostrictive membrane sensor 20, wherein a piezoelectric/electrostrictive body 5 contains an alkali metal or an alkaline earth metal, and a sulfide and the main component of terminal electrodes 18, 19 are contained near the surface of the piezoelectric/electrostrictive body 5. In this piezoelectric/electrostrictive membrane sensor 20, a voltage equal to or higher than a withstand voltage is hardly applied to the piezoelectric/electrostrictive body 5. Consequently, the sensor is prevented from dielectric breakdown. In addition, the sensor is hardly electrostatically charged, and thus prevented from electrostatic discharge damage and attraction of dust, dirt or the like.

Abstract: A composite for a transducer facilitates an increased actuation force as compared to similar prior art composites for transducers. In accordance with the present invention, the composite also facilitates increased compliance of the transducer in one direction and an improved reaction time as compared to similar prior art composites for transducers, as well as provides an increased lifetime of the transducer in which it is applied.

Abstract: Devices are disclosed that include a piezoelectric vibrating piece; a glass base and lid form a package enclosing the piezoelectric vibrating piece. The piece has first and second electrodes. The base has first and second opposing surfaces. The base mounts the piezoelectric vibrating piece, and the lid seals the piezoelectric vibrating piece in the package. The base includes first and second metal wires, extending therethrough, whose ends are denuded to the first and second surfaces and connected to the first and second electrodes, respectively. In disclosed methods for making the packaged devices, such as piezoelectric oscillators, multiple packaged devices are made simultaneously by stacking and simultaneously bonding respective wafers on which glass bases, piezoelectric vibrating pieces, and lids have been formed.

Abstract: Disclosed are electroactive polymer fibers, processes of preparing electroactive polymer fibers, and devices containing electroactive polymer fibers. Devices can be used as actuators and sensors, generators and transducers. Applications include inter alia artificial muscles, prosthetics and robotics.

Abstract: An electrical component includes a base. The base is made of a sintered ceramic, and at least one electrode that is inside the sintered ceramic. The at least one electrode has a surface that contains metal. The surface is adjacent to the sintered ceramic. In the component, a redox potential of the metal is less than or equal to a redox potential of copper.

Abstract: Disclosed are methods of making multi-element, finely divided, alloy powders containing silver and at least two non-silver containing elements and the uses of these powders in ceramic piezoelectric devices.

Abstract: A ferroelectric film containing a perovskite type oxide that is represented by Formula (P) is formed on a substrate by a sputtering technique under conditions satisfying Formulas (1) and (2), or Formulas (3) and (4): (Pb1?x+?Mx)(ZryTi1?y)Oz ??(P) wherein M is at least one kind of element selected from Bi and lanthanide elements, 0.05?x?0.4, and 0<y?0.7, the standard composition being such that ?=0, and z=3, 400?Ts(° C.)?475 ??(1) 20?Vs(V)?50 ??(2), 475?Ts(° C.)?600 ??(3) Vs(V)?40 ??(4), wherein Ts (° C.) is the film formation temperature, and Vs (V) is the plasma potential in the plasma at the time of the film formation.

Abstract: A piezoelectric assembly includes a piezoelectric substrate that has a top surface, a bottom surface, and at least one side surface. A top electrode is defined on the top surface and a first aperture is defined in the top electrode. A bottom electrode is disposed on the bottom surface. The electrodes are formed from a thin film metal. A first thick film bond pad is disposed in the first aperture and is in contact with the piezoelectric substrate. The first thick film bond pad is in electrical contact with the top electrode. In further embodiments, a second thick film bond pad is disposed on either the top surface or in a second aperture defined in the bottom electrode.

Abstract: A piezoelectric ceramic composition includes: a composite oxide, as a main component thereof, represented by the composition formula, Pba[(Zn1/3Nb2/3)xTiyZrz]O3, wherein a, x, y and z satisfy the following relations, 0.96?a?1.03, 0.005?x?0.047, 0.42?y?0.53, 0.45?z?0.56, and x+y+z=1; and the following additives in the indicated percentages by mass in relation to the main component, Cu as a first additive, in a content ?, in terms of Cu2O, falling within a range 0<??0.5%; at least one of Dy, Nd, Eu, Gd, Tb, Ho and Er, as a second additive, in a content ?, in terms of oxide, falling within a range 0<??0.3%; and at least one of Ta, Nb, W and Sb, as a third additive, in a content ?, in terms of oxide, falling within a range 0<??0.6%.

Abstract: A multilayer piezoelectric element has a laminate body in which a plurality of piezoelectric bodies and a plurality of internal electrodes are alternately laminated and sintered. The plurality of internal electrodes comprise a first electrode and a second electrode. The laminate body has an active portion in which the first electrode and the second electrode are arranged to overlap in a laminate direction of the laminate body, and inactive portions in which the first electrode and the second electrode are arranged not to overlap in the laminate direction of the laminate body. The inactive portions are provided on both sides of the active portion. The inactive portions are provided with a metal oxide layer made of a material having a melting point higher than a sintering temperature of the piezoelectric bodies and being soluble in the piezoelectric bodies.

Abstract: To provide a multi-layer piezoelectric device having excellent durability in which the amount of displacement does not change even when the piezoelectric actuator is subjected to continuous operation over a long period of time under a high voltage and a high pressure, the multi-layer piezoelectric device comprises a stack formed by stacking piezoelectric layers and internal electrodes alternately one on another and external electrodes formed on a first side face and on a second side face of the stack, wherein one of the adjacent internal electrodes is connected to the external electrode formed on the first side face and the other internal electrode is connected to the external electrode formed on the second side face, while content of alkali metal in a range from 5 ppm to 300 ppm is contained.

Abstract: To provide a multi-layer piezoelectric device having excellent durability in which the amount of displacement does not change even when the piezoelectric actuator is subjected to continuous operation over a long period of time under a high voltage and a high pressure, the multi-layer piezoelectric device comprises a stack formed by stacking piezoelectric layers and internal electrodes alternately one on another and external electrodes formed on a first side face and on a second side face of the stack, wherein one of the adjacent internal electrodes is connected to the external electrode formed on the first side face and the other internal electrode is connected to the external electrode formed on the second side face, while content of alkali metal in a range from 5 ppm to 300 ppm is contained.

Abstract: An actuator for a deformable optical component includes a stack of ferroelectric layers, a plurality of electrodes for applying a voltage across each layer; every other electrode extending to an associated first conductor path and interstitial electrodes extending to an associated second conductor path the first conductor path or receiving a first conductor lead, the second conductor path for receiving a second conductor lead to contact the respective electrodes.

Abstract: A piezoelectric thin film resonator has a substrate and a piezoelectric layered structure including a lower electrode, piezoelectric aluminum nitride thin film with c-axis orientation and upper electrode formed on the substrate in this order. The lower electrode are made of a metal thin film including a layer containing ruthenium as a major component having a full-width half maximum (FWHM) of a rocking curve of a (0002) diffraction peak of ruthenium of 3.0° or less. The piezoelectric aluminum nitride thin film formed on the lower electrode has a full-width half maximum (FWHM) of a rocking curve of a (0002) diffraction peak of 2.0° or less.

Abstract: A piezoelectric thin-film resonator includes a lower electrode formed on a substrate to define a rounded dome-shaped cavity between the lower electrode and the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. A membrane region is an overlapping region of the lower electrode and the upper electrode interposing the piezoelectric film and a projected area of the cavity onto the substrate includes the membrane region.

Abstract: A piezoelectric actuator 3 includes a metallic vibration plate 30, an insulating layer 31, a plurality of individual electrodes 32, a piezoelectric layer 33 and a common electrode 34. The insulating layer 31 is formed on the top surface of the vibration plate 30. The individual electrodes 32 are formed on the top surface of the insulating layer 31. The piezoelectric layer 33 is formed on the top surfaces of the individual electrodes 32. The common electrode 34 is formed on the top surface of the piezoelectric layer 33 over the individual electrodes 32. A plurality of terminals 36 and a plurality of wirings 35 are formed on the top surface of the insulating layer 31. Each of the terminals 36 is associated with one of the individual electrodes 32. Each of the wirings 35 connects one of the individual electrodes 32 and the associated terminal 36.

Abstract: In a piezoelectric element, an adhesive layer 12 is provided on a substrate 11, a first electrode layer 14 made of a noble metal containing titanium or titanium oxide is provided on the adhesive layer 12, and an orientation control layer 15 that is preferentially oriented along a (100) or (001) plane is provided on the first electrode layer 14. In the vicinity of a surface of the orientation control layer 15 that is closer to the first electrode layer 14, a (100)- or (001)-oriented region extends over titanium or titanium oxide located on one surface of the first electrode layer 14 that is closer to the orientation control layer 15, and the cross-sectional area of the region in the direction perpendicular to the thickness direction gradually increases in the direction away from the first electrode layer 14 toward the opposite side. Further, a piezoelectric layer 16 that is preferentially oriented along a (001) plane is provided on the orientation control layer 15.

Abstract: The present invention is to provide a piezoelectric element, a method of manufacturing the same, a liquid-jet head, a method of manufacturing the same, and a liquid-jet apparatus, all of which prevent an inter-layer detachment in a lower electrode.

Abstract: Holographic optical traps using the forces exerted by computer-generated holograms to trap, move and otherwise transform mesoscopically textured materials. The efficacy of the present invention is based upon the quality and nature of the diffractive optical element used to create the traps and dynamically use them. Further a landscape of potential energy sites can be created and used to manipulate, sort and process objects.

Abstract: Described herein are transducers, their use and fabrication. The transducers convert between mechanical and electrical energy. The present invention further relates to compliant electrodes that conform to the shape of a polymer included in a transducer.

Abstract: An inertial driving actuator includes a fixing member, a moving element that is fixed to the fixing member and generates a small displacement by extension and contraction, an oscillation substrate that is fixed to the moving element and is moved linearly reciprocally by the small displacement, and a moving body that is moved by reciprocal movement of the oscillation substrate. The moving body has a first driving electrode. The oscillation substrate has a second driving electrode and a detection electrode, the area of the facing portion of the detection and first driving electrodes changing continuously as the moving body moves. The actuator further includes a frictional force controller that controls a frictional force generated between the oscillation substrate and moving body, and a position detector that detects the position of the moving body from the electrostatic capacitance of the facing portion of the first driving and detection electrodes.

Abstract: There is provided with a piezoelectric transformer which does not require a marking operation, is easy to manufacture, and is capable of reducing costs. After the piezoelectric transformer is manufactured, a shape of secondary side electrodes on the outer end is made so that a polarization direction can be recognized at the time of printing the secondary side electrodes without marking by a separate step to recognize the polarity on the primary side.

Abstract: A SAW device includes a LiNbO3 single crystal piezoelectric substrate having an orientation defined by Euler angles (?,?,?), with angle ? ranging from ?5° to +5°, angle ? ranging from about ?74° to about ?65°, and angle ? ranging from ?5° to +5°. Electrode patterns on a surface of the substrate form element resonators having a metallization ratio ranging from about 0.3 to about 0.8 and electrode thicknesses ranging from about 12% to about 17.5% of an acoustic wavelength of a strongly coupled non-leaky surface acoustic wave, excited on the surface of the substrate, if Al is used as electrode material, and in a range from about 6% to about 10% of an acoustic wavelength, if Cu is used as electrode material. Such orientations simultaneously combined with an optimized electromechanical coupling of spurious surface acoustic mode provide for improved performance in RF applications with a widened passband.

Abstract: A method for driving an actuator. The method includes applying an electrical potential across an electrostrictive material relative to a counterelectrode disposed within an electrolyte, thereby creating a double layer potential across a region of enhanced ionic concentration. A current flowing between the electorostrictive material and the counterelectrode is measured. A portion of the applied potential appearing across the electrolyte and counterelectrode is calculated and subtracted from the applied potential to obtain an estimated double layer potential. The applied electrical potential is adjusted to obtain a specified double layer potential.

Abstract: To provide an actuator which is easily made a small size and flexible, and has a large displacement. The actuator comprises a rod-shaped actuator element, having one axial end thereof fixed, including a dielectric film made of a dielectric elastomer and a plurality of electrodes arranged via the dielectric film, in the actuator element, the dielectric film extends as a voltage applied across the electrodes becomes large, and a load member connected to the other axial end of the actuator element and fixed in a state in which the actuator element is permitted to be extended axially, characterized in that making large the voltage applied across the electrodes causes the dielectric film to be extended, whereby the actuator element is extended axially according to the tension of the load member.

Abstract: A multi-layer piezoelectric actuator with conductive polymer electrodes is described. The piezoelectric actuator comprises a stack of alternating conductive electrode layers and piezoelectric layers. The conductive electrode layers are comprised of a polymeric electrically conductive material. A device for cooling by forced-air convection may comprise the piezoelectric actuator, a fan blade and an alternating current supply. The piezoelectric actuator coupled with the fan blade and the alternating current supply, which is provided for vibrating the fan blade. A method of cooling by forced-air convection comprises supplying an alternating current to the piezoelectric actuator, wherein the alternating current has a frequency and causes the fan blade to vibrate with the same frequency.

Abstract: The invention proposes a piezoelectric actuator, for example for a piezoelectric injector or for actuating another mechanical component. The actuator has a piezoelectric element formed of a multilayer structure of piezoelectric layers. Inner electrodes are arranged between the piezoelectric layers in the direction of action and can alternately have a positive and a negative electric charge applied to them. A mutual contact-connection of the inner electrodes is established by means of which contact elements each having a core electrode and an electrically conductive elastic sheath. The contact elements are located in longitudinal inner bores of the piezoelectric actuator, perpendicularly to the layer structure. The core electrodes are provided with a conductive elastomer, which can be applied before assembly. The conductive elastomer has a predefined notch geometry in the form of a sheath in order to increase elasticity.

Abstract: A piezoelectric component (1) has at least one monolithic piezo element (10) having an electrode layer (101), at least one further electrode layer (102), at least one piezoceramic layer (103) disposed between the electrode layers and at least one predetermined breaking point (100) which, in the event of mechanical overload of the piezo element, leads to the formation of a specific crack (110) in the monolithic piezo element, wherein the predetermined breaking point includes the electrode layer. The component is, for example, a piezoelectric actuator with a monolithic actuator body (2) in which piezo elements with predetermined breaking points and further piezo elements (11) without predetermined breaking points are arranged one on top of the other and sintered collectively.

Abstract: A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal.