Abstract: There is provided an actuator that can deform as an electrolyte moves, wherein at least one of a pair of electrode layers contains polymer fibers, and the polymer fibers contain an electroconductive material and are porous.

Abstract: This disclosure provides systems, apparatus, and devices and methods of fabrication for electromechanical devices. In one implementation, an apparatus includes a metal proof mass and a piezoelectric component as part of a MEMS device. Such apparatus can be particularly useful for MEMS gyroscope devices. For instance, the metal proof mass, which may have a density several times larger than that of silicon, is capable of reducing the quadrature and bias error in a MEMS gyroscope device, and capable of increasing the sensitivity of the MEMS gyroscope device.

Abstract: A ceramic electronic component includes a substantially rectangular ceramic element assembly, a first external electrode, and a second external electrode. The first external electrode includes at least one plating film including a first plating film disposed directly on the ceramic element assembly from outside. Likewise, the second external electrode includes at least one plating film including a second plating film disposed directly on the ceramic element assembly from outside. The first and second plating films each have a surface area per unit area equal to or larger than about 1.02 in plan view.

Abstract: Provided is a piezoelectric element including: an electrode portion including a piezoelectric layer and an electrode layer that are laminated; and a non-electrode portion that is in contact with the electrode portion and includes a piezoelectric layer without an electrode layer, in which the non-electrode portion includes a region having a density smaller than a density of the piezoelectric layer of the electrode portion.

Abstract: A multi-layer piezoelectric element includes a columnar stacked body including an active portion including piezoelectric layers and internal electrode layers alternately laminated, and inactive portions including piezoelectric layers laminated, the inactive portions arranged at both ends in a stacked direction of the active portion; and a pair of external electrodes arranged on side faces of the columnar stacked body, the pair of external electrodes electrically connected to the internal electrode layers alternately. In at least one interlayer portion of the inactive portions, there are metal particles having a particle size smaller than that of piezoelectric ceramic particles forming the piezoelectric layers of the inactive portions, and the metal particles are scattered in a range including a region in which the internal electrode layers overlap each other when viewed in the stacked direction of the columnar stacked body.

Abstract: A piezoelectric sensing device is described for measuring material thickness of target such as pipes, tubes, and other conduits that carry fluids. The piezoelectric sensing device comprises a substrate such as a flexible circuit material, a piezoceramic element, and a solder layer disposed therebetween. These features are arranged in manner that provides a low-profile measurement device suitable for high-temperature applications such as those applications in which the temperature exceeds 120° C. Embodiments of the piezoelectric sensing device can be configured for use as stand-alone units separately located on the target or for use as a string of sensing elements coupled together by way of the flexible circuit material.

Abstract: A polymer actuator includes: a pair of electrode layers made of an ionic liquid, a polymer, and carbon nanoparticles; and an electrolyte layer provided between the pair of electrode layers, wherein the carbon nanoparticles are a mixture of carbon nanotubes (hereinafter, referred to as CNTs) and carbon nanohorns (hereinafter, referred to as CNHs), a ratio by weight of the carbon nanoparticles to the total weight of the ionic liquid, the polymer, and the carbon nanoparticles contained in the pair of electrodes is equal to or higher than 25 wt % and equal to or lower than 80 wt %, a mixing ratio of the CNTs to the CNHs contained in the carbon particles is in a range of (CNT):(CNH)=1:1 to 3:1, and a ratio by weight of the polymer is equal to or higher than 17.7 wt % and equal to or lower than 30.2 wt %.

Abstract: Dielectric elastomer or electroactive polymer film transducers configured to minimize high electrical field gradients that can lead to partial discharge and corona.

Abstract: An electrical connecting structure for a piezoelectric element enables wiring to the piezoelectric element to be carried out without deteriorating the productivity and reliability of the piezoelectric element. The electrical connecting structure is formed by facing a common electrode of the piezoelectric element to a terminal that supplies power to the common electrode and by injecting a conductive adhesive into a through hole, which is formed substantially at the center of the piezoelectric element, from an opening of the through hole that is on the opposite side of the common electrode, thereby securing electrical connection between the terminal and the common electrode of the piezoelectric element.

Abstract: An electronic device has an electronic signal source electrically connected to a signal routing circuit, an electrically activated transducer to receive electronic signals through the signal routing circuit, and an anisotropic conductive film to provide electrical continuity between the signal routing circuit and the transducer, the anisotropic conductive film having material removed adjacent the transducer to reduce mechanical loading of the transducer.

Abstract: A surface acoustic wave device, includes: an interdigital transducer serving as an electrode pattern to excite a Rayleigh surface acoustic wave, the interdigital transducer including a comb-tooth-shaped electrode having a plurality of electrode fingers; a piezoelectric substrate on which the interdigital transducer is formed, the piezoelectric substrate being made of a quartz substrate that is cut out at a cut angle represented by an Euler angle representation (?, ?, ?) of (0°, 95°???155°, 33°?|?|?46°); electrode finger grooves formed between the electrode fingers of the comb-tooth-shaped electrode; and electrode finger bases being quartz portions sandwiched between the electrode finger grooves and having upper surfaces on which the electrode fingers are positioned. The surface acoustic wave device provides an excitation in an upper limit mode of a stop band of the surface acoustic wave.

Abstract: A vibrator element includes a base section, vibration arms, and excitation electrodes provided to the respective vibration arms, the excitation electrodes each include a first electrode disposed on a principal surface side of the vibration arm, a second electrode disposed so as to be opposed to the first electrode, and a piezoelectric body extending between the first electrode and the second electrode, and ITO is used as at least one of the first electrode and the second electrode.

Abstract: In a piezoelectric resonator plate, a substrate having a main face formed in a rectangular shape is provided with a vibration portion and a joining portion that are integrated with each other, the vibration portion including a vibration region configured by forming a pair of excitation electrodes, and the joining portion having formed therein a pair of terminal electrodes that is joined to an external portion. The terminal electrodes in the pair each have a conductive bump formed therein and are electrically connected respectively to the excitation electrodes in the pair. Also, the substrate includes a post portion formed convexly at a position where the pair of terminal electrodes is formed.

Abstract: A ceramic electronic component includes a ceramic body, a first external electrode, and a second external electrode. The first and second external electrodes are disposed on a principal surface, which is directed to the mounting surface side, of the ceramic body so as to face each other with a predetermined gap region therebetween. The external electrodes each include a base layer and a Cu plating layer which covers the base layer. In each of the first and second external electrodes, an expression 0.1?t/d?0.5 is satisfied, where t is a thickness of the Cu plating layer at an end of the base layer on a gap region side, and d is a distance from the end of the base layer on the gap region side to an end of the Cu plating layer on the gap region side.

Abstract: There are provided an electrode structure of a piezoelectric resonator and a piezoelectric resonator including the same. The piezoelectric resonator includes: a piezoelectric plate vibrated by an electrical signal; and first and second electrodes having first to fourth layers stacked on both surfaces thereof, wherein the first and third layers are made of at least one selected from the group consisting of Ti, Ni, Cr, an alloy including Ti and an alloy including Cr and the second and fourth layers are made of Ag or an alloy including Ag.

Abstract: There are provided a ceramic composition for a piezoelectric actuator allowing for low-temperature sintering and a method of manufacturing the same, and a piezoelectric actuator. A Cuo powder and an MnO powder as an sintring additive are added to a PZT-PZN piezoelectric ceramic powder to allow low-temperature sintering at a temperature of 950° C. or lower, and the usage of high-priced palladium (Pd) used as materials for high-temperature inner electrodes is decreased due to lowering of the sintering temperature, and thereby to achieve cost reduction.

Abstract: Provided are an electrode having high conductivity and high durability to driving deformation, and an actuator including the electrode, the actuator having a large amount of displacement. The actuator includes a pair of electrodes arranged oppositely and an intermediate layer arranged between the pair of electrodes, the intermediate layer containing an electrolyte, and the actuator being deformed by applying a voltage to the pair of electrodes, in which at least one of the pair of electrodes includes a porous structure containing a first conductive material and having conductivity, a second conductive material, and an electrolyte, pores of the porous structure being filled with the second conductive material and the electrolyte.

Abstract: A piezoelectric element has a first electrode containing platinum, a piezoelectric layer formed above the first electrode, and a second electrode formed on the piezoelectric layer. The piezoelectric layer is composed of an oxide containing potassium, sodium, niobium, bismuth, and iron.

Abstract: The present invention provides a flexible conductive crosslinked body excellent in durability having a small influence of a reaction residue after the crosslinking on an object to which the conductive crosslinked body adheres, and a production process of the flexible conductive crosslinked body. The conductive crosslinked body is synthesized from a conductive composition containing a rubber polymer, an organic metal compound, and a conducting agent and has a crosslinked structure. The production process of the conductive crosslinked body includes: a mixed solution preparing step for preparing a mixed solution in which the rubber polymer, the conducting agent, and the organic metal compound are mixed in a solvent capable of dissolving the rubber polymer and capable of chelating the organic metal compound; and a crosslinking step for removing the solvent from the mixed solution to allow a crosslinking reaction to proceed.

Abstract: A multi-layer piezoelectric element having higher durability which experience less decrease in the amount of displacement even when operated continuously over a long period of time under a high pressure and a high voltage is provided. The multi-layer piezoelectric element comprises a plurality of piezoelectric layers and a plurality of internal electrode layers, wherein the piezoelectric layers and the internal electrode layers are stacked alternately one on another, and at least one of the plurality of internal electrode layers contains at least one nitride, titanium nitride or zirconium nitride.

Abstract: In a method for the production of a gradient encapsulation layer 20 on a piezoelectric actuator 1, based on this gradient encapsulation layer 20, the piezoelectric actuator 1 does not 5 require an additional housing-like enveloping structure in order to be protected externally. The gradient encapsulation layer 20 is produced by cold gas spraying of particles having different material properties.

Abstract: A piezoelectric element includes a substrate, and a lower electrode layer, a piezoelectric layer, and an upper electrode layer sequentially formed on the substrate. The substrate has a linear thermal expansion coefficient higher than that of the piezoelectric layer, and the piezoelectric layer includes a polycrystalline body having an in-plane stress in a compressive direction. Thus, the piezoelectric element realizes the piezoelectric layer having a high orientation in a polarization axis direction, high proportionality of a displacement amount with respect to an applied voltage, and a large absolute value of the displacement amount.

Abstract: In a particular embodiment, a system to dissipate heat in an information handling system includes a first heat-generating component adapted to process first data and a second heat-generating component adapted to process second data. The system also includes a cooling fluid guide including an electroactive material. The cooling fluid guide is adapted to change from a first shape to a second shape, in response to receiving a trigger voltage or in response to no longer receiving the trigger voltage. The system also includes a controller adapted to detect a data load processed at the second heat-generating component and, in response to detecting the data load, to cause the trigger voltage to be received at, or no longer received at, the cooling fluid guide. The cooling fluid guide is adapted to direct an increased portion of cooling fluid toward the first heat-generating component when the cooling fluid guide is in a form of the second shape, as compared to the first shape.

Abstract: A piezoelectric element including a plurality of stacked piezoelectric sheets, wherein the stretching axis of a first piezoelectric sheet and the stretching axis of a second piezoelectric sheet of the plurality of piezoelectric sheets are oriented in different directions from each other. Preferably, the stretching axis of the first piezoelectric sheet and the stretching axis of the second piezoelectric sheet are intersected at an angle of 90 degrees.

Abstract: To provide a conductive film that is flexible, extendable and contractible, and for which the electrical resistance hardly increases even when the conductive film is extended. The conductive film contains an elastomer and metallic filler particles, and satisfies a condition (A) [an average value of reference numbers is 0.8 (1/?m) or more, or the metallic filler particles include flake-like metallic filler particles having a thickness of 1 ?m or less and an aspect ratio of 26 or more and the average value of the reference numbers is 0.4 (1/?m) or more] and a condition (B) [a number of unit areas for which an area percentage of the elastomer is 60% or more is 20 or more], the condition (A) being a conductivity indicator and the condition (B) being a flexibility indicator.

Abstract: Provided are a piezoelectric thin film including a lead-free ferroelectric material and exhibiting high piezoelectric performance comparable to that of PZT, and a method of manufacturing the piezoelectric thin film. The piezoelectric thin film of the present invention has a multilayer structure in which a metal electrode film having a plane orientation of (100), a (Bi,Na)TiO3 film, and a (Bi,Na,Ba) TiO3 film having a plane orientation of (001) are laminated in this order. The piezoelectric thin film of the present invention can be applied to a wide range of fields and uses. For example, with the piezoelectric thin film of the present invention, an angular velocity sensor of the present invention having high sensitivity and a piezoelectric generating element of the present invention having excellent power generation characteristics can be constructed.

Abstract: Disclosed are a ceramic composition for a piezoelectric actuator and a piezoelectric actuator including the same. The ceramic composition for a piezoelectric actuator includes piezoelectric ceramic powder expressed by a chemical formula, (1?x)Pb(Zr(1-y)Tiy)O3-xPb(Ni1/3Nb2/3)O3, where, x ranges from 0.25 to 0.4, and y ranges from 0.4 to 0.7. The ceramic composition for a piezoelectric actuator permits low-temperature firing while implementing superior piezoelectric properties.

Abstract: A piezoelectric element comprising an electrode film and a piezoelectric layer provided above the electrode film. The electrode film is preferentially oriented with (111) surface and contains platinum as the main component. The electrode film has a rhombohedral system.

Abstract: The present invention relates to a ceramic composition for a piezoelectric actuator and a piezoelectric actuator comprising the same. The ceramic composition for piezoelectric actuator includes a piezoelectric ceramic powder expressed by a Chemical Formula: (1-x)Pb(Zr(1-y)Tiy)O3-xPb(Ni1/3Nb2/3)O3, wherein x is 0.25 to 0.4 and y is 0.4 to 0.7; and a CuO powder and a PbO powder forming a liquid-phase compound at a sintering temperature or less of the piezoelectric ceramic powder. The ceramic composition for a piezoelectric actuator according to the present invention exhibits excellent piezoelectric characteristics and allows for low-temperature firing.

Abstract: A piezoelectric element comprises a piezoelectric member made of a complex oxide and an electrode which contains platinum. The complex oxide contains potassium sodium niobate and bismuth ferrate. The molar ratio of the bismuth ferrate to the sum of the potassium sodium niobate and the bismuth ferrate is in the range of 3% to 10%. And the molar ratio of the sum of potassium and sodium to niobium is in the range of 103% to 115%.

Abstract: A piezoelectric element includes a first electrode, a piezoelectric film disposed on the first electrode, and a second electrode disposed on the piezoelectric film. The piezoelectric film is composed of piezoelectric material that is lead free and formed by mixing 100(1?x) % of material A having a spontaneous polarization of 0.5 C/m2 or greater at 25° C. and 100 x % of material B having piezoelectric characteristics and a dielectric constant of 1000 or greater at 25° C., wherein (1?x)Tc(A)+x Tc(B)?300° C., where Tc(A) is the Curie temperature of the material A and Tc(B) is the Curie temperature of the material B.

Abstract: In a sheet-type piezoelectric vibrator provided with a piezoelectric sheet made from a transparent organic polymer and electrodes formed on respective main surfaces that are opposite to each other of the piezoelectric sheet, an electrode material that is effectively used for making the vibrator colorless is provided. The first electrodes formed on one of the main surfaces of piezoelectric sheets are made of zinc oxide electrode layers, each mainly containing zinc oxide, and second electrodes formed on the other main surface of the piezoelectric sheets include polythiophene electrode layers made from a conductive polymer containing thiophene in a molecule structure thereof. Although the zinc oxide electrode layer is transparent, it is slightly yellowish, while, on the other hand, although the polythiophene electrode layer is also transparent, it is slightly bluish.

Abstract: A wiring connecting structure for a piezoelectric element is capable of performing wiring to the piezoelectric element without deteriorating the quality and reliability of the piezoelectric element. The piezoelectric element is arranged between a base and head of an object, to minutely move the head in a sway direction according to deformation that occurs on the piezoelectric element in response to a voltage applied from a terminal to an electrode of the piezoelectric element. The wiring connecting structure includes first and second liquid stoppers arranged between the terminal and the electrode, the second liquid stopper being arranged outside the first liquid stopper. The wiring connecting structure also includes an adhesive part to connect the electrode to the terminal. The adhesive part has a conductive adhesive part defined by the first liquid stopper and a sealing adhesive part defined by the second liquid stopper. The sealing adhesive part seals the first liquid stopper and conductive adhesive part.

Abstract: A piezoceramic transducer (PZT transducer) and a method for manufacturing the same are provided. The PZT transducer includes a piezoceramic substrate and an electrode unit. The piezoceramic substrate has a first surface and a second surface opposite the first surface, and has a mechanical quality factor (Qm) greater than 1400. The electrode unit has a first electrode and a second electrode. The first electrode is disposed on the first surface and has a first diameter. The second electrode covers the second surface and extends to cover a part of the surface at a periphery of the first surface, and the part of the second electrode covering the second surface has a second diameter. The ratio of the first diameter to the second diameter is 0.498 to 0.502. The PZT transducer has a large mist amount and a long service life.

Abstract: A liquid-ejecting head includes a pressure-generating chamber communicatively connected to a nozzle opening and also includes a piezoelectric transducer including a first electrode, a piezoelectric layer disposed on the first electrode, and a second electrode disposed on the piezoelectric layer. The first electrode contains platinum and titanium oxide with a rutile content of 76.5 to 100 mole percent.

Abstract: A piezoelectric element includes a first electrode, a first multilayer composite disposed on the first electrode, a second multilayer composite disposed on the first electrode with a distance from the first multilayer composite, and a covering layer covering the side surfaces of the first and second multilayer composites and the surface of the first electrode between the first multilayer composite and the second multilayer composite. The first and second multilayer composites each include a piezoelectric layer and a second electrode over the piezoelectric layer. The first electrode contains a metal that can react with chlorine, and has at least one of a bump and a dip at the surface thereof between the first multilayer composite and the second multilayer composite.

Abstract: The microacoustic component has a substrate that has at least one layer (composed of a dielectric or piezoelectric material, and a metallic strip structure. The layer is composed of a dielectric or piezoelectric material and/or the metallic strip structure have/has been produced or can be produced by the atomic layer deposition method.

Abstract: A first lead electrode containing nickel and chromium contacts a second upper electrode containing titanium. Here, since a difference between the normal electrode potential of nickel and chromium and the normal electrode potential of titanium is smaller than a difference between the normal electrode potential of nickel and chromium and the normal electrode potential of iridium, electric corrosion can be made difficult to occur as compared with the case where the first lead electrode containing nickel and chromium contacts a first upper electrode containing iridium. Therefore, a piezoelectric element can be obtained in which an increase in resistance due to the narrowing of the contact area between an upper electrode and a lead electrode for upper electrode or the separation of the lead electrode for upper electrode can be suppressed and which can be driven by a given voltage.

Abstract: A multi-layer piezoelectric element having high durability which allows it to increase the amount of displacement of a piezoelectric actuator under high voltage and high pressure and does not undergo a change in the amount of displacement during continuous operation in a high electric field and under a high pressure over a long time period is provided. The multi-layer piezoelectric element comprises a stack of at least one piezoelectric layer and a plurality of internal electrodes consisting of first and second internal electrodes placed one on another, a first external electrode formed on a first side face of the stack and connected to the first internal electrode and a second external electrode formed on a second side face of the stack and connected to the second internal electrode, wherein the bonding strength between the piezoelectric layer and the internal electrode is weaker than the bending strength of the piezoelectric layer.

Abstract: Energy harvesting elements or membranes are provided that use a layer of electrodes with a mixture of carbon nanotubes (CNT). The energy harvesting device of this type can be used as in sensor-based system in which on application of a bending load, the energy harvesting device produces a voltage across the electrodes. The energy harvesting device may include an electrode coating including carbon nanotubes (CNT) substantially homogenously dispersed in epoxy resin system to form a CNT-epoxy electrode coating. The CNT-epoxy electrode can be realized by dispersing about 5% CNT (by weight) in an epoxy-resin system, followed by mixing the system to achieve a near-homogenous dispersion resulting in a CNT-epoxy mixture. The CNT-epoxy mixture can then be uniformly coated on surfaces of a polymer to form electrodes.

Abstract: A temperature compensated crystal oscillator is mounted to a board. A quartz resonator includes a quartz chip that generates an oscillation frequency. A resistive element is formed on the quartz chip. A temperature sensor is located closer to the board than the quartz resonator. The compensation part compensates for a change in the oscillation frequency generated by the quartz resonator based on a value of a current flowing in the resistive element and an output of the temperature sensor.

Abstract: Methods are disclosed for manufacturing piezoelectric vibrating pieces and devices including such pieces. According to an embodiment of the method, a piezoelectric vibrating piece is produced from a piezoelectric wafer. To form the piece, a profile of the piezoelectric vibrating piece is formed in a piezoelectric wafer. A first metal film (chromium; Cr) is formed on the surface of the piezoelectric piece. The chromium film is surface-oxidized to form a film having Cr foundation layer and an oxidized surface. A second metal film (gold; Au) is formed on the oxidized surface. Then, in selected regions not destined to become electrodes, the second metal film is removed, leaving electrode patterns at designated regions of the piezoelectric vibrating piece.

Abstract: The present invention provides a piezoelectric thin film comprising an electrode film with a (001) orientation, a (NaxBi0.5)TiO0.5x+2.75—BaTiO3 film with a (001) orientation (x represents not less than 0.29 and not more than 0.4) and a (Na,Bi)TiO3—BaTiO3 piezoelectric layer, the electrode film, the (NaxBi0.5)TiO0.5x+2.75—BaTiO3 film, and the (Na,Bi)TiO3—BaTiO3 piezoelectric layer being laminated in this order. The lead-free piezoelectric thin film of the present invention has low dielectric loss and high piezoelectric performance.

Abstract: A multilayer piezo actuator is specified, in which piezoelectric layers and electrode layers are arranged to form a stack. Electrical contact is made with the electrode layers via two external electrodes which consist of wires which are woven with one another. The external electrodes are in this case connected over their entire area to the side surfaces of the stack. A method is also specified for fitting an external electrode.

Abstract: A multilayer piezoelectric actuator and a liquid discharge head are provided which are equipped with dense piezoelectric ceramics having improved insulation performance. The multilayer piezoelectric actuator comprises a multilayered body comprising a plurality of piezoelectric ceramic layers containing a PZT phase as a main crystal phase; and an electrode layer containing Ag, which is disposed at least one of on the surface and in the interior of the multilayered body. A lattice constant c of c-axis of the PZT phase is 0.4085 nm to 0.4100 nm, and a ratio of the lattice constant c of the c-axis of the PZT phase and a lattice constant a of a-axis, namely, the ratio c/a, is 1.011 or more. A second phase containing Ag different from the PZT phase is not substantially contained in the piezoelectric ceramic layer. A Zn2SiO4 phase is contained at grain boundaries of the PZT phase, and a Pb2SiO4 phase is not substantially contained at the grain boundaries of the PZT phase.

Abstract: A component that operates with acoustic waves includes a substrate including a piezoelectric material, a first electrode plane in which bottom electrode structures including an acoustically active bottom electrode are arranged directly on the substrate, and a top electrode arranged above the bottom electrode plane and which is electrically conductively connected to the bottom electrode structures, wherein excitation of the acoustic waves during operation of the component is effected exclusively or predominantly through the bottom electrode structures.

Abstract: A contour resonator reducing fluctuation of resonance frequency due to variety of a film thickness of an excitation electrode is provided. A counter resonator includes a quartz substrate and excitation electrodes respectively formed on front and back surfaces of the quartz substrate. There is a range where a frequency sensitivity with respect to an electrode film thickness is smaller than that in related art when a ratio Fe/Fb between a contour vibration frequency Fe of the excitation electrodes and a contour vibration frequency Fb of the substrate is larger than 0.69. That is, fluctuation of the contour vibration frequency with respect to variety of the electrode film thickness can be made small substantially.

Abstract: A surface acoustic wave device, includes: an interdigital transducer serving as an electrode pattern to excite a Rayleigh surface acoustic wave, the interdigital transducer including a comb-tooth-shaped electrode having a plurality of electrode fingers; a piezoelectric substrate on which the interdigital transducer is formed, the piezoelectric substrate being made of a quartz substrate that is cut out at a cut angle represented by an Euler angle representation (?, ?, ?) of (0°, 95°???155°, 33°?|?|?46°); electrode finger grooves formed between the electrode fingers of the comb-tooth-shaped electrode; and electrode finger bases being quartz portions sandwiched between the electrode finger grooves and having upper surfaces on which the electrode fingers are positioned. The surface acoustic wave device provides an excitation in an upper limit mode of a stop band of the surface acoustic wave.

Abstract: A method for manufacturing a ferroelectric member element structure having a ferroelectric member film, and lower and upper electrodes between which the ferroelectric member film is sandwiched, includes the steps of: forming a buffer layer having pattern-shaped oriented growth on a monocrystal substrate; performing oriented growth of the lower electrode layer on the buffer layer; performing oriented growth of the ferroelectric member film to cover the buffer layer and the lower electrode layer; and removing a portion of the ferroelectric member film other than the portion having the oriented growth achieved along the pattern of the buffer layer, by means of an etching treatment.

Abstract: An electrostrictive composite includes a flexible polymer matrix and a number of one dimensional conductive materials dispersed in the flexible polymer matrix. The flexible polymer matrix is a sheet. The one dimensional conductive materials cooperatively form an electrically conductive structure in the flexible polymer matrix. The one dimensional conductive materials are oriented substantially along a same preferred direction.