Abstract: An object of the present invention is to provide a polymer actuator that does not need a special member for determining the output direction of the drive force or a support member, and which is simply configured with a small number of parts and is compact and low-cost. The present invention provides a polymer actuator that includes electrodes which are inelastic in a planar direction and sandwich a stretching portion of a dielectric polymer with a gradient in thickness, and also provides an optical system including the polymer actuator.

Abstract: A head assembly includes a suspension having a gimbal, a flexible printed wiring sheet having a plurality of conductor patterns and adhered to the suspension, first and second piezoelectric actuators mounted on the gimbal, and a head slider mounted on the first and second piezoelectric actuators. The first and second piezoelectric actuators are adhered to the gimbal at end portion adhesion portions symmetrical with respect to the center of pivotal motion thereof and are adhered to the head slider at end portion adhesion portions on the opposite side disposed symmetrically with respect to the center of pivotal motion similarly. Consequently, when a voltage is applied to the first and second piezoelectric actuators through the flexible printed wiring sheet, a couple of forces can be generated which vary the posture of the head slider only in one direction around the center of pivotal motion.

Abstract: Described herein are transducers, their use and fabrication. The transducers convert between mechanical and electrical energy. The present invention further relates to compliant electrodes that conform to the shape of a polymer included in a transducer.

Abstract: In a polymer actuator driven by extension and contraction of the polymer by electrical stimulation, the displacement generated by extension and contraction of the polymer is taken out through a movable body connected to a second terminal member which is connected to one end of the polymer, by way of a first elastic body and pressed against a first terminal member which is connected to the other end of the polymer, by the elastic force of the first elastic body.

Abstract: A piezoelectric element including a vibrating plate, a lower electrode, a piezoelectric film and an upper electrode laminated in this order, wherein the lower electrode, the upper electrode and the piezoelectric film are formed by a perovskite type oxide while the vibrating plate is formed by a metal oxide, and a junction interface is substantially absent between the vibrating plate and the lower electrode, between the lower electrode and the piezoelectric film and between the piezoelectric film and the upper electrode.

Abstract: A multilayer piezoelectric element is provided with a multilayer body, a first external electrode on a side face of the multilayer body, and a second external electrode outside the first external electrode. The multilayer body consists of an alternate stack of a plurality of piezoelectric members and a plurality of internal electrodes. The first external electrode is electrically connected to predetermined internal electrodes. The second external electrode extends in a wave pattern along a stack direction of the multilayer body and is of flat plate shape. The first external electrode and the second external electrode are electrically and physically connected through a plurality of connections.

Abstract: A piezoelectric device includes a substrate, a buffer layer on the substrate, a lower electrode layer on the buffer layer, a piezoelectric layer on the lower electrode layer, and an upper electrode layer on the piezoelectric layer. The piezoelectric layer has a base portion extending outwardly at its lower portion of its periphery. The piezoelectric device provides enhanced bonding strength between the substrate and the stacked structure including the upper electrode layer, the lower electrode layer, and the piezoelectric layer.

Abstract: A piezoelectric ceramic composition includes a top-layer, a bottom-layer and at least one intermediate-layer ceramic sheets stacked to each other for sintering. An alloy layer of silver and palladium is interposed between every two ceramic sheets, and a sliver layer is coated on each exposed surface of the top-layer and the bottom-layer ceramic sheets, so as to form a positive and a negative electrode circuit therein. The piezoelectric ceramic composition with the silver layer is attached to at least one surface of a metal plate to make a piezoelectric element which is used to make a piezoelectric actuator, loudspeaker or buzzer.

Abstract: The disclosed invention relates to achieving micromachined piezoelectrically-actuated diaphragms. The piezoelectric diaphragm includes a central, inactive electrode free region and an annular shaped interdigitated electrode adjacent to the outer periphery of the central region. The diaphragm also may have an inactive annular, electrode free region and an active central, interdigitated electrode region. The diaphragms may be used in, such as, miniature pumps. The pumps may include a plurality of chambers to generate peristaltic pumping of fluids.

Abstract: A piezoelectric actuator includes a supporting member in which pressure chambers are formed, a vibration plate which is joined to a joining section of the supporting member, a piezoelectric layer formed on the vibration plate, and an FPC provided on the piezoelectric layer. A contact section of an electrode formed on the piezoelectric layer and a terminal section of the FPC are electrically connected via a bump formed on the terminal section. A recess is formed on an upper surface of the supporting member right below the bump. While joining the piezoelectric layer and a wire member, any damage of the piezoelectric layer and any poor connection do not occur.

Abstract: A multilayer ceramic substrate includes a multilayer composite including a first material layer including glass, a second material layer including a ceramic, disposed in contact with the first material layer, and an internal electrode including an electroconductive material, disposed in contact with at least one of the first material layer and the second material layer. The first material layer is sintered, and is firmly bonded to the second material layer by diffusing or permeating a portion of the glass in the first material layer into the second material layer. The internal electrode includes a main portion and a lead-out portion extending from the main portion to a side surface of the multilayer composite, and the internal electrode includes a ceramic powder at least in the lead-out portion.

Abstract: A surface acoustic wave element includes a thin film electrode composed of monocrystal aluminum disposed on a piezoelectric substrate. At least one metal of Cu, Ta, W, and Ti is segregated in the thin film electrode composed of monocrystal aluminum. In this surface acoustic wave element, segregation of Cu or the like occurs in the thin film electrode. Such segregation is effective to reduce the occurrence of cracks on the piezoelectric substrate during ultrasonic wave connection for flip chip mounting. That is, because the occurrence of cracks on the piezoelectric substrate is reduced, tolerance against the ultrasonic vibration is advantageously improved in the surface acoustic wave element.

Abstract: A resonator. The resonator includes a bottom electrode overlaying at least part of a substrate, a composite structure overlaying at least part of the bottom electrode, and a top electrode overlaying at least part of the composite structure. The composite structure comprises a piezoelectric layer and a compensation layer, and the compensation layer includes silicon dioxide combined with boron.

Abstract: A piezoelectric ceramic composition has the composition formula (Pb(a-b)Meb){(Ni(1-c)/3Znc/3Nb2d/3)zTixZr(1-x-z)}O3, wherein Me represents at least one element selected from the group consisting of Ba, Sr and Ca; a, b, d, and x satisfy the inequalities 0.975?a?0.998, 0?b?0.05, 1<d?1.3, and 0.39?x?0.47; and c and z are located in a region surrounded by lines connecting Point A (z=0.25, c=0.1), Point B (z=0.25, c=0.85), Point C (z=0.1, c=0.6), Point D (z=0.075, c=0.5), Point E (z=0.05, c=0.2), and Point F (z=0.05, c=0.1) or located on the lines in the z-c plane. Therefore, the piezoelectric ceramic composition is effective in achieving a large piezoelectric constant, a small dielectric constant, and a high Curie point. A piezoelectric actuator contains the piezoelectric ceramic composition.

Abstract: An acoustic resonator of one inventive aspect includes a substrate, at least one generally crystalline primer layer provided on the substrate either directly or on top of one or more intermediate layers, a generally smooth and generally crystalline electrode layer provided on the primer layer, and a piezoelectric layer provided on the electrode layer. The primer layer, or at least one of the primer layers, has a crystallographic structure belonging to a first crystal system, and the electrode layer has a crystallographic structure belonging to a second crystal system which is different to the first system. The atomic spacing of the primer layer or at least one of said primer layers and that of the electrode matches to within about 15%.

Abstract: A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal.

Abstract: An actuator device which is made as a laminated structure including a displacement-functioning layer having a region to be deformed by the electric field and an electrode-functioning layer having a region to function as an electrode. And an manufacturing method in which the above-mentioned device is easily manufactured, the method in which, according to the laminated structure, arranging each layer to be formed on the transfer section and transferring it onto the substrate to laminate.

Abstract: A method of determining adhesion quality and apparatus embodying the method are disclosed. The apparatus includes a substrate, a seed layer, and a resonator. The substrate defines a cavity and has a doped portion proximal to the cavity. The seed layer is disposed above the cavity. The resonator includes a bottom electrode on the seed layer, a piezoelectric portion on the bottom electrode, and a top electrode on the piezoelectric portion. To test the quality of adhesion of the seed layer to the substrate, one or more electrical property is measured between the doped portion and the bottom electrode and compared to a threshold value.

Abstract: A piezoelectric device including: a substrate; a first conductive layer formed over the substrate, the first conductive layer including a conductive oxide layer formed of a (001) preferentially oriented lanthanum nickelate, and the lanthanum nickelate having oxygen deficiency; a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure; and a second conductive layer electrically connected with the piezoelectric layer.

Abstract: A piezoelectric film device has a piezoelectric film element and a power supply circuit. The piezoelectric film element is formed of a first electrode, a second electrode, and a piezoelectric film that is sandwiched between the first electrode and second electrode and has a polarization vector in the film thickness direction. The polarization vector is inverted by application of a predetermined voltage or higher through the first electrode and second electrode. The power supply circuit supplies voltage for inverting the polarization vector. The piezoelectric film has each different lattice constant depending on the direction of the polarization vector. The piezoelectric film device keeps a different displacement position corresponding to the direction of the polarization vector even when the voltage application is stopped.

Abstract: Providing a manufacturing method of a piezoelectric element by which even if an electrode and a piezoelectric film stacked on a substrate are baked at a high temperature, the electrode does not oxidize and mutual diffusion between the substrate, the electrode and the piezoelectric film may be suppressed. The electrode is adapted as a laminated layer body which includes an electroconductive oxide layer, a mixture layer having an electroconductive oxide and electroconductive metal, and an electroconductive metal layer including the electroconductive metal from a substrate side, and the mixture layer above is adapted as a graded composition structure in which a ration of the electroconductive oxide is highest in an interface with the electroconductive oxide layer and lowest in an interface with the electroconductive metal layer.

Abstract: A multilayer ceramic device includes an external electrode disposed on a piezoelectric ceramic body including internal electrodes. The external electrode is a sintered body in which an Ag grid is integrally embedded in a coating film primarily composed of Ag. Therefore, it is possible to obtain a multilayer ceramic device having outstanding properties, such as durability and moisture resistance, without leading to poor electrical continuity and a decrease in conductivity even when a continuous operation is performed for a prolonged period of time.

Abstract: A piezoelectric thin-film resonator includes a first excitation electrode and a second excitation electrode, the first excitation electrode being disposed opposite the second excitation electrode; a piezoelectric thin film disposed between the first excitation electrode and the second excitation electrode; and a substrate supporting the first excitation electrode, the substrate being composed of a LiTaO3 single crystal or a LiNbO3 single crystal, the first excitation electrode including an acoustic reflecting layer, the acoustic reflecting layer containing (a) at least one epitaxially grown first sublayer being composed of a conducting material and having a relatively high acoustic impedance; and (b) at least one epitaxially grown second sublayer being composed of another conducting material and having a relatively low acoustic impedance.

Abstract: A cell driving type piezoelectric actuator comprising: a plurality of cell driving bodies each comprising a wall portion, a cell formed by the wall portion, a piezoelectric body formed on at least one of wall portions and at least one pair of electrodes formed on the piezoelectric body; said piezoelectric operation portion being capable of changing a volume of the cell on which said piezoelectric operation portion is formed by its displacement, wherein the piezoelectric actuator comprises at least one pair of support bodies, the plurality of cell driving bodies are formed completely independent of one another and are connected to one another through at least one pair of support bodies, and the cell driving bodies and the support bodies are integrally formed by firing a green body of said piezoelectric actuator. A method for manufacturing the same is also disclosed.

Abstract: A dielectric member including, on a substrate, a lower electrode, an oriented dielectric layer, and an upper electrode, in which at least either of the electrodes has an at least two-layered structure constituted of perovskite type oxide conductive layers, and has an orientation.

Abstract: To provide a dielectric layer of crystal structure preferentially or uniaxially oriented on a common substrate. A dielectric element of desired quality can be stably produced even on a common substrate for film-making by forming a lower electrode layer, dielectric layer and upper electrode layer in this order on a substrate, wherein each of these layers are designed to be preferentially or uniaxially oriented, and to have a specific half bandwidth, determined by fitting a pseudo-Voigt function.

Abstract: The present invention relates to transducers, their use and fabrication. The transducers convert between mechanical and electrical energy. Some transducers of the present invention include a pre-strained polymer. The pre-strain improves the conversion between electrical and mechanical energy. The present invention also relates to devices including an electroactive polymer to convert between electrical and mechanical energy. The present invention further relates to compliant electrodes that conform to the shape of a polymer included in a transducer. The present invention provides methods for fabricating electromechanical devices including one or more electroactive polymers.

Abstract: Disclosed is a method of manufacturing a surface acoustic wave device comprising the steps of forming a drive electrode having a surface acoustic wave element function on a piezoelectric substrate wafer, providing a resist coat on an upper region of the drive electrode, covering the resist coat with a metal film, removing the resist coat lying within the metal film so that the metal film is formed in a dome form having a hollow portion covering the drive electrode, and providing a resin seal on the metal film.

Abstract: The invention relates to a microbeam oscillator. Tuning of the oscillator is carried out by addition or subtraction of material to an oscillator member in order to change the mass of the oscillator member.

Abstract: A piezoelectric device of the present invention includes first and second piezoelectric resonators. The first piezoelectric resonator has a structure in which a cavity, a lower electrode, a piezoelectric layer, and an upper electrode are formed on a substrate. The second piezoelectric resonator has a structure in which a cavity, a lower electrode, a piezoelectric layer, and an upper electrode are formed on the substrate. A feature of the above-structure piezoelectric device is that the piezoelectric layers, have the same film thickness, and the depth of the cavity of the first piezoelectric resonator is different from the depth of the cavity of the second piezoelectric resonator.

Abstract: An electromechanical actuator comprising an inherently conducting polymer and a conductor for conducing voltage along the polymer from a first end region thereof. The conductor is adapted for axially extending and contracting with axial expansion and contraction of the polymer. In one form, the conductor is in the form of a helix embedded in the polymer and extends along substantially the entire length of the polymer. Also disclosed is a method for manufacture of the electromechanical actuator.

Abstract: A method of manufacturing a piezoelectric thin film resonator forms, after forming a piezoelectric film on a substrate so as to cover a lower electrode formed on the substrate, an electrode material layer for forming an upper electrode above the piezoelectric film, forms a mask of a predetermined form on the electrode material layer, and then etches the electrode material layer to form the upper electrode. Before a step of forming the electrode material layer, a protective layer for protecting the piezoelectric film during etching of the electrode material layer is formed so as to cover at least a part of the piezoelectric film where the upper electrode is not formed, and the electrode material layer is then formed so as to cover the protective layer.

Abstract: A piezoelectric element of the present invention includes a substrate, a lower electrode layer, a piezoelectric layer, an upper electrode layer, a cavity portion formed below a piezoelectric vibrating portion, and at least two bridging portions. The at least two bridging portions are formed so as not to be line-symmetric with respect to any line segment traversing the piezoelectric vibrating portion and/or so as not to be point-symmetric with respect to any point in the piezoelectric vibrating portion in a projection of the piezoelectric vibrating portion in the laminating direction.

Abstract: A piezoelectric element of a piezoelectric actuator is clamped by two electrodes, each of which has a conductive layer on a insulating layer. At least a connection terminal is formed by extending the conductive layer outside the insulating layer.

Abstract: A cell driving type piezoelectric/electrostrictive actuator comprises: one or a plurality of cells defined by a wall portion including side walls, a ceiling wall and a bottom wall: side walls, the ceiling wall and the bottom wall being connected to form a space as cell, at least two side walls facing each other comprising piezoelectric/electrostrictive operation portions, the piezoelectric/electrostrictive operation portions being displaced to change a volume of the cell, wherein at least one pore is disposed in the wall portion other than at least two side walls facing each other and comprising piezoelectric/electrostrictive operation portions, and wherein all inner surfaces of the wall portion defining each cell are coated with one or more layers of seamless thin films. The method for preparing the same is also disclosed.

Abstract: In a surface acoustic wave filter, an input-side IDT electrode and an output-side IDT electrode are arranged on a piezoelectric substrate so as to be separated from each other in the propagation of a surface acoustic wave. The thickness of the IDT electrodes is set so that the first coefficient of the velocity-dispersion has a negative value.

Abstract: In a piezoelectric element 20, a first electrode layer 2 made of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal is formed on a silicon substrate 1, and a piezoelectric layer 3 made of a rhombohedral or tetragonal perovskite oxide (e.g., PZT) is formed on the first electrode layer 2 so that the piezoelectric layer 3 is preferentially oriented along the (001) plane.

Abstract: An electronic component (1) includes a substrate (2) and at least two piezoelectric resonators (3, 4) each having an active element (6, 9), a lower electrode (5, 8) and an upper electrode (7, 10). The lower electrode (5) of the first resonator (3) is made of a material that is different from that of the lower electrode (8) of the second resonator (4) such that the resonators exhibit different resonance frequencies.

Abstract: A piezoelectric device includes a substrate, a buffer layer on the substrate, a lower electrode layer on the buffer layer, a piezoelectric layer on the lower electrode layer, and an upper electrode layer on the piezoelectric layer. The piezoelectric layer has a base portion extending outwardly at its lower portion of its periphery. The piezoelectric device provides enhanced bonding strength between the substrate and the stacked structure including the upper electrode layer, the lower electrode layer, and the piezoelectric layer.

Abstract: A piezoelectric element includes a first electrode; a piezoelectric layered film composed of a first piezoelectric film formed on the first electrode film and a second piezoelectric film that is formed on the first piezoelectric film and is controlled in crystal orientation thereof by the first piezoelectric film; and a second electrode film formed on the second piezoelectric film. Each of the first and second piezoelectric films is an aggregate of columnar grains grown unidirectionally along a thickness direction of the piezoelectric layered film. A columnar grain of the second piezoelectric film has a larger cross-sectional diameter than a columnar grain of the first piezoelectric film. A ratio l/d of the thickness l of the piezoelectric layered film to the cross-sectional diameter d of the second piezoelectric film is not less than 20 and not more than 60.

Abstract: The actuator is capable of greatly deforming a flexible sheet member. The actuator comprises: a flexible sheet member being made of a polymer material; and a pair of electrodes being respectively provided on both faces of the sheet member, the electrodes being made of carbon nano fibers.

Abstract: A frequency-tunable resonator comprises a basic element having at least one piezoelectric layer and at least one semiconducting layer. The electrodes, formed on main surface situated opposite one another of the basic element, are loaded with an external voltage, whereby the resonant frequency of the basic element or of the resonator can be in dependence on the voltage.

Abstract: To provide a stacked piezoelectric device which is inexpensive and excellent in bonding strength between a piezoelectric layer and an internal electrode layer, the piezoelectric device comprises piezoelectric layers and internal electrode layers containing not less than 50 percent by weight of Cu stacked alternately. Between the internal electrode layer and the piezoelectric layer, there is a diffusion region formed by mutual diffusion of components of the internal electrode layer and the piezoelectric layer to the other layer and comprising at least one component of the piezoelectric material and Cu. The diffusion region occupies not less than 90 percent of area of interface between the internal electrode layer and the piezoelectric layer, and a thickness of the diffusion region is not more than 10 percent of a thickness of the internal electrode layer.

Abstract: The present invention relates to a crystal oscillator that is provided with a crystal element; a main surface electrode configured of a first underlayer formed on each of two main surfaces of the crystal element and a first surface layer of Au superimposed over the first underlayer; an end surface electrode having a second underlayer formed on the crystal element to extend over the main surface electrode and a second surface layer of Au superimposed to cover the second underlayer; a supporter for holding the crystal element in the horizontal direction, bonded to the end surface electrode by a eutectic alloy comprising at least Au; and a base on which the supporter stands.

Abstract: A method for bonding one surface to a gold surface comprises the following steps: (a) mixing a solution containing sulfur-containing alkoxysilane; (b) treating the gold surface with the solution; (c) adding sulfur-containing alkoxysilane to an adhesive material; (d) applying the adhesive material with additive on one of both surfaces; and (e) pressing the surfaces against each other while the adhesive material therebetween sets.

Abstract: An actuator comprises a laminated structure having a vibration plate, a lower electrode, a piezoelectric element, and an upper electrode laminated sequentially on a basic element, and then, at least the lower electrode of the two electrodes is a thin oxide film doped with La of single orientated crystal or monocrystal that contains Sr and Ti. Thus, it is made possible to materialize the micro miniaturized actuator having a strong structure of lamination with high adhesion, which is capable of obtaining large displacement with sufficient durability without spoiling the piezo-electrostrictive property thereof even with the small thickness of the piezoelectric element. With the micro miniaturized actuator thus structured, it is made possible to make a liquid discharge head more precisely.

Abstract: A piezoelectric actuator includes: a buffer layer that is composed of an oxide or a nitride epitaxially formed on a Si substrate; a bottom electrode formed on the buffer layer, being composed of a transition metal oxide, and having a pseudo-cubic (100) or (111) orientation with a perovskite structure; a piezoelectric layer formed on the bottom electrode being composed of (Ba1?xMx)(Ti1?yZy)O3 (where (M=Sr or Ca and 0?x?0.3) (Z=Zr or Hf and 0?y?0.2)) with a pseudo-cubic (001) or (111) orientation; and a top electrode that is formed on the piezoelectric layer. In this way, a piezoelectric actuator that uses barium titanate as the piezoelectric body and does not include Pb is provided.

Abstract: In a piezoelectric element, an adhesive layer 12 is provided on a substrate 11, a first electrode layer 14 made of a noble metal containing titanium or titanium oxide is provided on the adhesive layer 12, and an orientation control layer 15 that is preferentially oriented along a (100) or (001) plane is provided on the first electrode layer 14. In the vicinity of a surface of the orientation control layer 15 that is closer to the first electrode layer 14, a (100)- or (001)-oriented region extends over titanium or titanium oxide located on one surface of the first electrode layer 14 that is closer to the orientation control layer 15, and the cross-sectional area of the region in the direction perpendicular to the thickness direction gradually increases in the direction away from the first electrode layer 14 toward the opposite side. Further, a piezoelectric layer 16 that is preferentially oriented along a (001) plane is provided on the orientation control layer 15.

Abstract: A surface acoustic wave device using second leaky surface acoustic waves the dominant component of which is a longitudinal wave component includes a LiTaO3 substrate and a conductive film formed on the LiTaO3 substrate. The density ? of the conductive film is in the range of about 2,699 kg/m3 to about 19,300 kg/m3.

Abstract: There is disclosed a piezoelectric/electrostrictive device made of piezoelectric/electrostrictive film which includes: a substrate section; and an operation section disposed on the substrate section and constituted of a piezoelectric/electrostrictive film and an electrode film and which operates by displacement of the operation section. The operation section comprises the piezoelectric/electrostrictive films and electrode films alternately laminated so that uppermost and lowermost layers form the electrode films, the operation and substrate sections are integrally fired, and the substrate section is constituted of a ceramic which contains a titanium element. For the piezoelectric/electrostrictive device made of piezoelectric/electrostrictive film, a residual stress after firing hardly exists, therefore larger displacement is obtained with the same driving voltage, response speed is higher, and generation force is larger.