Abstract: To fabricate a plurality of piezoelectric vibrating pieces while firmly preventing a defect, a crack, or a breakage from being brought about at a wafer in the midst of fabrication, there is provided a method of fabricating a piezoelectric vibrating piece which is a method of fabricating a plurality of piezoelectric vibrating pieces from a wafer S, the method including a film forming step of respectively forming metal films M on both faces of the wafer, a patterning step of removing a region of the metal film on an inner side of an outer peripheral end of the wafer by a constant distance H, thereafter, patterning the metal film M to outer shapes of the plurality of piezoelectric vibrating pieces, an outer shape forming step of forming outer shapes of the plurality of piezoelectric vibrating pieces at the wafer a size of which is reduced by an amount of the constant distance by selectively removing the wafer by wet etching by constituting a mask by the patterned metal film, and a removing step of removing the m

Abstract: A piezoelectric element includes an element layer, an electrode layer including one or more positive electrode layers and one or more negative electrode layers repeatedly stacked to alternate with each other on the element layers in a vertical direction, a primary positive electrode connection member connecting the positive electrode layers, a primary negative electrode connection member connecting the negative electrode layers, at least one secondary positive electrode connection member, at least one secondary negative electrode connection member, and a primary electrode connected to the primary positive electrode connection member and the primary negative electrode connection member and configured of a pair of electrodes, and at least one secondary electrode spaced apart from the primary electrode and configured of a pair of electrodes.

Abstract: Resonator structures and electrodes are described, as well as methods for manufacturing the same. Resonator electrodes may be formed using two or more photolithographic steps and masks, with different masks being used to define different features of the electrodes. The masks may create self-aligned electrodes, which can be aligned with one or more anchors of the resonator.

Abstract: Piezoelectric materials based on nanoporous polymer foams are provided. Also provided are nanogenerators incorporating the piezoelectric materials, piezoelectric energy harvesters incorporating the nanogenerators and methods of making and using the same. The piezoelectric materials comprise a unitary nanoporous matrix composed of a piezoelectrically active organic polymer, in which the pores are interconnected and have nanoscale diameters.

Abstract: Provided is a method of producing a piezoelectric/electrorestrictive film type device including a vibrating laminate obtained by laminating electrode films and piezoelectric/electrorestrictive films on a substrate containing a cavity. The method of producing the vibrating laminate includes: producing the substrate with a cavity, forming the first photoresist film on first principal surface of substrate, irradiating substrate from the second principal surface side of the substrate, transferring the plane shape of the cavity to the first photoresist film, developing and removing the first photoresist film formed in the region where the shape of cavity was formed, forming a lowermost electrode film by plating, and forming additional films other than the lowermost electrode film constituting the vibrating laminate.

Abstract: A piezoelectric actuator including first and second piezoelectric cantilevers is disclosed. Wirings are provided on an upper surface of a support body on which the first and second piezoelectric cantilevers are formed. The wirings are formed of patterned metal films.

Abstract: A piezoelectric element includes a substrate, a lower electrode layer, a piezoelectric layer, and an upper electrode layer. The lower electrode layer is fixed to the substrate and the piezoelectric layer is formed on the lower electrode layer. The upper electrode layer is formed on piezoelectric layer. The lower electrode layer contains pores therein and has a larger thermal expansion coefficient than the piezoelectric layer.

Abstract: The present invention has an object to provide a piezoelectric material that endures high temperatures, the resources of raw materials of which are abundant, and that is stably suppliable. Disclosed is a piezoelectric element, including: a piezoelectric member having a surface for receiving external stress and a side surface that is perpendicular to the surface for receiving external stress; and at least one pair of a first electrode and a second electrode that are placed on the side surface, the first electrode being provided so as to separate from the second electrode. The piezoelectric member is preferably cut out from a piezoelectric material that includes gehlenite (Ca2Al2SiO7) in a predetermined crystal orientation. The piezoelectric member utilizes a transverse piezoelectric effect, and is preferably a (XYt) 45°-cut piece. The electrodes are preferably provided on surfaces that are parallel to the YZ plane.

Abstract: In a piezoelectric device, an identification pattern provided on a main face of a piezoelectric body is covered with an electrode, so as to inhibit the identification pattern from generating particles, while the identification pattern makes the polarity of the piezoelectric device discernible by the appearance thereof.

Abstract: An electrical component includes a main body, a metallic contact structure, which is in direct contact with the main body, and an electrically insulating passivation layer provided with an opening. The metallic contact structure is connected to an external contact-making element through the opening. Furthermore, the external contact-making element is covered and enclosed by a flexible metal composite layer. A method for producing an electrical component is also specified.

Abstract: An example provides an apparatus including a substrate, a metal layer, and an adhesive layer adhered between the substrate and the metal layer, the adhesive layer comprising zinc-gallium oxide, zinc-indium oxide, zinc-gallium-tin oxide, or zinc-indium-tin oxide.

Abstract: An ultrasound transducer according to an embodiment has two-dimensionally arranged ultrasound vibrators. A wiring board block is a laminate of wiring boards which are arranged along the row direction in the arrangement. The wiring board has a first surface facing a rear surface of the ultrasound vibrators and a second surface on its opposite side. First connection parts are provided on the first surface corresponding to the arrangement, and are conducted with back electrodes of the vibrators. Second connection parts are provided on the second surface, and are provided corresponding to the first connection parts. Connecting leads establish conductivity between the first and second connection parts through a fourth surface which is perpendicular to the second and third surfaces. Electronic circuits are connected to the second surface of the wiring board block, and are conducted with the second connection parts.

Abstract: A perovskite oxide film is formed on a substrate, in which the perovskite oxide film has an average film thickness of not less than 5 ?m and includes a perovskite oxide represented by a general formula (P) given below: (K1-w-x,Aw,Bx)(Nb1-y-z,Cy,Dz)O3??(P), where: 0<w<1.0, 0?x?0.2, 0?y<1.0, 0?z?0.2, 0<w+x<1.0, A is an A-site element having an ionic valence of 1 other than K, B is an A-site element, C is a B-site element having an ionic valence of 5, D is a B-site element, each of A to D is one kind or a plurality of kinds of metal elements.

Abstract: A method of forming an array of piezoelectric actuators on a membrane (18) which includes the steps of preparing a piezoelectric comb-like structure having an array of islands that are integrally connected by a continuous top portion and that form piezoelectric layers of the actuators, the islands having an electrode at a bottom side, attaching the comb-like structure with its bottom electrode to a surface of the membrane, removing the continuous top portion of the comb-like structure to thereby separate the actuators from one another, and forming top electrodes on the top surfaces of the piezoelectric layers of the actuators.

Abstract: A liquid ejecting head includes a flow channel-forming substrate in which a pressure generating chamber that communicates with a nozzle opening is provided; and a piezoelectric element that includes a first electrode provided on one surface side of the flow channel-forming substrate corresponding to the pressure generating chamber, a piezoelectric layer provided on the first electrode, and a second electrode provided on the piezoelectric layer, in which the first electrode configures a separate electrode that is independent for each active portion that is a substantial driving portion of the piezoelectric element, the second electrode configures a common electrode shared with the active portion, the piezoelectric element extends up to the outer side of the pressure generating chamber in at least one end of the pressure generating chamber, and the piezoelectric element includes a weighting film provided to overlap to one end of the pressure generating chamber on the second electrode in a region extended up to

Abstract: A piezoelectric resonating element includes a piezoelectric substrate having a rectangular vibrating portion and a thick-walled portion, excitation electrodes and, and lead electrodes. The thick-walled portion includes a fourth thick-walled portion, a third thick-walled portion, a first thick-walled portion, and a second thick-walled portion. The third thick-walled portion includes a third slope portion and a third thick-walled body, and at least one slit is formed in the third thick-walled portion.

Abstract: A laminated body has a substrate and a metallic layer. The substrate is composed of an inorganic material. The metallic layer is disposed on the substrate. One of the substrate and the metallic layer has a main body portion and a plurality of protruding portions. The protruding portions are formed on the main body portion. The protruding portions are embedded in the other of the substrate and the metallic layer. An outer diameter of each of the protruding portions is configured to decrease towards the main body portion.

Abstract: A piezoelectric/electrostrictive element has a piezoelectric body, a first electrode, a second electrode and a glass layer. The piezoelectric body is formed in a thin film-shape. The piezoelectric body has a first main surface and a second main surface. The first electrode is disposed on the first main surface of the piezoelectric body. The first electrode has an electrode side surface configured to be connected with the first main surface. The second electrode is disposed on the second main surface of the piezoelectric body. The glass layer is continuously formed on the first main surface and the electrode side surface. The glass layer containing glass as a principal constituent. The glass layer is isolated from the side surface of the piezoelectric body.

Abstract: Provided is a lead-free piezoelectric material having a satisfactory and stable piezoelectric constant and electric insulation property in a wide practical temperature range. Provided is a piezoelectric material, including a perovskite-type metal oxide represented by the following general formula (1) as a main component, the piezoelectric material containing Mn in a content of 0.01 part by weight or more and 0.80 part by weight or less with respect to 100 parts by weight of the perovskite-type metal oxide: (Li?xNa?yK?zBa?Bi0.5?+?)a(Ti?+?Fe?) O3 . . . (1), where 0.800???0.999, 0???0.150, 0.001???0.050, ?+?+?=1, 0?x?0.050, 0.045?y?0.450, 0.045?z?0.450, 0.450?x+y+z?0.500, and 0.980?a?1.020.

Abstract: A piezoelectric element includes a first electrode, a first multilayer composite disposed on the first electrode, a second multilayer composite disposed on the first electrode with a distance from the first multilayer composite, and a covering layer covering the side surfaces of the first and second multilayer composites and the surface of the first electrode between the first multilayer composite and the second multilayer composite. The first and second multilayer composites each include a piezoelectric layer and a second electrode over the piezoelectric layer. The first electrode contains a metal that can react with chlorine, and has at least one of a bump and a dip at the surface thereof between the first multilayer composite and the second multilayer composite.

Abstract: A piezoelectric thin-film element includes a substrate, a lower electrode layer formed on the substrate, a piezoelectric thin-film layer that is formed on the lower electrode layer and includes potassium sodium niobate having a perovskite structure represented by the composition formula of (K1-xNax)NbO3 (0.4?x?0.7), and an upper electrode layer formed on the piezoelectric thin-film layer. The piezoelectric thin-film layer is formed such that a value of (Ec?+Ec+)/2 is not less than 10.8 kV/cm and a value of (Pr?+Pr+)/2 is not more than ?2.4 ?C/cm2 where Ec? and Ec+ are intersection points of a polarization-electric field hysteresis loop and the x-axis indicating an electric field and Pr? and Pr+ are intersection points of the polarization-electric field hysteresis loop and the y-axis indicating polarization.

Abstract: A piezoelectric thin-film multilayer body includes a substrate, an adhesive layer on the substrate, a lower electrode layer on the adhesive layer, and a lead-free piezoelectric thin-film layer on the lower electrode layer. The lead-free piezoelectric thin-film layer is composed of lithium potassium sodium niobate (composition formula (NaxKyLiz)NbO3, 0<x<1, 0<y<1, 0?z?1, x+y+z=1). The maximum height Rz of a roughness of an adhesive-layer-facing surface of the substrate is 2 nm or less. The adhesive layer is composed of a non-crystalline oxide of a Group 4 element or a non-crystalline oxide of a Group 5 element. The adhesive layer has a thickness of 1 nm or more and 2 nm or less and is equal to or more than the maximum height Rz of the roughness of the surface of the substrate.

Abstract: A piezoelectric vibrating piece includes a vibrator, a framing portion that surrounds the vibrator, a connecting portion that connects the vibrator and the framing portion, an excitation electrode on each of a front surface and a back surface of the vibrator, and a first extraction electrode and a second extraction electrode on the framing portion. The first extraction electrode and the second extraction electrode are electrically connected to the respective excitation electrodes. The piezoelectric vibrating piece includes a front surface and a back surface. A stepped portion is disposed on at least one of the front surface and the back surface of the piezoelectric vibrating piece. In a case where one of the first extraction electrode and the second extraction electrode is disposed across the stepped portion, another one of the first extraction electrode and the second extraction electrode is disposed to avoid crossing over the stepped portion.

Abstract: The present invention provides a piezoelectric material which has excellent insulating and piezoelectric properties and which contains no lead and potassium and also provides a piezoelectric element and a multilayered piezoelectric element each using the above piezoelectric material. The piezoelectric material is a perovskite-type metal oxide represented by the following general formula (1). (1?x){(NayBa1-z)(NbzTi1-z)O3}-xBiFeO3??(1) In the formula, 0<x?0.015, 0.80?y?0.95, 0.85?z?0.95 are satisfied. The piezoelectric element includes the above piezoelectric material and a pair of electrodes each provided in contact therewith. The multilayered piezoelectric element includes piezoelectric material layers formed of the above piezoelectric material and electrodes containing at least one internal electrode so as to be alternately laminated with each other.

Abstract: A flow channel substrate includes pressure chambers, and the pressure chambers communicate with nozzle openings. Piezoelectric elements located on either side of the flow channel substrate include a first electrode, a piezoelectric layer, and a second electrode. The piezoelectric layer contains lead, titanium, and zirconium. The second electrode includes a first layer on the piezoelectric layer side and a second layer on the side of the first layer opposite the piezoelectric layer. The second electrode also includes projections. The projections are aggregates of the lead originating in the piezoelectric layer, and the projections stick out of the surface of the second electrode opposite the piezoelectric layer.

Abstract: An electroactive polymer device is described that includes at least one layer of a dielectric polymer that is a polymerized product of at least one ethylenically unsaturated nitrogen-containing monomer. Also disclosed is a transducer that includes the electroactive polymer as disclosed.

Abstract: A flow channel substrate has pressure chambers, and the pressure chambers communicate with nozzle openings configured to eject liquid. Each of piezoelectric elements on the flow channel substrate has a piezoelectric layer, a pair of electrodes, and a wiring layer coupled to the electrodes. The wiring layer has a first layer on the flow channel substrate side and a second layer on the first layer. The first layer contains palladium and is formed by pretreatment, whereas the second layer contains nickel and is formed by electroless plating.

Abstract: There are provided a multi-layer piezoelectric element in which an increase of oxygen vacancies in an electric-field concentration part of piezoelectric layers is suppressed and a decrease of an amount of displacement is suppressed, as well as to provide a piezoelectric actuator, an injection device and a fuel injection system provided with the multi-layer piezoelectric element. A multi-layer piezoelectric element includes a stacked body composed of piezoelectric layers and internal electrode layers which are stacked on each other, and a resin which evolves OH? when being heated. Accordingly, it is possible to obtain a multi-layer piezoelectric element in which an increase of oxygen vacancies in an electric-field concentration part of piezoelectric layers is suppressed and a decrease of an amount of displacement is suppressed.

Abstract: An ultrasonic transducer device includes an ultrasonic transducer element array, a first signal terminal and a second signal terminal. The ultrasonic transducer element array has a 1st element group to a kth element group (where k is a natural number such that k?2). The first signal terminal is connected with a control section configured to perform at least one of receiving and transmitting of signals. The second signal terminal is connected with the first signal terminal via the ultrasonic transducer element array. Each of the 1st element group to the kth element group includes a plurality of ultrasonic transducer elements electrically connected in parallel. The 1st element group to the kth element group are electrically connected in series between the first signal terminal and the second signal terminal.

Abstract: A liquid ejecting head which includes a piezoelectric element which includes a first electrode, a piezoelectric layer which is provided on the first electrode, and on which a plurality of piezoelectric films are laminated, a second electrode which is provided on the piezoelectric layer, and a plurality of active units which are interposed between the first electrode and the second electrode, and a pressure generating chamber which communicates with nozzle openings which eject liquid, and in which a pressure fluctuation is generated by the piezoelectric element, in which a plurality of grooves with inner faces facing the first electrode side are formed on a side surface of the piezoelectric layer on each interface of each of the piezoelectric films along a first direction and a second direction which cross a third direction which goes from the first electrode to the second electrode.

Abstract: An ultrasonic transducer device includes an ultrasonic transducer element array, a first signal terminal, and a second signal terminal. The ultrasonic transducer element array has a 1st element group to a kth element group (where k is a natural number such that k?2). The first signal terminal is connected with a control section configured and arranged to perform at least one of receiving and transmitting of signals. The second signal terminal is connected with the first signal terminal via the ultrasonic transducer element array. Each of the 1st element group to the kth element group includes a plurality of ultrasonic transducer elements electrically connected in series. The 1st element group to the kth element group are electrically connected in parallel between the first signal terminal and the second signal terminal.

Abstract: An ultrasonic transducer device includes an ultrasonic element array and a common electrode wiring. The ultrasonic element array has three ultrasonic element rows with each of the three ultrasonic element rows including a plurality of ultrasonic elements arranged along a first direction and electrically connected to each other. The three ultrasonic element rows are arranged along a second direction intersecting with the first direction. The common electrode wiring is configured and arranged to supply a common voltage to at least one of the three ultrasonic element rows. The common electrode wiring extends in the first direction and is arranged between two of the three ultrasonic element rows positioned on outer sides among the three ultrasonic element rows with respect to the second direction.

Abstract: A method of manufacturing a piezoelectric element, which includes a first electrode adjacent a first main surface of a mother piezoelectric substrate and a second electrode adjacent a second main surface. During formation of the first electrode and the second electrode, cutouts are provided in the first electrode and the second electrode so that the shapes of the first electrode and the second electrode are different from each other when the mother piezoelectric substrate is inverted.

Abstract: This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, a resonator structure includes a first conductive layer of electrodes and a second conductive layer of electrodes. A piezoelectric layer including a piezoelectric material is disposed between the first conductive layer and the second conductive layer. One or more trenches can be formed in the piezoelectric layer on one or both sides in space regions between the electrodes. In some implementations, a process for forming the resonator structure includes removing an exposed portion of the piezoelectric layer to define a trench, for instance, by partial etching or performing an isotropic release etch using a XeF2 gas or SF6 plasma. In some other implementations, a portion of a sacrificial layer is removed to define a trench in the piezoelectric layer.

Abstract: A piezoelectric generator includes: a base body; and at least one piezoelectric transducer disposed on the base body, and including a first electrode, a piezoelectric body, and a second electrode, wherein the piezoelectric transducer includes a support section fixed to the base body, and a vibrating section disposed apart from the base body, having one end connected to the support section and the other end set as a free end, and vibrating due to a vibration applied externally, and a distance between the other end of the vibrating section and the base body is larger than a distance between the one end of the vibrating section and the base body.

Abstract: An SAW device (1) has a piezoelectric substrate (3) propagating acoustic waves, and a comb-shaped electrode (6) arranged on a first surface (3a) of the piezoelectric substrate (3). The SAW device (1) has a columnar terminal (15) located on the first surface (3a) and electrically connected to the comb-shaped electrode (6), and a cover member (9) covering a side surface of the terminal (15). The terminal (15) comprises, in a first region in the direction of height thereof, a larger diameter on the side of the first surface (3a) compared with the diameter on the side opposite to the first surface (3a).

Abstract: In a piezoelectric device, a piezoelectric substrate includes a vibrating piece with respective excitation electrodes on each principal surface thereof. The piezoelectric substrate is surrounded by an outer frame separated therefrom by a through-void except for a supporting portion connecting the vibrating piece to the frame. Extraction electrodes extend from the excitation electrodes across the supporting portion to the frame, and on edge surfaces of the supporting portion. The piezoelectric substrate is sandwiched between a lid and a package base to form a piezoelectric device. The outer surface of the package base is a mounting surface to which the extraction electrodes extend via an edge surface of the through-void in a region that does not overlap the excitation electrode.

Abstract: A piezoelectric device, including the following on a substrate in the order listed below: a lower electrode, a piezoelectric film which contains a Pb containing perovskite oxide represented by a general expression (P) below, and an upper electrode, in which the piezoelectric film has a layer of pyrochlore oxide on the surface facing the lower electrode, and the average layer thickness of the pyrochlore oxide layer is not greater than 20 nm. AaBbO3??(P) where, A: at least one type of A-site element containing Pb as a major component, B: at least one type of B-site element selected from the group consisting of Ti, Zr, V, Nb, Ta, Cr, Mo, W, Mn, Sc, Co, Cu, In, Sn, Ga, Zn, Cd, Fe, and Ni, and O: an oxygen element.

Abstract: A piezoelectric thin film resonator includes: a substrate; a piezoelectric film located on the substrate; a lower electrode and an upper electrode facing each other across at least a part of the piezoelectric film; and an insertion film that is inserted into the piezoelectric film, is located in at least a part of an outer periphery region in a resonance region in which the lower electrode and the upper electrode face each other across the piezoelectric film, and is not located in a center region of the resonance region.

Abstract: A surface acoustic wave resonator includes a quartz substrate with preselected Euler angles and an IDT on the quartz substrate. The IDT includes electrode fingers and excites a stop band upper end mode surface acoustic wave. Inter-electrode finger grooves are provided between the electrode fingers. Assuming a surface acoustic wave wavelength is ?, an electrode finger film thickness is H, an inter-electrode finger groove depth is G, a line occupation rate of convex portions of the substrate between the inter-electrode finger grooves is ?g, and a line occupation rate of the electrode fingers on the convex portions is ?e, 0.0407??G+H; and ?g>?e.

Abstract: A resonator element has a piezoelectric substrate including a vibration section and a thick section having a thickness which is thicker than that of the vibration section, and a pair of excitation electrodes provided on a surface and aback surface of the vibration section. In addition, the thick section has a second thick section provided along a second outer edge of the vibration section. The second thick section has an outer edge section intersecting with both axes of an X axis and a Z? axis in an end portion opposite to the fixing section in a plan view of the resonator element.

Abstract: The present invention relates to an actuator including a supporting portion including a first electrode, a second electrode disposed opposite the first electrode, and a part of a planar electrolyte member disposed therebetween, and having terminals configured to apply a voltage between the first and second electrodes; a displacement portion; and an intermediate portion disposed between the supporting portion and the displacement portion and including a third electrode on the electrolyte member and a conductive connecting member. The third electrode includes linear members and a conductive material. The linear members have major axes thereof extending in a direction crossing a direction from the supporting portion toward the displacement portion. The third electrode has conduction paths through which a current flows in the crossing direction. The conductive connecting member is electrically connected to one of the first and second electrodes and electrically connects the conduction paths together.

Abstract: A piezoelectric component (1), which serves in particular as a piezoelectric sensor or a piezoelectric actuator, comprises a main body (2). The main body (2) has a first ceramic layer (15), a second ceramic layer (16) and an inner electrode layer (17). An outer metallization (5) is provided here, applied to an outer side (3) of the main body (2) and contacting the inner electrode layer (17). The main body (2) has a removal of material (4), the removal of material (4) separating the outer metallization (5) from an end-face outer electrode (7), which is formed by a metallization (7) of an end face (6) of the main body (2). A method for producing a piezoelectric component (1) is also provided.

Abstract: An electrically conductive contact layer (4) is provided with a joining material (9) during a method for producing a piezoelectric component (1), in particular a piezoelectric sensor (1). To this end, the electrically conductive contact layer (4) can be dipped into a paste that serves to form the joining material (9). The contact layer (4) provided with the joining material (9) is subsequently disposed between a first piezoceramic layer (2) and a second piezoceramic layer (3). The contact layer (4) is then inserted via the joining material (9) between the first piezoceramic layer (2) and the second piezoceramic layer (3), wherein a pressure is applied to the first piezocermaic layer (2) against the second piezoceramic layer (3).

Abstract: An acoustic wave device and an electronic component are disclosed. The acoustic wave device includes a substrate, excitation electrodes on the substrate and a cover. The cover comprises a frame member on the substrate, and a lid member. The frame member surrounds the excitation electrodes and includes an inner wall, top surface and an outer wall. The lid member is disposed on the top surface, and includes first and second surfaces opposite to each other, and a descending part on the second surface. The second surface faces the substrate. The descending part extends downward from the second surface, and covers at least a part of the inner wall or at least a part of the outer wall. The electronic component includes the acoustic wave device on a mounting substrate via an electrically conductive bonding member, and molding resin covering the device.

Abstract: A method and apparatus for determining phase sensitivity of an accelerometer based on an analysis of the harmonic components of the interference signal, which can estimate phase lags of an accelerometer through an analysis of the interference signal obtained using a single photo-detector when the accelerometer moves in sinusoidal motion with an initial phase of vibration. The method comprises the steps of obtaining an interference signal in a time domain generated from a signal reflected by an accelerometer and a fixed mirror using a single photo-detector; transforming the interference signal in the time domain into a signal in a frequency domain including a plurality of harmonic signals by Fourier transform; and determining the phase sensitivity of the accelerometer using initial phase of vibration displacement of the accelerometer, which is included in the interference signal in the frequency domain.

Abstract: A polymer linear actuator for a micro electro mechanical system (MEMS) and a micro manipulator for a measurement device of cranial nerve signal using the same are provided. The polymer linear actuator has first and second bodies positioned spaced apart to a distance from each other, and one or more pairs of V-type moving units connecting the first and second bodies together, wherein the moving units in pair are opposed to each other to convert a rotation motion of the respective moving units into a linear motion, thereby causing the first and second bodies to move linearly.

Abstract: The present disclosure provides a method of fabricating an ultrasound transducer. A substrate having a first side and a second side opposite the first side is provided. A bottom electrode is formed over the first side of the substrate. A piezoelectric element is formed over the bottom electrode. The piezoelectric element has a chamfered sidewall. A top electrode is formed over the piezoelectric element. A step metal element is formed over a portion of the top electrode proximate to the chamfered sidewall of the piezoelectric element.

Abstract: The present disclosure provides a method of fabricating an ultrasound transducer. A substrate having a first side and a second side opposite the first side is provided. A bottom electrode is formed over the first side of the substrate. A piezoelectric element is formed over the bottom electrode. The piezoelectric element has a chamfered sidewall. A top electrode is formed over the piezoelectric element. A step metal element is formed over a portion of the top electrode proximate to the chamfered sidewall of the piezoelectric element.

Abstract: Methods and systems may provide for a hybrid RF MEMS component design including an electrostatic actuation and a piezoelectric actuation. In one example, the method may include applying a first voltage to generate a first piezoelectric force to reduce a first gap between a cantilever and an actuation electrode, and applying a second voltage to generate an electrostatic force to create contact between the cantilever and a transmission electrode.