Abstract: Systems and methods of harvesting and converting naturally occurring energy are described that include exposing a material to an ambient condition and harvesting at least a portion of energy that is created. Energy harvesting from fluidic and flow environments or vibration can be accomplished using types of energy harvesters, such as flexible polymers. Active materials or Electro-Active Polymer (EAP)-metal composite thin films like Ionic Polymers, Piezoceramic materials, and electromagnetic systems may be used as mechanical to electrical energy transducers. One type of an ionic EAP is ionic polymer-metal composite (IPMC), which includes a base polymer membrane that may be coated with a metal to act as a surface electrode. The surface electrode may be silver (Ag) nanoparticles. The silver nanoparticle functionalized IPMC can be used to convert mechanical vibrations and fluidic flow to electrical energy to power wireless devices and microelectronic systems, for example.

Abstract: Described herein are transducers and their fabrication. The transducers convert between mechanical and electrical energy. Some transducers of the present invention include a pre-strained polymer. The pre-strain improves the conversion between electrical and mechanical energy. The present invention provides methods for fabricating electromechanical devices including one or more electroactive polymers.

Abstract: A configuration is provided in which at least one end of a piezoelectric body active portion is defined by an end of a second electrode, a portion of configuring the piezoelectric body active portion of a first electrode is covered with a piezoelectric body layer, the first electrode and the piezoelectric body layer are extended to the outside of the end of the second electrode which defines the end of the piezoelectric body active portion, the first electrode includes an exposure portion which is not covered with the piezoelectric body layer and extends further outside than the end of the second electrode, and on the end of the piezoelectric body layer which forms the exposure portion, an independent electrode which is electrically independent from the second electrode is provided.

Abstract: A piezoelectric device prevents damage to a piezoelectric thin film caused by etching and the manufacturing cost of the piezoelectric device is reduced. On a surface of a support layer formed on a support substrate, an etching adjustment layer is formed. An etchant flows through etching windows to simultaneously form a through hole through which a portion of a sacrificial layer is exposed to a side of a piezoelectric thin film and an opening through which the etching adjustment layer, which is conductive with a lower electrode, is exposed to the side of the piezoelectric thin film. By making an etchant flow through the through hole, the sacrificial layer is removed. A lead-out wiring is formed between an upper electrode and a bump pad and a lead-out wiring is formed between the conductive etching adjustment layer, which is conductive with the lower electrode, and a bump pad.

Abstract: A method of operating a micro-electromechanical system, comprising a resonator; an actuation electrode; and a first detection electrode, to filter and mix a plurality of signals. The method comprises applying a first alternating voltage signal to the actuation electrode, wherein an actuation force is generated having a frequency bandwidth that is greater than and includes a resonant bandwidth of a mechanical frequency response of the resonator, and wherein a displacement of the resonator is produced which is filtered by the mechanical frequency response and varies a value of an electrical characteristic of the first detection electrode. The method also comprises applying a second alternating voltage signal to the first detection electrode, wherein the second voltage signal is mixed with the varying value to produce a first alternating current signal. The first alternating current signal is detected at the first detection electrode.

Abstract: A piezoelectric multilayer actuator includes a stack of piezoelectric layers arranged one above another and first electrode layers and second electrode layers arranged alternately one above another between said piezoelectric layers. The electrode layers extend into the stack from a first and a second lateral face of the stack and overlapping in the stack. The first lateral face holds a first contact element in electrical contact with the first electrode layers and the second lateral face (5) holds a second contact element in electrical contact with the second electrode layers. The first and second contact elements each have a wire mesh, wherein at least one wire mesh has a twill-weave structure.

Abstract: The piezoelectric resonator (21) includes a first and a second planar tuning fork shaped part arranged in a common plane. It is intended to be mounted on a support via a linking part (29), the linking part being arranged to connect the tips of the inner vibrating arms (25a, 25b) of the first and second tuning fork shaped parts so as to link the first and second tuning fork shaped parts together, The electrodes carried by the first and second tuning fork shaped parts are interconnected through the linking part so as to make the outer vibrating arms of the first and second tuning fork shaped part oscillate with opposite phase.

Abstract: A piezoelectric drive type MEMS element includes: a first substrate including, in a portion thereof, a movable part which is driven by a piezoelectric drive section to be displaced in a convex shape, a movable electrode being provided on a surface of the movable part; and a second substrate which is bonded to the first substrate and supports a fixed electrode facing the movable electrode via a prescribed gap, wherein the piezoelectric drive section includes a piezoelectric film provided on a region of the first substrate which forms the movable part as a portion of the movable part, and a pair of electrodes disposed so as to sandwich the piezoelectric film.

Abstract: There is disclosed a piezoelectric/electrostrictive element which can be used as a sensor, even if a piezoelectric/electrostrictive layer cracks. Provided is a piezoelectric/electrostrictive element comprising a substrate, a lower electrode layer secured onto the substrate, and a piezoelectric/electrostrictive layer secured onto the lower electrode layer, and the coverage of the lower electrode layer with respect to the substrate is 98% or less.

Abstract: To provide the piezoelectric device and the manufacturing method thereof, in which the quartz-crystal side surface electrodes and the base side surface electrodes are ensured to be electrically connected without disconnection. The piezoelectric device (100) comprises: a piezoelectric vibrating piece (21), an outer frame (22), a piezoelectric frame (20) for forming a first castellation (204), a package base (12) which is bonded by to the outer frame by adhesive (13) and which the second castellation is formed, and a package lid (11). The piezoelectric frame comprises: an excitation electrodes, a second extraction electrodes and a first side surface electrodes formed on the first castellation. The package base comprises: a second side surface electrode formed on the second castellation, and an external electrode.

Abstract: A piezoelectric ceramic with environmental friendliness including a composition as the main component composed of a composite oxide free from lead (Pb) as a constituent element, and with excellent piezoelectric characteristics such as the relative dielectric constant, the electromechanical coupling factor, and the piezoelectric constant, and a piezoelectric device using the piezoelectric ceramic, are provided. A piezoelectric ceramic including a composition represented by the following general formula as the main component: (K1-x-y-w-vNaxLiyBawSrv)m(Nb1-z-uTaz-Zru)O3 (wherein, x, y, z, w, v, u and m in the formula satisfy the following conditions respectively: 0.4<x?0.7; 0.02?y?0.1; 0<z?0.3; 0<w?0.01; 0.04?v?0.07; 0.04?u?0.07; and 0.95?m<1).

Abstract: To provide a quartz sensor capable of detecting a sensing target with high sensitivity also in measurement in a liquid phase in which a difference in Q values at the time of measurement in the liquid phase and in a vapor phase is small. In a quartz sensor 1 including an AT-cut quartz plate 11 having a capture layer (absorbing layer) 12 formed on one surface (XZ? surface) thereof and detecting a sensing target based on an amount of change in a frequency of a quartz resonator 10 caused when the sensing target is absorbed by the capture layer 12, there are formed electrodes 13 for oscillating the quartz plate 11 on end faces (XY? surfaces) mutually opposite in a Z? direction of the surface of the quartz resonator 10 on which the capture layer 12 is formed (XZ? surface).

Abstract: A piezoceramic surface actuator comprising multilayer plates each having a plurality of piezoceramic plates separated from one another by in each case a positive or negative electrode. The positive and negative electrodes alternate and are constructed integrally with the piezoceramic plates, and have collector electrode surfaces for the positive and negative electrodes, which are connected to the associated positive or negative electrodes in a conducting manner and are arranged on two exterior sides of the surface actuator that are opposite from one another. The multilayer plates are plate-shaped and have a much greater width of the piezoceramic plates, defined by the distance between the opposite collector electrode surfaces, than the thickness of the multilayer plates. The collector electrode surface in each case contacts the positive or negative electrodes of the neighboring multilayer plates.

Abstract: In order to provide complete removal of a sacrificial layer on a bottom surface of a disk during an etching process, without leaving residue, a disk type resonator of an electrostatic drive type includes a disk type resonator structure; a pair of drive electrodes at a predetermined gap from an outer peripheral portion of the disk type resonator structure and disposed at both sides of the resonator structure so as to face each other; a unit for applying an alternating current bias voltage with a same phase to the drive electrodes; and a detection unit that obtains an output corresponding to an electrostatic capacitance between the disk type resonator structure and the drive electrodes. The disk type resonator structure has a through hole in the center of the disk and is vibrated in a wineglass mode.

Abstract: A piezoelectric thin-film resonator includes a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the substrate and the lower electrode, an upper electrode provided on the piezoelectric film, and an additional pattern, a cavity being formed between the lower electrode and the substrate in a resonance portion in which the lower electrode and the upper electrode face each other through the piezoelectric film, the additional pattern being provided in a position that is on the lower electrode and includes an interface between the resonance portion and a non-resonance portion.

Abstract: A piezoelectric thin-film resonator includes a piezoelectric thin film which includes aluminum nitride containing Sc and which has a concentration distribution such that the concentration of Sc is non-uniform in a thickness direction of the piezoelectric thin film; a first electrode; a second electrode facing the first electrode across the piezoelectric thin film; and a substrate supporting a piezoelectric vibrating section defined by the piezoelectric thin film and the first and second electrodes.

Abstract: A piezoelectric assembly and portable electronic device having a piezoelectric assembly are described. The piezoelectric assembly comprises a first electrode for electrical communication to a current or voltage source, a second electrode for electrical communication to a reference source, a piezoelectric material in electrical communication with each one of the first and second electrodes and between the first and second electrodes, a signal electrical connector in electrical communication with the first electrode and configured to be connected to the current or voltage source, and a reference electrical connector in electrical communication with the second electrode and configured to be connected to the reference source so as to provide electrical communication between the second electrode and the reference source.

Abstract: There is provided a dielectric composition, including; a base powder including BamTiO3 (0.995?m?1.010); a first sub-component including 0.05 to 4.00 moles of an oxide or carbonate containing at least one rare-earth element based on 100 moles of the base powder; a second sub-component including 0.05 to 0.70 moles of an oxide or carbonate containing at least one transition metal; a third sub-component including 0.20 to 2.00 moles of a Si oxide; a fourth sub-component including 0.02 to 1.00 mole of an Al oxide; and a fifth sub-component including 20 to 140% of an oxide containing at least one of Ba and Ca, based on the third sub-component.

Abstract: In a multilayer piezoelectric element in which a plurality of piezoelectric layers and a plurality of metal layers are stacked alternately, the plurality of metal layers include a plurality of low-filled metal layers having a lower filling rate of metal composing the metal layers than oppositely disposed metal layers adjacent to each other in a stacking direction. In a multilayer piezoelectric element in which a plurality of piezoelectric layers and a plurality of metal layers are stacked alternately, the plurality of metal layers include a plurality of thin metal layers having a smaller thickness than oppositely disposed metal layers adjacent to each other in a stacking direction.

Abstract: A piezoelectric actuator is formed by forming first and second electrodes on a substrate, and depositing a material on the substrate and between side surfaces of adjacent first and second electrodes to form a thin film sheet within which the first and the second electrodes extend from a first surface of the thin film sheet towards a second surface of the thin film sheet opposite the first surface. The second electrode is interdigitated in relation to the first electrode. The side surfaces of the first and the second electrodes are at least substantially perpendicular to the substrate. The thin film sheet is to physically deform in response to an electric field induced within the thin film sheet via application of a voltage across the first and the second electrodes.

Abstract: There is provided a method for testing a piezoelectric/electrostrictive actuator, wherein the displacement of a piezoelectric/electrostrictive actuator is estimated on the basis of the relations between one or more frequency characteristic values selected from the group consisting of the heights and areas of the peaks of the resonance waveforms and the difference of the maximum and minimum of the first order or first to higher orders of the resonance frequency characteristic values of the piezoelectric/electrostrictive actuator and the k-th order (k=1 to 4) of the first or first to higher orders of resonance frequencies. According to this piezoelectric/electrostrictive actuator testing method, a piezoelectric/electrostrictive actuator can be tested with high precision without actually driving the same as a product and without being accompanied by any disassembly/breakage.

Abstract: An electrostrictive structure includes a flexible polymer matrix and a carbon nanotube film structure at least partly embedded into the flexible polymer matrix. The carbon nanotube film structure includes a number of carbon nanotubes combined by van der Waals attractive force therebetween. The carbon nanotube film structure extends in a curve in the flexible polymer matrix.

Abstract: The invention provides a transducer for converting between mechanical and electrical energies. The transducer comprises an EAP laminate with a layer of an elastomer material arranged between two electrode layers, each electrode layer comprising a second layer of a plastically deformable material, e.g. metal or a thermoplastic material, and a third layer of an electrically conductive material. Due to the layer of plastically deformable material, the electrode layers can be shaped into various shapes which can provide anisotropic characteristics of the transducer.

Abstract: Electromechanical systems dilation mode resonator (DMR) structures are disclosed. The DMR includes a first electrode layer, a second electrode layer, and a piezoelectric layer formed of a piezoelectric material. The piezoelectric layer has dimensions including a lateral distance (D), in a plane of an X axis and a Y axis perpendicular to the X axis, and a thickness (T), along a Z axis perpendicular to the X axis and the Y axis. A numerical ratio of the thickness and the lateral distance, T/D, is configured to provide a mode of vibration of the piezoelectric layer with displacement along the Z axis and along the plane of the X axis and the Y axis responsive to a signal provided to one or more of the electrodes. Ladder filter circuits can be constructed with DMRs as series and/or shunt elements, and the resonators can have spiral configurations.

Abstract: An actuator includes a drive beam; a lower electrode formed on the drive beam; a piezoelectric element provided on the lower electrode; an upper electrode provided on the piezoelectric element; an upper wiring connecting the upper electrode and a wiring for supplying a voltage to the upper electrode; and an insulating part providing electrical insulation between the upper electrode and the lower electrode and formed under the upper wiring such that it covers an end of the lower electrode. The insulating part includes insulating extension parts extended on opposite sides of the upper wiring in a width direction of the upper wiring.

Abstract: A piezoceramic transducer (PZT transducer) and a method for manufacturing the same are provided. The PZT transducer includes a piezoceramic substrate and an electrode unit. The piezoceramic substrate has a first surface and a second surface opposite the first surface, and has a mechanical quality factor (Qm) greater than 1400. The electrode unit has a first electrode and a second electrode. The first electrode is disposed on the first surface and has a first diameter. The second electrode covers the second surface and extends to cover a part of the surface at a periphery of the first surface, and the part of the second electrode covering the second surface has a second diameter. The ratio of the first diameter to the second diameter is 0.498 to 0.502. The PZT transducer has a large mist amount and a long service life.

Abstract: A method and apparatus for a piezoelectric resonator having combined thickness and width vibrational modes are disclosed. A piezoelectric resonator may include a piezoelectric substrate and a first electrode coupled to a first surface of the piezoelectric substrate. The piezoelectric resonator may further include a second electrode coupled to a second surface of the piezoelectric substrate, where the first surface and the second surface are substantially parallel and define a thickness dimension of the piezoelectric substrate. Furthermore, the thickness dimension and the width dimension of the piezoelectric substrate are configured to produce a resonance from a coherent combination of a thickness vibrational mode and a width vibrational mode when an excitation signal is applied to the electrodes.

Abstract: A mesa-structure crystal element includes a circumferential portion having a thin thickness, a first convex portion formed on a plane in a center side from the circumferential portion and having a first height from the circumferential portion in a first principal face and a first planar shape, and a second convex portion formed in a center side from the circumferential portion and having a second height from the circumferential portion in a second principal face opposite to the first principal face and a second planar shape, wherein at least one of an area and a planar shape is different between the first planar shape of the first convex portion and the second planar shape of the second convex portion, or the first height of the first convex portion is different from the second height of the second convex portion.

Abstract: The invention relates to a piezoelectric multilayer component as an intermediate, which comprises a stack of piezoelectric layers arranged on top of one another. The stack comprises an active region having electrode layers arranged between the piezoelectric layers and at least one inactive region, wherein the active region on the end product of the piezoelectric multilayer component is provided for the purpose of deforming when a voltage is applied to the electrode layers. The inactive region contains at least one sacrificial layer which comprises an electrically insulating material and a metal, wherein the metal can diffuse at least partially from the sacrificial layer into the piezoelectric layers of the inactive region by heating the multilayer component.

Abstract: An object of the invention is to provide a surface mounted resonator that improves impact resistance by the shape of a mounting terminal provided on an outside bottom face of a stacked resonator. A surface mounted crystal resonator is provided with a plurality of mounting terminals electrically connected to a hermetically sealed crystal piece at both ends of an outside bottom face having a rectangular shape long in the lengthwise direction, the mounting terminals having the same external dimensions with a total dimension of the mounting terminals in a lengthwise direction of the outside bottom face being 70% or more [but less than 100%] of a dimension in the lengthwise direction of the outside bottom face. Respective facing sides of the mounting terminals facing each other in a central area of the outside bottom face are formed curved in a convex shape such that a curvature thereof decreases gradually.

Abstract: An acoustic wave device includes: a substrate; a lower electrode that is located on the substrate; a piezoelectric film that is located on the lower electrode and made of aluminum nitride of which a ratio of a lattice constant in a c-axis direction to a lattice constant in an a-axis direction is smaller than 1.6; and an upper electrode that is located on the piezoelectric film and faces the lower electrode across the piezoelectric film.

Abstract: A piezoelectric resonator structure, comprising: (i) a substrate, (ii) an acoustic mirror, (iii) a first electrode, (iv) a piezoelectric layer, and (v) a second electrode, wherein each of the substrate, the acoustic mirror, the first electrode, the piezoelectric layer, and the second electrode has a top surface and a bottom surface, a first end portion and an opposite, second end portion, and a body portion defined therebetween, wherein the overlapped area of body portions of the substrate, the acoustic mirror, the first electrode, the piezoelectric layer and the second electrode is defined as an active area A. A plurality of air gaps and interference structures is formed at the first end portion of the piezoelectric layer and the second electrode, and the second end portion of the piezoelectric layer and the second electrode to enhance the performance of the piezoelectric resonator.

Abstract: A mesa-type quartz-crystal vibrating piece includes a vibrator in a quadrangular shape with both main surfaces, a pair of excitation electrodes on both the main surfaces, a thin portion outside of the quadrangular shape, and a pair of extraction electrodes. The thin portion has a thickness thinner than a thickness of the vibrator. The pair of extraction electrodes are extracted from the excitation electrodes to a predetermined direction. A center of a first length in the predetermined direction of the excitation electrode is decentered from a center of a second length in the predetermined direction. The second length includes a length of the vibrator and a length of the thin portion. The center of the first length is decentered toward an opposite side of the extraction electrode by 25 ?m to 65 ?m.

Abstract: There is provided a method for manufacturing a piezoelectric actuator where the planar shape is adjusted by subjecting the piezoelectric body layer located on one of the outer surfaces in the two or more piezoelectric body layers to a polarization treatment to control remnant polarization of the piezoelectric body layer. The piezoelectric actuator is used as a drive portion of a piezoelectric drive type variable capacitor. The variable capacitor has high mechanical strength and excellent reliability for a long period of time. The relation between the displacement amount of the piezoelectric actuator and the capacity of the capacitor is stable, and the variable capacity is wide.

Abstract: Methods are disclosed for manufacturing tuning-fork type piezoelectric vibrating devices. In an exemplary method a metal film is formed on both surfaces of a piezoelectric wafer, followed by application of photoresist. A first metal-film-etching step etches the metal film after removal of the photoresist layer outside the profile outline of the devices. A first piezoelectric-etching step etches the wafer surface but not through to the rear surface; thus, outside the profile outline the metal film is removed. A second metal-film-etching step etches the metal film after removal of the photoresist layer from first groove regions. A second piezoelectric-etching step etches outside the profile outline and the groove regions through to the rear surface.

Abstract: A transparent piezoelectric sheet includes a quadrilateral-shaped transparent piezoelectric film and a first transparent plate electrode. The quadrilateral-shaped transparent piezoelectric film includes an organic polymer. The quadrilateral-shaped transparent piezoelectric film has entire main surfaces that are piezoelectric. The first transparent plate electrode is layered on part of a first main surface of the main surfaces of the transparent piezoelectric film. One to three sides of the four sides of the quadrilateral shape of the transparent piezoelectric film and area(s) of the first main surface adjacent thereto are not covered by the first transparent plate electrode.

Abstract: An electronic component has an element body, an external electrode, and an insulating material. The element body has a pair of end faces opposed to each other, a pair of principal faces extending so as to connect the pair of end faces and opposed to each other, and a pair of side faces extending so as to connect the pair of principal faces and opposed to each other. The external electrode is formed on the end face side of the element body and covers a partial region of the principal face and/or a partial region of the side face adjacent to the end face. The insulating material covers a surface of the element body except for one face which is the principal face or the side face and at least a part of which is covered by the external electrode, and the external electrode formed on the surface.

Abstract: A piezoelectric actuator comprises a co-fired stack of piezoelectric elements formed from a piezoelectric material and a plurality of positive internal electrodes interdigitated with a plurality of negative internal electrodes throughout the stack to define active regions of the piezoelectric material which are responsive to a voltage applied across the internal electrodes, in use. An external positive electrode connects with the positive internal electrodes and an external negative electrode connects with the negative internal electrodes. The actuator is characterized in that the stack further comprises means for deliberately creating artificial cracks within the stack at a location at which the artificial cracks do not give rise to a short circuit between the internal electrodes but serve to relieve stresses within the piezoelectric material.

Abstract: An AT-cut quartz plate having chamfered ridge portions and an almost rectangular shape in planar view, wherein a resonance frequency is equal to or larger than 7 MHz and equal to or smaller than 9 MHz, lengths of long and short sides of the rectangular shape are equal to or larger than 1.5 mm and equal to or smaller than 2.4 mm, and equal to or larger than a frequency difference between primary vibration and sub-vibration is equal to or larger than 975 kHz and equal to or smaller than 1,015 kHz.

Abstract: A piezoelectric element is provided with an element body, which has a pair of principal faces opposed to each other and an end face extending in a direction in which the pair of principal faces are opposed to each other, so as to connect the pair of principal faces, and which is comprised of a piezoelectric ceramic material; a pair of electrodes arranged respectively on the pair of principal faces; and a resin covering an entire area of the end face and arranged so as to make contact with the pair of electrodes. The resin has two edges in the aforementioned direction projecting outward in the aforementioned direction from the respective electrodes.

Abstract: First and second piezoelectric element overlapped portions of an insulating layer of a flexure part is formed with first and second connecting openings, respectively. There are provided on an upper surface of the insulating layer, first and second lower conductive adhesive agents that electrically connect lower electrode layers of first and second piezoelectric elements to a voltage supply wiring through the first and second connecting openings, and a surrounding insulative adhesive agent that is arranged so as to surround the first and second lower conductive adhesive agents in a plan view.

Abstract: A bulk acoustic wave (BAW) resonator, comprises: a first electrode formed on a substrate; a piezoelectric layer formed on the first electrode; a second electrode formed on the first piezoelectric layer; a non-piezoelectric layer formed on the first electrode and adjacent to the piezoelectric layer; and a bridge formed between the non-piezoelectric layer and the first or second electrode.

Abstract: A laminated piezoelectric element includes a base part that is configured from a piezoelectric layer, and a laminate configured by a first internal electrode and a second internal electrode, which are alternately laminated with the piezoelectric layer interposed therebetween, and that includes a displacement part extending from the base part in a laminating direction of the first internal electrode and the second internal electrode.

Abstract: An ultrasonic transducer is configured to transmit and receive ultrasonic waves. The ultrasonic transducer includes a vibrating member and a piezoelectric member coupled to the vibrating member. The piezoelectric member includes a first piezoelectric part configured and arranged to be deformed by applied voltage to vibrate the vibrating member or configured and arranged to be deformed by vibration of the vibrating member to produce a potential difference, and a second piezoelectric part configured and arranged to be deformed by applied voltage to statically deflect the vibrating member.

Abstract: A ceramic electronic component includes two electronic-component main bodies and two metal terminals. Each of the metal terminals includes a base, ribs on left and right sides of the base, and a mounting portion below the base. The base includes two bonding portions to be bonded to respective external electrodes of the two electronic-component main bodies and cut-out portions each having a closed shape and being disposed below the respective bonding portions. The ribs are bent from the left and right sides of the base in the width direction toward the electronic-component main body. The ribs extend from the top of the base in the height direction to the vicinity of the mounting-side major surface of the mounting-side electronic-component main body and do not reach the mounting portion. The mounting portion is bent from the bottom of the base toward the electronic-component main body.

Abstract: To provide a multi-layer piezoelectric element having high strength against breakage, high insulation and excellent displacement performance, and an injection apparatus that incorporates the same. The multi-layer piezoelectric element comprising a stack 4 constituted from a plurality of piezoelectric layers 1 stacked one on another via internal electrode layers 2, wherein at least a part of peripheral areas 31, that are disposed between two piezoelectric layers 1, 1 located adjacently in the stacking direction and are located between an edge 2a of the internal electrode layer 2 and side face 4a of the stack 4, is dispersed areas where a plurality of metallic regions are dispersed via voids 21.

Abstract: A bulk acoustic wave (BAW) resonator, comprises: a first electrode formed on a substrate; a piezoelectric layer formed on the first electrode; a second electrode formed on the first piezoelectric layer; a non-piezoelectric layer formed on the first electrode and adjacent to the piezoelectric layer; and a bridge formed between the non-piezoelectric layer and the first or second electrode.

Abstract: Methods are provided for creating a metal or other electrically-conductive member extending from an air-backed cavity of a piezoelectric ultrasonic transducer (pMUT) apparatus defining such an air-backed cavity, through a substrate layer disposed adjacent to the transducer device of the pMUT device, and into electrically-conductive engagement with a first electrode of the pMUT device, such that the electrically-conductive member provides an electrically-conductive engagement between the first electrode and a conformal electrically-conductive layer deposited in the air-backed cavity of the pMUT device. Associated apparatuses are also provided.

Abstract: An electronic component comprises an element body and an outer electrode. The element body has a pair of end faces opposing each other, a pair of main faces opposing each other while extending so as to connect the pair of end faces to each other, and a pair of side faces opposing each other while extending so as to connect the pair of main faces to each other. The outer electrode is formed on the end face side of the element body and covers a portion of the main and side faces adjacent to the end face. At least a surface of an electrode portion of the outer electrode located on the side face side thereof is covered with an insulating layer.

Abstract: In an exemplary method for making crystal vibrating devices, four wafers are provided: a crystal wafer, a base wafer, a first-lid wafer, and a second-lid wafer. The crystal wafer defines multiple crystal vibrating pieces including respective frames and respective electrodes formed on both main surfaces thereof. The base wafer defines multiple base plates bondable to one main surface of respective frames. The first-lid wafer defines multiple first lids bondable to the other main surface of the respective frames. Each first lid defines a void registrable with respective electrodes. The second-lid wafer is sized similarly to and bondable to the first-lid wafer so as to sealably close the voids. In a first bonding step the crystal wafer is bonded to the base wafer and first-lid wafer. In a subsequent adjustment step the thickness of at least one electrode per each crystal vibrating piece is adjusted to adjust the vibrational frequency of the respective vibrating portion.