Abstract: A method for manufacturing a piezoelectric element that includes a piezoelectric ceramic body containing an internal electrode. The piezoelectric ceramic body is mainly made of a perovskite complex oxide containing an alkali metal niobate-based compound containing at least one element selected from among K, Li, and Na. The internal electrode is made of a base metal material, such as Ni or Cu. The piezoelectric element is produced by co-sintering the internal electrode and the piezoelectric ceramic body in a reducing atmosphere.

Abstract: An inexpensive piezoelectric sensor where noise unlikely occurs and a method for manufacturing the same are provided. A piezoelectric body (2) made of polymeric material, a first electrode-supporting portion (3) disposed at one side of the piezoelectric body (2) and supporting a signal electrode (3b) on a first insulator (3a), and a second electrode-supporting portion (4) disposed at the other side of the piezoelectric body (2) and supporting a ground electrode (4b) on a second insulator (4a) are included, and the first electrode-supporting portion (3) and the second electrode-supporting portion (4) are arranged so that the signal electrode (3b) and the ground electrode (4b) overlap each other in a layering direction.

Abstract: A piezoelectric multilayer component has a stack of green piezoceramic layers arranged one on top of the other. A first electrode layer is applied onto a piezoceramic layer and contains a first metal. A structured sacrificial layer is applied onto a further piezoceramic layer, adjacent to the first electrode layer in the stacking direction, and contains a higher concentration of the first metal than does the first electrode layer. When the intermediate product is sintered, the first metal diffuses from the structured sacrificial layer to the first electrode layer and in the process leaves cavities which form a weak layer.

Abstract: A Langevin transducer horn uses split electroding or selective electroding of transducer elements and phase relationships of the voltages applied thereto to determine the relative longitudinal and flexural/transverse motion induced in the tip of the horn.

Abstract: A flexural vibration piece includes: a base portion; a vibrating arm extending from the base portion and having a first surface, a second surface opposing the first surface, and side surfaces connecting the first surface and second surface, wherein a laminated structure including a first electrode, a second electrode, and a piezoelectric layer disposed between the first electrode and second electrode, is formed on each of the first surface and second surface, the piezoelectric layer formed on the first surface side and the piezoelectric layer formed on the second surface side have mutually opposite polarization directions, and the first electrode formed on the first surface side and the first electrode formed on the second surface side are connected to each other.

Abstract: There is provided a piezoelectric thin film resonator that decreases only transverse mode waves selectively while maintaining resonance characteristics due to original thickness longitudinal vibration. The piezoelectric thin film resonator includes: a piezoelectric film (14); a first electrode (15a) formed on a first principal surface of the piezoelectric film (14); and a second electrode (13) formed on a second principal surface of the piezoelectric film (14) opposite to the first principal surface. The resonator has a resonance region (20) where the first electrode (15a) and the second electrode (13) are opposed to each other. An electrically discontinuous portion (18a) that is insulated from the first electrode (15a) is provided on the first principal surface of the piezoelectric film (14) in the resonance region (20), and the electrically discontinuous portion (18a) is surrounded by the first electrode (15a) on the first principal surface.

Abstract: A transducer system includes a multi-layer flexible circuit. The flexible circuit includes a first layer, a second layer and a third layer. The circuit engages a piezoelectric material/electrode subassembly. Vias are used to operatively connect ground electrodes of individual transducer elements to grounds in the third layer of the circuit. The vias extend through the first and second layers to the third layer of the circuit. When the flexible circuit is diced during the assembly of the transducer system, no cuts are made in the third layer of the circuit. As a result, a common ground connection is maintained by way of the grounds in the third layer of the circuit. Thus, no subsequent operation of reconnecting the common ground electrode is required.

Abstract: A surface acoustic wave device with improved temperature characteristics includes a piezoelectric substrate of a single crystal of symmetry 3m, providing propagation of a SAW having an electromechanical coupling factor exceeding 5%, an electrode pattern on a substrate surface forming a resonator, and a SiOx overlay covering the electrode pattern. An optimized thickness of the electrodes combined with an SiOx overlay provide improved performance in RF applications with improved temperature characteristics. To suppress spurious responses the SiOx thickness is varied depending upon the relative thickness and period of the electrodes. The electrode pattern forms resonators with the silicon oxide thickness over the electrodes inversely related to the period of the electrodes of the resonators.

Abstract: A piezoelectric thin film resonator includes a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. At least a portion of the upper electrode and that of the lower electrode oppose each other through the piezoelectric film, and at least a portion of the periphery of the upper electrode is reversely tapered.

Abstract: The present invention relates to one of energy conversion devices, actuator and a dielectric layer used in the actuator. The present invention provides a polymer blend composition capable of easily controlling the ability of converting electrical energy to mechanical energy, which is prepared by blending a piezoelectric polymer with a flexible elastomeric block copolymer showing an effective miscibility therewith, and a tunable actuator using the same.

Abstract: An electromechanical converter comprises a dielectric elastomer layer (1) designed as one piece and having a first side and a second side opposite the first side. The first and the second side of the dielectric elastomer layer (1) are corrugated in the same direction as each other with the formation of ridges (2) and furrows (3). The dielectric elastomer layer (1) comprises a polyurethane polymer, the first side of the dielectric elastomer layer (1) being in contact with a first electrode (4) and the second side of the dielectric elastomer layer (1) being in contact with a second electrode (5) and the first and second electrode (4, 5) having a same-directional corrugated design corresponding to the first and second side of the dielectric elastomer layer (1).

Abstract: A stacked bulk acoustic resonator includes a first piezoelectric layer stacked on a first electrode, a second electrode stacked on the first piezoelectric layer; a second piezoelectric layer stacked on the second electrode, and a third electrode stacked on the second piezoelectric layer. The stacked bulk acoustic resonator includes further includes an inner raised region formed in an inner portion on a surface of at least one of the first, second and third electrodes, and an outer raised region formed along an outer perimeter on the surface of the at least one of the first, second or third electrodes. The outer raised region surrounds the inner raised region and defines a gap between the inner raised region and the outer raised region.

Abstract: A crystal device and an inspection method for inspecting the crystal device are provided. The crystal device includes: a crystal plate; excitation electrodes formed on the crystal plate; extraction electrodes extending from the excitation electrodes; electrode pads electrically connected with the extraction electrodes; a package including mounting terminals formed on a mounting surface and connection terminals formed on a bottom surface, which is on the other side of the mounting surface, and electrically connected with the mounting terminals; and an electrically-conductive adhesive agent bonding and fixing the connection terminals to the electrode pads. An bonding status inspection region, on which no metal film is formed, is formed in the crystal plate, and the bonding status inspection region is surrounded by or adjacent to the electrode pads. In addition, the bonding status inspection region occupies not more than 25% of the area of the electrode pads.

Abstract: A piezoelectric resonator element includes: a resonating arm extending in a first direction and cantilever-supported; a base portion cantilever-supporting the resonating arm; and an excitation electrode allowing the resonating arm to perform flexural vibration in a second direction that is orthogonal to the first direction. In the piezoelectric resonator element, the resonating arm includes an adjusting part adjusting rigidity with respect to a bend in a third direction that is orthogonal to the first and second directions.

Abstract: A piezoelectric multilayer component includes a stack of piezoceramic layers, which are arranged one on top of the other, and electrode layers. The stack has a first area and a second area. The second area contains a disturbance material, which is used to make the second area less mechanically robust than the first area.

Abstract: A difference is arisen in the electric potential of the electrode layer between a fixed end portion and a displacement end portion of an actuator. The electrode layer includes a bundle of polymer fibers containing a conductive material. Longitudinal directions of the polymer fibers are arranged parallel to a direction from the fixed portion to the displacement end portion of the actuator.

Abstract: A lead type piezoelectric resonator device includes a piezoelectric resonator plate and a lead terminal that supports the piezoelectric resonator plate. The piezoelectric resonator plate is provided with a terminal electrode that is electrically connected to the lead terminal, and the lead terminal is provided with a bonding layer that is electrically connected to the piezoelectric resonator plate. The piezoelectric resonator plate and the lead terminal are electromechanically bonded to each other by the terminal electrode and the bonding layer. A bonding material containing an Sn—Cu alloy is produced from the terminal electrode and the bonding layer by the bonding of the terminal electrode and the bonding layer.

Abstract: A piezoelectric vibration element includes: a piezoelectric substrate; excitation electrodes that are arranged so as to face each other on both principal faces of the piezoelectric substrate; drawn-out electrodes; and pads. The piezoelectric substrate includes an excitation portion that is located at the center and a peripheral portion that is thin-walled to be thinner than the thickness of the excitation portion and is disposed on a peripheral edge thereof. The pads have support areas that fix the piezoelectric substrate to a support member at positions of the piezoelectric substrate corresponding to corner portions. The excitation electrodes are formed over the excitation portion and a vibration area that is at least a part of the peripheral portion.

Abstract: This disclosure provides systems, apparatus, and devices and methods of fabrication for electromechanical devices. In one implementation, an apparatus includes a metal proof mass and a piezoelectric component as part of a MEMS device. Such apparatus can be particularly useful for MEMS gyroscope devices. For instance, the metal proof mass, which may have a density several times larger than that of silicon, is capable of reducing the quadrature and bias error in a MEMS gyroscope device, and capable of increasing the sensitivity of the MEMS gyroscope device.

Abstract: A method of manufacturing a piezoelectric actuator includes a first polarization of a piezoelectric body; polishing the piezoelectric body; first heating step of heating the piezoelectric body to a temperature which is not lower than a Curie point of the piezoelectric body and performing a re-polarization of the piezoelectric body in a second polarization of the piezoelectric body having been heated in the first heating step.

Abstract: A piezoelectric component with a monolithic stack, has electrode layers and piezoceramic layers arranged alternately one on top of the other, the piezoceramic layers have a piezoceramic, and having at least one porous security layer arranged in the stack for the formation of a crack if mechanical overload of the stack should occur. The piezoelectric component has an infiltration barrier arranged between the security layer and a lateral surface section of the stack for suppressing the penetration of a foreign substance into the security layer. The piezoelectric component can be as a piezoactuator for controlling a valve, particularly a valve of an internal combustion engine.

Abstract: A method for manufacturing a surface acoustic wave filter device includes a step of forming grooves in one principal surface of a piezoelectric substrate, a step of embedding a metallic film in the grooves to form IDT electrodes, a step of performing a process of removing a portion of the piezoelectric substrate from the one principal surface of the piezoelectric substrate, thereby forming a recessed portion including the bottom surface in which the IDT electrodes are embedded, and a step of bonding a cover member to the piezoelectric substrate.

Abstract: A piezoelectric sensing device is described for measuring material thickness of target such as pipes, tubes, and other conduits that carry fluids. The piezoelectric sensing device comprises a substrate such as a flexible circuit material, a piezoceramic element, and a solder layer disposed therebetween. These features are arranged in manner that provides a low-profile measurement device suitable for high-temperature applications such as those applications in which the temperature exceeds 120° C. Embodiments of the piezoelectric sensing device can be configured for use as stand-alone units separately located on the target or for use as a string of sensing elements coupled together by way of the flexible circuit material.

Abstract: A piezoelectric vibrator, an oscillator, an electronic device and a ratio timepiece are provided which are capable of increasing a capacitance C0 while achieving miniaturization and cost reduction. The piezoelectric vibrator includes a base substrate, a lid substrate, a piezoelectric vibrating reed on which an excitation electrode is formed, and external electrodes. An electrode pattern for capacitance adjustment, which extends along a routing electrode, is provided extending from a routing electrode.

Abstract: The embodiments relate to a piezoelectric component including at least one fully active piezoelectric element comprising electrode layers and piezoelectric layers arranged therebetween. The electrode layers are conveyed to a lateral edge of the piezoelectric element and contacted there. The external electrode is attached in a structured fashion for electrical contacting and/or a structured external electrode is made available: The external electrode essentially includes two components, namely the contacting field and the contacting path. In the event of several piezoelectric elements (piezoelectric actuator in multilayer structure) stacked one above the other, the contacting path functions as a collector electrode, which connects the contacting fields of the piezoelectric elements to one another. The insulation path exists for the electrical insulation of the contacting path from electrode layers which are not to be contacted.

Abstract: A piezoelectric actuator includes a vibrating plate having a base surface, a first electrode, a piezoelectric layer, and a second electrode which extends in a first direction. In the piezoelectric actuator, the second electrode has a first portion having a first width, a second portion having a second width which is smaller than the first width, and a third portion which connects the first portion and the second portion, the first electrode has a first side which forms an outer circumference of the first electrode on a plan view, and the third portion of the second electrode is arranged at an upper side of the first side of the first electrode and a third width of the third portion is made narrower from the first portion toward the second portion.

Abstract: An acoustic resonator comprises a first electrode a second electrode and a piezoelectric layer disposed between the first and second electrodes. The acoustic resonator further comprises a reflective element disposed beneath the first electrode, the second electrode and the piezoelectric layer. An overlap of the reflective element, the first electrode, the second electrode and the piezoelectric layer comprises an active area of the acoustic resonator. The acoustic resonator also comprises a bridge adjacent to a termination of the active area of the acoustic resonator.

Abstract: An electrical connecting structure for a piezoelectric element enables wiring to the piezoelectric element to be carried out without deteriorating the productivity and reliability of the piezoelectric element. The electrical connecting structure is formed by facing a common electrode of the piezoelectric element to a terminal that supplies power to the common electrode and by injecting a conductive adhesive into a through hole, which is formed substantially at the center of the piezoelectric element, from an opening of the through hole that is on the opposite side of the common electrode, thereby securing electrical connection between the terminal and the common electrode of the piezoelectric element.

Abstract: A wiring connecting structure for a piezoelectric actuator includes a terminal 57-1, a through hole 67 formed through the terminal 57-1, a first liquid stopper 69-1 arranged around the through hole 67 in a gap between the terminal 57-1 and a common electrode 19 of a piezoelectric element 13 of the piezoelectric actuator, and a liquid trap 73 arranged adjacent to the first liquid stopper 69-1. The terminal 57-1 faces the common electrode 19 with an electric insulating layer 61 being on the piezoelectric element 13 side and the first liquid stopper 69-1 being in the gap between the common electrode 19 and the terminal 57-1. A liquid conductive adhesive 79 is filled in the through hole 67. If there is an excess of the liquid adhesive 79, the excess is guided into a trapping space 77 of the liquid trap 73, to prevent the excess from oozing out.

Abstract: An acoustic assembly that includes an integrated circuit package having an electrically conductive via configured to pass from an active portion of the integrated circuit package through a bottom portion of the integrated circuit package. The bottom portion is a bottom side of a substrate of the integrated circuit package. An acoustic element is positioned on the bottom side of the substrate and the via is arranged to electrically couple the active portion of the integrated circuit package to the acoustic element. In one embodiment, the acoustic element is an acoustic stack and the integrated circuit package is an ASIC. The assembly microbeamformed transducer.

Abstract: A method of producing a piezoelectric thin film resonator is provided. A sacrificial layer is formed on a part of the piezoelectric film. The sacrificial layer is patterned, and thereafter an upper electrode is formed on the piezoelectric layer. The method further includes removing the sacrificial layer formed on the piezoelectric layer; and patterning the piezoelectric film. In the step of removing the sacrificial layer, the sacrificial layer is removed such that at least a portion of the periphery of the upper electrode has a reversely tapered shape that reflects the tapered portion of the sacrificial layer, and in the step of patterning the piezoelectric film, the piezoelectric film is removed such that a lower end of the reversely tapered periphery of the upper electrode is placed so as to coincide with or to be in the vicinity of an end portion of the patterned piezoelectric film.

Abstract: A method of manufacturing a polymer electrode and a polymer actuator employing the polymer electrode, the method including: adhering a shadow mask onto a substrate, forming a hydrophilic electrode pattern on the substrate, coating the hydrophilic electrode pattern of the substrate with a conductive polymer water solution, removing the shadow mask, and drying the conductive polymer water solution, thus forming the polymer electrode. The method may be applied to electrodes disposed on both surfaces of a polymer deformation layer of a polymer actuator.

Abstract: The present invention relates to an electromechanical converter, in particular an electromechanical sensor, actuator and/or generator, which comprises a polymer element obtainable from a reaction mixture comprising a polyisocyanate, a polyisocyanate prepolymer and a compound having at least two isocyanate-reactive hydroxy groups. The present invention additionally relates to a process for the production of such an electromechanical converter and to the use of a polymer element according to the invention as an electromechanical element. The present invention relates further to an electronic and/or electrical device comprising an electromechanical converter according to the invention and to the use of an electromechanical converter according to the invention in an electronic and/or electrical device.

Abstract: An acoustic resonator comprises a first electrode a second electrode and a piezoelectric layer disposed between the first and second electrodes. The acoustic resonator further comprises a reflective element disposed beneath the first electrode, the second electrode and the piezoelectric layer. An overlap of the reflective element, the first electrode, the second electrode and the piezoelectric layer comprises an active area of the acoustic resonator. The acoustic resonator also comprises a bridge adjacent to a termination of the active area of the acoustic resonator.

Abstract: A method for forming a piezoelectric component includes forming a plurality of sets of first piezoelectric elements having comb-shaped electrodes and wiring electrodes on a principal surface of a piezoelectric substrate base material, forming a protective film, a seed layer, and terminal electrodes, and removing the seed layer by etching. The method further includes preparing another piezoelectric substrate and performing resin-sealing by laminating a photosensitive resin film onto a principal surface side of the piezoelectric substrate base material. Cu electroplating is performed upon the terminal electrodes, and the piezoelectric substrate base material is cut along dicing lines to obtain individual piezoelectric components. The piezoelectric component includes a first piezoelectric element and a plurality of second piezoelectric elements with the second piezoelectric elements sealed by a resin seal layer such that a hollow section is formed between opposing principal surfaces thereof.

Abstract: In a piezoelectric resonator plate, a substrate having a main face formed in a rectangular shape is provided with a vibration portion and a joining portion that are integrated with each other, the vibration portion including a vibration region configured by forming a pair of excitation electrodes, and the joining portion having formed therein a pair of terminal electrodes that is joined to an external portion. The terminal electrodes in the pair each have a conductive bump formed therein and are electrically connected respectively to the excitation electrodes in the pair. Also, the substrate includes a post portion formed convexly at a position where the pair of terminal electrodes is formed.

Abstract: A multi-layer piezoelectric element includes a stacked body in which piezoelectric layers and internal electrode layers are alternately laminated in such a way that an end face of each of the internal electrode layers is partly exposed at a side face of the stacked body; and a pair of external electrodes configured to bond to side faces of the stacked body so as to make connection with the internal electrode layers, wherein a multiplicity of voids exists in the internal electrode layers, and the end face of each of the internal electrode layers partly exposed at the side face of the stacked body is substantially free from the voids.

Abstract: An electromechanical conversion element having high connection reliability and an actuator equipped with the electromechanical conversion element. The electromechanical conversion element includes: a displacement part capable of expanding and contracting by application of voltage and having electrode forming faces and an adhesion face which are disposed adjacent to each other; and external electrodes on the electrode forming faces, in which lead electrodes for applying voltage to the displacement part are bonded to bonding regions provided in the external electrodes, and a driven member capable of being driven by the expansion and contraction of the displacement part is bonded to the adhesion face by an adhesive. The electromechanical conversion element further includes bleed flow blocking parts on the electrode forming faces at points closer to the adhesion face than ends of the bonding regions located on the same side as the adhesion face.

Abstract: A transducer array assembly includes a support structure having a plurality of predetermined openings therein for accommodating transducer components. Flexible circuits are embedded in the support structure. Each flexible circuit has first ends being positioned in the support structure predetermined openings. Terminal blocks are joined to the second ends. Transducer elements are positioned in the support structure predetermined openings and placed in electrical communication with the flexible circuit first ends. A polymer material is provided surrounding the transducer elements, said support structure, and said flexible circuit first ends. There is also provided a method for manufacturing the transducer array.

Abstract: There are provided an electrode structure of a piezoelectric resonator and a piezoelectric resonator including the same. The piezoelectric resonator includes: a piezoelectric plate vibrated by an electrical signal; and first and second electrodes having first to fourth layers stacked on both surfaces thereof, wherein the first and third layers are made of at least one selected from the group consisting of Ti, Ni, Cr, an alloy including Ti and an alloy including Cr and the second and fourth layers are made of Ag or an alloy including Ag.

Abstract: The present invention provides electroactive polymer transducers configured for surface mode deformation to provide thickness mode actuation. The inventive transducers may find use in various applications, including but not limited to haptic feedback for user interface devices (e.g., key buttons, key pads, touch pads, touch screens, touch plates, touch sensors, etc.), fluid movement and control mechanism such as pumps and valves, breaking and clutch mechanisms, power generation, sensing, etc.

Abstract: A compositionally stratified multi-layer Ba1-xSrxTiO3 (BST) heterostructure material is described which includes a lower layer of crystallized Ba1-xSrxTiO3 perovskite oxide where x is in the range of 0.36-0.44, inclusive, deposited on a substrate; an intermediate layer of crystallized Ba1-xSrxTiO3 perovskite oxide where x is in the range of 0.23-0.27, inclusive, in contact with the lower layer; and an upper layer of crystallized Ba1-xSrxTiO3 perovskite oxide where x in the range of 0.08-0.13, inclusive, in contact with the intermediate layer. A phase shifter and/or preselector tunable device including a compositionally stratified multi-layer BST hererostructure material is described according to the present invention. Temperature sensitivity of an inventive phase shifter is reduced by at least 70% in the temperature interval of 20 to 90° C., inclusive, and by at least 14% in the temperature interval of ?10 to 20° C., inclusive, compared to a compositionally homogeneous 60/40 BST material.

Abstract: There are provided a ceramic composition for a piezoelectric actuator allowing for low-temperature sintering and a method of manufacturing the same, and a piezoelectric actuator. A Cuo powder and an MnO powder as an sintring additive are added to a PZT-PZN piezoelectric ceramic powder to allow low-temperature sintering at a temperature of 950° C. or lower, and the usage of high-priced palladium (Pd) used as materials for high-temperature inner electrodes is decreased due to lowering of the sintering temperature, and thereby to achieve cost reduction.

Abstract: The invention relates to a method of making an actuator comprising a plurality of force elements and an actuator made according to the method. The method comprises providing a coupler for coupling force from the force elements to a load; calculating a transfer function for each force element wherein the transfer functions allow the force provided to the load to be predicted; determining an error functional which is indicative of any undesired dips in the predicted force; calculating the parameters of the force elements which minimise the error functional, and coupling force elements having the calculated parameters to the coupler to make the actuator.

Abstract: Described herein are transducers and their fabrication. The transducers convert between mechanical and electrical energy. Some transducers of the present invention include a pre-strained polymer. The pre-strain improves the conversion between electrical and mechanical energy. The present invention provides methods for fabricating electromechanical devices including one or more electroactive polymers.

Abstract: A haptic actuator using a cellulose electro-active paper film is provided. The haptic actuator includes a cellulose electro-active paper film exhibiting a piezoelectric phenomenon and a metal electrode for applying electricity to the electro-active paper film, so that the haptic actuator can be provided in the form of a thin film, can manifest high transparency, and can produce displacement to the magnitude of sufficiently stimulating the sensor receptors of a user's skin in response to the applied electricity. Also, the haptic actuator is friendly to the environment and humans thanks to the use of cellulose which is an environmentally friendly material.

Abstract: Disclosed is a piezoelectric ceramic which is characterized by containing [K1-xNax]1-yLiy[Nb1-z-wTazSbw]O3 (wherein x, y, z and w each represents a molar ratio and satisfies 0?x?1, 0?y?1, 0?z?1, 0?w?1) as the main phase and K3Nb3O6Si2O7 as a sub-phase, while containing, as an additive, a Cu compound in an amount of 0.02-5.0 mol in terms of CuO relative to 100 mol of the main phase.

Abstract: Provided is a piezoelectric material including a bismuth barium niobium oxide-based tungsten bronze structure metal oxide having a high Curie temperature and being excellent in piezoelectric property. The piezoelectric material includes a metal oxide having a tungsten bronze structure represented by the following general formula (1), in which the metal oxide having a tungsten bronze structure includes Li, and a content of the Li is 0.015 weight percent or more and 0.600 weight percent or less in terms of metal with respect to 100 parts by weight of the metal oxide: AxB100O30??(1) where A represents Ba and Bi, or at least one kind or more of elements selected from the group consisting of: Na, Sr, and Ca in addition to Ba and Bi; B represents Nb, or Nb and Ta; and x represents a numerical value of 4.5<x<5.5.

Abstract: A vibrator element includes: a base part; and a vibrating arm extended from the base part in a first direction, the vibrating arm including a first region, a second region, and a third region sequentially arranged from the base part side in the first direction, the first region to the third region including first electrodes and second electrodes that generate electric fields in second directions perpendicular to the first direction in a plan view and are electrically independent from each other, wherein electric field directions of the first region and the third region and an electric field direction of the second region are opposite to each other, and the vibrating arm is expanded and contracted in the first direction by the electric fields in the second directions, and the vibrating arm is vibrated in third directions as directions perpendicular to the respective first direction and second directions.

Abstract: An actuator device includes a piezoelectric element including a lower electrode, a piezoelectric layer, and an upper electrode that are displaceably provided in sequence on a substrate. The lower electrode includes a flat center portion and an inclined end portion that descends toward the substrate. The piezoelectric layer is disposed above the lower electrode and the substrate, and includes a first, second, and third piezoelectric layer portion constituted by a plurality of columnar crystals. The columnar crystals of the first and second piezoelectric layer portions are orthogonal to the flat portion of the lower electrode and surface of the substrate, while the columnar crystals of the third piezoelectric layer portion extend orthogonally from a surface of the inclined portion and bend to be orthogonal to the surface of the upper electrode, giving the grains of the columnar crystals of the third piezoelectric layer portion larger widths and increased stress resistance.