Abstract: An ultraviolet lamp system for irradiating a substrate includes a magnetron and a memory physically attached to the magnetron. An electrodeless lamp is configured to emit ultraviolet light when excited by microwave energy generated from the magnetron. Main control circuitry is operable to read and write operational data associated with the magnetron to the memory. The ultraviolet lamp system is operated by generating microwave energy from the magnetron. A plasma within an electrodeless lamp is excited with the microwave energy to emit ultraviolet light. Operational data associated with the magnetron is tracked and written to the memory associated with the magnetron.

Abstract: In each anode vane 10, there is provided the brazing material spreading prevention groove 13 that interconnects the strap ring inserting portions 11 and 12 in parallel to the direction of the central axis Ax. With such a configuration, it is possible to prevent the residual brazing material 3a from spreading to the front end part 10a of the anode vane 10 when each anode vane 10 is brazed on the inner peripheral surface of the anode cylinder 1. Therefore, non-uniformity in thickness of the anode vanes 10 caused by the residual brazing material 3a is suppressed, and electrostatic capacity between the anode vanes 10 adjacent to each other becomes substantially constant. Thus, it is possible to obtain stable resonant frequency. In addition, it becomes easy to perform adjustment for obtaining the stable resonant frequency in that non-uniformity in initial frequency of the time when the magnetron is completely assembled decreases.

Abstract: A microwave generation device includes: a magnetron having a cathode containing a filament and an anode containing a hollow resonator arranged to oppose to each other; a filament current measuring unit; and an application voltage measuring unit for measuring voltage applied to the filament. Based on the current and the voltage obtained by the current measuring unit and the voltage measuring unit, a resistance value calculation unit obtains a resistance value of the filament. A temperature calculation unit calculates the filament temperature from the resistance value and the resistance-temperature dependent characteristic. A filament power source is controlled by a power control unit so that the filament temperature is within a predetermined temperature range.

Abstract: The magnetron includes: a cylindrical-shaped anode barrel member 10 having two openings respectively formed in the two end portions thereof; a cathode structure member 12 disposed on the center axis of the anode barrel member 10; more than one anode vane 11 disposed radially through an action space 13 in the periphery of the cathode structure member 12 and fixedly mounted on the inner wall surface of the anode barrel member 10; and, a pair of funnel-shaped pole pieces 14 and 30 respectively disposed in their associated ones of the two openings formed in the two end portions of the anode barrel member 10, each pole piece including a small-diameter flat portion FL1 having a penetration hole formed in the central portion thereof, a large-diameter flat portion FL2 having a diameter larger than the diameter of the small-diameter flat portion FL1, and a conical-shaped slanting portion SL for connecting the large-diameter flat portion FL2 and small-diameter flat portion FL1 to each other.

Abstract: A plasma lighting system comprises a resonator, a bulb received in the resonator and containing a discharge material therein for emitting light in accordance with the discharge material is exited as a plasma state, and a dielectric mirror disposed at one side of the bulb and formed of a spontaneous reflective material for spontaneously reflecting light generated from the bulb. The dielectric mirror can be included or excluded, and can smoothly reflect light without an additional reflection coating layer. The dielectric mirror is prevented from being damaged even in a high temperature, and thus a lowering of an optical efficiency is prevented when used for a long time.

Abstract: An “eggbeater” cathode comprising a transparent cathode including a plurality of longitudinally oriented cathode strips anchored at both ends between support discs and forming an open-walled hollow cylindrical structure. A cathode base is disposed substantially coaxially with a longitudinal axis of the transparent cathode and surrounded by the plurality of cathode strips, wherein the support discs secure the cathode strips to the cathode base and result in a cathode that is more robust in harsh operating environments compared with a simple transparent cathode.

Abstract: A modular magnetron for use in UV curing lamp assembly is disclosed. The modular magnetron includes a vacuum tube having a vacuum tube body, a top assembly, and a bottom assembly. The top assembly is configured to substantially overlay the vacuum tube. The bottom assembly is configured to substantially extend about the vacuum tube, the vacuum tube being positioned to partially protrude from the bottom assembly, the bottom assembly including a cooling assembly configured to employ a flexible clamp-type fitting about the vacuum tube body for substantially maintaining thermal and electrical conductivity. The top assembly is configured to be releasably fastened to the bottom assembly about the vacuum tube with removable fasteners.

Abstract: An ultraviolet lamp assembly and corresponding methods is operable to generate ultraviolet light for irradiating a substrate. The lamp assembly includes a magnetron, an electrodeless lamp for emitting ultraviolet light when excited by microwave radiation generated from the magnetron, and a power control circuit arrangement configured to control an output power of the microwave radiation generated by the magnetron corresponding to the intensity of ultraviolet light produced by the lamp. A first control loop of the power control circuit is configured to regulate an input current to the magnetron based upon an input current setting associated with a desired intensity of UV light output of the lamp and a second control loop coupled to the first control loop configured to adjust the input current setting used by the first control loop to regulate the input current to the magnetron based upon an input power to the magnetron, which is proportional to the intensity of UV light output from the lamp.

Abstract: A gap is provided between a cooling block 22 and a magnetic yoke 20. A cushioning material 25 is interposed in the gap to fix the cooling block 22 relatively to the magnetic yoke 20 by screws. Thus, even when metals having a large difference in tendency of ionization are used in the cooling block 22 and the magnetic yoke 20, the corrosion of the metals hardly arises. Further, the cushioning material 25 is provided in the gap between the cooling block 22 and the magnetic yoke 20, so that an impact or vibration to an anode tubular member 10 can be mitigated and the disconnection and deficiency of the filament of a cathode structural member can be reduced. Further, since a dimensional unevenness of the cooling block 22 or the magnetic yoke 20 can be absorbed by the cushioning material 25, the dimensional accuracy of parts does not need to be improved to make an assembly easy.

Abstract: A plasma lamp apparatus includes a post structure with a material overlying a surface region of the post structure, which has a first end and a second end. The apparatus also has a helical coil structure configured along the post structure. The apparatus includes a bulb with a fill material capable of emitting electromagnetic radiation. A resonator coupling element configured to feed radio frequency energy to at least the helical coil causes the bulb device to emit electromagnetic radiation.

Abstract: A microwave generator (10) having a hollow central electrode (12) with a front face including hollow emmission element (18), and having an outer electrode (14), which coaxially surrounds the central electrode (12) along an axially extending resonator section (16). The two electrodes (12, 14) define a spark gap (36) and are connected to a high-voltage source (38). An ultracompact microwave generator (10) is implemented by the high-voltage source (38) being arranged in the hollow central electrode (12) of the microwave generator (10) rather than on the outside thereof.

Abstract: A photon source capable of emitting, for example, a single photon or a single pair of photons on demand. The photon source may include an excitation region where a single instance of a quantum system is excited using excitation energy. A Stimulated Raman Adiabatic Passage (STIRAP) technique can be used for exciting the quantum system to a desired energy level. The photon source may include a photon emission region physically displaced from the excitation region. A transport device can be used for controllably moving an excited quantum system from the excitation region to the photon emission region. The photon emission region may include a resonant cavity tuned to the de-excitation frequency of the quantum system for inducing de-excitation of the quantum system and emission of a photon. The photon emission resonant cavity may be switchably coupled to an output port by a tunable resonant cavity coupling device.

Abstract: A plasma lamp having a lamp bulb (1) which contains a material which is suitable for plasma formation with microwave excitation radiation, having a supply line (9) for supplying the microwave excitation radiation to the lamp bulb (1) and having a reflector (11), which at least partially surrounds the lamp bulb (1), for directing the light which is emitted from the plasma in the lamp bulb (1), wherein the lamp bulb (1) is arranged within a microwave resonator (5) such that a high microwave field strength is achieved in the area of the lamp bulb (1), and wherein the microwave resonator (5) has metallic walls (6, 4, 7), at least one wall section (7) of which is designed to be light-transmissive with an electrically conductive shielding structure, allows a compact design and an improved light yield in that the reflector (11) is arranged within the microwave resonator (5), and in that the microwave resonator (5), together with the reflector (11), is matched to optimum energy introduction into the lamp bulb (1).

Abstract: An optical communication system is provided which includes an optical signal transmitter which communicates high bandwidth, high power frequencies. The optical signal transmitter includes a high efficiency/high power optical source such as an optical magnetron or a phased array source of electromagnetic radiation, and a modulator element. The modulator element may be within a resonance cavity of the high efficiency/high power optical source (intra cavity) or external to the cavity (extra cavity). The modulator element serves to modulate output radiation of the high efficiency/high power optical source to produce a modulated high frequency optical signal which may be transmitted through the air. The optical signal transmitter is particularly useful in providing the last mile connection between cable service operators and end users.

Abstract: The invention consists, generally, of a method for automatically reducing power to an electron emitting cathode by sensing an operating condition of the electron emitting cathode, calculating a condition number based upon the operating condition, comparing the condition number to a threshold value, and reducing the power to the electron emitting cathode when the condition number is greater than the threshold. The apparatus and method may be implemented upon a system having a high voltage power source, an RF tube, a control processor, and a signal processor.

Abstract: A microwave generator has at least one resonator with two mutually opposite resonator electrodes which are separated by a spark gap. The spark gap breaks down when a high-voltage is applied. The resonator electrodes are designed in the area of the spark gap such that they result in a two-dimensional or three-dimensional section with a substantially constant, minimum electrode separation.

Abstract: An array of ultra-small structures of between ones of nanometers to hundreds of micrometers in size that can be energized to produce at least two different frequencies of out put energy or data, with the ultra small structures being formed on a single conductive layer on a substrate. The array can include one row of different ultra small structures, multiple rows of ultra small structures, with each row containing identical structures, or multiple rows of a variety of structures that can produce all spectrums of energy or combinations thereof, including visible light.

Abstract: A microwave tube including: a) an electron gun capable of producing a beam of electrons in the form of a hollow axisymmetrical cylinder in repetitive operation; and b) a body in which the beam is intended to propagate, the body ending with a collector and being provided with means for applying an axial magnetic field for guiding the beam and, upstream from the collector, with a resonant structure crossed by the beam, intended to group the electrons into a succession of packets (P). The resonant structure is formed with two coupled cavities which follow along the axis (Z) of the beam, the coupling being achieved via an inter-cavity region crossed by the beam, this structure having axial symmetry the axis of which is that of the beam and being dimensioned so that the transformation of the electrons in packets is accomplished at a frequency which is that of the ? resonant mode of the resonant structure.

Abstract: In the magnetron, an upper end hat 122A is used as a composing element of a cathode structure member 12A and includes a portion 122Aa which is in contact with one end portion 121a of a filament coil 121. The thickness of the portion 122Aa is reduced, whereby the portion 122Aa is held not in contact with a center lead 124. Owing to this, heat generated in the filament coil 121 can travel to the upper end hat 122A without traveling directly to the center lead 124. Therefore, even when the quantity of input power is reduced to such a degree as to be able to reduce noise, or even when the electron radiation area of the filament coil 121 is reduced, the getter effect can be displayed fully. As a result of this, noise reduction and cost reduction can be realized at the same time.

Abstract: A cathode for use in a magnetron may include a plurality of longitudinally oriented emitter regions disposed around a longitudinal axis of the cathode. Each emitter region may be configured to emit electrons and adjacent emitter regions may be separated from one another by openings.

Abstract: A plasma lighting system having a thin metallic film resonator includes: an electrodeless bulb emitting light by making luminous material filled therein converted into plasma state; and a resonator housing the electrodeless bulb in an inner space, transmitting the light generated from the electrodeless bulb, and blocking the microwave generated from a microwave generator and applied to the inner space from being leaked out so that a resonance mode is provided to make the electrodeless bulb emit light, wherein the resonator is a thin metallic film resonator including a thin metallic film formed in a cylindrical shape and a supporting member extended along the inner peripheral surface of the thin metallic film so as to support the thin metallic film.

Abstract: An electromagnetic radiation source is disclosed that produces a single mode operation at a desired operating frequency. The electromagnetic radiation source is included in a wide variety of applications including a wireless power transmission system, a system for providing wireless/high-bandwidth communications in accordance with the present invention, a lighting system, an irradiation system, a weapons system, etc.

Abstract: A light-emitting device, includes: an emitter sealed with a gas emitting light caused by a microwave; a high frequency power supply section including a diamond SAW oscillator and outputting a high frequency signal being output from the diamond SAW oscillator to a subsequent stage; and a waveguide unit emitting the high frequency signal being input from the high frequency power supply section towards the emitter as the microwave.

Abstract: The present invention aims to provide a magnetron in which the getter material is used under the temperature range in which the gettering effect is sufficiently exerted, and even if the getter material evaporates, the vapor of the getter material is not vapor-deposited on the stem ceramic and the antenna ceramic, and therefore, unwilling electrical conduction or performance deterioration is prevented. The magnetron according to the present invention includes an anode cylinder having a cylindrical shape with open side ends and including an inner wall and a plurality of anode vane radially provided on the inner wall, a cathode part provided on a central axis of the anode cylinder, a pair of pole piece, one of which is provided on the one of the open side end and the other one of which is provided on the other open side end, a mounting part provided in the anode cylinder as a different part from the pole piece, and a getter material provided on the mounting part.

Abstract: For an anode assembly 51 of a magnetron, a plurality of plate shaped vanes 54 radially arranged at an inner circumference of the roughly round shaped anode assembly 53 has a end portion arranged at a central axis of the anode assembly 53 with a step shape Df having a reduced thickness in a range of predetermined length L from an end portion, so that increase of the facing area of the respective adjacent plate shaped vanes 54 is suppressed while the separation distance of the end portions of the vanes is secured.

Abstract: A magnetron for microwave oven has an anode cylinder, vanes (height: H (mm)), a cathode spirally extending along the central axis, a pair of end hats (outer diameter: DEH1 (mm), DEH2 (mm)) fixed to both ends of the cathode, and a pair of pole pieces. Vanes extend from an inner surface of the anode cylinder to the central axis. Free ends of the vanes form a vane inscribing circle (diameter: Da (mm)). Pole pieces expand like funnels from through-holes (inner diameter: DPP1 (mm), DPP2 (mm)) facing to the end hats and pinch the cathode. The shape of the magnetron satisfies, H?8.5, H/Da?0.95, DEH1/DPP1?0.8, DEH1/DPP2?0.8, DEH2/DPP1?0.8, DEH2/DPP2?0.8, 0.92?Da/DPP1?0.95, and 0.92?Da/DPP2?0.95.

Abstract: A microwave generator comprises a magnetron having an anode and a cathode, oscillating by the current supplied to the anode, and generating a microwave, electric-field controlling means for controlling one of the frequency/phase and the amplitude of the microwave by varying the electric field, and magnetic-field varying means for stabilizing the other by varying the magnetic field.

Abstract: A microwave generation device includes: a magnetron having a cathode containing a filament and an anode containing a hollow resonator arranged to oppose to each other; a filament current measuring unit; and an application voltage measuring unit for measuring voltage applied to the filament. Based on the current and the voltage obtained by the current measuring unit and the voltage measuring unit, a resistance value calculation unit obtains a resistance value of the filament. A temperature calculation unit calculates the filament temperature from the resistance value and the resistance-temperature dependent characteristic. A filament power source is controlled by a power control unit so that the filament temperature is within a predetermined temperature range.

Abstract: An electromagnetic radiation source is disclosed that produces a single mode operation at a desired operating frequency. The electromagnetic radiation source is included in a wide variety of applications including a wireless power transmission system, a system for providing wireless/high-bandwidth communications in accordance with the present invention, a lighting system, an irradiation system, a weapons system, etc.

Abstract: A middle output electrodeless lighting system comprising: a resonator having a certain inner space and adapted to form a resonance mode by shielding a discharge of microwaves applied therein to the exterior and to allow a discharge of light generated to the exterior; an electrodeless bulb including a light emitting portion positioned in the inner space of the resonator to emit (generate) light upon plasmarizing light emitting materials filled therein by the microwaves applied to the resonator, and a supporting member to support the light emitting portion thus to allow the light emitting portion to be arranged up to a certain height in the inner space of the resonator; and an initial lighting unit disposed at one side of the inner space of the resonator to enhance concentration of microwaves toward the electrodeless bulb so as to stabilize an initial lighting of the electrodeless bulb.

Abstract: Test apparatus for examining the operation and functioning of ultra-small resonant structures, and specifically using an SEM as the testing device and its electron beam as an exciting source of charged particles to cause the ultra-small resonant structures to resonate and produce EMR.

Abstract: The invention relates to a high frequency heating apparatus and provides a tracking method of a frequency modulation in order to prevent an extension of the harmonic current component of an oscillation threshold ebm which varies from moment to moment in accordance with a change in the temperature of a magnetron. A driving signal for driving a first semiconductor switching element (3) and a second semiconductor switching element (4) is transmitted to a driving control IC unit (14), and an input reference signal Ref is used to perform an input current fixed control. In this case, a variation amount of the input current of the input reference signal Ref is understood as an accumulation information POW and a constant is optimally configured in a resistor network in an ebm-tracking bias circuit (20).

Abstract: According to the present invention, a microwave generator includes a variable voltage provided from a first transformer to a second transformer having a secondary winding split into a filament winding cathode low AC signal and a secondary winding providing a high voltage which is doubled and rectified in a half-wave voltage doubler for providing a pulsed DC signal through a ballast resistor to a magnetron anode responsive to an electromagnetic field. In still further accord with the present invention, a microwave sample cavity includes a waveguide, and a hole for receiving a sample to be microwave-heated, and an inductive tuning post all on a straight line, wherein the hole is adjacent the waveguide and the post is distant from the waveguide.

Abstract: A microwave generator (10) having a hollow central electrode (12) with a front face including hollow emmission element (18), and having an outer electrode (14), which coaxially surrounds the central electrode (12) along an axially extending resonator section (16). The two electrodes (12, 14) define a spark gap (36) and are connected to a high-voltage source (38). An ultracompact microwave generator (10) is implemented by the high-voltage source (38) being arranged in the hollow central electrode (12) of the microwave generator (10) rather than on the outside thereof.

Abstract: Disclosed herein is a magnetron. The magnetron comprises an anode cylinder, upper and lower magnets provided to upper and lower portions of the anode cylinder, and upper and lower magnetic poles connected to the magnets, respectively. Each of the magnets has an inner diameter of 19˜21 mm, a thickness of 11.5˜12.5 mm, and an outer diameter of 50˜54 mm.

Abstract: A device includes at least one ultra-small resonant structure; and shielding constructed and adapted to shield at least a portion of said ultra-small resonant structure with a high-permeability magnetic material. The magnetic material is formed from a substance selected from a non-conductive magnetic oxide such as a ferrite; a cobaltite, a chromite, and a manganite. The magnetic material may be mumetal, permalloy, Hipernom, HyMu-80, supermalloy, supermumetal, nilomag, sanbold, Mo-Permalloy, Ultraperm, or M-1040.

Abstract: Microwave oven components are formed of a conductively doped resin-based material. The conductively doped resin-based material comprises micron conductive powder(s), conductive fiber(s), or a combination of conductive powder and conductive fibers in a base resin host. The percentage by weight of the conductive powder(s), conductive fiber(s), or a combination thereof is between about 20% and 50% of the weight of the conductively doped resin-based material. The micron conductive powders are metals or conductive non-metals or metal plated non-metals. The micron conductive fibers may be metal fiber or metal plated fiber. Further, the metal plated fiber may be formed by plating metal onto a metal fiber or by plating metal onto a non-metal fiber. Any platable fiber may be used as the core for a non-metal fiber. Superconductor metals may also be used as micron conductive fibers and/or as metal plating onto fibers in the present invention.

Abstract: In a magnetron having a body 1 defining an anode 2 divided into resonant cavities 4 by vanes 3 and having a coaxial cathode 5, r.f. energy produced when a magnetic field is applied parallel to the axis of the anode is launched along a waveguide 8 by an antenna 6 in an evacuated region of the magnetron closed by a dielectric window 19. The latter has sector shaped conducting areas on its surface symmetrically arranged with respect to the antenna, the inductance of which balance the capacitance of the dielectric window, thereby reducing reflections at the window.

Abstract: Described is a plasma electrode-less lamp. The device comprises an electromagnetic resonator and an electromagnetic radiation source conductively connected with the electromagnetic resonator. The device further comprises a pair of field probes, the field probes conductively connected with the electromagnetic resonator. A gas-fill vessel is formed from a closed, transparent body, forming a cavity. The gas-fill vessel is not contiguous with (detached from) the electromagnetic resonator and is capacitively coupled with the field probes. The gas-fill vessel further contains a gas within the cavity, whereby the gas is induced to emit light when electromagnetic radiation from the electromagnetic radiation source resonates inside the electromagnetic resonator, the electromagnetic resonator capacitively coupling the electromagnetic radiation to the gas, which becomes a plasma and emits light.

Abstract: An optical communication system is provided which includes an optical signal transmitter which communicates high bandwidth, high power frequencies. The optical signal transmitter includes a high efficiency/high power optical source such as an optical magnetron or a phased array source of electromagnetic radiation, and a modulator element. The modulator element may be within a resonance cavity of the high efficiency/high power optical source (intra cavity) or external to the cavity (extra cavity). The modulator element serves to modulate output radiation of the high efficiency/high power optical source to produce a modulated high frequency optical signal which may be transmitted through the air. The optical signal transmitter is particularly useful in providing the last mile connection between cable service operators and end users.

Abstract: A magnetron 10 is equipped with a helical filament 39, as an element of a cathode assembly, arranged on a central axis of an anode cylindrical body 13. Assuming that a resistance value of the filament 39 before forming the carbonized layer is R1 and a resistance value of the filament 39 after forming the carbonized layer is R2, a thickness of the carbonized layer 42 of the filament 39 is determined such that a carbonization rate Rx defined by the equation “Rx={(R2?R1)/R1}×100” in a range of from 30 to 50%.

Abstract: An RMIM electrode, a method for manufacturing the RMIM electrode, and a sputtering apparatus using the RMIM electrode, wherein the RMIM electrode includes a magnet unit including a cylinder-shaped magnet located at a center of the magnet unit and a plurality of ring-shaped magnets having increasingly larger diameters surrounding the cylinder-shaped magnet; and a driver unit for supporting and for off-axis-rotating the magnet unit, wherein in the magnet unit, adjacent magnets have opposite magnetization directions.

Abstract: A magnetron output arrangement includes a coaxial output adapted to be coupled in an endfire configuration to a rectangular waveguide. The waveguide has a flange for mating with the magnetron output arrangement. The coaxial output includes a central conductor. The output arrangement further includes a plate located in a predetermined position with respect to the central conductor. The plane of the plate is arranged to be substantially perpendicular to the axis of the coaxial output. The plate is located a predetermined distance from the end of the central conductor, such that the coaxial output in use couples with the plate so that the output coupling is substantially the same regardless of the type of waveguide flange employed.

Abstract: A high-power microwave generator employing a plurality of inexpensive commercial magnetron tubes cross-coupled by means of a secondary coupling path between each magnetron output pair, whereby a portion of the output energy from a first magnetron tube is injected into a second magnetron tube and a portion of the output energy from the second magnetron tube is similarly injected into the first magnetron tube. The resulting cross-injection of microwave energies brings the respective magnetron tube pair into a phase-lock sufficiently stable to permit coherent combination of their outputs for many high-power microwave applications, such as directed energy weapon systems. The magnetron phase-locking system requires no external components other than the secondary coupling paths of this invention.

Abstract: Disclosed is an electrodeless lighting system capable of being used as an optical source of an electronic device by being minimized and capable of obtaining an optimum impedance matching and controlling a resonance frequency.

Abstract: A magnetron is configured so that an antenna lead 17 connected to a desired position of an anode segment 2 passes through a magnetic pole piece 7 and a metal cylinder 8 so as not to make contact therewith and is connected to the output portion of the magnetron, and so that the electrical length L1 of this antenna lead 17 between the opening end of a third harmonic restraint choke 15 and the connection portion of the anode segment 2 is 1/2 of the wavelength (?) of the third harmonic, thereby restraining the third harmonic and the side bands of the third harmonic.

Abstract: A magnetron includes semi-circularly shaped electric field adjusting grooves provided on surfaces of outer ends of vanes brought into contact with an inner surface of a positive polar body to make distribution of an electric field uniform on the surfaces of the outer ends of the vanes. Accordingly, the electric field becomes uniform by the electric field adjusting grooves provided on the surfaces of the outer ends of the vanes, so that generation of undesirable harmonics is suppressed.

Abstract: An electrodeless lighting system includes: a waveguide for guiding microwave energy generated from a microwave generator; and a resonator formed in a mesh structure allowing the microwave energy having passed the waveguide to resonate therein and passing light, and having around the bulb a microwave leakage preventing portion having a relatively low perforation ratio per unit area so that microwave energy is concentrated on the bulb positioned therein. Accordingly, leakage of microwaves is minimized and luminous efficiency is improved.

Abstract: A magnetron for microwave ovens includes an anode cylinder, a plurality of plate-shaped vanes radially arranged along an inside surface of the anode cylinder, one or more strap rings to electrically connect the plurality of plate-shaped vanes to each other, an antenna connected to one of the plurality of vanes to radiate microwaves generated from the plurality of vanes. Each of the vanes is plated with a brazing material to be brazed to one or more of the anode cylinder, the one or more strap rings and the antenna, and the brazing material has a plating depth of about 2.25 to 8 ?m. The magnetron having the anode allows a manufacturing process of the anode to be simplified to reduce manufacturing time and equipment costs. Furthermore, the anode prevents brazing defects, and allows the magnetron to have an optimal performance.

Abstract: An RMIM electrode, a method for manufacturing the RMIM electrode, and a sputtering apparatus using the RMIM electrode, wherein the RMIM electrode includes a magnet unit including a cylinder-shaped magnet located at a center of the magnet unit and a plurality of ring-shaped magnets having increasingly larger diameters surrounding the cylinder-shaped magnet; and a driver unit for supporting and for off-axis-rotating the magnet unit, wherein in the magnet unit, adjacent magnets have opposite magnetization directions.