Abstract: The present invention relates to a tool holder for adapting a tool to be measured in a measuring arrangement. Such tool holder can, for example, include a spindle or an adapter of a tool presetter to be inserted in such spindle. Furthermore, this invention refers to a measuring arrangement for measuring of tools as well as a method for calibration of such measuring arrangement to a zero-point of the tool.

Abstract: A coordinate measuring machine has a probe head, a calibrating body and an apparatus for recording and correcting measured values obtained by the probe head. A mechanical flexibility at predetermined points on the surface of the calibrating body is determined. The mechanical flexibility is stored in the apparatus in the form of a data record. The calibrating body is scanned point by point by means of the probe head in order to obtain the measured values. Thereafter, the probe head is calibrated by correcting the measured values using the data record. A similar approach can also be used on workpieces having a known mechanical flexibility.

Abstract: An adjustment arrangement for a measuring head, in particular an adjustment arrangement in order to simplify the calibration of a measurement probe (3) supported by a measuring head in a coordinate measuring machine, where the adjustment arrangement includes an element for the determination of the measured position of the probe ball (7), and where an element is arranged to turn or displace, or both, the probe ball in order to determine a newly measured position of the probe ball, whereby the offset of the probe ball (7) can be determined.

Abstract: A method and apparatus for mounting a calibration sphere to a calibration fixture for Coordinate Measurement Machine (CMM) calibration and qualification is described, decreasing the time required for such qualification, thus allowing the CMM to be used more productively. A number of embodiments are disclosed that allow for new and retrofit manufacture to perform as integrated calibration sphere and calibration fixture devices. This invention renders unnecessary the removal of a calibration sphere prior to CMM measurement of calibration features on calibration fixtures, thereby greatly reducing the time spent qualifying a CMM.

Abstract: A method for determining probe tip diameters with improved accuracy and reliability that includes performing a routine for determining probe tip diameter multiple times with the arm of the coordinate measurement machine in different machine positions. Diameter values associated with each of the calibration routines may be combined in a manner that provides more accurate diameter measurements.

Abstract: A method of calibrating a measurement probe (10) mounted on a machine is described. The measurement probe (10) has a stylus (14) with a workpiece contacting tip (16). The method comprises determining a probe calibration matrix that relates the probe outputs (a,b,c) to the machine coordinate system (x,y,z.). The method comprising the steps of scanning a calibration artefact (18) using a first probe deflection (d1) to obtain first machine data and using a second probe deflection (d2) to obtain second machine data. The first and second machine data are used to obtain a pure probe calibration matrix in which any machine errors are substantially omitted. Advantageously, the method determines the pure probe matrix numerically based on the assumption that the difference between the first and second machine position data is known.

Abstract: A probe straightness measuring method includes: placing a measurement jig having a measurement reference surface with a known profile error on a stage surface of an XY stage so that the measurement reference surface is slanted in a moving direction of the XY stage; measuring a displaced position of the measurement piece by a displacement detector of the probe each time the XY stage is moved for a predetermined distance while controlling a driving actuator so that the measurement piece of a probe touches the measurement reference surface at a constant pressure; and calculating a straightness error of a measurement-piece moving mechanism on a basis of a measured position of the measurement piece obtained in the measuring, a nominal position of the measurement piece obtained by a calculation and a slant angle of the measurement reference surface.

Abstract: The present invention relates to a three-dimensional measuring assembly for determining the relative position of components, such as machine parts and/or instruments. The invention also relates to a method for determining the relative position of components, such as more particularly machine parts, using a reference member according to any of the foregoing claims.

Abstract: Position measurement apparatus, such as hexapod co-ordinate measuring machine, is described that comprises a thrust frame and a metrology frame. The thrust frame comprises a load carrying base connected to a moveable platform by a plurality of powered extendable legs. The metrology frame comprising a metrology base attached to the load carrying base by a base attachment mechanism such as kinematic mounts. The base attachment mechanism is arranged to prevent any distortions of the load carrying base being transmitted to the metrology base.

Abstract: A device forming a sight-vane for a three-dimensional measuring machine. It includes a cylinder-shaped body (1), a thin part (5), and a tail (6). The part (5) and the tail (6) are provided with slots enabling the expansion or the withdrawal of the tail (6) in relation to the nominal diameter thereof. A contact face (2) is calibrated in relation to a bearing face (3). A cylinder (4) and the contact face (2) are calibrated and intended for the palpation. The exterior of the tail (6) is calibrated, the interior is provided with a conical (11) bore and the end thereof is provided with a wedge-shaped chamfer (13). The contact face (2) is provided with a countersink (9) and a threading (8) suitable for receiving an expansion screw (10) at the conical end. The device is useful as a palpation point for a measuring machine.

Abstract: Provided is method of calibrating Y-axis direction position of contact tip of form measuring instrument including: table rotatable about Z-axis; contact tip capable of contacting workpiece; and contact tip driving means to drive contact tip in at least X- and Z-axis directions among X-, Y- and Z-axis directions perpendicular to one another. Method performs tracing measurement of inclined surface or inclined cylinder side surface which is part of workpiece obtained by inclining workpiece placed on table about Y-axis, or side surface of off-centered cylinder having center axis off-centered in X-axis direction by rotating surface to obtain measurement value at each angular position of rotation of table, obtains angular position of rotation at which smallest value among measurement values of tracing measurement is detected as angular position of rotation with smallest detected value, and adjusts Y-axis direction position of contact tip based on angular position of rotation with smallest detected value.

Abstract: A method is disclosed which is suitable for the calibration of a measuring table (20) of a coordinate measuring machine (1). For this purpose, a mask (2) is deposited in a three-point support of the measuring table (20), wherein the mask (2) used for the calibration of the measuring table (20) is a mask (2), which is used for the semiconductor production. The measurement of positions of a plurality of different structures (3) which are arranged in a distributed manner on the mask (2) is carried out. The structures (3) are available in an initial orientation on the mask (2). The mask (2) is rotated and the position of the structures (3) is determined in the rotated orientation. Afterwards, the mask (2) is shifted and the position of the structures (3) is also determined. A total correction function for eliminating coordinate-dependant measuring errors is determined, wherein the total correction function has a first correction function and a second correction function.

Abstract: A corrected ball diameter calculating method includes: preparing a reference gauge that has at least one reference peripheral surface of an outer peripheral surface and an inner peripheral surface; valuing of diameter values of the reference peripheral surface at a plurality of different height positions from a bottom surface of the reference gauge; calculating calibrated diameter values per each of the height positions; placing the reference gauge on the rotary table and causing the stylus tip to touch a plurality of measurement sites on the reference peripheral surface at each of the height positions to calculate measured diameter values that are diameter values of a circle passing through the neighborhood of center points of the stylus tip; and calculating the corrected ball diameters per each of the height positions from the calibrated diameter values and the measured diameter values that are calculated per each of the height positions.

Abstract: A mesoscale calibration artifact, also called a hybrid artifact, suitable for hybrid dimensional measurement and the method for make the artifact. The hybrid artifact has structural characteristics that make it suitable for dimensional measurement in both vision-based systems and touch-probe-based systems. The hybrid artifact employs the intersection of bulk-micromachined planes to fabricate edges that are sharp to the nanometer level and intersecting planes with crystal-lattice-defined angles.

Abstract: A method is disclosed which is suitable for the calibration of a measuring table (20) of a coordinate measuring machine (1). For this purpose, a mask (2) is deposited in a three-point support of the measuring table (20), wherein the mask (2) used for the calibration of the measuring table (20) is a mask (2), which is used for the semiconductor production. The measurement of positions of a plurality of different structures (3) which are arranged in a distributed manner on the mask (2) is carried out. The structures (3) are available in an initial orientation on the mask (2). The mask (2) is rotated and the position of the structures (3) is determined in the rotated orientation. Afterwards, the mask (2) is shifted and the position of the structures (3) is also determined. A total correction function for eliminating coordinate-dependant measuring errors is determined, wherein the total correction function has a first correction function and a second correction function.

Abstract: A measurement apparatus calibrated to measure an absolute diameter of a part in a shop floor environment. The measurement apparatus includes a calibration that includes compensation factors for thermal expansion, shifting of measurement parts (arm, support tower, and related laser), and variances of these parts. The resulting measurements report an absolute diameter of a part to a higher degree of accuracy than previously possible. Also, the calculated compensation factor eliminate the need for an isolated, climate-controlled measurement room.

Abstract: A method for correcting the measuring errors caused by the lens distortion of an objective in a coordinate measuring machine is disclosed. For a plurality of different types of structures, the lens distortion caused by an objective is determined in an image field of the objective. The position of a type of structure is determined in the image field of the objective by a measuring window. The correction of the lens distortion required for the type of structure to be measured is retrieved from the database as a function of the type of structure to be measured.

Abstract: The present system, method, article of manufacture, software, and apparatus is an “intelligent” probe system and components thereof and may openly encompass, in at least an embodiment, an embedded IC chip located in an interchangeable probe(s) which offers repeatable, fast, easy, and error free probe swapping on a CMM.

Abstract: Validating the error map of a CMM using a calibrated probe including a stylus, the probe capable of rotation about at least one axis, includes placing a calibration artifact on a table of the CMM, the table having an upper surface in an XY plane; positioning a Z-ram of the CMM in a first calibration position and a second calibration position with respect to the artifact such that the stylus contacts the artifact; calculating a measured value representing the measured length between the first and second calibration positions; calculating a nominal value based on the length of the stylus of the probe; comparing the nominal value to the measured value; and updating the error map of the CMM if the measured value differs from the nominal value by more than a predetermined value. The probe and/or the stylus moves relative to the Z-ram such that the calibration artifact remains stationary while the Z-ram is positioned in the first calibration position and the second calibration position.

Abstract: A method of calibrating a measurement scale in a motorised scanning head using a reference artefact is described. The method comprises the step of rotating a surface sensing device, such as a scanning probe, mounted on the scanning head about at least one axis of the scanning head to move the surface sensing device into a plurality of different angular orientations relative to the reference artefact. A step is then performed of measuring, with the surface sensing device, at least one property of the reference artefact at each of the different angular orientations. An error map or function is then created for at least one measurement scale of the scanning head using the properties of the reference artefact measured and optionally known or calibrated properties of that reference artefact. The method may comprise use of co-ordinate positioning apparatus, such as a co-ordinate measuring machine, to move the scanning head. The reference artefact may comprise a single feature or an array of features.

Abstract: To provide a calibration jig which can perform three-dimensional calibration of measurement errors in a spectacle frame shape measuring apparatus. The calibration jig (30) is used for calibrating measurement errors of the spectacle frame shape measuring apparatus for measuring a shape of a spectacle frame, etc. A trace groove traced by a measuring probe of the spectacle frame shape measuring apparatus is a frame groove (20) formed in an inner circumference of rims (2A and 2B) of the spectacle frame and provided for engaging with the bevel of a spectacle lens. The rims are secured to a frame body (31) having rigidity higher than that of the rim. The frame groove has a displacement r in the radial direction, a displacement ? in the rotational direction, and a displacement z in the height direction.

Abstract: The invention relates to a method of calibrating an ophthalmic-lens-piercing machine, a device used to implement one such method and a ophthalmic-lens-machining apparatus comprising one such device. The inventive method applies to a machine including a piercing tool, a lens support which is associated with a first reference mark (O1, X1, Y1), and programmable tool-control means which are associated with a second reference mark expressing set co-ordinates which define a target piercing point (M). A template is placed on the support, and the template includes pre-applied markings defining a third reference mark (O3, X3, Y3), such that the third reference mark in essentially in line with the first reference mark. The template is pierced at a pre-determined point corresponding to a target point, and an image of the template this point position, and a correction is applied to the set co-ordinates that can compensate for the misalignment.

Abstract: A method for improving the reproducibility of a coordinate measuring machine and its accuracy is disclosed. Using at least one measuring field of a camera, a plurality of images of at least one structure on the substrate are recorded. The substrate is placed on a measuring stage traversable in the X coordinate direction and the Y coordinate direction, the position of which is determined during imaging using a displacement measuring system. The measuring field is displaced by the amount of the deviation determined.

Abstract: A tape measure calibrator includes a base with a first reference surface and a second reference surface. A pull calibration mark is made on the base which indicates a first distance from the first reference surface. A push calibration mark is also made on the base which indicates a second distance from the second reference surface, in which the first distance and the second distance are substantially equal.

Abstract: An articulated arm portable coordinate measurement machine (PCMM) can be calibrated or recalibrated using a coordinate measurement machine (CMM). In one method for PCMM calibration, the CMM can be moved to one position, and the PCMM moved to a contact position where a probe head of the PCMM contacts a probe head of the PCMM. The PCMM and the CMM can be operatively coupled, for example, by a synchronizing cable such that position data from the PCMM and the CMM can be obtained at the contact position. The PCMM can be repositioned one or more times to obtain position data at multiple PCMM positions. The CMM can be repositioned as desired and additional contact position data sets obtained by subsequent positioning and repositioning of the PCMM. Various probe head types such as touch trigger probes, hard probes, and contact probes can be used in the calibration systems and methods.

Abstract: A method is proposed for measuring tools on a machine tool with a measuring device, wherein by means of a movement of a spindle of the machine tool the measuring device is temporarily positioned at a measuring point on the machine tool in order to carry out one or more measurements, the measuring point differing from a spindle mount. Furthermore, a measuring apparatus is proposed which is embodied in such a way that the measuring device can be positioned at a measuring point on the machine tool for a measuring operation by means of a spindle movement of a machine tool, said measuring point differing from a spindle mount.

Abstract: A coordinate measuring machine compensates for hysteresis error caused by friction at the non-driven end of the bridge. The bridge may have a single drive and/or a single scale. The methods, systems, and apparatuses compensate for errors in the x-direction and/or errors in the y-direction caused by rotation of the bridge. Some embodiments compensate for hysteresis errors in the x-direction caused by a vertically-movable ram.

Abstract: A method of calibrating a measurement probe (10) mounted on a machine is described. The measurement probe (10) has a stylus (14) with a workpiece contacting tip (16). The method comprises determining a probe calibration matrix that relates the probe outputs (a,b,c) to the machine coordinate system (x,y,z.). The method comprising the steps of scanning a calibration artefact (18) using a first probe deflection (d1) to obtain first machine data and using a second probe deflection (d2) to obtain second machine data. The first and second machine data are used to obtain a pure probe calibration matrix in which any machine errors are substantially omitted. Advantageously, the method determines the pure probe matrix numerically based on the assumption that the difference between the first and second machine position data is known.

Abstract: An articulated arm portable coordinate measurement machine (PCMM) can be calibrated or recalibrated using a coordinate measurement machine (CMM). In one method for PCMM calibration, the CMM can be moved to one position, and the PCMM moved to a contact position where a probe head of the PCMM contacts a probe head of the PCMM. The PCMM and the CMM can be operatively coupled, for example, by a synchronizing cable such that position data from the PCMM and the CMM can be obtained at the contact position. The PCMM can be repositioned one or more times to obtain position data at multiple PCMM positions. The CMM can be repositioned as desired and additional contact position data sets obtained by subsequent positioning and repositioning of the PCMM. Various probe head types such as touch trigger probes, hard probes, and contact probes can be used in the calibration systems and methods.

Abstract: A method for providing error compensation in a double flank functional gear testing apparatus is disclosed in which a total composite signal is generated and errors due to master gears, master gear spindles, arbors, and work gear holding devices are eliminated from the total composite signal, such that the error due to a work or precision setting master gear is distilled.

Abstract: Position measurement apparatus, such as hexapod co-ordinate measuring machine, is described that comprises a thrust frame and a metrology frame. The thrust frame comprises a load carrying base connected to a moveable platform by a plurality of powered extendable legs. The metrology frame comprising a metrology base attached to the load carrying base by a base attachment mechanism such as kinematic mounts. The base attachment mechanism is arranged to prevent any distortions of the load carrying base being transmitted to the metrology base.

Abstract: For determining a space coordinate of a measurement point on a measuring object, the measurement point is approached with a probe head arranged on a displacement mechanism having at least two supports movable parallel to one another. Each support is moved by its own drive. The space coordinate of the measurement point is determined as a function of the respective displacement position of the supports. The two drives are controlled by a common regulator.

Abstract: A method of calibrating a probe is disclosed said probe being mounted on a machine and having a stylus with a workpiece contacting tip, comprising calculating calibration information for the probe for a first orientation of the probe, and rotating the calibration information by an angle to obtain a probe calibration information for when the probe is oriented by that angle with respect to the first orientation. Also disclosed is a method of calibrating a probe during a measurement process. The calibration information may include a vector which relates probe head axes to machine axes; a calibration matrix; datum data; an inertial matrix. The stylus tip may be datumed at the orientation of the probe or inferred from datum information obtained at different orientations. The rotation step may be carried out by a software/computer program which may be stored on a controller for the machine.

Abstract: Apparatus, systems and methods for an improved probe for a coordinate measurement machine (PCMM) is disclosed herein. The probe comprises a machine readable unique serial number, which the PCMM can read from the probe to identify the probe and obtain information relating to calibration of the probe by matching the unique serial number with unique serial number stored with the information relating calibration. The coordinate information device further comprises modules configured to store and provide the machine readable unique serial number, and also information relating to calibrating the probe.

Abstract: Disclosed is a method and apparatus for measuring inside diameters of holes using a dial bore gage with a packaged digital transducer providing an amplified readable output to both dial indicator and digital display enabling wireless data transmission for recording its measured output.

Abstract: The invention relates to a monitoring device (20) of the position of an assembly containing nuclear fuel (4) in a housing of a storage basket (2). According to the invention, it comprises at least one mobile stop device (24, 26, 28) and a position indicator (30) suitable for being held at a stop by the mobile stop device in a first position indicating that the assembly occupies a first position, said mobile stop device being arranged so as to be able to be placed, by means of contact with the assembly located in a second position in its housing, in a position enabling it to release the position indicator devised to move automatically from the first position to a second position indicating that the assembly occupies the second position.

Abstract: A method, apparatus, and computer usable program product for calibrating rivet height gages. In one embodiment, the process calculates a size of sphere required to create a sphere-based ring gage to simulate a contact point between a rivet height gage and a sharp edge of a specified sharp-edged ring gage. The process identifies an expected protrusion height from a top of the rivet height gage to a reference surface formed by tops of a set of spheres of the size of sphere required to simulate the contact point.

Abstract: A method of measuring an object using a surface sensing device mounted on a coordinate positioning apparatus. The method has the steps of measuring a single surface point of a feature of the object with the surface sensing device, moving the surface sensing device along a path around the feature at a fast speed, thereby taking measurements along the path, including at the surface point, determining the difference between the measurements of the surface point and using the difference determined to apply a correction to the object or subsequent objects having the same feature.

Abstract: A method for zero resetting of a measuring machine is provided. A zero-reset instruction is received. A zero-reset direction S1 of a movable arm and a position where the limit switch is fixed on the shaft is set as a first trigger position. The zero-reset instruction is executed. A first feedback pulse from the limit switch is received. A zero-reset direction S2 of the movable arm is set if the movable arm has reached the first trigger position. A position of a reference mark on a raster ruler fixed on the movable arm is set as a second trigger position. The zero-reset instruction is executed again. A second feedback pulse from a reader fixed on the movable arm is received. If the movable arm has reached the second trigger position, the zero resetting ends.

Abstract: A method and apparatus for mounting a calibration sphere to a calibration fixture for Coordinate Measurement Machine (CMM) calibration and qualification is described, decreasing the time required for such qualification, thus allowing the CMM to be used more productively. A number of embodiments are disclosed that allow for new and retrofit manufacture to perform as integrated calibration sphere and calibration fixture devices. This invention renders unnecessary the removal of a calibration sphere prior to CMM measurement of calibration features on calibration fixtures, thereby greatly reducing the time spent qualifying a CMM.

Abstract: Validating the error map of a CMM using a calibrated probe including a stylus, the probe capable of rotation about at least one axis, includes placing a calibration artifact on a table of the CMM, the table having an upper surface in an XY plane; positioning a Z-ram of the CMM in a first calibration position and a second calibration position with respect to the artifact such that the stylus contacts the artifact; calculating a measured value representing the measured length between the first and second calibration positions; calculating a nominal value based on the length of the stylus of the probe; comparing the nominal value to the measured value; and updating the error map of the CMM if the measured value differs from the nominal value by more than a predetermined value.

Abstract: Provided is a method for manufacturing a semiconductor device. The method, in one embodiment, includes calibrating an inspection tool configured to obtain a measurement of a semiconductor feature, including: 1) providing a test structure comprising a substrate having a trench therein, and a post feature located over the substrate adjacent the trench. The post feature, in this embodiment, includes a second layer positioned over a first layer, wherein the first layer has a notch or bulge in a sidewall thereof; 2) finding a location of the notch or bulge relative to a different known point of the test structure using a probe of the inspection tool; and 3) calculating a dimension of the probe using the relative locations of the notch or bulge and the different known point.

Abstract: A method for controlling operations of a measuring machine is provided. The method includes the steps of: clearing faults when there are the faults occur in a measuring machine; sending a restart instruction via a control card to the measuring machine for controlling the movable arm to return to an initial position in relation to an X-axis, a Y-axis and a Z-axis directions; sending a move instruction comprising information of a final position to the control card; executing the move instruction; calculating a current position of the movable arm according to a count tracked by a raster ruler; determining whether the movable arm locates at the final position of the measuring machine according to the count; and controlling the movable arm to move along the measuring machine by executing a next move instruction, if the movable arm locates at the final position. A related system is also disclosed.

Abstract: A method for improving the reproducibility of a coordinate measuring machine and its accuracy is disclosed. Using at least one measuring field of a camera, a plurality of images of at least one structure on the substrate are recorded. The substrate is placed on a measuring stage traversable in the X coordinate direction and the Y coordinate direction, the position of which is determined during imaging using a displacement measuring system. The measuring field is displaced by the amount of the deviation determined.

Abstract: An adjustment arrangement for a measuring head, in particular an adjustment arrangement in order to simplify the calibration of a measurement probe (3) supported by a measuring head in a coordinate measuring machine, where the adjustment arrangement includes an element for the determination of the measured position of the probe ball (7), and where an element is arranged to turn or displace, or both, the probe ball in order to determine a newly measured position of the probe ball, whereby the offset of the probe ball (7) can be determined.

Abstract: In a coordinate measuring machine or any other kind of machine having at least one translational movement axis, correction values are determined by moving the mobile head of the machine along a defined path of movement. First and second position data are recorded by means of first and second position measuring devices. The first position data originate from position measuring devices of the machine. The second position data result from a reference measurement. The correction values are determined as a function of the first and second position data. A defined number of correction values is determined for each section of the path of movement, with the defined number varying in the sections as a function of the error profile defined by the correction values.

Abstract: A parallel kinematic machine has a parallel kinematic mechanism including an end effecter and a parallel link mechanism. A numerical control device controls a position and orientation of the end effecter based on kinematics of the parallel kinematic mechanism. A posture setter sets an adjustment tool on the end effecter in a known posture in a reference coordinate system defined outside the parallel kinematic mechanism based on a measurement method. A data acquirer acquires data in accordance with a measurement method selecting code for designating the measurement method used by the posture setter in setting the adjustment tool in the known posture, and defines a correlation between kinematic parameters for the parallel kinematic mechanism and the reference coordinate system. A calculator calculates the kinematic parameters based on the acquired data by using a relational expression describing forward kinematics of the parallel kinematic mechanism.

Abstract: A calibration method is provided for calibrating a parallel kinematic mechanism that has an end effecter. The method includes setting an adjustment tool attached to the end effecter in predetermined postures in a reference coordinate system by taking coordinates of the posture of the adjustment tool each time the adjustment tool is placed in the posture and recording coordinates of driver shafts manipulated by a numerical control device in accordance with the inverse kinematics each time the adjustment tool is placed in the posture. The method continues by calculating kinematic parameters necessary for the kinematics of the parallel kinematic mechanism based on the taken coordinates of the postures of the driver shafts and the recorded coordinates of the driver shafts. Accordingly, it is possible to obtain accurate posture information of the end effecter and relative coordinates of the driver shafts.

Abstract: An exemplary contour measuring device (100) includes a pair of guide rails (13), a movable fixture (14), a first probe (15), a second probe (16), and an error correcting unit (17). The movable fixture is movably disposed on the guide rails. The first probe is configured for measuring an object along a contour measuring direction and obtaining a first measured contour value from the object to be measured. The second probe is configured for measuring a standard object whose contour is known along the contour measuring direction and obtaining a second measured contour value from the standard object. The error correcting unit is configured for compensating the first measured contour value according to the second measured contour value.

Abstract: The present system, method, article of manufacture, software, and apparatus is an “intelligent” probe system and components thereof and may openly encompass, in at least an embodiment, an embedded IC chip located in an interchangeable probe(s) which offers repeatable, fast, easy, and error free probe swapping on a CMM.