Abstract: The invention concerns a device for examining the precision of motion of a working spindle of an NC-controlled machine tool along a circular path for producing circular cylindrical surfaces on workpieces, comprising a first device part which can be coaxially mounted to the working spindle, a second device part which can be positioned on a machine table, which receives a workpiece to be processed, coaxially to the axis of a circular cylindrical surface to be produced on the workpiece, an electronic measuring value sensor which extends radially with respect to the axes of working spindle and circular cylindrical surface and is hinged to both device parts, and a shaft encoder which is rotatably disposed in the second device part coaxial relative to the axis of the circular cylindrical surface to be produced to determine the angular position of the measuring value sensor, wherein the measuring value sensor is held on one of the two device parts such that it can be adjusted and fixed transversely to the axes of th

Abstract: A method for measuring a program-controlled machine tool using a measuring sphere. According to this method the measuring sphere having known dimensions is positioned on a machine part. A sensing element installed in the machine is moved to a selected initial position in which it is located approximately 10 mm above the vertex section of the sphere. Then the sensing element is repeatedly moved until it contacts various points on the surface of the sphere, and the coordinate values of those points of contact are input into the controller. Thereafter the spatial position of the center of the sphere is calculated and compared with target values stored in the controller.

Abstract: A method of measuring an object on a coordinate positioning apparatus. A first object is placed on a coordinate positioning apparatus and measured with a workpiece contacting probe to create measurement data. The measurement data is collected at multiple stylus deflections or probe forces. For a plurality of points on the surface of the first object, the measurement data is extrapolated to that corresponding to zero stylus deflection or zero probe force. An error function or map is created from the measurement data and the extrapolated data. Subsequent objects are then measured using a known stylus deflection or known probe force and the error function or map is used to apply an error correction to these measurements.

Abstract: The disclosed embodiments relate to calibrating a measuring device by comparing a set of master measurement data against a set of current measurement data. Adjustments are made to the measuring device based on the difference between the current measurement data and the master measurement data.

Abstract: The invention relates to a holder for test objects, which are composed of at least two targets and at least one connecting element, comprising at least one carrier, at least one guide, which is arranged on or/and in the at least one carrier, and seats for the targets of at least one test object, wherein at least one seat can be moved along the at least one guide such that an adaptation of the position of the at least one movable seat to the position of one target of the test object is possible. Furthermore, the invention relates to a test object for the holder previously mentioned, comprising at least two targets and at least one connecting element, wherein the targets and connecting elements can be selected from a given set of single targets and single connecting elements and combined to form a test object.

Abstract: A mount table having a mount surface on which a workpiece as an object to be measured or worked includes a support unit for supporting the mount table so as to be floated from a surface plate so that the mount table can freely move or rotate on the surface plate finished to be plane or fixing and supporting the mount table on the surface plate and a plurality of artifact for measuring a plurality of attitudes on the mount table to detect the positions and rotations of the mount table in respective attitudes.

Abstract: To enable the on-machine measurement of selected features of a workpiece formed on a live spindle lathe with a positioning rotary table, both the machine itself and the electronic touch probe used to conduct the measurements are calibrated. The accuracy of the machine itself is measured and calculated by including the measured errors not only in the x and z linear axes, but also in the y linear axis. Calibration of the touch probe is made by determining a correction factor which is obtained by the touch probe measurement of an artifact whose dimensions are precisely known by other means. This correction factor is then made to the nominal measurements made by the touch probe on the selected features of the workpiece to be measured, to obtain the actual dimensions thereof. Adjustments are also made to compensate for the differences in radial positions between the workpiece and the artifact.

Abstract: Test piece, comprising at least two shaped probe elements and at least one connecting element for connecting the at least two shaped probe elements. Each connecting element is provided with at least one fastening element at one end of the connecting element for fastening a shaped probe element. Length variations of the at least two shaped probe elements and/or of the at least one connecting element are compensated by the fastening elements in such a way that the distance between respective two sensing points under standard measuring conditions is essentially constant.

Abstract: A method for correcting errors in a coordinate measuring machine having a measuring head which is adapted to move in at least two different spatial directions. Measuring scales and measuring lines are assigned to each spatial direction. The measuring lines of different spatial directions intersect, and correction values are determined along the measuring lines at predetermined values of the scales in order to correct for elastic and/or geometric errors of the scales and/or of the guiding mechanism for moving the measuring head. According to one aspect of the invention, the correction values determined along a measuring line of a first spatial direction are modified such that the modified correction value of this measuring line assumes a predetermined value at the point of intersection with a first measuring line of a second spatial direction.

Abstract: A calibration method for calibrating a parts-handling device with respect to a computer vision camera includes the steps of moving a parts-handling device into contact with a touch-off block, and storing a value indicative of the position of the parts-handling device when it is in contact with the touch-off block. In addition, there may be two orthogonal surface on the touch-off block. By touching the parts-handling device against both surfaces, the parts-handling device can be calibrated for position offset in two orthogonal directions. For parts-handling devices that are rotatable, the parts-handling device may be rotated to a succession of predetermined angular positions and brought into contact with the touch-off block in each position. By combining the measured positions of the parts-handling device in each rotational position, the system can be calibrated to compensate for the offset from the camera to the parts-handling device as a function of rotational position as well.

Abstract: A method and apparatus for keeping a probe accurately positioned relative to a device to be tested. The apparatus having a probe and movable probe station element for positioning the probe at a predetermined test position on the device to be tested. The probe station element being driven by a drive to position the probe at the test position, and having a controller connected thereto for substantially keeping the probe at the test position and inhibiting the probe shifting therefrom. In one form the controller is capable of determining the variance between the current probe position and the desired or predetermined test position, and actuating the drive after the variance has reached a predetermined value.

Abstract: Reference gauge for calibrating measuring machines whose reference dimension can be measured both on its inner size and by its outer size, thus making it possible to keep the reference dimension less than 15 millimeters, even for calibrating measuring machines equipped with probe tips having a diameter greater than that dimension. The calibration method with the aid of such a reference gauge comprises in certain cases the measuring of the calibrated distance between two outer surfaces of a protruding volume.

Abstract: The present invention relates to apparatuses and methods for calibrating relative motions of moveable parts using plurality of balls, rods, and liner encoders which form configurations to measure multiple translational, angular and squareness errors simultaneously.

Abstract: A method for certifying and calibrating a multi-axis coordinate measuring machine includes the steps of loading a check standard into a means for holding of the multi-axis coordinate measuring machine; measuring a virtual location of each of a plurality of apertures of the check standard within a virtual coordinate system using a touch probe of the multi-axis coordinate measuring machine; measuring an actual location of each of the apertures and simultaneously verifying the accuracy of the virtual coordinate system of the check standard using an optical probe of the multi-axis coordinate measuring machine; and calculating a deviation between the actual location of each of the apertures and a virtual location of each of the apertures of the virtual coordinate system.

Abstract: The invention concerns a process for the aligning of the tooth spaces of workpieces (1) with precut teeth, which are set up for fine machining on the work spindle (2) of a gear finishing machine. In order to avoid the trend related occurrence of out-of-tolerance aligning errors as series production progresses, teach-in cycles are performed on the workpiece machined in the immediately preceding machining cycle, called for automatically after time intervals or machining cycle intervals which are either pre-defined or calculated by the machine control system. By this means any prevailing trend errors are restored to zero.

Abstract: The disclosed embodiments relate to calibrating a measuring device by comparing a set of master measurement data against a set of current measurement data. Adjustments are made to the measuring device based on the difference between the current measurement data and the master measurement data.

Abstract: A scale-bar artifact is and measurement method is provided, the artifact comprising a shaft, at least one mounting nest positioned on the shaft, a plurality of target nests positioned on the shaft, at least one temperature sensor in contact with the material of the shaft and a computer or circuit board in communication with the at least one temperature sensor, wherein the computer or circuit board is configured to receive temperature sensor data and to compile temperature corrected distance measurements corresponding to at least one linear portion of the shaft. Additionally, a scale-bar artifact is provided, comprising a shaft, a plurality of target nests positioned on the shaft and at least one mounting nest positioned on the shaft, wherein the at least one mounting nest comprises either at least one adjustable kinematic mounting nest or at least one fixed kinematic mounting nest configured to receive a separate mounting component.

Abstract: A device for detecting the rotational movement of an element which is rotatably seated around an axis, the device including a material measure that rotates about an axis of rotation. A first measuring graduation provided on the material measure and which scans along a first direction, which has a component along the axis of rotation and a second measuring graduation provided on the material measure, wherein both the first measuring graduation and the second measuring graduation surround the axis of rotation in a ring shape, and which can be scanned along the first direction and a second direction that is linearly independent of the first direction. At least three measuring heads, which are spaced apart from each other along a circumferential direction which surrounds the axis of rotation, are assigned to each of the first measuring graduation and the second measuring graduation for scanning the first measuring graduation and the second measuring graduations.

Abstract: The present invention relates to a method for calibrating a metrology stage in at least two dimensions using an artefact plate having marks forming a pattern, comprising the steps of: placing the artefact plate on the metrology stage in at least three positions, assuming the geometrical properties of the metrology stage and the artefact plate, and the positions of the artefact plate for each measurement, forming a model predicting the measurements of the artefact plate, measuring the marks by the metrology stage, and inverting said model to improve the assumptions on metrology stage and artefact plate.

Abstract: A method for determining an “effective” thermal coefficient of a machine comprises the steps of installing one or more temperature sensors (110) at various locations on the machine, positioning a first machine member (60) at a “known” reference location, relative to a second machine member (42), installing a linear position measuring device (120) to detect changes in position of the first machine member (60) relative to the second machine member (42) along a first axis of movement, periodically acquiring readings from each of the temperature sensors (110) and from the linear position measuring device (120) during a test cycle and compiling the temperature and linear position data into a table.

Abstract: There is provided a tie-in device for correlating at least two different coordinate systems. The tie-in device comprises an outer surface having a predefined geometric shape, such as a generally spherical surface, located at a first predefined distance from a reference point of the tie-in device, such as the center of the generally spherical surface. The outer surface of the tie-in device is mappable to determine the location of the reference point in a first coordinate system. The tie-in device comprises at least one target located at a second predefined distance from the reference point. The target is locatable in a second coordinate system to determine a location of the reference point in a second coordinate system. The relative locations of the reference point are tied-in, advantageously by processing circuitry, to correlate the first and second coordinate systems.

Abstract: A reference fixture (20) for a roundness measuring instrument performs acquisition of origin information of a roundness measuring instrument (1) including a workpiece rotary mechanism (3) on which a workpiece is set and a probe (14) provided with a stylus (14a) and also performs calibration of the probe (14). The reference fixture (20) includes a mount (21), a calibration master (22) provided on a top face of the mount (21) for calibrating the sensitivity of the probe (14), an origin ball (23) disposed above the calibration master (22) for providing the origin information of the roundness measuring instrument (1) by the stylus (14a) of the probe (14), and a holder (25) that holds the origin ball (23).

Abstract: Accelerations of a probe or probe head due to vibrations of a machine during a measuring operation are measured using accelerometers placed in the probe or probe head. The acceleration signals are double integrated to determine the corresponding displacements of the probe or probe head and these are added to the readings of displacement of the machine taken from the machine scales using a data fusion algorithm to correct the scale readings for the vibration of the probe. Both linear and angular accelerations of the probe can be corrected in this way.

Abstract: The invention relates to the determination of correction parameters of a rotating swivel unit. An optical sensor (9) measuring in at least one dimension is fixed to the unit. The sensor is calibrated on a calibration body in at least three rotational positions of a rotating joint of the rotating swivel unit. At least parameters of a first parameter field are calculated, the field describing the transformation (rotation) of a sensor coordinate system (u,v,w) in the machine coordinate system (XM, YM, ZM) , and parameters of another parameter field are determined, the other field describing the shift (vector) of the sensor coordinate system in relation to the point (AB) (in the measuring arm) in the machine coordinate system.

Abstract: A method of measuring a clearance distance between a first member and a stationary member is provided. The method includes measuring the clearance distance using a first probe that is removably coupled at least partially within a mounting adapter, determining a first probe calibration based on the measured clearance distance, measuring a gauge clearance distance using a second probe, and modifying the first probe calibration based on the gauge clearance distance.

Abstract: An apparatus and method is disclosed for ultra-precision positioning. A slide base provides a foundational support. A slide plate moves with respect to the slide base along a first geometric axis. Either a ball-screw or a piezoelectric actuator working separate or in conjunction displaces the slide plate with respect to the slide base along the first geometric axis. A linking device directs a primary force vector into a center-line of the ball-screw. The linking device consists of a first link which directs a first portion of the primary force vector to an apex point, located along the center-line of the ball-screw, and a second link for directing a second portion of the primary force vector to the apex point. A set of rails, oriented substantially parallel to the center-line of the ball-screw, direct movement of the slide plate with respect to the slide base along the first geometric axis and are positioned such that the apex point falls within a geometric plane formed by the rails.

Abstract: The present invention relates to an accuracy measuring apparatus which is capable of efficiently measuring the accuracies of a machine tool at low costs. The accuracy measuring apparatus (1) comprises a laser oscillator (2) attached to a spindle (15) of the machine tool (10) for projecting a light beam having an axis aligning with the axis of the spindle, a CCD camera (3) disposed in opposed relation to the laser oscillator (2) for receiving the light beam projected from the laser oscillator (2) and generating two-dimensional image data, and an analyzer (4) for analyzing the image data to determine the accuracies of the machine tool (10).

Abstract: The present invention overcomes the disadvantages of the related art by providing a spatial reference system that includes at least one artifact assembly. The artifact assembly has a measuring bar assembly including an inner member with a proximate end and a distal end, an outer member with a proximate end and a distal end, and a compensating member with a proximate end and a distal end operatively disposed between said inner and said outer members. The distal end of the outer member is fixedly mounted to the distal end of the compensating member. The proximate end of the compensating member is fixedly mounted to the proximate end of the inner member.

Abstract: To provide a measuring apparatus of positions and postures of a machine for correcting positions and postures of an end effecter by means of an actuator, and an error correcting method for correcting errors thereof. At least three universal joint fixing members 2 are attached onto a base 1 that comprises a measuring reference; steel balls 3 are fixed to the respective universal joint fixing members 2 as universal joints; a steel ball 5 is fixed to a universal joint fixing member 9 as a universal joint; a universal joint fixing member 4 is attached to an object to be measured 7 that is supported by means of another member; and a measuring device 6 is attached to between the steel balls B3 and the steel ball 5. By using such a measuring apparatus, geometrical errors of a mechanism in a machine are estimated and corrected based on measured values on positions and postures of the end effecter.

Abstract: An apparatus and method for adjusting the position of a load port utilized in a semiconductor wafer processing system. Generally, a door opener can be configured for opening a door through which a semiconductor wafer may enter for subsequent positioning and processing thereof by a semiconductor wafer processing system. A load port is associated with the door opener. A calibration mechanism can then be utilized for calibrating the load port for leveling and height positioning, such that a plurality of directional axis associated with the load port do not interfere with one another, thereby conserving calibration time while permitting a single individual to perform calibration operations thereof.

Abstract: A method of measuring an artefact 5 using a machine 2 on which a measuring probe 6 is mounted. The probe is brought into contact with the artefact and movement continued for a limited distance to deflect the stylus 7. The machine and probe outputs are recorded whilst the probe is free and when the stylus is deflected. A model of the probe and CMM outputs during both contact and non-contact between the probe and artefact is fitted to the data to allow the contact position when the stylus contacts the artefact with zero force to be determined. The probe outputs may be fitted to the model individually to determine a single contact position. By using data during movement of the probe towards and away from the artefact, errors due to time delays may be corrected.

Abstract: An apparatus for use in orienting an object at a reference angle includes a pin gauge having at least two projections located at an end of the body of the apparatus. The projections are located at certain X Y coordinates of an X, Y Z Cartesian coordinate system. A horizontal support supports the body so as to be movable horizontally in the longitudinal direction of the projections. A mechanical drive member is operable to move the body mechanically in the horizontal direction. The apparatus may also include a vertical support and vertical drive member. The pin gauge is mechanically moved into contact with a surface of an object to provide a reference angle for the object. Then the object is pivoted, if necessary, to bring the surface into point contact with all of the projections of the pin gauge, whereupon the object is oriented at the reference angle.

Abstract: The disclosed embodiments relate to calibrating a measuring device by comparing a set of master measurement data against a set of current measurement data. Adjustments are made to the measuring device based on the difference between the current measurement data and the master measurement data.

Abstract: To provide a measuring apparatus of positions and postures of a machine for correcting positions and postures of an end effecter by means of an actuator, and an error correcting method for correcting errors thereof. At least three universal joint fixing members 2 are attached onto a base 1 that comprises a measuring reference; steel balls 3 are fixed to the respective universal joint fixing members 2 as universal joints; a steel ball 5 is fixed to a universal joint fixing member 9 as a universal joint; a universal joint fixing member 4 is attached to an object to be measured 7 that is supported by means of another member; and a measuring device 6 is attached to between the steel balls B3 and the steel ball 5. By using such a measuring apparatus, geometrical errors of a mechanism in a machine are estimated and corrected based on measured values on positions and postures of the end effecter.

Abstract: A method of adjusting the relative attitude of a work in a surface texture measuring instrument for measuring the work having a feature region includes a measurement step of performing measurement of the feature region along an X-axis direction after positioning a detector in a Y-axis direction and the X-axis direction, a determination step of repeating the measurement which is performed while changing the position in the X-axis direction, and a step of adjusting the attitude of the work on the basis of the amount of relative attitude correction. Therefore, the direction of the feature region in the work is adjusted so as to be parallel to the Y axis.

Abstract: The invention relates to the determination of correction parameters of a rotating swivel unit. An optical sensor (9) measuring in at least one dimension is fixed to the unit. The sensor is calibrated on a calibration body in at least three rotational positions of a rotating joint of the rotating swivel unit. At least parameters of a first parameter field are calculated, the field describing the transformation (rotation) of a sensor coordinate system (u, v, w) in the machine coordinate system (XM, YM, ZM) , and parameters of another parameter field are determined, the other field describing the shift (vector) of the sensor coordinate system in relation to the point (AB) (in the measuring arm) in the machine coordinate system.

Abstract: An adjustable end arm effector alignment system and process is provided. The system includes an arm having a working end and an alignment support in a known location relative to said arm. An adjustable end arm effector including at least two alignment members is attached to one of said working end of said arm and said alignment support. A control system is also provided that is operable to move the working end of the arm into a first and a second alignment position, each permitting appropriate adjustment of the adjustable end arm effector with respect thereto.

Abstract: A method for determining the axis of rotation (AR) of an object (12) mounted to a rotary stage or platform (10) in a gauge measurement system by estimating a transformation (&dgr;) between multiple views or measurements of the object (12) obtained at different poses.

Abstract: A method and an apparatus for vertically calibrating a wire of a wire cutting electric discharge machine are provided. The vertical calibration apparatus includes a body, an upper calibration board and a lower calibration board attached to the body and parallel to a machine table, with a circular hole formed through the upper calibration board and on the lower calibration board respectively. The two circular holes are coaxial and have different diameters. The method of wire vertical calibration includes searching for the circle centers of the two circular holes by contacting the circles several times with the wire in a prescribed manner, then passing the wire through the circle centers. The method and apparatus allow wire vertical calibration to be more easily and accurately performed.

Abstract: A method of calibrating a scanning system comprising a machine and a measuring probe, includes the steps of error mapping the system statically and qualifying the stylus tip so that the system will provide accurate measurements, determining the positions of a number of datum points on the surface of an artefact with the probe stylus in contact with the workpiece and at zero deflection normal to the surface, scanning the surface through the datum points at a nominal stylus deflection and at the maximum speed which provides repeatable position measurements to make a second determination of the positions of the datum points, determining the errors attributable to the scanning process by subtracting the positions obtained in the first and second determinations, and storing the error values for correction of subsequent measurements of similar artefacts.

Abstract: A transfer apparatus of a testing master block for a coordinate measuring machine which enables a testing master block to be transferred on to a measurement table of the measuring machine quickly without human intervention and can be easily attached to an existing measuring machine with a small installation space, provided with a moving member for moving a testing master block for a measuring machine between a retracted position near an end of a measurement table of the measuring machine and a measurement position on the measurement table. When measuring a workpiece, the moving member or testing master block is retracted to a retracted position to enable the measurement table as a whole to be made effective use of in the measurement work. Between measurement operations of workpieces, the testing master block can be quickly moved and transferred to the measurement position to inspect the accuracy of the measuring machine itself or check the operation.

Abstract: A calibration system and method for a multi-toolhead machine. A calibration device is installed onto the machine. When a first toolhead is calibrated with respect to the calibration device, based upon the change in position between the first toolhead and a predetermined reference on the calibration device, all of the remaining toolheads are automatically calibrated. The system is set up by calibrating each toolhead with respect to the calibration device and determining an offset between the calibrated position of each toolhead and the calibration of the first toolhead.

Abstract: An assemblage of reference points arranged in a distorted pattern of rows and columns over a planar surface is used to precisely establish the coordinates of a particular situs on said surface by determining the location between said situs in relation to three of said reference points. The array is particularly useful in ascertaining the reference location of a swiveling coordinate measuring arm or other such spatial measuring device. A three-dimensional reference point array can be constructed from a similarly distributed matrix of reference points arranged in orthogonally-oriented layers of rows and columns. Positioning the probe of the measuring device over three closely located reference points is sufficient to automatically load the exact coordinates of the measuring device location into an associated data processing system.

Abstract: So-called navigation links or navigation references are required in the area of optical three dimensional coordinate measuring techniques in order to be able to compile measured data of expanded objects from individual partial measurements in a mosaic-like manner. Conventional navigation links employ adhesive marks which require investment of time to fixing them onto and then remove them from the object to be measured, or employ structures which are difficult to transport. These disadvantages should be minimized. This is achieved by using a device as a navigation link essentially comprised of a grid-like component on which a plurality of measuring marks and a plurality of connecting elements each having a fastening device are attached.

Abstract: Reference gauge for calibrating measuring machines whose reference dimension can be measured both on its inner size and by its outer size, thus making it possible to keep the reference dimension less than 15 millimeters, even for calibrating measuring machines equipped with probe tips having a diameter greater than that dimension. The calibration method with the aid of such a reference gauge comprises in certain cases the measuring of the calibrated distance between two outer surfaces of a protruding volume.

Abstract: The present invention relates to an accuracy measuring apparatus which is capable of efficiently measuring the accuracies of a machine tool at low costs. The accuracy measuring apparatus (1) comprises a laser oscillator (2) attached to a spindle (15) of the machine tool (10) for projecting a light beam having an axis aligning with the axis of the spindle, a CCD camera (3) disposed in opposed relation to the laser oscillator (2) for receiving the light beam projected from the laser oscillator (2) and generating two-dimensional image data, and an analyzer (4) for analyzing the image data to determine the accuracies of the machine tool (10).

Abstract: A coordinate measuring machine (CMM) carries a probe and is controlled by a controller to drive the probe to take measurements on a workpiece. In order to reduce the effects of acceleration-induced deflections of the probe on the measurements made by the machine, accelerometers are provided to measure the accelerations of the probe and to produce signals indicative thereof. The acceleration signals (45) are passed to the controller (FIG. 2) where they are integrated (46) and filtered (48) before being passed as velocity signals (49) to a summing junction (50) from which they are fed to a velocity feedback control loop[ (34, 35, 36, 37) which reduces any changes in the velocity (and hence deflection) of the probe due to the accelerations.

Abstract: The present invention relates to a device for checking and calibrating high precision inclinometric sensors. It comprises a substantially quadrangular planar base body made of highly rigid material, set to float on mercury placed inside a tank; a pair of micrometric positioning means of known weights, situated in proximity to concurrent edges of the base body, on the respective axes of symmetry of the base body, able to allow to change the baricentre and the inclination on the mercury of the base body by a value determined by the variation in the applied moment; a pair of screws for adjusting the zero point, situated on said base body and a seat located centrally to the base body for positioning an inclinometric sensor to be calibrated.

Abstract: The present invention relates to apparatuses and methods for calibrating relative motions of moveable parts using plurality of balls, rods, and liner encoders which form configurations to measure multiple translational, angular and squareness errors simultaneously.

Abstract: A compensation method according to the present invention includes: a traverse linearity data calculating step for measuring a master workpiece (MW) of which profile data is value-specified in advance while moving a sensor (7) using a linear movement mechanism (4, 5) of a measuring device (1) and for subtracting the previously value-specified profile data from the measurement data of the master workpiece to obtain a traverse linearity data of the linear movement mechanism; a workpiece measurement data calculating step for measuring the workpiece while moving the sensor by the linear movement mechanism of the measuring device to obtain a measurement data of the workpiece; and a workpiece profile calculating step for subtracting the traverse linearity data from the workpiece measurement data to obtain a true value data of the workpiece.