Abstract: Methods for fabricating flexible substrate nanostructured devices are disclosed. The nanostructures comprise nano-pillars and metallic bulbs or nano-apertures. The nanostructures can be functionalized to detect biological entities. The flexible substrates can be rolled into cylindrical tubes for detection of fluidic samples.

Abstract: Sensor assay methods for detecting the presence of an analyte in a sample are provided. Aspects of the methods include providing a sensor, e.g., a proximity sensor, in contact with an assay composition that includes a sample and a proximity label. Next, a capture probe configured to bind to the proximity label and the analyte is introduced into the assay composition to produce a labeled analyte. Following capture probe introduction, a signal is obtained from the sensor to detect the presence of the labeled analyte in the sample. Also provided are sensor devices, including hand-held devices, and kits that find use in practicing the subject methods.

Abstract: A method for deconvolution of digital images includes obtaining a degraded image from a digital sensor, a processor accepting output from the digital sensor and recognizing a distorted element within the image. The distorted element is compared with a true shape of the element to produce a degrading function. The degrading function is deconvolved from at least a portion of the image to improve image quality of the image. A method of indirectly decoding a barcode includes obtaining an image of a barcode using an optical sensor in a mobile computing device, the image comprising barcode marks and a textual character. The textual character is optically recognized and an image degrading characteristic is identified from the textual character. Compensating for the image degrading characteristic renders previously undecodable barcode marks decodable. A system for deconvolution of digital images is also included.

Abstract: A method for obtaining the binding kinetic rate constants using fiber optic particle plasmon resonance (FOPPR) sensor, suitable for a test solution with two or more concentrations, which employs the following major steps: providing one FOPPR sensor instrument system, obtaining optical time-resolved signal intensities starting at the initial time to the steady state of the two or more regions, substituting the measured signal intensity values into the formula which is derived by using the pseudo-first order rate equation model. In addition, this method measures the temporal signal intensity evolution under static conditions as the samples are quickly loaded. As a result, unlike the conventional device where the sample is continuously infused, the method is able to measure the association and dissociation rate constants of which the upper bounds are not limited by the sample flow rate.

Abstract: A method and an apparatus for examining a sample. The apparatus has a light source for generating excitation light in pulses which occur in succession at an excitation pulse frequency, for illuminating a sample region with the excitation pulse, and having a detector for detecting the detection light emanating from the sample region. The apparatus is characterized in that, for each detected photon of the detection light, the detector generates an electrical pulse and thereby a sequence of electrical pulses, and an analog-digital converter is provided that generates a digital data sequence by sampling the sequence of electrical pulses at a sampling rate.

Abstract: Surface plasmon microscopy methods are described which comprise irradiating a sample with a beam of electromagnetic radiation, wherein at least some of the radiation is incident on the sample at an angle or angles which results in the excitation of surface plasmons in the sample, and wherein the beam of radiation comprises a longitudinal axis passing through a focus of the beam. Both radiation reradiated from the sample by one or more surface plasmons and radiation reflected from a location on the sample which does not lie on the longitudinal axis passing through the focusare received at a detector. The received reradiated radiation is then interfered with the received reflected radiation to provide information about the sample. Apparatus for performing the methods is also described.

Abstract: There are provided an SPR sensor cell and an SPR sensor having a very excellent detection sensitivity. The SPR sensor cell of the present invention includes: an under-cladding layer; a core layer formed so that at least a part of the core layer is adjacent to the under-cladding layer and having a light entrance and a light exit; and a metal layer covering a part of the core layer. A sectional area (S1) of the core layer at the light entrance and a sectional area (S2) of the core layer at the part covered by the metal layer satisfy a relationship of S1>S2.

Abstract: Embodiments are directed to a plasmonic structure having an enhanced resonance frequency bandwidth. In one aspect, a plasmon-enhanced coupler is provided having a first plasmon region and a second plasmon region. A resonance frequency bandwidth of the plasmon-enhanced coupler is a hybridization of at least one first resonance frequency of the first plasmon region, and at least one second resonance frequency of the second plasmon region. The first plasmon region may be implemented as a single layer of graphene conductive material, and the second plasmon region may be implemented as multiple layers of graphene conductive material. The resonance frequency bandwidth may be chosen to overlap a frequency that comprises a vibration frequency of certain molecules of interest. Radiation directed to the plasmon-enhanced coupler causes its plasmons to interact with the molecules of interest, thereby altering the radiation.

Abstract: A multiplex fiber optic biosensor including an optical fiber, a plurality of noble metal nanoparticle layers, a plurality of light sources and a light source function generator is disclosed. The optical fiber includes a plurality of sensing regions which are unclad regions of the optical fiber so that the fiber core is exposed, wherein the noble metal nanoparticle layers are set in each sensing regions. The light sources emit light with different wavelengths, and the noble metal nanoparticle layers absorb the lights with different wavelengths, respectively. The light sources emit the lights in different timing sequences or different carrier frequencies, wherein when the lights propagate along the optical fiber in accordance with the different timing sequences or the different carrier frequencies, a detection unit detects particle plasmon resonance signals produced by interactions between the different noble metal nanoparticle layers and the corresponding analytes.

Abstract: The present invention provides surface plasmon resonance (SPR) based sensing systems and methods for rapid, sensitive, and real-time analysis of analyte secretion from living cells. In one embodiment, the SPR based sensing device of the present invention comprises at least one cell culture module for culturing living cells, wherein the cell culture module is configured so that analytes secreted from the living cells can be released onto a SPR sensing surface.

Abstract: In exemplary implementations of this invention, a jammable structure functions as an HCI interface. A user provides input by changing the shape of a flexible layer of the jammable structure (e.g., by pressing against it or stretching, twisting or bending it) and receives haptic feedback (e.g., varying stiffness). Sensors are used to determine the shape of the flexible layer. The sensors output data that is indicative of electromagnetic waves that have traveled through the jammable media or of electrical or magnetic phenomena that are produced by the waves. For example, visible or infrared light may be shone through a transparent jammable media to the flexible layer and reflect back to a camera. The media may comprise granular particles (e.g., glass beads) and a liquid (e.g., oil) with matching indices of refraction. Or capacitive sensing may be used to detect the shape of the flexible layer.

Abstract: A detect device and a detect method for transmittivity spectrum of the light guiding plate are provided. The detect device comprises a mixing cavity unit for providing a linear light source with continuous spectrum to a light guiding plate to be detected; a light guiding plate placing unit located at a side of the mixing cavity unit, on which the light guiding plate to be detected is disposed to receive light from the mixing cavity unit; and a detecting lens disposed above the light guiding plate placing unit for detect the spectrum.

Abstract: A thermochromic window, the sunlight transmittance of which is adjustable depending on temperature, and a method of fabricating the same. The thermochromic window includes a substrate, a plurality of nanodots formed on the substrate, and a thermochromic thin film coating the substrate and the nanodots. The thermochromic thin film is made of a thermochromic material. The thickness of the thermochromic thin film disposed on the substrate is smaller than the thickness of the thermochromic thin film disposed on the nanodots.

Abstract: Embodiments of the present invention are directed to systems and methods for trapping and holding airborne particles. In the various embodiments, an optical trap is provided which uses a focused hollow-beam for trapping and holding both absorbing and non-absorbing airborne particles. The optical trap comprises: a trapping region where a particle can be present to be trapped; a light source for generating a coherent beam of light; optics for forming a hollow beam having a ring geometry from the coherent beam of light; and a focusing element for focusing the hollow beam to a point in the trapping region. In this arrangement, the particle is trapped at or near the focal point of the focused hollow beam.

Abstract: An apparatus for the calibration of optical measuring instruments with a carrier includes a calibration body having a glass body which has at least one scattering element, wherein the scattering element is completely surrounded by the glass body, and wherein a degree of transmission of the scattering element and of the glass body differ from one another.

Abstract: In a conventional device, light is irradiated from positions on a rotation axis of a detector, so that there may be unevenness of light irradiation intensity in a subject. The acoustic wave acquisition apparatus of the present invention includes a light source that generates light and a detector including a plurality of elements that receive an acoustic wave generated from inside a subject when the subject is irradiated with the light. The acoustic wave acquisition apparatus further includes a rotation driving unit that rotates the detector and a plurality of light irradiation portions that irradiate the subject with the light from the light source. The plurality of light irradiation portions are provided at least at positions other than a rotation axis of the detector.

Abstract: The present disclosure provides a method for detecting resistance of a photo resist layer. The method includes: providing a silicon wafer and measuring a refractive index of a surface of the silicon wafer as an initial refractive index of the surface of the silicon wafer; forming photo resist layers with different thicknesses on the surface of the silicon wafer; performing ion-implantation on the photo resist layers by predetermined amounts; peeling off the photo resist layers from the surface of the silicon wafer; and testing the refractive indexes of different areas on the surface of the silicon wafer after the ion-implantation, on which the photo resist layers with different thicknesses are located and determining the resistance of the photo resist layers with different thicknesses in contrast to the initial refractive index before the ion-implantation.

Abstract: Disclosed herein is an apparatus for spectroscopic ellipsometry, preferably for infrared spectroscopic ellipsometry, and a method for spectroscopic ellipsometry employing the apparatus. In some embodiments, the apparatus may comprise a light source (12), a detector (30), a polarizer (40), an analyzer (41), and a measuring probe (10). In one embodiment, the measuring probe may comprise an ATR prism (50) having at least one first surface having at least one measuring portion (M) configured to be brought in optical contact with a measured object (72), and at least one second surface having at least one reflective portion (RX).

Abstract: A method for linear filtering of noise in a sensorgram generated from a surface plasmon resonance apparatus, the method comprising: providing a linear filter of variable length to filter an output signal in the sensorgram; and determining an optimal length of the linear filter based on a slope of the signal in the sensorgram and a locked interception linear error, LILE, detector.

Abstract: A plasmonic device and an apparatus and method for generating a surface plasmon polariton (SPP) mode using the plasmonic device are disclosed herein. The plasmonic device includes a first plasmonic waveguide and a second plasmonic waveguide. The first plasmonic waveguide is made of a strip-shaped metal material forming at least one pair of first metal-dielectric interfaces along with a dielectric layer, and extends from an input location to a gap start location. The second plasmonic waveguide is made of a strip-shaped metal material forming at least one pair of second metal-dielectric interfaces in planes identical to those of the at least one pair of first metal-dielectric interfaces of the first plasmonic waveguide, and extends from a gap end location, spaced apart from the gap start location by the length of a gap along the propagation direction of the SPP, to an SPP output location.

Abstract: Apparatuses and methods for determining viscosity, surface tension and/or surface tension/viscosity ratio are presented. The methods use the measurement of liquid penetration rate in a test medium to evaluate liquid properties. In particular the methods and apparatuses can be used to determine the quality of frying or cooking oils in terms of polymer or polar compounds. The point of rejection of frying oils according to recommendations and legal limits can be determined. In one embodiment the time required for the oil to penetrate a given distance in a test strip is measured. The time is related to the above liquid (oil) properties and can be correlated to the amount of polymer and/or polar compounds in the oil sample.

Abstract: A laser diode firing circuit for a light detection and ranging device is disclosed. The firing circuit includes a laser diode coupled in series to a transistor, such that current through the laser diode is controlled by the transistor. The laser diode is configured to emit a pulse of light in response to current flowing through the laser diode. The firing circuit includes a capacitor that is configured to charge via a charging path that includes an inductor and to discharge via a discharge path that includes the laser diode. The transistor controlling current through the laser diode can be a Gallium nitride field effect transistor.

Abstract: Methods of binding and detecting a microorganism on a solid substrate. The microorganism is bound on a solid substrate covalently bound to a capture agent having a saccharide moiety. A lectin capable of binding to the microorganism and the saccharide moiety of the capture agent is added to the sample to bind the microorganism on the solid substrate. Further provided are biosensor devices, such as a quartz crystal microbalance (QCM) device or a surface plasmon resonance (SPR) device, that incorporate the solid substrate for the detection of microorganisms.

Abstract: An arrangement for capturing an image of a printing substrate web in a printing machine, includes a camera that has a sensor field extending parallel to the printing substrate web, and an objective lens an optical axis of which runs at right angles to the sensor field, a light source that is arranged relative to the printing substrate web such that the light emitted therefrom is reflected by reflective surface portions of the printing substrate web mainly into the camera, and the objective lens is arranged to be offset from the sensor field such that a straight line extending through the center of the sensor field and the center of the objective lens and a straight line extending from the center of the light source to the center of the light incident on the image field on the printing substrate web form equal angles with the axis of incidence.

Abstract: A method defines one or more monitoring target profiles, collects and stores initial calibration data of the metrology apparatus, compiling a library of spectra that would be observed from inspection of the monitoring target profiles using the metrology apparatus calibrated according to the initial calibration data. Some operations can be performed periodically, e.g., on a daily basis: obtaining current calibration data from the apparatus, modeling the effect of the current calibration data on the metrology apparatus operation, and using the result of the modeling and the contents of the library to determine any differences between one or more values of the initial calibration data and the current calibration data, and how these changes will be translated into changes in the measurement output for a given number of stacks and geometries.

Abstract: Authentication apparatus (1, 100) and methods which authenticate an item (4, 110) responsive to the detection that a portion of the item has one or more predetermined characteristics, the said predetermined characteristics comprising either or both the thickness of the said portion of the item, and the thickness of one or more layers within the said portion of the item, determined by optically-based thickness measuring apparatus (6, 102-108). The item may be a product and the portion of the item may be a sheet of packaging material. The item may be a security document and the portion of the item may be a sheet of security document substrate.

Abstract: A plasmonic phototransistor includes a photon to surface-plasmon-polariton (SPP) transducer including and an optical coupling structure configured to receive incident light and an electrically conducting layer having a first and a second surface. The second surface is on the optical coupling structure and the first surface generates SPPs responsive to the incident light. A gate dielectric layer is on the first surface. A two dimensional (2D) electrically conductive material is on the gate dielectric layer having electrical properties sensitive to electromagnetic fields of the SPP. Source and drain contacts are on the 2D electrically conductive material. Dynamic electric fields of the SPPs reach the 2D electrically conductive material that are operable to electric field-induce modulation of an electrical conductance of the 2D electrically conductive material which is sensed from the source and drain contacts.

Abstract: An imaging device uses a fiber optic faceplate (FOF) with a compressive sampling algorithm for the fluorescent imaging of a sample over an large field-of-view without the need for any lenses or mechanical scanning. The imaging device includes a sample holder configured to hold a sample and a prism or hemispherical glass surface disposed adjacent the sample holder on a side opposite the lower surface of the sample holder. A light source is configured to illuminate the sample via the prism or the hemispherical surface, wherein substantially all of the light is subject to total internal reflection at the lower surface of the sample holder. The FOF is disposed adjacent to the lower surface of the sample holder, the fiber optic array having an input side and an output side. The device includes an imaging sensor array disposed adjacent to the output side of the fiber optic array.

Abstract: Provided herein is a sensing apparatus comprising, at least one LSPR light source, at least one detector, and at least one sensor for LSPR detection of a target chemical. The sensor comprises a substantially transparent, porous membrane having nanoparticles immobilized on the surface of its pores, the nanoparticles being functionalized with one or more capture molecules.

Abstract: Plasmonic condensers for generating surface plasmon at an evanescent wave surface can include a substrate layer, a metal layer comprising the evanescent wave surface; and a media layer disposed between the metal layer and the substrate layer. The media layer can be active or passive and can include a source of radiation that interacts with the metal layer to create surface plasmons that are not substantially optically detectable as far field radiation until an interfering object is brought into proximity with the evanescent wave surface. When an interfering object such as a sample or specimen is brought into proximity with the evanescent wave surface, it causes coupling of at least some of the surface plasmons into propagating radiation detectable by an objective lens. Systems, methods, and the like are disclosed, as are features of a plasmonic meta-materials illuminator.

Abstract: A method of characterizing a coated body by at least one coating parameter based on fitting to a physical model is provided. The coated body includes a substrate coated by a polymeric coating such as a paint film, the polymeric coating having at least one layer. The method is carried out by a sensor system in a non-contact manner, the sensor system including an emitter system for emitting THz radiation, a detector system for detecting THz radiation, and a processing unit operationally coupled to the emitter system and the detector system. The method includes: emitting, by the emitter system, a THz radiation signal towards the coated body such that the THz radiation interacts with the polymeric coating; and detecting, by the detector system, a response signal being the detected THz radiation signal having interacted with the polymeric coating.

Abstract: Systems and methods for authenticating a document are provided. In one embodiment, a method for authenticating a feature of a document includes capturing a first image of a region of a document while the region is subjected to a first wavelength of electromagnetic radiation. The region includes at least a portion of the document. The method also includes determining a first intensity value associated with the first image of the region, and comparing the first intensity value with a first training intensity value of a region of a training document. The first training intensity value is obtained using the first wavelength of electromagnetic radiation. The method also includes determining whether the document is authentic at least partially based on the comparison between the first intensity value and the first training intensity value.

Abstract: Provided is an apparatus having a beam geometry changing device that changes the beam geometry of excitation light, and a control device that controls the beam geometry changing device, with favorable precision, which the apparatus performs a resonance angle scan and to detect a target material.

Abstract: Asymmetry properties of a periodic target on a substrate, such as a grating on a wafer, are determined. An inspection apparatus has a broadband illumination source with illumination beams point mirrored in the pupil plane of a high numerical aperture objective lens. The substrate and target are illuminated via the objective lens from a first direction and a second direction mirror reflected with respect to the plane of the substrate. A quad wedge optical device separately redirects diffraction orders of radiation scattered from the substrate and separates diffraction orders from illumination along each of the first and second directions. For example the zeroth and first orders are separated for each incident direction. After capture in multimode fibers, spectrometers are used to measure the intensity of the separately redirected diffraction orders as a function of wavelength.

Abstract: The present invention provides surface plasmon resonance (SPR) based sensing systems and methods for rapid, sensitive, and real-time analysis of analyte secretion from living cells. In one embodiment, the SPR based sensing device of the present invention comprises at least one cell culture module for culturing living cells, wherein the cell culture module is configured so that analytes secreted from the living cells can be released onto a SPR sensing surface.

Abstract: A light signal device includes at least one light sensor and a signal generator which has a light source and a shutter disk. An inner side of a screening stop, which protects the shutter disk, holds at least one reflector element which reflects a portion of the light emitted by the light source in the direction of the at least one light sensor. A method for ascertaining the degree of soiling of a shutter disk for a signal generator is also provided.

Abstract: In general, the invention relates to a unit that includes a semiconductor and a plasmonic material disposed on the semiconductor, where a potential barrier is formed between the plasmonic material and the semiconductor. The unit further includes an insulator disposed on the semiconductor and adjacent to the plasmonic material and a transparent conductor disposed on the plasmonic material, where, upon illumination, the plasmonic material is excited resulting the excitation of an electron with sufficient energy to overcome the potential barrier.

Abstract: Method for processing slaughtered poultry, wherein oven-ready carcasses of slaughtered poultry are conveyed by a feed conveyor (2), said feed conveyor having an endless track and carriers (2a) that are moved along said track, the feed conveyor carrier being adapted to support one carcass suspended from its legs. Each individual carcass is subjected at least one of: ?—a determination of the individual carcass weight by a weighing device (4), ?—a determination of the individual carcass size by an imaging device. For dividing the carcasses into parts use is made of a first cut-up line (10) and a second cut-up line (20), wherein each cut-up line has an associated cut-up line conveyor (11, 21), said cut-up line conveyor having an endless track and carriers (11a, 21a) that are moved along said track, each cut-up line conveyor carrier being adapted to support one carcass suspended from its legs.

Abstract: A method of measuring the reflectivity of a region of an article to electromagnetic radiation, in particular for the characterisation of the radio-frequency (RF) properties of wind turbine blades. The article is arranged in the near-field of a transceiver antenna, which performs both illumination and measurement of reflected radiation from the region of the article undergoing measurement. The method is beneficial in that it can be used with an antenna in close proximity (or in contact) to the article to be measured, for example for use in on site measurement of specific regions of a turbine blade.

Abstract: A method of processing a substrate according to a PECVD process is described. Temperature profile of the substrate is adjusted to change deposition rate profile across the substrate. Plasma density profile is adjusted to change deposition rate profile across the substrate. Chamber surfaces exposed to the plasma are heated to improve plasma density uniformity and reduce formation of low quality deposits on chamber surfaces. In situ metrology may be used to monitor progress of a deposition process and trigger control actions involving substrate temperature profile, plasma density profile, pressure, temperature, and flow of reactants.

Abstract: A toner-amount detection sensor includes a board, a sensor cover, a light emitter, a light receiver, a light-shielding wall, and two locking parts. The light emitter is surface-mounted on the board. The light receiver is surface-mounted on the board. The light-shielding wall is located between the light emitter and the light receiver, abuts the board, and abuts the sensor cover or extends from the sensor cover. The two locking parts are formed at opposite ends of the sensor cover to press the board to lock it from outside the light emitter and light receiver relative to the light-shielding wall, using the abutment between the light-shielding wall and the board as a supporting point.

Abstract: According to an example, an apparatus for performing spectroscopy includes a substrate on which a plurality of surface-enhanced spectroscopy (SES) elements are positioned substantially along a first plane. The apparatus also includes a first electrode positioned adjacent to the plurality of SES elements substantially along the first plane and a second electrode positioned adjacent to the plurality of SES elements substantially along the first plane and on a side of the plurality of SES elements that is opposite the first electrode. The first electrode and the second electrode are to generate an electric field around the plurality of SES elements when voltages are applied through the first electrode and the second electrode.

Abstract: The optical absorber for long-wave infrared radiation includes a nano-plasmonic gold structure arrayed on an absorbing dielectric substrate in an alternating checkerboard-type pattern. A plurality of plasmonic cells are formed on an upper surface of the absorbing dielectric substrate, which can be, for example, a silicon nitride (Si3N4) substrate. The plurality of plasmonic cells are arrayed in a regular rectangular grid pattern, with each plasmonic cell having a plurality of elongated strips, each extending along an identical axis of orientation within the plasmonic cell. Adjacent ones of the plasmonic cells are oriented orthogonally with respect to one another, and each elongated strip includes a titanium layer formed on the upper surface of the absorbing dielectric substrate and a gold layer formed on the titanium layer, such that the titanium layer is sandwiched between the gold layer and the upper surface of the absorbing dielectric substrate.

Abstract: A sensor system is described for detecting wetting of a window includes a photodetector having multiple light-sensitive elements and a light source for emitting light to a detection region of the window in such a way that a portion of the light is reflected at the window, and another portion of the light passes through the window. The light source and the light-sensitive element are situated in such a way that a portion of the light from the light source which passes through the window is reflected at the wetting and strikes a portion of the light-sensitive elements. The light source includes a lighting element which is set up to irradiate into a transparent body. The transparent body has a surface which has defined unevennesses for the diffuse radiation of the irradiated light.

Abstract: A method for assaying a sample for each of multiple analytes is described. The method includes contacting an array of spaced-apart test zones with a liquid sample (e.g., whole blood). The test zones are disposed within a channel of a microfluidic device. The channel is defined by at least one flexible wall and a second wall which may or may not be flexible. Each test zone comprising a probe compound specific for a respective target analyte. The microfluidic device is compressed to reduce the thickness of the channel, which is the distance between the inner surfaces of the walls within the channel. The presence of each analyte is determined by optically detecting an interaction at each of multiple test zones for which the distance between the inner surfaces at the corresponding location is reduced. The interaction at each test zone is indicative of the presence in the sample of a target analyte.

Abstract: A sensor chip maybe provided that is used in a specimen material detection device with which a solution can be prevented from remaining, an irregularity can be prevented from occurring in a concentration, and a fluctuation of a signal can be prevented from occurring during a detection, and as a result it is possible to carry out an inspection in an accurate manner.

Abstract: There is provided a surface plasmon resonance sensor including a metallic graphene layer formed in a core of a predetermined area of an optical fiber from which a jacket and a cladding are removed. Further, a preparing method of the surface plasmon resonance sensor and a surface plasmon resonance sensor system is also provided.

Abstract: A non-contact metrology system utilizes a display that can be programmed with a plurality of targets. The display targets shine on a specular surface and the reflected targets are detected by an imaging device. Based on the display pattern and the expected location of the reflected pattern, it is possible to characterize the reflective surface. The displayed pattern can be a regular array of targets and the reflected pattern detected by the imaging device is an irregular display of targets whose locations are based on the particular display pattern, the location of the display system and imaging device and the nature of the surface. Deviations of the actual location of targets from the expected location of targets is indicative of unexpected variations in the surface. Alternatively, the display has an irregular pattern of targets such that the reflected signals result in a regularly spaced array detected by the imaging device.

Abstract: The resistivity of a silicon boule may vary along its length, thereby making a uniform ion implantation process sub-optimal. A system and method for measuring a resistivity of a substrate, and processing the substrate based on that measured resistivity is disclosed. The system includes a resistivity measurement system, a controller and an ion implanting system, where the controller configures the ion implantation process based on the measured resistivity of the substrate.

Abstract: The invention relates to a micromechanical resonator arrangement, in particular micro-mirror scanner with an inner actuator, which comprises an oscillation body capable of oscillation about at least one axis, and with an outer actuator with an oscillating part. The inner and outer actuator form a coupled oscillation system, and the outer actuator is driven by an external drive whose drive frequency is selected in a manner such that the oscillation body of the inner actuator oscillates with one of its eigenmodes or close to this eigenmode. The inner actuator is at least one vacuum-encapsulated micro-actuator chip which is fastened on the oscillating part of the outer actuator.