Abstract: A device for determining the surface topology and associated color of a structure, such as a teeth segment, includes a scanner for providing depth data for points along a two-dimensional array substantially orthogonal to the depth direction, and an image acquisition means for providing color data for each of the points of the array, while the spatial disposition of the device with respect to the structure is maintained substantially unchanged. A processor combines the color data and depth data for each point in the array, thereby providing a three-dimensional color virtual model of the surface of the structure. A corresponding method for determining the surface topology and associate color of a structure is also provided.

Abstract: Methods for forming a three-dimensional image of a test object include directing light to a surface of best-focus of an imaging optic, where the light has an intensity modulation in at least one direction in the surface of best-focus, scanning a test object relative to the imaging optic so that a surface of the measurement object passes through the surface of best-focus of the imaging optic as the test object is scanned, acquiring, for each of a series of positions of the test object during the scan, a single image of the measurement object using the imaging optic, in which the intensity modulation of the light in the surface of best-focus is different for successive images, and forming a three-dimensional image of the test object based on the acquired images.

Abstract: An apparatus for determining surface topology of a portion of a three-dimensional structure is provided, that includes a probing member, an illumination unit, a light focusing optics, a translation mechanism, a detector and a processor.

Abstract: An apparatus for determining surface topology of a portion of a three-dimensional structure is provided, that includes a probing member, an illumination unit, a light focusing optics, a translation mechanism, a detector and a processor.

Abstract: There is provided an apparatus (300) for measuring a distance to a target (312), comprising: a transmitter (302) configured to transmit an optical pulse (310) towards the target (312), a receiver channel (304) configured to receive the optical pulse (310) reflected from the target (312), and a processor (306) configured to measure a time intervaf between the transmission and detection of the optical pulse (310) at a predefined amplitude threshold level (11OA, 110B), to determine a time domain parameter from the detected optical pulse (310) at one or more amplitude threshold levels (110A, 110B), to convert the time domain parameter value into a correction value by a conversion model; to correct a timing error in the measured time interval by the correction value, and to convert the error-corrected time interval into a distance to the target (312).

Abstract: A method of error compensation in a chromatic point sensor (CPS) reduces errors associated with varying workpiece spectral reflectivity. The errors are associated with a distance-independent profile component of the CPS measurement signals. Workpiece spectral reflectivity may be characterized using known spectral reflectivity for a workpiece material, or by measuring the workpiece spectral reflectivity using the CPS system. CPS spectral reflectivity measurement may comprise scanning the CPS optical pen to a plurality of distances relative to a workpiece surface and determining a distance-independent composite spectral profile from a plurality of resulting wavelength peaks.

Abstract: A machine vision inspection system acquires a plurality of images of a workpiece region of interest at various focus heights, and determines a Z-height (e.g., the best focus height) for the region of interest based on a focus peak determining data set for the region of interest. The focus peak determining data set is derived from the plurality of images. The machine vision inspection system also determines Z-height quality meta-data based on data derived from the plurality of images (e.g., based on the focus peak determining data set), and associates the Z-height quality meta-data with the corresponding Z-heights. The Z-height quality meta-data are usable to establish weighting factors that are used in association with the corresponding best focus Z-heights in subsequent operations that fit a workpiece surface representation to a plurality of the best focus Z-heights.

Abstract: The invention relates to a method and an apparatus for determining a height of a number of spatial positions on a sample, defining a height map of a surface of said sample. The method can involve irradiating the surface of the sample with light including a spatial periodic pattern in a direction perpendicular to an optical axis and moving parallel to the pattern, scanning the surface in the direction of the optical axis for each position of the surface and detecting the light reflected by the sample by a detector during the scanning. In any scanning position, only a single image is taken, and the scanning speed has a predetermined relation to the phase of the periodic pattern. Analyzing an output signal of the detector can involve, for each spatial position of the detector, determining of an amplitude of the signal detected during the scanning and determining a scanning location where the amplitude is maximal.

Abstract: Even if a return beam from a work to be measured does not agree with the center of a two-piece sensor, a correction value is calculated according to a voltage difference between two sensors of the two-piece sensor if the voltage difference is within a neighborhood range. The correction value is added to an actual position of an objective lens in an up-down direction, to calculate a movement amount of the objective lens up to a focused state (a state in which the return beam agrees with the center of the two-piece sensor).

Abstract: Method of detecting surface features of a microarray. The method includes providing a microarray to an optical scanner, wherein the microarray includes a surface having features. The method also includes carrying out a scanning process using the optical scanner, wherein the scanning process includes: (i) acquiring images of sequential regions on the surface, wherein a defocus spread is applied to the optical scanner during the acquiring, (ii) determining a focus score for the images, (iii) adjusting the optical scanner to a different defocus spread based on the focus score, and (iv) repeating (i) through (iii) at the different defocus spread, thereby acquiring images of further sequential regions on the surface. The method also includes analyzing the images to distinguish different target molecules at the features of the microarray. The images that are analyzed were acquired at the defocus spread and at the different defocus spread during the scanning process.

Abstract: A system and method of autofocusing an optical system uses transforms of images or portions of images formed by the optical system. A detector is used to capture images at different positions relative to the optical system. Transforms and blur spread parameters are calculated for the images for use in determining a position to which the detector should be moved to autofocus the system.

Abstract: According to one embodiment, a three-dimensional shape measuring apparatus includes at least an aperture plate that is provided with a plurality of confocal apertures which are two-dimensionally arranged to have a predetermined arrangement period, and an aperture plate displacement portion that displaces the aperture plate at a constant speed in a predetermined direction perpendicular to the optical axis direction. Further, the aperture plate is provided with a cover member which is moved integrally with the aperture plate and which includes a transparent body allowing the light beams from the light source to pass therethrough and to be irradiated to the plurality of confocal apertures, and protects the plurality of confocal apertures from dust. Further, an imaging optical system, by which each of reflected light beams is guided to a photo-detector, is designed in consideration of optical properties of the whole optical system including the transparent body of the cover member.

Abstract: An apparatus for determining surface topology of a portion of a three-dimensional structure is provided, that includes a probing member, an illumination unit, a light focusing optics, a translation mechanism, a detector and a processor.

Abstract: In a method for scanning edges of an object using a computing device, the computing device is connected to an image measuring machine including an image capturing device. A start point, an end point, a scan direction, and a scan distance interval are set. Scan points on the edges of the object are determined. For each scan point, the computing device aims the image capturing device at the scan point, controls the image capturing device to capture images of the object at different depths, and records focal points. Definition values of the images are calculated and an image with a highest definition value is determined. A focal point corresponds to the image with the highest definition value and so coordinates of the scan point are determined. Scanned edges of the object are formed based on all the scan points.

Abstract: Method for measuring the shape of a section of a semi-transparent object such as one section of a tooth, using a light source for generating light with a broadband spectrum in a device for generating a multifocal illumination pattern, a lens with a large chromatic aberration for imaging foci of the illumination pattern onto the object, and a detection device for determining the wavelength spectra of the foci confocally imaged onto the object via the lens, wherein a spectral peak position of each focus is determined from the respective wavelength spectrum, from which position the extent of the object in the direction of the imaging beam (Z coordinate) is calculated.

Abstract: A method of error compensation in a chromatic point sensor (CPS) reduces errors associated with varying workpiece spectral reflectivity. The errors are associated with a distance-independent profile component of the CPS measurement signals. Workpiece spectral reflectivity may be characterized using known spectral reflectivity for a workpiece material, or by measuring the workpiece spectral reflectivity using the CPS system. CPS spectral reflectivity measurement may comprise scanning the CPS optical pen to a plurality of distances relative to a workpiece surface and determining a distance-independent composite spectral profile from a plurality of resulting wavelength peaks.

Abstract: An apparatus for observing the optical appearance of a surface (2) of a sample (1) of semitransparent material, in particular the surface (2) of a human skin, the apparatus comprising a light source (11,12,13,16,17) for illuminating at least a region of interest of the surface (2) of the sample (1) from a predetermined direction, a camera (14) for observing a response to the illumination of the region of interest and an optical focus device (21,31) for determining if the camera (14) is in focus with the surface (2) of the region of interest. The invention also relates to a method for observing the optical appearance of the surface (2) of a sample (1) of semitransparent material, in particular the surface (2) of a human skin.

Abstract: A device for determining the surface topology and associated color of a structure, such as a teeth segment, includes a scanner for providing depth data for points along a two-dimensional array substantially orthogonal to the depth direction, and an image acquisition means for providing color data for each of the points of the array, while the spatial disposition of the device with respect to the structure is maintained substantially unchanged. A processor combines the color data and depth data for each point in the array, thereby providing a three-dimensional color virtual model of the surface of the structure. A corresponding method for determining the surface topology and associated color of a structure is also provided.

Abstract: A method for controlling focus of an optical system. The method includes providing a pair of incident light beams to a conjugate lens. The incident light beams are directed by the lens to converge toward a focal region. The method also includes reflecting the incident light beams with an object positioned proximate to the focal region. The reflected light beams return to and propagate through the lens. The method also includes detecting a phase of each of the reflected light beams and determining a degree-of-focus of the optical system with respect to the object by comparing the phases of the reflected light beams.

Abstract: There is provided a profile measuring apparatus which measures a profile of an object, including an imaging element; an image formation optical system including an objective lens; a measuring direction changing unit which is configured to change inclination of a surface of the object with respect to the objective lens based on information of the inclination of the surface of the object so that a light flux enters the objective lens with an aperture angle not less than a predetermined degree; and a measuring unit which is configured to measure the profile of the object based on the image, of the object on which the pattern is projected, obtained by the imaging element.

Abstract: An apparatus for determining surface topology of a portion of a three-dimensional structure is provided, that includes a probing member, an illumination unit, a light focusing optics, a translation mechanism, a detector and a processor.

Abstract: A method for controlling a focus of an optical system. The method includes providing a pair of incident light beams to a conjugate lens. The incident light beams are directed by the lens to converge toward a focal region. The method also includes reflecting the incident light beams with an object positioned proximate to the focal region. The reflected light beams return to and propagate through the lens. The method also includes determining relative separation measured between the reflected light beams and determining a degree-of-focus of the optical system with respect to the sample based upon the relative separation.

Abstract: Provided is a device for determining the surface topology and associated color of a structure, such as a teeth segment, including a scanner for providing depth data for points along a two-dimensional array substantially orthogonal to the depth direction, and an image acquisition means for providing color data for each of the points of the array, while the spatial disposition of the device with respect to the structure is maintained substantially unchanged. A processor combines the color data and depth data for each point in the array, thereby providing a three-dimensional color virtual model of the surface of the structure. A corresponding method for determining the surface topology and associated color of a structure is also provided.

Abstract: An apparatus (10) for microlithographic projection exposure, which includes: an optical system (18) for imaging mask structures (16) onto a surface (21) of a substrate (20) by projecting the mask structures (16) with imaging radiation (13), the optical system (18) being configured to operate in the EUV and/or higher frequency wavelength range, and various structure defining a measurement beam path (36) for guiding measurement radiation (34), the measurement beam path (36) extending within the optical system (18) such that the measurement radiation (34) only partially passes through the optical system (18) during operation of the apparatus (10).

Abstract: An apparatus for measuring a height of an object plane or multiple points on an object is disclosed. The apparatus comprises an imaging system having a focal plane passing through a focal point of the imaging system, wherein the focal plane of the imaging system is tilted at an oblique angle with respect to the object plane such that only a small portion of the object is in focus. Alternatively, the focal plane is tilted at an oblique angle with respect to a scanning direction of the imaging system during relative movement between the imaging system and the object.

Abstract: A probe microscope includes a cantilever having a probe for contact with an object, first and second displacement detection optical systems, and an object lens. The first displacement detection optical system includes a first light source and a first displacement detecting section that detects displacement of the cantilever. The second displacement detection optical system includes a second light source and a second displacement detecting section that detects displacement of the object. The object lens is provided between the cantilever and the first light source and between the cantilever and the second light source. The object lens has a focal position for the light that is emitted from the first light source and has a first wavelength at the position of the cantilever and has a focal position for the light that is emitted from the second light source and has a second wavelength at the position of the object.

Abstract: A method for measuring a surface profile of an object, the method includes, acquiring information about a first direction where a step of a surface of the object extends relative to a scanning direction, setting phase distribution applied to the irradiation beam according to the information, and scanning the object in the scanning direction with the irradiation beam.

Abstract: An apparatus for determining surface topology of a portion of a three-dimensional structure is provided, that includes a probing member, an illumination unit, a light focusing optics, a translation mechanism, a detector and a processor.

Abstract: An electronic part recognition apparatus and a chip mounter having the same are provided. The apparatus includes a part conveyor unit for moving an electronic part along a path and mounting the part at a mounting position, a position recognition portion for continuously recognizing position information of the part conveyor unit moving along the path, a controller for receiving the position information from the position recognition portion and generating a photographing signal, and an image processing unit for receiving the photographing signal from the controller and time-exposing the part to light to photograph an image of the part when the part is located at a part recognition region while the conveyor unit moves. The apparatus can capture an image of a part suctioned by a nozzle installed in a head of a chip mounter and moved without stoppage of the head to recognize a state of the suctioned electronic part.

Abstract: The present invention aims to provide an intra-oral measurement device and an intra-oral measurement system capable of measuring an inside of an oral cavity at high accuracy without increasing a size of the device, and includes a light projecting unit for irradiating a measuring object including at least a tooth within an oral cavity with light, a lens system unit for collecting light reflected by the measuring object, a focal position varying mechanism for changing a focal position of the light collected by the lens system unit, and an imaging unit for imaging light passed through the lens system unit.

Abstract: A measurement device for the determination of the characteristics of the object's surface by means of the optical radiation, wherein a measurement device comprises an optical radiation source and a detector to receive the radiation reflected from the surface being measured. In addition, a measurement device comprises an emitted optical radiation processing unit, which is adjusted to split optical radiation emitted by an optical source into separate wavelengths and to direct said separate wavelengths to the object being measured in a direction, that differs from the normal of the surface being measured so, that at least the shortest and the longest wavelengths of said wavelengths are focused on different halves and different heights of the measured object's surface, in the direction of the normal of the surface being measured.

Abstract: Methods, devices and systems of an optical sensor for spatially smart 3-D object measurements using variable focal length lenses to target both specular and diffuse objects by matching transverse dimensions of the sampling optical beam to the transverse size of the flat target for given axial target distance for instantaneous spatial mapping of flat target, zone. The sensor allows volumetric data compressed remote sensing of object transverse dimensions including cross-sectional size, motion transverse displacement, inter-objects transverse gap distance, 3-D animation data acquisition, laser-based 3-D machining, and 3-D inspection and testing. An embodiment provides a 2-D optical display using 2-D laser scanning and 3-D beamforming optics engaged with sensor optics to measure distance of display screen from the laser source and scanning optics by adjusting its focus to produce the smallest focused beam spot on the display screen.

Abstract: A chromatic confocal point sensor optical pen comprises a multi-stage optical configuration providing an enhanced range-to-resolution ratio. The optical configuration comprises at least first and last axially dispersive focusing elements that combine to contribute to the overall axial chromatic dispersion of the optical pen. The first focusing element receives source radiation and focuses that radiation at a first focal region internal to the multi-stage optical configuration and the last focusing element receives radiation from a last focal region internal to the multi-stage optical configuration and outputs the measurement beam. Intermediate focusing elements may provide additional focal regions internal to the multi-stage optical configuration. This configuration provides an unprecedented combination of extended sensing range, compact lens diameter, and high numerical aperture. The focusing elements may comprise refractive lenses or diffractive optical elements.

Abstract: Methods for forming a three-dimensional image of a test object include directing light to a surface of best-focus of an imaging optic, where the light has an intensity modulation in at least one direction in the surface of best-focus, scanning a test object relative to the imaging optic so that a surface of the measurement object passes through the surface of best-focus of the imaging optic as the test object is scanned, acquiring, for each of a series of positions of the test object during the scan, a single image of the measurement object using the imaging optic, in which the intensity modulation of the light in the surface of best-focus is different for successive images, and forming a three-dimensional image of the test object based on the acquired images.

Abstract: A plurality of spots forming an M×N matrix can be used in a focus system. Specifically, a plurality of identical spots can be simultaneously projected onto the sample. A V(z) curve can be generated for each spot. A robust focus can be determined based on the generated V(z) curves. Using the spot matrix significantly increases the probability that at least one of the plurality of spots in the matrix can provide an unambiguous V(z) curve. Thus, the spot matrix eliminates the need to search for an appropriate site because the spot matrix increases the probability of landing on a “good” location by a factor of M×N.

Abstract: An apparatus and a method for ascertaining a gap between a stationary member and a rotating member are disclosed. At least a reference beam and a signal beam, which have different focal lengths or which diverge/converge at different rates, are fixed to the stationary member and proximate to each other. The beams are projected across a gap between the stationary member and the rotating member toward the rotating member. The reference and signal beams are reflected by the translating member when it intersects the reference and signal beam, and the reflected reference and signal pulses are obtained. One or more features of the reflected reference pulse and the reflected signal pulse, such as a rise time of the pulses, a fall time of the pulses, a width of the pulses and a delay between the reflected reference pulse and the reflected signal pulse, among other factors, are obtained. The width of the gap is obtained using at least one of these factors.

Abstract: A system for determining the shape of a cornea of an eye illuminates at least one of the interior surface, the posterior surface, and the interior region of the eye with infrared light of a wavelength that can generate fluorescent light from the portion of the cornea illuminated. The generated fluorescent light is then detected. A step of illuminating can comprise focusing the infrared light in a plurality of different planes substantially perpendicular to the optical axis of the eye. From the detected light it is possible to create a map of at least a portion of the interior surface, at least a portion of the posterior surface, and/or portion of the interior region of the cornea. Clarity of vision can be determined by generating fluorescence from proteins in the pigment epithelial cells of the retina.

Abstract: A phosphor point source element comprises a substrate and light emitting phosphor particles arranged on the substrate to provide a circular operational track having a tightly packed particle arrangement adjacent to a flat operational surface of an operational track region. The operational track region is rotated while illuminated at a point to provide a high intensity point source. The tightly packed particle arrangement may be achieved by spinning the phosphor particles in a cavity to compress the phosphor on the substrate at the periphery of the cavity, or by other mechanical compression. The tightly packed phosphor arrangement may either be compressed against a forming element that bounds the cavity, or machined, to provide a flat operational surface. An adhesive binding agent that permeates the phosphor particles may be cured to fix the tightly packed arrangement. A window element may support and/or protect the operational surface, in some embodiments.

Abstract: There is provided a profile measuring apparatus which measures a profile of an object, including an imaging element; an image formation optical system including an objective lens; a measuring direction changing unit which is configured to change inclination of a surface of the object with respect to the objective lens based on information of the inclination of the surface of the object so that a light flux enters the objective lens with an aperture angle not less than a predetermined degree; and a measuring unit which is configured to measure the profile of the object based on the image, of the object on which the pattern is projected, obtained by the imaging element.

Abstract: A method for measuring a surface profile of an object, the method includes, acquiring information about a first direction where a step of a surface of the object extends relative to a scanning direction, setting phase distribution applied to the irradiation beam according to the information, and scanning the object in the scanning direction with the irradiation beam.

Abstract: A probe microscope includes a cantilever having a probe, a displacement detecting optical system, an observation optical system, an objective lens, and a parallel glass. The displacement detecting optical system includes a first light source and a light detecting element. The observation optical system includes a second light source, an image forming lens, and a camera. The objective lens is disposed between the cantilever and the first and second light sources, and is commonly used by the displacement detecting optical system and the observation optical system. The parallel glass is capable of being inserted and retracted freely between the cantilever and the objective lens to adjust a focal point of the objective lens.

Abstract: Provided is a device for determining the surface topology and associated color of a structure, such as a teeth segment, including a scanner for providing depth data for points along a two-dimensional array substantially orthogonal to the depth direction, and an image acquisition means for providing color data for each of the points of the array, while the spatial disposition of the device with respect to the structure is maintained substantially unchanged. A processor combines the color data and depth data for each point in the array, thereby providing a three-dimensional color virtual model of the surface of the structure. A corresponding method for determining the surface topology and associated color of a structure is also provided.

Abstract: A phosphor point source element comprises a disk substrate and light emitting phosphor particles arranged on the substrate to provide a circular operational track having a desirable tightly packed particle arrangement adjacent to a flat operational surface of an operational track region. The operational track region is rotated while illuminated to provide a high intensity point source of radiation. The tightly packed particle arrangement may be achieved by spinning the phosphor particles in a cavity between a fabrication plate and the substrate, to compress the phosphor against the fabrication plate at the periphery of the cavity, or by mechanically compressing the phosphor. An adhesive binding agent may permeate the phosphor particles and be cured to maintain the tightly packed arrangement. A window element may support and/or protect the operational surface, in some embodiments.

Abstract: A central ray blocking aperture element is utilized in a chromatic confocal point sensor optical pen for chromatic range sensing. The central ray blocking aperture element blocks light which would otherwise pass through the chromatic confocal point sensor optical pen proximate to its optical axis. The average numerical aperture of the operative light rays of the optical pen is thereby increased, which decreases the width of a corresponding spectral peak that the optical pen provides in the spectrometer of a chromatic confocal point sensor system and thereby improves the overall measurement resolution.

Abstract: Even if a return beam from a work to be measured does not agree with the center of a two-piece sensor, a correction value is calculated according to a voltage difference between two sensors of the two-piece sensor if the voltage difference is within a neighborhood range. The correction value is added to an actual position of an objective lens in an up-down direction, to calculate a movement amount of the objective lens up to a focused state (a state in which the return beam agrees with the center of the two-piece sensor).

Abstract: A method for controlling a focus of an optical system. The method includes providing a pair of incident light beams to a conjugate lens. The incident light beams are directed by the lens to converge toward a focal region. The method also includes reflecting the incident light beams with an object positioned proximate to the focal region. The reflected light beams return to and propagate through the lens. The method also includes determining relative separation measured between the reflected light beams and determining a degree-of-focus of the optical system with respect to the sample based upon the relative separation.

Abstract: An apparatus for determining surface topology of a portion of a three-dimensional structure is provided, that includes a probing member, an illumination unit, a light focusing optics, a translation mechanism, a detector and a processor.

Abstract: The invention provides for surface mapping of in-vivo imaging subjects using a single camera and an illuminator that projects a plurality of targets such as spots on the subject. By limiting the depth-of-field of the camera lens, or of the illuminator optics, or both, a spatial plane is defined in which the spots are most sharply in focus. Controlled displacement of this plane relative to the subject is achieved through movement of the mechanical stage on which a subject is placed; or through movement of the best-focus plane by adjustment of the camera, lens, or illuminator optics. Images are taken at several relative positions of the best-focus plane and the subject, and the height of individual points on the subject is determined through analysis of focus, given the known displacements. A mesh or other surface can be constructed from individual point locations, to provide a surface map of the subject. Accuracy of 0.5 mm can be readily attained for mice and similarly sized subjects.

Abstract: A three-dimensional profile inspecting apparatus includes at least two optical inspecting apparatuses and a tilt angle adjusting mechanism. The tilt angle adjusting mechanism is equipped with the at least two optical inspecting apparatuses so as to adjust the tilt angles of the at least two optical inspecting apparatuses. When the tilt angles of the optical inspecting apparatuses are changed, the focuses of the optical inspecting apparatuses remain at a single position and a subject to be inspected is within the fields of view of the optical inspecting apparatuses. The three-dimensional profile of the subject can be obtained by building the images collected by the two optical inspecting apparatuses.

Abstract: A three-dimensional profile inspecting apparatus includes at least two optical inspecting apparatuses and a tilt angle adjusting mechanism. The tilt angle adjusting mechanism is equipped with the at least two optical inspecting apparatuses so as to adjust the tilt angles of the at least two optical inspecting apparatuses. When the tilt angles of the optical inspecting apparatuses are changed, the focuses of the optical inspecting apparatuses remain at a single position and a subject to be inspected is within the fields of view of the optical inspecting apparatuses. The three-dimensional profile of the subject can be obtained by building the images collected by the two optical inspecting apparatuses.