Abstract: Determining surface topology of a portion of a three-dimensional structure is provided. An array of incident light beams passing through a focusing optics and a probing face is shone on said portion. The focusing optics defines one or more focal planes forward the probing face in a position which can be changed by the focusing optics. The beams generate illuminated spots on the structure and the intensity of returning light rays propagating in an optical path opposite to that of the incident light rays is measured at various positions of the focal plane(s). By determining spot-specific positions yielding a maximum intensity of the returned light beams, data is generated which is representative of said topology.

Abstract: An arrangement for measuring the geometry or structure of an object by means of a co-ordinate measuring device with an optical system for recording and reproducing a measured point on at least one optical sensor, whereby the optical system has at least one displaceable lens group having at least one measuring lens and at least some of the measuring lenses are supported in a housing. At least one further lens is arranged in at least some of the housings for supporting the measuring lenses of the at least one displaceable lens group, for the focusing of a light beam on the object.

Abstract: A method and apparatus for measuring surface properties of a workpiece in an extremely precise manner by means of a co-ordinate measuring device (10), independently from the material properties of the workpiece. A molded probe element is used which can be displaced along coordinate axes (X, Y, Z), and an optical sensor detects the movement of the probe element on the surface of the workpiece. The optical sensor is an optoelectronic distance sensor, and the molded probe element is displaceably arranged in relation to the distance sensor in such a way that the distance sensor optionally directly measures the surface, or the position of the molded probe element.

Abstract: The present invention relates to a method and to a device enabling data to be input, and also to an optical system for detecting the position of an article or a member and suitable for being used (or incorporated) in such a method (or device). The technical field of the invention is that of making keyboards and similar devices enabling manual input of data for processing by a digital computer. The method of the invention for determining the position of an article in a zone uses the steps of structuring a neural network by training, applying data to the input of the structured neural network, the data being the result of converting signals delivered by a plurality of detectors sensitive to illumination of said zone, and determining the position of the article in the zone as a function of at least one data item output by the structured neural network.

Abstract: A non-contact surface configuration measuring method is provided which allows for accurate measurement of a surface which is at a steep angle to a laser probe. Specific areas including parts inclined ±30° or more from an optimum measurement state relative to the laser probe are measured after a workpiece is rotated such that the surface within the specific areas is less than ±30°. Therefore, accurately measured data on the specific areas can be obtained even in a different coordinate system from that of a general area.

Abstract: When irradiating a sample with light from a light source through an object lens, discretely changing a relative position between a beam condensing position of the object lens and the sample in an optical axis direction of the converging beam, obtaining light intensity information from the sample at each relative position, extracting plural pieces of light intensity information from a light intensity information group, estimating a maximum value on a change curve adaptive to the plural pieces of extracted light intensity information and the relative position for the maximum value, and obtaining the estimated maximum value of the light intensity information and relative position as brightness information and height information, these information about the sample can be continuously obtained by discretely performing an iterative operation on the relative position between a beam condensing position of the object lens and the sample in an optical axis direction of the converging beam.

Abstract: A technique for focusing and maintaining the focus of an inspection or review system upon a specific layer of a multi-layered specimen is described. In one embodiment, a confocal autofocus system can be used to focus an optical inspection or review system upon the top layer of a semiconductor wafer thin-film stack. The confocal autofocus system utilizes a tilted mask having a linear array of apertures or a continuous slit that is aligned so that a respective linear array of focal points or a focal slit is parallel with a scanning axis of the inspection system. Appropriate processing of the profile depth information yields knowledge of the depth of various layers in the specimen and allows for selection of the layer or location of interest upon which to focus the inspection or review system.

Abstract: A method and apparatus for tracing an edge contour of an object in three dimensional space is provided. The method and apparatus is utilized in a computer vision system that is designed to obtain precise dimensional measurements of a scanned object. In order to save focusing time during an automatic tracing measurement, multiple images may be collected and saved for a number of Z heights for a particular position of the XY stage. These saved images can later be used to calculate a focal position for each edge point trial location in the selected XY area rather than requiring a physical Z stage movement. In addition, a Z height extrapolation based on the Z heights of previous edge points can significantly speed up the searching process, particularly for objects where the Z height change of a contour is gradual and predictable.

Abstract: An imaging system on which a calibration method is practiced includes: a light source; a substrate for supporting an object; a patterning mask that generates a substantially periodic spatial pattern on the object; a phase shifter that adjusts the relative position of the patterning mask and object to shift the position of the pattern on the object; a detector that detects images of the object; and an analyzer that analyzes at least three images of the object, each of which represents a different spatial shift of the pattern, the analyzer being configured to remove the spatial pattern from the images to generate an optically sectioned image of the object. The calibration method includes: calibrating the position of the mask relative to the substrate via a phase-voltage technique; calibrating the position of the mask relative to the substrate via a merit function technique; and operating the calibrated imaging system.

Abstract: Determining surface topology of a portion (26) of a three-dimensional structure is provided. An array of incident light beams (36) passing through a focusing optics (42) and a probing face is shone on said portion. The focusing optics defines one or more focal planes forward the probing face in a position which can be changed (72) by the focusing optics. The beams generate illuminated spots (52) on the structure and the intensity of returning light rays propagating in an optical path opposite to that of the incident light rays is measured (60) at various positions of the focal plane(s). By determining spot-specific positions yielding a maximum intensity of the returned light beams, data is generated which is representative of said topology.

Abstract: A camera unit is arranged opposite a grinding surface. While moving the focal position of the camera unit in a direction perpendicular to the grinding surface relative to the grinding surface of the grinding tool, a control unit causes the camera unit to pickup images of the grinding surface at a plurality of focal positions. Then, an already prepared basic image pattern of abrasive gains is compared with the image data obtained at the plurality of focal positions by the image pickup operation. As a result of the comparison, image data approximate to the basic of the focal position at which the detected image data was obtained.

Abstract: A sensor device is for performing rapid optical measurement of distances according to the confocal optical imaging principle in order to determine distance values and/or height values of a surface. The sensor device includes a point-shaped light-emitting element that is arranged on an optical axis, a reflector, which is arranged perpendicular to the optical axis and which can be displaced along the optical axis, imaging optics centered with regard to the optical axis, and a point-shaped light-receiving element that is situated at the same location as the light-emitting element.

Abstract: A displacement sensor is provided with: a light-projection unit; a light-receiving unit having a light-shielding mask and a light-receiving element; a first light-converging element which converges luminous fluxes released from the light-projection unit on a measuring object; a second light-converging element which converges reflected luminous fluxes on the light-receiving unit; a first light-path control element which allows a projection-light light axis and a receiving-light light axis to be coaxially set on the measuring object side; and a light-path length sweeping mechanism which continuously changes a light-path length from the light-projection unit to the measuring object and a light-path length from the measuring object to the light-receiving unit.

Abstract: An embodiment described herein provides a technique to determine a focus point of a lense. Light is directed from a light source through the lense and onto a target surface. The light source and target surface may be positioned on opposite sides of the lense. The target surface may correspond to the position of where a primary light source for the particular application is to be located. A reflection passing through the lense from the reflective target surface may be located. A determination is then made as to whether the position where the reflection was located also could also corresponds to a focus point for the lense, if the primary light source was to be located at or near the target surface.

Abstract: A method and apparatus capable of using two or more capture methods to create three-dimensional representations of a target captured. Elements of the three-dimensional digital representation generated from the plural capture method are combined to yield a single digital three-dimensional representation having improved quality.

Abstract: A process for operating an optical scanning system includes making an image of a sample by scanning spots in the sample, measuring intensities of light emitted by the scanned spots, determining locations of the scanned spots, and assigning intensities to image pixels based on the measured intensities and determined locations of the scanned spots. In the making of the image, the acts of determining depend on a value of a parameter. The process also includes selecting a new value for the parameter and deciding whether the image of the sample has less double imaging if the new value of the parameter is used during the acts of determining. The process accepts the new value of the parameter in response to determining that the new value produces less of the double imaging.

Abstract: The invention provides a method for a method for determining a best initial focal position estimate for a current sample location on a substrate comprising multiple sample locations, comprising determining the best initial focal position estimate by using a result from one or more techniques selected from the group consisting of linear regression analysis of focal positions determined for at least two other sample locations on the substrate and quadratic regression analysis of focal positions determined for at least three other sample locations on the substrate.

Abstract: An optical measuring device includes a 3-D measuring set-up for measuring the shapes of test object surfaces in three dimensions, and projection optics including an objective optics, the test object being illuminated by a light source via an illuminating beam using an illuminating optics. A rapid, highly resolving measurement of surface shapes which are nearly radially symmetric is provided by configuring the objective optics as image-flattening optics for covering (measuring) and flattening a curved surface area or as panoramic optics for measuring a radially symmetric surface area that encircles 360°.

Abstract: An optical scanning system includes a probe and a processor. The probe includes a mechanical oscillator responsive to AC voltage signals and an optical fiber. The optical fiber has a free end that executes an oscillatory scanning motion in response to being mechanically driven by the mechanical oscillator. The processor is configured to receive measured intensities of light emitted from spots of a sample scanned by light from the free end of the optical fiber. The processor is also configured to assign intensities to image pixels based on the measured intensities of light. The acts of assigning compensate for variations in the density of the scanned spots.

Abstract: An adjustable lens is disclosed for use in an optical profilometer system. The adjustable lens includes a plurality of elements that are mutually spaced from another in a first position and provides a first focal point for an incident electromagnetic field having a first frequency incident at a first angle with respect to the plurality of elements. The adjustable lens also includes an actuation unit for changing the focal point of the plurality of elements to provide a second focal point for the incident electromagnetic field having the first frequency incident at the first angle with respect to the plurality of elements.

Abstract: The present invention relates to an optical measuring device (1) for measuring the shape of particularly rough surfaces of a test object (O), the measuring device including a device that has at least one light source (LQ), one illumination optics, one measuring optics, and at least one detection unit, for determining the intensity distribution of a measuring beam reflected from the surface as a function of a focus position relative to the object surface. A simple measurement even of highly inaccessible locations on the test object is made possible by the fact that the measuring optics has an optical probe for generating at least one intermediate image (ZW) of the observed surface area (FIG. 1).

Abstract: Determining surface topology of a portion (26) of a three-dimensional structure is provided. An array of incident light beams (36) passing through a focusing optics (42) and a probing face is shone on said portion. The focusing optics defines one or more focal planes forward the probing face in a position which can be changed (72) by the focusing optics. The beams generate illuminated spots (52) on the structure and the intensity of returning light rays propagating in an optical path opposite to that of the incident light rays is measured (60) at various positions of the focal plane(s). By determining spot-specific positions yielding a maximum intensity of the returned light beams, data is generated which is representative of said topology. Measurement of teeth. Light beams by grating of matrix of pinholes, micro lens array. Simultaneous imaging from three angles. Quicker with three different light components.

Abstract: A confocal three dimensional inspection system, and process for use thereof, allows for rapid inspecting of bumps and other three dimensional (3D) features on wafers, other semiconductor substrates and other large format micro topographies. The sensor eliminates out of focus light using a confocal principal to create a narrow depth response in the micron range.

Abstract: Method for carrying out the non-contact measurement of geometries such as surfaces of objects, with a coordinate measuring machine with a laser beam that is projected onto a measuring point of the object via an optical system, and in which the light that is reflected or scattered by the measuring point is detected by a detector. The optical system includes a zoom lens, whose lens groups each are each motor-adjusted separately from each other in positions for working distance and/or resolution and/or measuring range.

Abstract: A method and an apparatus for measuring a step difference in a semiconductor device without making contact with the semiconductor device. A first beam is radiated onto a wafer so as to form a first focus on a first portion of the wafer, and a second beam is radiated onto the wafer so as to form a second focus on a second portion of the wafer. The step difference between the first portion and the second portion of the wafer is measured by calculating a vertical displacement distance of the wafer and a beam focusing device used to attain the first focus and the second focus.

Abstract: The invention is directed to an arrangement for autofocusing onto a measuring location on an object moving in a direction which is at least approximately vertical to the optical axis of the imaging optics. According to the invention, a diaphragm device is to be provided the diaphragm opening of which extends in a direction aligned with the direction of movement of the measuring location; a receiving device for the measuring light has receiving areas arranged in a row beside each other and is inclined relative to the optical axis so that the image from the diaphragm device is incident on the receiving areas at an inclination of an angle &agr;; wherein the receiving device and the diaphragm opening are positioned relative to each other in such a way that characteristic measuring values are measured on the receiving areas when the measuring location is in or near the focus position.

Abstract: The invention relates to a method and an arrangement for determining the geometry of objects using a coordinate measuring device. An optical system (10) is used to form an image of at least one light or scanning spot whose position depends on the geometry of the object on at least one detector (30). The imaging scale, depth of field and distance from the object are adjusted by means of a zoom lens (18) whose lens groups (20, 22) are each power driven and are axially displaceable.

Abstract: A confocal three dimensional inspection system, and process for use thereof, allows for rapid inspecting of bumps and other three dimensional (3D) features on wafers, other semiconductor substrates and other large format micro topographies. The sensor eliminates out of focus light using a confocal principal to create a narrow depth response in the micron range.

Abstract: A stylus having a curvature radius of 1 mm or less is attached to the extremity of a probe. When the profile of an object is measured with high precision by causing the stylus to follow a measurement surface of the object, a reference ball for calibration is first measured, thereby surface profiling the object. From the measurement data, a contact position where the stylus contacts with the object is determined. A positional error caused by a curvature radius of the stylus is corrected by using an angle of inclination of the measurement surface in that contact position. The amount of profile error in the contact position is extracted by using the profile error data pertaining to the stylus determined by measurement of the reference ball. The amount of profile error is added to the measurement data, thereby correcting the profile error caused by the curvature radius of the stylus.

Abstract: The focusing capability of a metrology tool is used to determine the surface profile of a substrate and the stress on the substrate that is associated with processing step, such as layer deposition or etching. The amount of focusing adjustment necessary to place the substrate in focus is used to determine the height of the surface of the substrate at three or more locations. Based on the surface profile, a curvature parameter may be calculated. The curvature parameter may be calculated before and after a processing step. The stress associated with the processing step can then determined from these two curvature parameters.

Abstract: A method and an arrangement for automatic three-dimensional recording of structures of interest in a sample (15) are disclosed. The arrangement possesses a microscope having at least one microscope objective (13). The images of a sample (15) are acquired using a detector unit (19). A computer system (23) controls acquisition of the images and the microscope functions. The computer system (23) possesses a means (25) for automatically recording the entire marked specimen region in three dimensions.

Abstract: Determining surface topology of a portion (26) of a three-dimensional structure is provided. An array of incident light beams (36) passing through a focusing optics (42) and a probing face is shone on said portion. The focusing optics defines one or more focal planes forward the probing face in a position which can be changed (72) by the focusing optics. The beams generate illuminated spots (52) on the structure and the intensity of returning light rays propagating in an optical path opposite to that of the incident light rays is measured (60) at various positions of the focal plane(s). By determining spot-specific positions yielding a maximum intensity of the returned light beams, data is generated which is representative of said topology. Measurement of teeth. Light beams by grating of matrix of pinholes, micro lens array. Simultaneous imaging from three angles. Quicker with three different light components.

Abstract: An apparatus for measuring characteristics of a substance is provided. The apparatus includes a light source to generate light to form an image. A splitter transmits the light from the light source to a first lens, which collimates the light. A second lens receives the collimated light and is adapted to oscillate with respect to the substance and adapted to transmit and focus the light to a focal region within the substance, such that the oscillation will cause the focal region to pass back and forth through the substance and its surfaces/interfaces. A sensor receives light reflected from the focal region and provides a signal indicative of characteristics of the substance at the focal region.

Abstract: A shape measuring apparatus for measuring an outer surface of a measurement object, includes: a photo-sensor unit including two photo-sensors each provided with a number of pixels, first and second signal processing sections which executes combination processing to light reception signals outputted from the photo-sensors. The first signal processing section includes a corrector for correcting errors of light reception signals from one photo-sensor with respect to light reception signals from another photo-sensor in the incident direction or the direction perpendicular to the incident direction based on the relative displacement stored in the displacement memory. The second signal processing section includes a corrector for correcting the relative displacement by delaying the sending of the reception signals from one photo-sensor with respect to the sending of the reception signals from another photo-sensor. The first and second signal processing sections are selectively changed over.

Abstract: Determining surface topology of a portion (26) of a three-dimensional structure is provided. An array of incident light beams (36) passing through a focusing optics (42) and a probing face is shone on said portion. The focusing optics defines one or more focal planes forward the probing face in a position which can be changed (72) by the focusing optics. The beams generate illuminated spots (52) on the structure and the intensity of returning light rays propagating in an optical path opposite to that of the incident light rays is measured (60) at various positions of the focal plane(s). By determining spot-specific positions yielding a maximum intensity of the returned light beams, data is generated which is representative of said topology. Measurement of teeth. Light beams by grating of matrix of pinholes, micro lens array. Simultaneous imaging from three angles. Quicker with three different light components.

Abstract: The object of the invention is a method and an apparatus for optical measurement of a surface profile of a specimen, a series of n images of the specimen being acquired with an image acquisition apparatus in different planes in the z direction of a coordinate system (x, y, z). The image contents of all n images of the resulting image stack are compared to each other in the z direction at each coordinate point (x, y) in order to determine a plane therefrom according to predetermined criteria, assign its plane number (N) to that coordinate point (x, y), and store it in a mask image. The mask image contains all the 3D data of the specimen surface. Processing can be performed using 2D image processing procedures. The 3D information can be quickly and easily retrieved from the mask image. The surface profile can be reconstructed and displayed three-dimensionally.

Abstract: An adjustable lens is disclosed for use in an optical profilometer system. The adjustable lens includes a plurality of elements that are mutually spaced from another in a first position and provides a first focal point for an incident electromagnetic field having a first frequency incident at a first angle with respect to the plurality of elements. The adjustable lens also includes an actuation unit for changing the focal point of the plurality of elements to provide a second focal point for the incident electromagnetic field having the first frequency incident at the first angle with respect to the plurality of elements.

Abstract: A best focus determining method. First, a test mask is provided, wherein the test mask comprises a transparent substrate and an opaque layer covering parts of the transparent substrate to define a first transparent area with 0° phase and a second transparent area with 90° phase. The sizes of the two transparent areas are the same. Next, a light source is provided and transmits the test mask to perform an exposure. Then, a first image corresponding to the first transparent area and a second image corresponding to the second transparent area are formed. The sizes of the first and second images are measured to ensure the best focus possible.

Abstract: A calibration system within an optical inspection apparatus comprising a sensor, lens, fiducials, and a CPU. The CPU is configured to receive information from the sensor relating to the fiducial coordinate system and the sensor coordinate system, and the fiducials are used to determine a physical relationship between the sensor coordinates and fiducial coordinates. The calibration system has a means for calibrating the inspection system and measuring critical dimensions of an object in an accurate manner on-the-fly without additional set-up or manual calibration of the system.

Abstract: The upper end of an elongate, rigid, mirror supporting arm is releasably secured at its upper end to an orientation ring, which is removably and rotatably mounted on the lower, cylindrically shaped end of the objective lens housing of an optical autofocus measurement system. The arm extends at its lower end beneath the housing and has secured thereon a mirror which is spaced beneath the housing, and lies in a plane that intersects and is inclined relative to the optical axis of the optical system contained in the housing. The mirror faces the surface of an object disposed in an object plane spaced laterally from the optical axis of the lens system, so that the system is focused along a supplemental optical axis which is inclined to, and intersects, the optical axis of the system in the housing. Images of the object in the offset object plane are therefore projected along the supplemental axis and then from the mirror to the optical system along its optical axis.

Abstract: The invention relates to a method and an arrangement for measuring the structure of an object. The structure is scanned by touch, by means of a scanning element whose position is optically detected. The force produced after the contact between the scanning element and the object is determined and optionally adjusted to constant values.

Abstract: The present invention provides a laser processing and autofocusing system that measures the position of the work-piece at the machining spot, to allow the laser processing of work-pieces which are not flat and have surface variations, with the autofocusing system being able to compensate for these variations. During laser machining, it is desirable to keep the laser focus at the same height with respect to the surface of the sample for the best possible machining quality. Not all samples are flat, though, and it thus becomes necessary to map the surface of the sample accurately and to correct the focusing of the laser beam on the fly. The system includes a processing laser beam directed onto the surface at normal incidence and a light line projected onto the surface in the vicinity of the area being machined but at an angle with respect to the surface normal. The focusing optics for the machining laser and light line generator are fixed relative to each other on a positioning stage.

Abstract: The invention concerns a device for acquiring the three-dimensional shape of an object (10) by opto-electronic process, comprising a chromatic system (18) for illuminating the object (10) and for picking up the light reflected or backscattered by the object (10), and a reflecting mirror (26) placed on the optical axis between the optical system (18) and an illumination slot (16) for deflecting the light reflected by the object towards a spectral analysis means (30).

Abstract: A bilaterally conjugate telecentric optical system has, sequentially from one conjugate side, a first lens unit in the form of an afocal optical system including sequentially from one conjugate side a first subunit having positive optical power and a second subunit having positive optical power, and having an aperture stop fixed in the optical axis direction at the focal position on the back side of the first subunit; and a second lens unit in the form of an afocal optical system that is movable in the optical axis direction to adjust the focus while maintaining a telecentric state.

Abstract: A method for measuring the heights of test parts of an object to be measured and a height-measuring apparatus for carrying out the same, comprising the steps of placing an object on an X-Y table , projecting measurement light flux emitted by a light source on the object supported on the X-Y table from above the object with the measurement light flux being focused in a spot beam by an objective lens on the object, receiving the measurement light flux focused in the spot beam on and reflected from the object to be measured to cause a photosensor to detect the condition of focus on the object to be measured of the measurement light flux focused by the objective lens, moving the light source and the objective lens for horizontal scanning movement relative to the X-Y table while the objective leans is reciprocated vertically at a high speed, and determining the height of each of bonding wires on the basis of the vertical position of the objective lens when the measurement light flux is focused on the bonding wire

Abstract: A confocal microscope is provided which uses a confocal disk. The confocal microscope includes a light source, a high-NA and low-magnification objective lens which forms an image of the confocal disk obtained by irradiation with a light from the light source on a sample, and a first image formation lens system disposed between the confocal disk and the objective lens. A first image formation lens driving mechanism is provided for moving the first image formation lens system in a light axis direction and adjusting a focal point position of the objective lens with respect to the sample, and a second image formation lens system is provided which forms a sectioning image formed on the confocal disk into an image by photoelectric conversion.

Abstract: A system and method for utilizing a topology detector to capture visual information comprises a topology detector that propagates a detection pulse towards a target object using a transmitter module, and then senses wave segments of the detection pulse with a sensor array as the wave segments are reflected back toward the topology detector. The topology detector may then generate contour values that correspond to localized areas of the target object. A detection manager may then access the contour values to responsively generate and store topology values that may be mapped to respective pixel values of a set of captured image data that represents the target object.

Abstract: A confocal three dimensional inspection system, and process for use thereof, allows for rapid inspecting of bumps and other three dimensional (3D) features on wafers, other semiconductor substrates and other large format micro topographies. The sensor eliminates out of focus light using a confocal principal to create a narrow depth response in the micron range.

Abstract: An optical measurement arrangement includes an ellipsometer (45) and a device for ascertaining and correcting directional deviations between the line normal to the specimen surface and the angle bisector (25) between the incident and return beams (23, 24) of the ellipsometer (45). A measurement arrangement includes a mirror objective and a device for ascertaining directional deviations between the line normal to the specimen surface and the optical axis of the mirror objective, which has a deflection element in the unused aperture space of the mirror objective. A direction monitoring beam (30) is directed onto the specimen (P). An optical element for imaging the return reflection of the direction monitoring beam (30) onto an area detector that is connected to an evaluation circuit (46) is also provided. Positioning commands for a specimen stage (12) are available at the outputs of the evaluation circuit (46).

Abstract: The present invention relates to an optical measuring device (1) for measuring the shape of particularly rough surfaces of a test object (O), the measuring device including a device that has at least one light source (LQ), one illumination optics, one measuring optics, and at least one detection unit, for determining the intensity distribution of a measuring beam reflected from the surface as a function of a focus position relative to the object surface. A simple measurement even of highly inaccessible locations on the test object is made possible by the fact that the measuring optics has an optical probe for generating at least one intermediate image (ZW) of the observed surface area (FIG. 1).