Abstract: An optical module includes a mirror unit including a mirror holder and a mirror on the mirror holder, the mirror holding including a first plate; a center guide supporting the mirror unit; and an actuator configured to rotate the mirror unit about a rotation axis. The actuator includes a first actuator at the first plate and second and third actuators at second and third plates, respectively, and spaced from each other in a direction parallel to the rotation axis, and the first actuator is configured to be acted upon by the second and third actuators to rotate the mirror unit about the rotation axis.

Abstract: In one embodiment, a method of aligning mirrors of a micro-electro-mechanical system (MEMS) photonic switch includes illuminating a first group of photodiodes associated with a first mirror of a first mirror array of the MEMS photonic switch by a first control beam during a first period of time and illuminating a second group of photodiodes associated with a second mirror of the first mirror array by a second control beam during a second period of time, where the second control beam is off during the first period of time, where the first control beam is off during the second period of time, and where the second period of time is after the first period of time. The method also includes illuminating the first group of photodiodes by the first control beam during a third period of time, where the second control beam is off during the third period of time, and where the third period of time is after the second period of time.

Abstract: In a method for producing a component, a first layer composite is first produced, comprising a structured layer and a trench filled with an insulating material. The structured layer is electrically conductive at least in a first region. The trench filled with an insulating material extends outwards from a first surface of the structured layer and is arranged in the first region of the structured layer. The first surface of the structured layer faces a first surface of the first layer composite. The method additionally has the step of producing a second layer composite, which has a first depression in a first surface of the second layer composite, and the step of connecting the first layer composite to the second layer composite. The first surface of the first layer composite adjoins the first surface of the second layer composite at least in some regions, said filled trench being arranged within the lateral position of the first depression.

Abstract: A display device having a MEMS transmissive light valve and a method for forming the same are provided. The method includes: providing a multilayer semiconductor substrate comprising a bottom semiconductor layer, a middle buried layer and a top semiconductor layer; forming a light guide opening in the top semiconductor layer; forming at least one MOS device in a remaining part of the top semiconductor layer; forming an interconnection layer and an interlayer dielectric layer on the at least one MOS; forming a MEMS transmissive light valve, which is electrically connected to the interconnection layer, on the light guide opening, where the MEMS transmissive light valve is surrounded by the interlayer dielectric layer; forming a transparent backplane on a top surface of the interlayer dielectric layer; and removing the bottom semiconductor layer.

Abstract: A multiplexer includes: an output section outputting a beam bundle made of a plurality of laser beams whose F-axis directions are aligned; and an F-axis converging lens causing the beam bundle outputted from the output section to be converged in the F-axis direction. Optical axes of the plurality of laser beams constituting the beam bundle outputted from the output section intersect with each other at a single point without relying on the F-axis converging lens.

Abstract: Product-to-product variation, routing conflicts and undocumented product design changes in commercial off-the-shelf components are accommodated using additive manufacturing to modify interfaces for such components on a pre-fabricated component connection and interface structure. Radio frequency waveguides, printed circuit structures and additive twisted pair technology allow adaptive re-routing or shielding of signal lines on the design of the interface structure. Connectors and signal routing for power, radio frequency signals, and data signals may be adapted to enable interoperability of the off-the-shelf components.

Abstract: A method of manufacturing an optical interferometer includes a first step of forming a first semiconductor portion for a beam splitter and a second semiconductor portion for a movable mirror on a main surface of a support substrate and a first insulating layer formed on the main surface, a second step of disposing a first wall portion between a first side surface of the first semiconductor portion and a second side surface in the second semiconductor portion, and a third step of forming a mirror surface in the second semiconductor portion by forming a first metal film on the second side surface using a shadow mask. In the third step, the first side surface is masked by the mask portion and the first wall portion and the first metal film is formed in a state in which the second side portion is exposed from an opening portion.

Abstract: In one embodiment, a micro-electro-mechanical-system (MEMS) photonic switch includes a first plurality of collimators including a first collimator configured to receive a first traffic optical beam having a traffic wavelength and a first control optical beam having a control wavelength, where a first focal length of the first collimators at the traffic wavelength is different than a second focal length of the first collimators at the control wavelength. The MEMS photonic switch also includes a first mirror array optically coupled to the first plurality of collimators, where the first mirror array including a first plurality of first MEMS mirrors integrated on a first substrate and a first plurality of first photodiodes integrated on the first substrate, where the photodiodes are disposed in interstitial spaces between the MEMS mirrors.

Abstract: A wavelength selective switch 1A includes a light input/output unit 10, a dispersive element 20, and a light deflection element 30 disposed side by side on a predetermined axis C. The light input/output unit 10 has a first portion 10a in which light enters and exits a light input/output port 11 by an optical axis inclined with respect to the predetermined axis C, and a second portion 10b in which light enters and exits a light input/output port 12 by an optical axis inclined with respect to the predetermined axis C. A light entry/exit angle of the light input/output port 11 with the predetermined axis C as a reference and a light entry/exit angle of the light input/output port 12 with the predetermined axis C as a reference differ from each other.

Abstract: An electronic device is provided with a display and a light sensor that receives light that passes through the display. The display includes features that increase the amount of light that passes through the display. The features may be translucency enhancement features that allow light to pass directly through the display onto a light sensor mounted behind the display or may include a light-guiding layer that guides light through the display onto a light sensor mounted along an edge of the display. The translucency enhancement features may be formed in a reflector layer or an electrode layer for the display. The translucency enhancement features may include microperforations in a reflector layer of the display, a light-filtering reflector layer of the display, or a reflector layer of the display that passes a portion of the light and reflects an additional portion of the light.

Abstract: An optoelectronic integrated circuit for coupling light to or from an optical waveguide formed in an optical device layer in a near-normal angle to that layer. In an embodiment, the integrated circuit comprises a semiconductor body including a metal-dielectric stack, an optical device layer, a buried oxide layer and a semiconductor substrate arranged in series between first and second opposite sides of the semiconductor body. At least one optical waveguide is formed in the optical device layer for guiding light in a defined plane in that device layer. Diffractive coupling elements are disposed in the optical device layer to couple light from the waveguide toward the second surface of the semiconductor body at a near-normal angle to the defined plane in the optical device layer. In an embodiment, an optical fiber is positioned against the semiconductor body for receiving the light from the coupling elements.

Abstract: A device for displaying information comprising at least one display element which includes: a liquid, the surface energy thereof being variable by means of an electric field; a first and a second volume for receiving the liquid, wherein said first and said second volume are defined by a first effective radius or a second effective radius, respectively, a fluidic passage between said first and said second volume, wherein in a first state said liquid substantially occupies said first volume and wherein in a second state said liquid substantially occupies said second volume, is characterized in that said passage is configured such that the fraction of the liquid facing to the unoccupied volume comprises a radius which is smaller than the effective radius of the presently occupied volume.

Abstract: A microelectromechanical device package with integral a heater and a method for packaging the microelectromechanical device are disclosed in this invention. The microelectromechanical device package comprises a first package substrate and second substrate, between which a microelectromechanical device, such as a micromirror array device is located. In order to bonding the first and second package substrates so as to package the microelectromechanical device inside, a sealing medium layer is deposited, and heated by the heater so as to bond the first and second package substrates together.

Abstract: A device (100) for variable deflection of light is described, encompassing a micromechanical mirror arrangement (14) having a plurality of light-reflecting mirror actuators (18, 20, 22, 24, 26), and a control unit (32) with which the mirror actuators (18, 20, 22, 24, 26) are controllable into different reflection positions in order to vary the light deflection. The device (100) has a back-reflection structure (60), systematically adapted to the mirror arrangement (14), for reflecting back onto another portion of the mirror actuators (18, 20, 22, 24, 26), in targeted fashion, the light reflected onto the back-reflection structure (60) from one portion of the mirror actuators (18, 20, 22, 24, 26).

Abstract: The disclosed method for fiber stabilization of optical path differences involves splitting a laser produced optical beam into a first and second optical beam. Further, the method involves circulating the first optical beam to an adjustable optical telescope, and circulating the second optical beam to a reference optical telescope. Also, the method involves splitting the first circulated beam into the first optical beam and the adjustable optical telescope beam, and splitting the second circulated beam into the second optical beam and the reference optical telescope beam. Additionally, the method involves inputting, into an interferometer, the first and second optical beams; and outputting, from the interferometer, a sinusoidal signal. Also, the method comprises filtering the sinusoidal signal to form a high frequency and low frequency signal. Further, the method involves controlling a translation stage by using the low frequency signal, and controlling a fiber stretcher by using the high frequency signal.

Abstract: A method is described for aligning a light beam, having the steps of: deflecting the light beam by way of a first mirror element and a second mirror element, the first mirror element being displaced through a first deflection angle around a first rotation axis, and the second mirror element being displaced through a second deflection angle around a second rotation axis inclined with respect to the first rotation axis, and the second mirror element being additionally displaced through a third deflection angle around a third rotation axis that is inclined with respect to the second rotation axis, and the first mirror element being displaced around a first mirror normal line of the first mirror element through a first compensation angle defined for the third deflection angle, and/or the second mirror element being displaced around a second mirror normal line of the second mirror element through a second compensation angle defined for the third deflection angle.

Abstract: A laser light source module includes a housing and a heat sink that is thermally connected to the housing. The housing includes a laser element that emits laser light, a laser holder that is made of metal to hold the laser element, a laser light receiving element that receives laser beam from the laser element, a mirror element that reflects the laser light to scan a screen, an optical element that is disposed on the optical axis of the laser light. The laser holder is thermally connected to the housing with a thermally conductive member. A protrusion is formed on the thermally conductive member. The protrusion and the springiness of the thermally conductive member are used to press the laser holder against the housing in the same direction as the direction of laser light emission.

Abstract: On/off digital drive signals are used to create arbitrary spatial and temporal ribbon movement patterns in MEMS ribbon arrays.

Abstract: A laser system (1) for creating a laser marking (23) on a substrate (4, 7), having a laser device (2) with a beam source (11) that emits a laser beam (14) along a first optical axis (16), and having a deflection unit (3) with a deflection lens (19) that deflects the laser beam (14) along a second optical axis (22), whereby the first and second optical axes (16, 22) are arranged at an angle of 90°, and the deflection unit (3) can be adjusted with respect to the laser device (2).

Abstract: A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.

Abstract: A display device, including a scanning device, displays an image on a display region using a light ray which scans. The display device includes a light source unit, a scanning control unit, and an emission control unit. The scanning device includes an auxiliary scanning unit which changes an inclination angle of a reflective mirror unit including a reflective mirror and a main scanning unit. The display region includes a plurality of elemental regions coupled to one another. The scanning control unit provides control so that the light ray scans over one of the plurality of elemental regions by changing the inclination angle of the reflective mirror while maintaining the inclination angle of the reflective mirror unit, and control so that the plurality of elemental regions are changed over by changing the inclination angle of the reflective mirror unit.

Abstract: MEMS and fabrication techniques for positioning the center of mass of released structures in MEMS are provided. A MEMS device includes a substrate and a released structure connected to the substrate via a flexure. The released structure includes a frame rotatable with respect to the substrate, and an elongate first member having a longitudinal axis extending perpendicularly from an undersurface of the frame and a free end remote from the frame. A recess is formed in an end face of the free end. The recess has a longitudinal axis substantially parallel to the longitudinal axis of the first member and a transverse area smaller than an area of the end face.

Abstract: Optical systems are provided that include illumination sources, micro-mirror array optical modulators, and an optical element. The micro-mirror array optical modulators can selectively modulate light beams, redirect light by diffraction and reflection, and provide an output modulated light beam that exhibits a diffraction handedness dependent on the spectral bandwidth of the light incident thereupon. The optical element has a color dependent aperture that defines portions of output modulated light beams that are transmitted and remaining portions that are blocked. An efficiency and contrast of each the output modulated light beams acquired by the optical element can be independently determined by a narrow spectral bandwidth of each of the light beams, the spectral characteristics of the color dependent aperture, and the diffraction handedness of the micro-mirror array optical modulators for the associated spectral bandwidth.

Abstract: A method and system for zonal switching for light steering to produce an image having high dynamic range is described. The system comprises: a light source for providing light along an optical path; a spatial light modulator for directing portions of the light to off-state and on-state light paths, thereby producing an image, the spatial light modulator having a plurality of illumination zones corresponding to the image; and a set of sequentially-arranged optical elements in the optical path for steering at least some of the light from a first subset of the plurality of illumination zones to a second subset of the plurality of illumination zones to increase the dynamic range of the image. The dwell time of the one or more sequentially arranged optical elements can be modified to steer light.

Abstract: The disclosure relates to a correction light device for the irradiation of optical elements of an optical arrangement, in particular a lens, such a microlithography lens having a correction light, which include at least one correction light source and at least one mirror arrangement that deflects the light from the correction light source in the beam path to the optical element such that at least part of at least one surface of at least one optical element of the optical arrangement are irradiated in a locally and/or temporally variable fashion. The correction light strikes the surface of the optical element at a flat angle such that the obtuse angle between the optical axis of the optical arrangement at the location of the optical element and the correction light beam is less than or equal to 105°.

Abstract: A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and the first electrode. The second reflector is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector. In one embodiment, the three positions correspond to reflecting white light, being non-reflective, and reflecting a selected color of light. Another embodiment is a method of making the light modulator. Another embodiment is a display including the light modulator.

Abstract: A data recording apparatus and method using three dimensional (3D) optical memory and an authentication apparatus and method using 3D optical memory are provided. The data recording apparatus includes a recording excitation light splitting unit, a condition storage unit, and a data recording unit. The recording excitation light splitting unit splits recording excitation light into first split light and second split light. The condition storage unit stores recording conditions including information about the waveforms, wavelengths and phases of the split light and information about an arrangement of reflection mirrors configured to reflect the split light. The data recording unit records storage data by making the split light incident on the 3D optical memory through the reflection mirrors under the recording conditions.

Abstract: A wavelength selective switch includes a light input/output unit that includes an input unit and an output unit of a wavelength multiplexed light arranged in a form of an array in a first direction, a light dispersing unit that receives the wavelength multiplexed light from the input unit and disperses the wavelength multiplexed light into signal wavelengths, a light condensing element that condenses the light dispersed into the signal wavelengths, and a light deflecting element array that deflects a signal light in the first direction and a second direction, that is orthogonal to the first direction, so as to switch the light of the signal wavelengths condensed by the light condensing element to a desired output unit.

Abstract: Optical telecommunication receivers and transmitters are described comprising dispersive elements and adjustable beam steering elements that are combined to provide optical grid tracking to adjust with very low power consumption to variations in the optical grid due to various changes, such as temperature fluctuations, age or other environmental or design changes. Thus, high bandwidth transmitters or receivers can be provides with low power consumption and/or low cost designs.

Abstract: According to the present invention there is provided a method of manufacturing a MEMS micro mirror assembly (250), comprising the step of mounting a PCB board (205) on a metallic plate (206), mounting a MEMS device (240) on the PCB board (205), wherein the MEMS device (240) comprises a MEMS die (241) and a magnet (230).

Abstract: The invention relates to an optical system of a microlithographic projection exposure apparatus, comprising a mirror arrangement having a plurality of mirror elements which are adjustable independently of one another for the purpose of changing an angular distribution of the light reflected by the mirror arrangement, a polarization-influencing optical arrangement having at least one polarization-influencing component, wherein, by displacing the polarization-influencing component, a degree of overlap between the polarization-influencing component and the mirror arrangement can be set in a variable manner, and a deflection device having a respective reflection surface upstream and downstream of the mirror arrangement relative to the light propagation direction.

Abstract: A method of detecting a scanning angle range of a laser beam of a laser projector is provided. First, a photo sensor is disposed between first and second positions on a projection mirror. Then, a laser beam emitted from the laser projector scans back and forth between the first and second positions, so that the photo sensor receives the laser beam sequentially at first and second scanning time points to generate first and second sensing signals, respectively. If an actual time interval between the first and second sensing signals conforms to an expected time interval, an actual scanning angle range of the laser beam is determined as normal. If the actual time interval does not conform to the expected time interval, the actual scanning angle range of the laser beam is determined as abnormal and the laser projector stops emitting the laser beam. A laser projector is also provided.

Abstract: A light deflector includes a fixing portion, a movable portion and a reinforcing member. The movable portion includes a mirror portion for deflecting light by swinging about a predetermined swing axis, a torsion bar fixedly supported on the fixing portion and having an axis serving as the swing axis, and a supporting body configured to support the mirror portion and fixed to the torsion bar. The supporting body includes a contact surface to be held in contact with the mirror portion and a non-contact surface opposite to the contact surface. The reinforcing member is provided only on the non-contact surface out of the contact surface and the non-contact surface of the supporting body and reinforces the supporting body and adjusts a center of gravity of the movable portion so that the center of gravity of the movable portion is located on the axis.

Abstract: A micromechanical structure includes a substrate having an upper side and a lower side, the substrate having a first region and a second region adjacent thereto, the upper side being fashioned in the first region as a mirror region that reflects light. In the second region on the upper side of the substrate, a network-type structure and/or a web-type structure is fashioned, such that the second region is essentially non-light-reflective.

Abstract: A light deflector includes a fixing portion and a movable portion. The movable portion includes a mirror portion for deflecting light by swinging about a predetermined swing axis, a torsion bar fixedly supported on the fixing portion and having an axis serving as the swing axis, and a supporting body configured to support the mirror portion and fixed to the torsion bar. The supporting body includes a hole portion through which the axis passes. A mass body for adjusting a resonant frequency of the movable portion is arranged in the hole portion.

Abstract: An optical deflector includes a movable portion having a mirror plane, a fixed portion, a pair of combined torsion bars connecting the movable portion and the fixed portion to each other so that the movable portion can be rotationally displaced about a rotation axis with respect to the fixed portion, and a driver to drive the movable portion. Each combined torsion bar includes a plurality of torsion bars extending to be parallel to the rotation axis and a plurality of connecting bars, each of the connecting bars connecting one ends of each adjacent two of the torsion bars to each other. A torsion bar farther from the rotation axis has higher torsional rigidity than a torsion bar closer to the rotation axis.

Abstract: A device for deflecting a light beam in two different directions includes a mirror and a first rotating actuator element configured to rotate about a first axis as a function of a first actuation signal. A second rotating actuator element is disposed opposite to the first rotating actuator element along the first axis and configured to rotate about the first axis as a function of a second actuation signal. A first spring element is connected to the first rotating actuator element and, off-axially with respect to the first axis at a predetermined first distance thereto, to the mirror in a rest position of the mirror. A second spring element is connected to the second rotating actuator element and to the mirror.

Abstract: A micromechanical mirror arrangement comprising a mirror plate (1) which forms a translation mirror, which is connected via at least one holding element (2), preferably two or more holding elements, to a frame structure (3) and is movable in translation relative to this frame structure, characterized in that the connection region (4) of at least one holding element (2), preferably of all holding elements, with the mirror plate (1) is arranged inwardly offset, viewed from the outer margin (5) of the mirror plate toward to the center (6) of the mirror plate.

Abstract: A Micro Electro-Mechanical System (MEMS) interferometer system utilizes a capacitive sensing circuit to determine the position of a moveable mirror. An electrostatic MEMS actuator is coupled to the moveable mirror to cause a displacement thereof. The capacitive sensing circuit senses the current capacitance of the MEMS actuator and determines the position of the moveable mirror based on the current capacitance of the MEMS actuator.

Abstract: A tunable tilting device is described. The device includes a tilting element and a suspension structure that has one or more flexures coupled to the tilting element. The suspension structure has a variable bending stiffness and configured to bend due to a tilting motion of the tilting element around a pivot axis. The suspension structure is responsive to a tuning force actuating a variation of an extension stress or a compression stress of the suspension structure, and thereby can vary the bending stiffness of the suspension structure.

Abstract: A system and method for producing an image having high dynamic range is described. The system comprises: a light source for providing light along an optical path; a digital micromirror device for directing portions of the light to off-state and on-state light paths, thereby producing an image; and a deformable optical element disposed in the optical path between the light source and the digital micromirror device for steering at least some of the light from the off-state light path to the on-state light path to increase dynamic range of the image produced by the digital micromirror device. The deformable optical element can comprise at least one steerable segment and at least one static element.

Abstract: A method and system for zonal switching for light steering to produce an image having high dynamic range is described. The system comprises: a light source for providing light along an optical path; a spatial light modulator for directing portions of the light to off-state and on-state light paths, thereby producing an image, the spatial light modulator having a plurality of illumination zones corresponding to the image; and a set of sequentially-arranged optical elements in the optical path for steering at least some of the light from a first subset of the plurality of illumination zones to a second subset of the plurality of illumination zones to increase the dynamic range of the image. The dwell time of the one or more sequentially arranged optical elements can be modified to steer light.

Abstract: A system and method for splitting water to produce hydrogen and oxygen employing focused polarized sunlight energy is disclosed. Hydrogen and oxygen may then be stored for later use as fuels. The system and method use inorganic capping agents that cap the surface of semiconductor nanocrystals to form photocatalytic capped colloidal nanocrystals, which may be deposited and oriented on a substrate to form an oriented photoactive material. The oriented photoactive material may be employed in the system to harvest sunlight and produce energy necessary for water splitting. The system may also include a light polarization system and elements necessary to collect, transfer, and store hydrogen and oxygen, for subsequent transformation into electrical energy.

Abstract: An optical scanning device includes a MEMS mirror, a driving unit for oscillating the MEMS mirror using a drive voltage which varies in a basic cycle, a light detection unit for receiving laser light deflected by the MEMS mirror and outputting a detection signal, a correction value calculation unit for calculating a correction voltage value used in correcting the drive voltage, a DC voltage generation unit for generating a DC voltage having a voltage value smaller than the correction voltage value, a DC voltage amplification unit for amplifying the DC voltage generated by the DC voltage generation unit to have a voltage value equal to the correction voltage value, and a waveform shaping unit for shaping the waveform of the amplified DC voltage so that the DC voltage varies in the basic cycle and outputting the shaped DC voltage as the drive voltage to the driving unit.

Abstract: The disclosure relates to a correction light device for the irradiation of optical elements of an optical arrangement, in particular a lens, such a microlithography lens having a correction light, which include at least one correction light source and at least one mirror arrangement that deflects the light from the correction light source in the beam path to the optical element such that at least part of at least one surface of at least one optical element of the optical arrangement are irradiated in a locally and/or temporally variable fashion. The correction light strikes the surface of the optical element at a flat angle such that the obtuse angle between the optical axis of the optical arrangement at the location of the optical element and the correction light beam is less than or equal to 105°.

Abstract: A micro-mirror system having a micro-mirror actuator, a sensor for detecting the position of the micro-mirror actuator, a light module having at least one light source and an associated control system via which a light intensity of the light source is controllable, and an evaluation and control unit which is designed to control the micro-mirror actuator as a function of an output signal of the sensor. The system provides that the evaluation and control unit includes a compensation routine in which an offset voltage of the output signal of the sensor is settable as a function of the light intensity of the light source to be expected at the point in time that the micro-mirror actuator is activated.

Abstract: A laser scanning projection apparatus includes an illumination unit, a projection surface, a scanning mirror, a projection window, an optical sensor, and a controlling unit. The projection window includes a transmissible part and a blocking part. A reflection-differential pattern is formed on the blocking part. When the laser beam reflected by the scanning mirror is projected on the transmissible part, the laser beam is transmitted through the transmissible part and projected on the projection surface. When the laser beam reflected by the scanning mirror is projected on the reflection-differential pattern, a reflective beam with different intensities is reflected by the reflection-differential pattern. The controlling unit calculates a phase difference between an actual projection position and a predetermined projection position of the laser beam according to the sensing signal, and compensating a subsequent image frame according to the phase difference.

Abstract: The disclosed method for fiber stabilization of optical path differences involves splitting a laser produced optical beam into a first and second optical beam. Further, the method involves circulating the first optical beam to an adjustable optical telescope, and circulating the second optical beam to a reference optical telescope. Also, the method involves splitting the first circulated beam into the first optical beam and the adjustable optical telescope beam, and splitting the second circulated beam into the second optical beam and the reference optical telescope beam. Additionally, the method involves inputting, into an interferometer, the first and second optical beams; and outputting, from the interferometer, a sinusoidal signal. Also, the method comprises filtering the sinusoidal signal to form a high frequency and low frequency signal. Further, the method involves controlling a translation stage by using the low frequency signal, and controlling a fiber stretcher by using the high frequency signal.

Abstract: An optical system (100) comprises a coherent light source (101) and optical elements for directing light from the source to a target (1001). The optical elements include at least one diffusing element (141, 161) arranged to reduce a coherence volume of light from the source and a variable optical property element (151). A control system (1021) controls the variable optical property element such that different speckle patterns are formed over time at the target (1001) with a temporal frequency greater than a temporal resolution of an illumination sensor or an eye (1011) of an observer so that speckle contrast ratio in the observed illumination is reduced. The variable optical property element (151) may be a deformable mirror with a vibrating thin plate or film.

Abstract: A vibrating mirror element includes a mirror portion that reflects light and is tiltable around a rotational axis, a tiltable frame portion connected to a mirror end portion of the mirror portion at a position on an intersecting line that intersects with the rotational axis, a driving portion that includes a piezoelectric element that deforms through application of a voltage, and a connecting portion that connects the frame portion and the driving portion and is tiltable through deformation of the piezoelectric element of the driving portion. The frame portion can be tilted by tilting the connecting portion, and the mirror portion can be tilted by tilting the frame portion.