Abstract: A display system includes a substrate guided relay and a scanning projector. The scanning projector exhibits a brightness variation on a resonant scanning axis, and the substrate guided relay exhibits a brightness variation along a length of an output coupler. The scanning projector includes a brightness compensation circuit to compensate for both the brightness variation caused by the resonant scanning and the brightness variation along the length of the output coupler.

Abstract: The invention relates to an optical system of a microlithographic projection exposure apparatus, comprising a mirror arrangement having a plurality of mirror elements which are adjustable independently of one another for the purpose of changing an angular distribution of the light reflected by the mirror arrangement, a polarization-influencing optical arrangement having at least one polarization-influencing component, wherein, by displacing the polarization-influencing component, a degree of overlap between the polarization-influencing component and the mirror arrangement can be set in a variable manner, and a deflection device having a respective reflection surface upstream and downstream of the mirror arrangement relative to the light propagation direction.

Abstract: A telescopic flashlight that includes a universally adjustable mirror unit for reflecting the light of the lighting unit over a universal range, which mirror unit is readily and easily attached and detached from the distal end of the flashlight apparatus via a metallic mounting collar that is magnetically retained by means of an annular magnet affixed to the distal end of the apparatus, which mounting collar itself is rotatable relative to the distal end of the flashlight apparatus in order to provide two of the three degrees of freedom on motion of the mirror proper.

Abstract: In accordance with the teachings of one embodiment of this disclosure, a method for manufacturing a semiconductor device includes forming a support structure outwardly from a substrate. The support structure has a first thickness and a first outer sidewall surface that is not parallel with the substrate. The first outer sidewall surface has a first minimum refractive index. A first anti-reflective layer is formed outwardly from the support structure and outwardly from the substrate. A second anti-reflective layer is formed outwardly from the first anti-reflective layer. The first and second anti-reflective layers each includes respective compounds of at least two elements selected from the group consisting of: silicon; nitrogen; and oxygen.

Abstract: A micro optical switch device, an image display apparatus including the same, and a method of manufacturing the micro optical switch device are provided.

Abstract: An optical scanner includes: a light reflecting section having light reflectivity; a movable section which includes the light reflecting section and can be displaced; two link sections connected to positions of ends of the movable section, the positions facing each other; a supporting section supporting the link sections; and a displacement providing section turning the two link sections, wherein each link section includes a turnable drive section, and a shaft section connecting the movable section and the drive section and bending in a thickness direction of the movable section by turning of the drive section.

Abstract: Methods of operating an optical circuit switch and optical circuit switches are disclosed. A command to make an optical connection between a first port and a second port may be received, the first port uniquely associated with a first rotatable mirror element and the second port uniquely associated with a second rotatable mirror element. A determination whether or not input signal light is present at the first port may be made. When light is present at the first port, the first mirror element and the second mirror may be rotated to provide an initial optical connection between the first port and the second port. When light is not present at the first port, the first mirror element and the second mirror element may be placed in respective at-rest positions.

Abstract: The disclosure relates to a correction light device for the irradiation of optical elements of an optical arrangement, in particular a lens, such a microlithography lens having a correction light, which include at least one correction light source and at least one mirror arrangement that deflects the light from the correction light source in the beam path to the optical element such that at least part of at least one surface of at least one optical element of the optical arrangement are irradiated in a locally and/or temporally variable fashion. The correction light strikes the surface of the optical element at a flat angle such that the obtuse angle between the optical axis of the optical arrangement at the location of the optical element and the correction light beam is less than or equal to 105°.

Abstract: In a wavelength selective switch, respective values are set to satisfy an expression (?2>2×?1+?). Therefore, when an inclination angle of a mirror is changed to move primary reflected light to be close to an output port in operation, secondary reflected light moves away from the output port. Therefore, when an inclination angle of a mirror is changed to couple the primary reflected light to the output port, coupling of the secondary reflected light to the output port is suppressed.

Abstract: This disclosure provides mechanical layers and methods of forming the same. In one aspect, a method of forming a pixel includes depositing a black mask on a substrate, depositing an optical stack over the black mask, and forming a mechanical layer over the optical stack. The black mask is disposed along at least a portion of a side of the pixel, and the mechanical layer defines a cavity between the mechanical layer and the optical stack. The mechanical layer includes a reflective layer, a dielectric layer, and a cap layer, and the dielectric layer is disposed between the reflective layer and the cap layer. The method further includes forming a notch in the dielectric layer of the mechanical layer along the side of the pixel so as to reduce the overlap of the dielectric layer with the black mask along the side of the pixel.

Abstract: A method for producing oblique surfaces in a substrate, comprising a formation of recesses on both surfaces of the substrate, until the recesses are so deep that the substrate is perforated by the two recesses. One recess is produced going out from a first main surface in the region of a first surface, and the other recess is produced going out from the second main surface in the region of a second surface, so that the first surface and the second surface do not coincide along a surface normal of the main surfaces of the substrate. Subsequently, flexible diaphragms are attached over the recesses on each of the main surfaces. If a vacuum pressure is then produced inside the recesses, the flexible diaphragms each curve in the direction of the recesses until their surfaces facing the substrate come into contact with one another, generally in the center of the recesses.

Abstract: A DND device is disclosed. In one aspect, the device includes a nano-mirror (21), and an actuating module configured to move the nano-mirror in an upward and/or downward position. The actuating module has a cantilever mounted to a fixed structure, and at least one first electrode for moving the cantilever in an upward and/or downward position. Such DND devices may be arranged in a 2D array.

Abstract: Exemplary methods and systems for applying a correction to an initiated signal are disclosed. In some examples the correction may be a compensation for dispersion present, e.g., in an optical signal. An exemplary method may include receiving an initiated signal, and forming a curved surface with a first array of discrete elements. The exemplary method may further include impinging the initiated signal upon the curved surface, thereby applying a correction to the initiated signal determined at least in part by the curved surface.

Abstract: The power and response curves of one or more beams or primaries of beams of a laser projection system illuminating an image on a viewing surface are controlled to desired characteristics during exhibition by monitoring the scanning beams in real time by using at least part of the horizontal blanking time during the scanning of a motion or still image to project a test pattern with one or more of the beams onto a sensor or sensors. The system and method permits real-time balancing and maintenance of the response curves and power levels of each of the beams, and of primary beams of combined beams, to desired targets so as to produce a display field without artifacts and at desired brightness on the viewing surface.

Abstract: Aspects of the disclosure provide an apparatus. The apparatus includes a mirror module having a plurality of individually controllable mirror segments to reflect an incident beam having a variable incidence angle, and a controller configured to determine deflection profiles of the individually controllable mirror segments, and provide control signals to the individually-controllable mirror segments to adjust the deflection profiles, such that the individually controllable mirror segments collectively reflect the incident beam in a predetermined direction.

Abstract: A Micromirror Array Lens with self-tilted micromirrors comprising a plurality of self-tilted micromirrors and configured to form a designed optical surface profile by self-tilted micromirrors. Each self-tilted micromirror comprises a substrate, at least one stiction plate configured to be attracted to the substrate by adhesion force, a micromirror plate having a reflective surface, coupled to the stiction plate elastically and configured to have a required motion when the stiction plate is attracted to the substrate, and at least one pivot structure disposed between the substrate and the micromirror plate and configured to provide a tilting point or area for the motion of the micromirror plate. The designed optical surface profile determines the required motion of the micromirror plate and a surface profile shape memory is built in the structure of the micro-mechanical elements of the self-tilted micromirrors so that each micromirror plate has the required motion.

Abstract: A system for constructing high resolution images includes a beam splitter assembly, a light intensity modulator, an image capturing module and an image processing module. The beam splitter assembly is utilized to reflect a light beam generated from a light source generating device and generate a splitting beam. The light intensity modulator is utilized to modulate the intensity of the splitting beam to generate a modulating beam, which includes a predetermined noise. The modulating beam is emitted onto an object to generate a modulating image. The image capturing module is utilized to obtain a plurality of modulating images. The image processing module is utilized to analyze the modulating images to generate a high resolution image.

Abstract: This invention discloses a MEMS device supported on a substrate formed with electric circuit thereon. The MEMS device includes at least an electrode connected to the circuit and at least a movable element that is controlled by the electrode. The MEMS device further includes a conformal protective layer over the electrode and the circuit wherein the protective layer is semiconductor-based material. In a preferred embodiment, the MEMS device is a micromirror and the semiconductor material is one of a group of materials consisting of Si, SiC, Ge, SiGe, SiNi and SiW.

Abstract: The invention relates to a device for forming an interference grating on a sample, the device comprising a laser emitting a light beam of wavelength ?, a beam splitter plate splitting the beam emitted by the laser into first and second beams (11, 14), the first beam (11) being deflected in a first direction, a first stationary deflection mirror for deflecting the first beam onto a point P of the sample at a first constant angle of incidence ?1, and at least one second stationary deflection mirror for deflecting the second beam along a final path (17) that reaches said point P of the sample at a second angle of incidence ?2 in order to form an interference grating on the sample at a pitch that depends on the angular difference ? between the first and second angles of incidence ?1 and ?2, the path of the second beam being characterized in that it includes a movable deflection mirror (7, 7?) to direct and deflect the second beam from a plurality of first points of impact (71) from which the second beam (15) is d

Abstract: A laser irradiation apparatus is provided with a laser oscillator, an articulated beam propagator in which a plurality of pipes are connected to each other in an articulated portion, and a course change means of a laser beam in the articulated portion. At least one pipe of the plurality of pipes includes a transfer lens for suppressing stagger of a laser beam in a traveling direction, in each pipe. The articulated portion produces degree of freedom in disposition of a laser oscillator, and the transfer lens enables suppression of change in beam profile.

Abstract: A method for processing workpieces includes performing a laser processing operation in which a laser beam is directed at a first mirror face and at a second mirror face of a redirecting mirror. The second mirror face is at least partially surrounded by the first mirror face. During the laser processing operation, the second mirror face performs a pendulum movement relative to the first mirror face.

Abstract: A confocal optical scanner includes: a plurality of condenser elements each configured to concentrate illumination light to be applied on a sample to produce fluorescence from the sample; a plurality of optical scanning units including a plurality of openings each configured to allow the illumination light concentrated by the condenser element to pass the opening, the optical scanning units each configured to scan the sample with the illumination light that has passed through the opening; a moving mechanism configured to move the optical scanning units to select one of the optical scanning units; and an incident-angle adjusting part configured to adjust the incident angle of the illumination light incident on the optical scanning unit selected from the optical scanning units according to the selected optical scanning unit.

Abstract: In accordance with the teachings of the present invention, a system and method for increasing the bit-depth of a video display system using a pulse lamp are provided. In one embodiment, the method includes illuminating a digital micro-mirror device with a light source having a variable power supply, receiving a signal indicating the light output provided to the digital micro-mirror device by the light source should be reduced to a target level during a predetermined time period, reducing a power supplied to the light source by the variable power supply in response to the signal such that the light output of the light source is reduced to about a target level during the predetermined time period, displaying a least significant bit on the digital micro-mirror device during the predetermined time period, and decreasing a speed of a master clock controlling the digital micro-mirror device in response to the light output of the light source deviating below the target level during the predetermined time period.

Abstract: A fast modular port switching device is described. The device can be used with an optical microscope to facilitate using multiple devices with the microscope. The port switching is done with a galvanometer for switching very fast. The device is modular so it can be combined with any number of similar devices for building a complex, multi-modal imaging system. Also described is the combination of a port switcher with automated spherical aberration correction. Even further described is a similar device where the outputs are recombined, thus making the device a fast filter switcher.

Abstract: An interferometric modulator (Imod) cavity has a reflector and an induced absorber. A direct view reflective flat panel display may include an array of the modulators. Adjacent spacers of different thicknesses are fabricated on a substrate by a lift-off technique used to pattern the spacers which are deposited separately, each deposition providing a different thickness of spacer. Or a patterned photoresist may be used to allow for an etching process to selectively etch back the thickness of a spacer which was deposited in a single deposition. A full-color static graphical image may be formed of combined patterns of interferometric modulator cavities. Each cavity includes a reflector, and an induced absorber, the induced absorber including a spacer having a thickness that defines a color associated with the cavity.

Abstract: An optical device includes a non-transparent substrate. The optical device further includes a first optical layer which is at least partially transmissive and at least partially reflective to incident light. The optical device further includes a second optical layer which is at least partially reflective to incident light. The second optical layer is spaced from the first optical layer. At least one of the first optical layer and the second optical layer is movable between a first position at a first distance from the first optical layer and a second position at a second distance from the first optical layer. Movement of the at least one of the first optical layer and the second optical layer between the first and second positions modulates the reflectivity of the device.

Abstract: A micro-optical switching device, an image display apparatus including the micro-optical switching device, and a method of manufacturing the micro-optical switching device are provided. The micro-optical switching device includes a substrate; a first electrode disposed on the substrate and including a first opening array, wherein the first opening array includes a plurality of openings; and a second electrode disposed spaced apart from the first electrode and including a second opening array including a plurality of openings, wherein the plurality of openings of the second opening array do not overlap with the plurality of openings of the first opening array.

Abstract: A disclosed optical scanner apparatus can include a member having spaced apart proximal and distal portions. An optical scanning device can be configured to direct optical radiation, which is moveably coupled to the proximal portion of the member and can be configured to rotate in a plane of movement to a first position to direct the optical radiation along a first path and can be configured to rotate in the plane of movement to a second position to direct the optical radiation along a second path. A MicroElectroMechanical Systems (MEMS) actuator can be coupled to the optical scanning device, where the MEMS actuator can be configured to move in a first direction to move the optical scanning device to the first position and can be configured to move in a second direction to move the optical scanning device to the second position.

Abstract: A projector for projecting an image includes: a light source for generating a light bundle; a pivotable deflection unit for deflecting the light bundle generated by the light source onto a projection surface; and an imaging device for imaging an aperture of the deflection unit onto the projection surface. The imaging device includes a mirror objective having at least two mirror elements. A method for projecting an image is also provided.

Abstract: The deflecting mirror includes a fixed base member; a mirror having a reflection surface; a support member swingablly supporting the mirror; a pair of driving beam members, each having a first end connected with the fixed base member and a second end connected with the support member to support the support member from both sides; and a piezoelectric member fixed to each driving beam member and extending from the first or second end of each driving beam member while having length not longer than about half the length of the driving beam member. The piezoelectric member and the driving beam members constitute piezoelectric unimorph or bimorph structure. By applying voltage to the piezoelectric member, the driving beam members are driven at the same time in the same direction, thereby vibrating the support member in a direction perpendicular to the reflection surface of the mirror, resulting in swinging of the mirror.

Abstract: A system for varying a delay of an optical beam has a rotatable wheel and a set of one or more prisms mounted about a circumference of the rotatable wheel. The set of one or more prisms are positioned to retroreflect the optical beam that passes approximately tangent to the rotatable wheel to cause a delay or phase shift to the beam as the rotatable wheel rotates.

Abstract: An electromechanical tilting device including a first and a second electrode structures, shaped, positioned and oriented to define at least partially interdigitated electrodes, and a suspension defining a tilt-containing motion path for the second structure with respect to the first structure. The motion path is selected to cause changes in overlapping regions and overlapping regions' gaps of the interdigitated electrodes. The device is configured such that an increase in one or more voltage bias applied to interdigitated driving electrodes makes a decrease in a total area of overlapping regions of the driving electrodes electrically energetically favorable.

Abstract: A device (100) for variable deflection of light is described, encompassing a micromechanical mirror arrangement (14) having a plurality of light-reflecting mirror actuators (18, 20, 22, 24, 26), and a control unit (32) with which the mirror actuators (18, 20, 22, 24, 26) are controllable into different reflection positions in order to vary the light deflection. The device (100) has a back-reflection structure (60), systematically adapted to the mirror arrangement (14), for reflecting back onto another portion of the mirror actuators (18, 20, 22, 24, 26), in targeted fashion, the light reflected onto the back-reflection structure (60) from one portion of the mirror actuators (18, 20, 22, 24, 26).

Abstract: Provided is an optical processing device including: a beam emission portion which includes a plurality of optical fibers; a dispersion element which disperses a beam emitted from one optical fiber of the plurality of optical fibers; a condenser lens which concentrates the beam passing through the dispersion element; and an optical path conversion optical system which converts an optical path of the beam passing through the condenser lens so that the beam is incident to one of the other optical fibers of the plurality of optical fibers. An optical axis of the condenser lens is inclined with respect to an optical axis direction from the beam emission portion to the optical path conversion optical system. The inclination angle is set so that a maximum difference in focal depth of a plurality of beams having different wavelengths obtained by the dispersion element becomes smaller.

Abstract: A laser system (1) for creating a laser marking (23) on a substrate (4, 7), having a laser device (2) with a beam source (11) that emits a laser beam (14) along a first optical axis (16), and having a deflection unit (3) with a deflection lens (19) that deflects the laser beam (14) along a second optical axis (22), whereby the first and second optical axes (16, 22) are arranged at an angle of 90°, and the deflection unit (3) can be adjusted with respect to the laser device (2).

Abstract: A programmable encoder is provided that includes at least one optical input for receiving a modulated broadband optical signal and at least one optical output. A dispersion element receives the optical signal from the optical input and spatially separates the optical signal into a plurality of wavelength components. A collimating element is provided for collimating the plurality of wavelength components. An actuatable optical arrangement receives the collimated plurality of wavelength components from the collimating element. The actuatable optical arrangement includes a digital micromirror device (DMD) from which a programmably selected subset of wavelength components are reflected at least twice before being directed to a selected one of optical outputs to thereby encode the CDMA signal.

Abstract: Spectrally filtering at least one input beam includes dispersing spectral components of at least one input beam at different respective angles in a spectral plane; changing at least some of the angles of the propagation axes of the dispersed spectral components so that the maximum angular separation among the propagation axes of the spectral components changes; receiving a plurality of the dispersed spectral components incident on a reflective surface at a location at which the central rays of each of the spectral components are incident at different points on the reflective surface; and tilting the reflective surface to select at least one and fewer than all of the received spectral components to be directed to a selected output path.

Abstract: A speckle reduction system includes an optical system and one or more beam steerers for directing light to successive off-axis areas around a diffuser and for reorienting and recentering distributions of the light from each of the successive off-axis areas of the diffuser along a common axis.

Abstract: A system and method for operating an electronic device used in light processing. A method comprises altering a spatial relationship between a spatial light modulator (SLM) and a light incident on the SLM, shifting light modulator states of a first portion of light modulators to a second portion of light modulators, and placing a third portion of light modulators in the SLM into a performance degradation-reducing mode. The amount of shifting performed is proportional to the amount of change in the spatial relationship. The method allows for a change in light modulators used to modulate the light, thereby preventing the overuse of some of the light modulators, which may help to prevent degradation of the light modulators. The performance degradation reducing mode may help to further reduce or even reverse the performance degradation of the light modulators.

Abstract: A projector with a color sensor module is provided. The projector includes a light source providing a light, a prism device refracting the light, a reflecting device reflecting the light refracted by the prism device, an optical lens receiving the light reflected by the reflecting device and forming a first light path between the optical lens and the reflecting device, and a color sensor module disposed on a second light path and comprising a light inlet receiving the light reflected toward the second light path by the reflecting device.

Abstract: Methods of fabricating a microelectromechanical systems (MEMS) device with spacers between plates and MEMS devices formed by the same are disclosed. In one embodiment, a MEMS device is fabricated by laminating a front substrate and a carrier, each of which has components preformed thereon. The front substrate is provided with stationary electrodes formed thereover. A carrier including movable electrodes formed thereover is attached to the front substrate. The carrier of some embodiments is released after transferring the movable electrodes to the front substrate. In other embodiments, the carrier stays over the front substrate, and serves as a backplate for the MEMS device. Features are formed by deposition and patterning, by embossing, or by patterning and etching. Spacers are provided between the front substrate and the backplate to maintain a gap therebetween. The methods not only reduce the manufacturing costs, but also provide a higher yield.

Abstract: An optical switching device has multiple input ports and multiple output ports and is capable of switching a wavelength component from any of the input ports to any of the output ports. The optical switching device is configured with beam steering arrays that are controlled to provide the switching from any of the input ports to any of the output ports. The beam steering arrays may be microelectromechanical (MEMS) mirror arrays or liquid-crystal on silicon (LCOS) panels. In addition, an array of beam-polarizing liquid-crystal elements provides wavelength-independent attenuation.

Abstract: An actuator includes a base made of silicon and including a movable portion capable of oscillating around an oscillation axis, at least one connection portion extending from the movable portion, and a support portion that supports the connection portion, an insulating layer provided on a surface of the base, and a conductive portion having conductivity and provided on the insulating layer. In a plan view of the base viewed in a thickness direction of the base, the insulating layer is provided on portions other than an edge of the connection portion, an edge that connects an edge of the movable portion to the edge of the connection portion, and an edge that connects an edge of the support portion to the edge of the connection portion.

Abstract: Methods, systems, and apparatus for resetting a micro-mirror devices. In one aspect, a micro-mirror device includes a mirror plate tiltable about a hinge, two electrodes located on different sides of the hinge, a memory storing state data for the electrodes, and a state modifier operable to receive the state data for the electrodes from the memory and, during a reset of the mirror plate, change the state for at least one of the electrodes from the state specified by the state data stored in memory to a different state.

Abstract: The invention relates to a holographic reconstruction system for the reconstruction of scenes having at least one video hologram modulated wave front, and an enlarged visibility region. The system utilizes two-dimensional coded light modulator cells of spatial light modulation means and optical focusing means, which realize a Fourier transformation of the modulated wave front in their focal plane. First optical deflection means deflect the parallel disposed partial light waves such that their Fourier transformations appear as cascading in the focal plane. A spatial frequency filter located on the focal plane, lets each of the same diffraction orders of all modulated partial light waves pass, and second optical deflection means arrange the wave front strips next to each other at the modulated wave front, which reconstructs the scene.

Abstract: A microelectromechanical systems device having support structures formed of sacrificial material surrounded by a protective material. The microelectromechanical systems device includes a substrate having an electrode formed thereon. Another electrode is separated from the first electrode by a cavity and forms a movable layer, which is supported by support structures formed of a sacrificial material.

Abstract: A two-terminal, variable capacitance device is described that is constructed by connecting multiple MEMS devices having different actuation or “pull in” voltages in parallel.

Abstract: A scanning projector includes a mirror that scans in two dimensions, at least one of which is sinusoidal. A position sensor provides a position signal that represents an angular displacement of the mirror. The position signal is amplified by an amplifier with time variant characteristics. A beam position determination component compensates for the time variant characteristics of the amplifier.

Abstract: A method and apparatus for the multi-dimensional control of a light source's brightest point over a targeted area is disclosed. Control and drive electronics are presented to the beam-steering device causing the beam-steering component to steer the spot of light toward a targeted area in at least a two-dimensional scanning pattern about a vertical and horizontal axis. The result is an illuminated pattern displayed on a targeted area that appears to be a solid, uniformly illuminated light pattern, having the intensity of a spot beam and the area of a broad beam.

Abstract: A microelectromechanical system (MEMS) device includes a first electrode, a second electrode electrically insulated from the first electrode, and a third electrode electrically insulated from the first electrode and the second electrode. The MEMS device also includes a support structure which separates the first electrode from the second electrode and a reflective element located and movable between a first position and a second position. The reflective element is in contact with a portion of the device when in the first position and is not in contact with the portion of the device when in the second position. An adhesive force is generated between the reflective element and the portion when the reflective element is in the first position. Voltages applied to the first electrode, the second electrode, and the third electrode at least partially reduce or counteract the adhesive force.