Abstract: Provided is a micro-electromechanical-system (MEMS) device including a substrate; at least one semiconductor layer provided on the substrate; a circuit region including at least one chip containing drive/sense circuitry, the circuit region provided on the at least one semiconductor layer; a support structure attached to the substrate; at least one elastic device attached to the support structure; a proof-mass suspended by the at least one elastic device and free to move in at least one of the x-, y-, and z-directions; at least one top electrode provided on the at least one elastic device; and at least one bottom electrode located beneath the at least one elastic device such that an initial capacitance is generated between the at least one top and bottom electrodes, wherein the drive/sense circuitry, proof-mass, supporting structure, and the at least one top and bottom electrodes are fabricated on the at least one semiconductor layer.

Abstract: A mirror control device includes a pivotally supported mirror (230), electrodes (340a-340d) spaced apart from the mirror (230), a driving voltage generation means (401) for generating a driving voltage corresponding to the desired tilt angle of the mirror (230) for each electrode, a bias voltage generation means (402) for generating, as a bias voltage for each electrode, a voltage which causes the tilt angle of the mirror (230) to have the same predetermined value upon being independently applied to each of the electrodes (340a-340d), and an electrode voltage applying means (403) for adding, for each electrode, the bias voltage to the driving voltage and applying the voltage after addition to a corresponding one of the electrodes (340a-340d).

Abstract: The present invention provides an image projection system comprising a spatial light modulator (SLM) comprises a plurality of pixel elements, wherein each of the pixel elements further comprises a deflectable mirror, and at least a first electrode and a second electrode for controlling the deflectable mirror to deflect to different tilt angles to reflect and modulate an illumination light for displaying an image; and a controller for applying a voltage to the second electrode wherein the voltage applied in an initial operation period is different from the voltage applied in an image display period.

Abstract: An adjustable two-dimensional lamellar grating system including a lamellar grating and a movable mirror disposed substantially parallel to one another, and an interferometer using the adjustable lamellar grating system. In one example, the lamellar grating includes a dielectric wafer having a dielectric wafer having a plurality of periodically spaced recesses formed therein, wherein the dielectric wafer has higher reflectivity at its surface facing the movable mirror than at a second opposing surface. In one example, the system also includes a mechanism for moving the mirror relative to the dielectric wafer.

Abstract: A calibration method for a grating light modulator includes calibrating light reflective ribbons on the modulator on a pixel-by-pixel basis. The method further includes performing a dark-state calibration and a bright-state calibration for each pixel. Once completed, the results of the dark-state calibration and the bright-state calibration may be combined to ensure a smooth transition between a dark state and a bright state for each pixel.

Abstract: A wavelength selective switch includes a light input output portion having an input port and an output port for a wavelength-multiplexed light, which are arranged in an array form in a first direction, a light dispersive unit which separates the wavelength-multiplexed light which has been input from the input port, into respective signal wavelengths, a condenser element which condenses light which has been separated into the signal wavelengths, and a light deflective element array which deflects the signal light in the first direction such that, respective signal wavelength light which has been condensed by the condenser element is switched to a desired output port.

Abstract: The present invention provides a projection apparatus, comprising: a light source; a spatial light modulator for modulating the incident light emitted from the light source; a spatial light modulator control unit for generating, from an inputted image signal, a control signal for driving the spatial light modulator; and a light source control unit for receiving data corresponding to the control signal for controlling the light source to operate in one of three states consisted of a driven state, a stopped state and a standby state on the basis of the data.

Abstract: An optical device including: a laser light emitting portion that emits laser light; a polygon mirror having a reflective surface that reflects the laser light, the polygon mirror being driven to rotate and deflecting the laser light emitted from the laser light emitting portion; a first lens through which the laser light reflected by the polygon mirror is transmitted, the first lens refracting the laser light; a second lens through which the laser light having passed through the first lens is transmitted, the second lens refracting the laser light; and an adjustment unit that adjusts at least one of a length of a first optical path between the polygon mirror and the first lens, and a length of a second optical path between the first lens and the second lens.

Abstract: A method includes generating a plurality of beams that each illuminate a separate portion of a spatial light modulator. The spatial light modulator has a first dimension of a first length and a second dimension of a second length. Each of the beams spans a portion of the first length of the first dimension and a portion of the second length of the second dimension. The method also includes scrolling the plurality of beams along the second dimension of the spatial light modulator while maintaining at least a first gap between each of the plurality of beams.

Abstract: A method of lubricating MEMS devices using fluorosurfactants 42. Micro-machined devices, such as a digital micro-mirror device (DMD™) 940, which make repeated contact between moving parts, require lubrication in order to prevent the onset of stiction (static friction) forces significant enough to cause the parts to stick irreversibly together, causing defects. These robust and non-corrosive fluorosurfactants 42, which consists of a hydrophilic chain 40 attached to a hydrophobic fluorocarbon tail 41, are applied by nebulization and replace the more complex lubricating systems, including highly reactive PFDA lubricants stored in polymer getters, to keep the parts from sticking. This lubrication process, which does not require the use of getters, is easily applied and has been shown to provide long-life, lower-cost, operable MEMS devices.

Abstract: A light source unit includes: a light source part that supplies light; an optical element that changes an optical path of the light from the light source part; and a wavelength conversion element that converts a wavelength of the light from the optical element. The optical element is movable, and the optical path of the light entering the wavelength conversion element from the light source part is shifted by moving the optical element.

Abstract: A device (1) for manufacturing a three-dimensional object by a layer-wise solidification of a building material at positions in the respective layers corresponding to the object is provided. The device has an energy source (6) that emits a beam (9) for solidifying the building material, a scanner (8) that selectively directs the beam (9) to different positions in a building plane (11), and a deflection mirror (7) that deflects the beam (9) coming from the energy source (6) to the scanner (8). The beam (9) from the energy source (6) to the scanner (8) runs in a space (13, 14) secluded from the outside and an adjustment mechanism (16) for the alignment of the deflection mirror (7) is provided, which is adjustable from the outside of the secluded space (13, 14).

Abstract: A system and method for operating an electronic device used in light processing. A method comprises altering a spatial relationship between a spatial light modulator (SLM) and a light incident on the SLM, shifting light modulator states of a first portion of light modulators to a second portion of light modulators, and placing a third portion of light modulators in the SLM into a performance degradation-reducing mode. The amount of shifting performed is proportional to the amount of change in the spatial relationship. The method allows for a change in light modulators used to modulate the light, thereby preventing the overuse of some of the light modulators, which may help to prevent degradation of the light modulators. The performance degradation reducing mode may help to further reduce or even reverse the performance degradation of the light modulators.

Abstract: Terminals of upstream and downstream sides of an in-service line and a detour line are connected by optical couplers. An optical oscilloscope is connected to one optical coupler, and a chirped pulse light source is connected to the other optical coupler to thereby form dualized lines. The detour line includes an optical line length adjuster for compensating for the phase difference of optical transmission signals that occurs because of the optical line length difference with the in-service line. Pulse light in which an optical frequency is chirped is transmitted from the chirped pulse light source. The pulse light is branched by the second optical coupler, passes through the in-service line and the detour line, is multiplexed again by the first optical coupler, and is measured by the optical oscilloscope.

Abstract: A wavelength selective switch according to the present invention includes at least one input port for inputting wavelength-multiplexed light, a dispersive element which receives the light from the input port, and disperses the received light, a light converging element which converges dispersed light which has been dispersed for each wavelength, a light deflecting member having a plurality of reflecting optical elements which are capable of independently deflecting each dispersed light from the light converging element, and at least one output port which receives light which has been deflected by the light deflecting member. An area having a reflectivity higher than a central area of the reflecting surface is formed in at least a part of an end portion of the reflecting surface in the dispersive direction by the dispersive element.

Abstract: According to the present invention, a stable operation of an actuator is realized. An actuator 1 according to the present invention includes: a movable section 5; a stationary section 10 for supporting the movable section 5; driving electrode portions 8 and 9 for driving the movable section 5; and a repulsion generation section 6 for generating a repulsion acting between the movable section 5 and the stationary section 10. The repulsion generation section 6 is provided at a position of the stationary section 10 opposing the movable section 5. At least a portion of the repulsion generation section 6 opposes an end of the movable section 5 that is located closer to the movable comb electrodes 9 than to hinges 7. By applying the same driving voltage to the movable section 5 and the repulsion generation section 6, a repulsion is generated. The repulsion acts in a direction of suppressing a rotation of the movable section 5 around an axis which is perpendicular to the planar direction of the movable section 5.

Abstract: An image projection system (100) has a laser (102, 104, 106) providing at least one beam (103, 105, 107) to a scan mirror apparatus (130) for scanning the at least one beam (103, 105, 107) in two orthogonal directions (404, 406). The scan mirror (130) includes an oscillating portion (204, 904) disposed contiguous to a frame (202) and includes a reflective portion (218, 918) capable of reflecting the beam (103, 105, 107). Circuitry (500) is provided for measuring the capacitance between interdigitated teeth (212, 214, 912, 914) on the frame (202) and the oscillating portion (204, 904).

Abstract: A system comprises a spatial light modulator comprising a plurality of modulation elements, the spatial light modulator operable to receive an optical signal comprising one or more optical channels, wherein the elements are operable to perform an optical function on at least one of the one or more optical channels. The system further comprises two or more reset groups associated with the spatial light modulator, wherein each reset group comprises one or more elements, and wherein at least one of the one or more optical channels resides on at least two of the two or more reset groups. The system also comprises a controller operable to actuate the elements of at least one of the at least two reset groups associated with the optical channel at a different time than any one or more other reset group of the at least two reset groups.

Abstract: In the light scanning apparatus, flatness of a mirror section can be improved. The light scanning apparatus comprises: a substrate having an opening part; a mirror section being located in the opening part of the substrate, the mirror section having side parts, which are held by a beam; and a vibration source being provided on the substrate, the vibration source bending the substrate so as to swing the mirror section on the beam which acts as a pivot shaft. The mirror section swung by the vibration source reflects an irradiated light for scanning operation. The mirror section is constituted by a metal base plate and a mirror surface member, which is bonded to the metal base plate by an elastic adhesive.

Abstract: A laser beam steering apparatus includes a beam steering cell with an adjustable shape, with the cell having opposing Fabry-Perot filters, and a steering mechanism coupled to the cell to adjust its shape so that the direction of a laser beam emitted from the cell is changed in response to a change in the cell shape.

Abstract: A digital micromirror projection display system is disclosed in which “off” pixel light is recaptured and recycled. In the disclosed system, a digital micromirror device directs incident light for “on” pixels in the image to be displayed through projection lenses to a projection screen. The digital micromirror device directs incident light for “off” pixels back toward the light source for recapture by a light integrator. Both the incident and projected light can pass through a rear group of projection lenses, with the first projection lens being disposed near the digital micromirror device. A mirror directs the incident light toward the digital micromirror device, and the “off” pixel light from the digital micromirror device toward the light integrator. As a result, “off” pixel light can be recycled without degrading image contrast, in a manner that can place fast projection lenses close to the digital micromirror device to save cost.

Abstract: An optical system (100) comprises a coherent light source (101) and optical elements for directing light from the source to a target (1001). The optical elements include at least one diffusing element (141, 161) arranged to reduce a coherence volume of light from the source and a variable optical property element (151). A control system (1021) controls the variable optical property element such that different speckle patterns are formed over time at the target (1001) with a temporal frequency greater than a temporal resolution of an illumination sensor or an eye (1011) of an observer so that speckle contrast ratio in the observed illumination is reduced. The variable optical property element (151) may be a deformable mirror with a vibrating thin plate or film.

Abstract: An optical scanning apparatus that includes a light source unit having plural main light sources that are two-dimensionally arranged in the main scanning direction and the sub scanning direction, and plural sub light sources that are arranged between rows of the main light sources aligned in the main scanning direction. The optical scanning apparatus also includes an optical system configured to scan light emitted from the light source unit on a scanning object to form an image on the scanning object, and a control apparatus configured to adjust a main scanning direction image position by controlling two of the main light sources that are juxtaposed to each other with respect to the main scanning direction and adjust a sub scanning direction image position by controlling a main light source and a sub light source that are adjacent to each other.

Abstract: In one aspect of the present invention, a method is provided for communicating radiation pressure provided by a light wave. The method entails positioning a reflective prism (606, 607) having a near total reflective surface, including an initial transparent surface (614A, 614B) and a pair of reflective surfaces (612) each positioned at an angle relative to the initial transparent surface. Then, a light wave is directed toward the reflective prism, such that the light wave is generally normal to the transparent surface and passes therethrough. The light wave further reflects from the first and then the second reflective surface and exits the prism through the transparent surface. In this way, radiation pressure communicated by the relecting light wave acts on the prism.

Abstract: A driving method of an optical actuator is applied to a projection system. The optical actuator includes a carrier, an optical element and an actuator component. The optical element is disposed at the carrier. The actuator component drives the carrier to rotate an angle. The driving method includes the steps of providing a driving signal having an initial section and a target section, and shifting the optical element between a position driven by the initial section and a position driven by the target section via the actuator component according to a first acceleration-deceleration section and a second acceleration-deceleration section. In addition, an optical actuator, a projection lens module and a projection system are also disclosed.

Abstract: A wavelength selective switch includes a polarization controller to control a polarization controller configured to control a polarization plane of a first optical signal as wavelength-multiplexed light input through a first input port, and control a polarization plane of a second optical signal as wavelength-multiplexed light input through a second input port such that the polarization plane of the second optical signal is aligned in a direction perpendicular to the polarization plane of the first optical signal, a demultiplexer to demultiplex optical signals multiplexed in the first and the second optical signals, a polarization separator to separate, an optical collector to collect the optical signals separated by the polarization separator, an optical signal reflector to reflect each of the optical signals collected by the optical collector; and a reflection controller to control the optical signal reflector in accordance with an incident position of the optical signal.

Abstract: An oscillator device includes an oscillator, a resilient support member configured to support the oscillator for oscillatory motion about an oscillation central axis, a magnetic member provided on the oscillator, and a magnetic-field generating member disposed opposed to the oscillator, wherein the oscillator has a through-hole extending through the oscillator from its top surface to its bottom surface, and wherein the magnetic member is provided in the through-hole.

Abstract: A method includes generating a plurality of beams that each illuminate a separate portion of a spatial light modulator. The spatial light modulator has a first dimension of a first length and a second dimension of a second length. Each of the beams spans a portion of the first length of the first dimension and a portion of the second length of the second dimension. The method also includes scrolling the plurality of beams along the second dimension of the spatial light modulator while maintaining at least a first gap between each of the plurality of beams.

Abstract: An optical actuator includes a base, a carrier, a reflecting optical element, a connecting structure and an actuating component. The reflecting optical element is disposed at a first side of the carrier. The connecting structure has a first connecting portion located at the central region thereof and two second connecting portions located at two opposite sides thereof. The connecting portions connect the base to the second side of the carrier. The actuating component is disposed on the base and drives the carrier rotating along an axial line. The axial line is substantially perpendicular to the connecting structure. A projection system including the optical actuator is also disclosed.

Abstract: An true time delay in optical signals using a Fourier cell is provided. One embodiment includes: an input array for inputting an array of light beams; at least a portion of a lens; a plurality of micromirrors located at a distance away from the lens that is approximately equal to the focal length of the lens; one or more mirrors located at a distance away from the lens that is approximately equal to the focal length of the lens; and one or more delay blocks, at least a portion of which are located at a distance away from the lens that is approximately equal to the focal length of the lens. The micromirrors may include a plurality of individually controllable pixels for directing one or more light beams in the array of light beams through the lens and onto either a mirror or a delay block.

Abstract: Diffractive patterns are disposed on a MEMS substrate in the gaps between the MEMS micromirrors to reduce backreflection of light leaking through the gaps and reflected by the MEMS substrate. The diffractive patterns are silicon surface-relief diffraction gratings or silicon oxide gratings on silicon substrate. Sub-wavelength gratings are used to suppress higher orders of diffraction; 50% duty cycle surface relief gratings on a substrate having index of refraction close to 3 are used to suppress both reflected and transmitted zero orders of diffraction simultaneously. The gratings have lines running parallel or at a slight angle to the gaps, to prevent the diffracted light from re-entering the gaps.

Abstract: A projector includes a projecting module for projecting a projecting image on a screen panel, an image sensor for capturing an image of an object which is located outside of the projecting module and faces toward the lens module, a light director, and a controlling unit. The projecting module has a lens module and a light source for emitting light transmitting through the lens module. The light director is movable between a first position where the light director is located outside of a light path associated with the lens module, and a second position where the light director is configured for directing light of the object through the lens module to be incident on the image sensor. The controlling unit controls the light director to move between the first and second positions.

Abstract: In an optical scanning apparatus, an aperture is provided between a semiconductor laser in a light source unit and an oscillating mirror, and between a cylindrical lens and the oscillating mirror. When a light beam from the semiconductor laser comes into an reflection surface of the oscillating mirror, the optical scanning apparatus is configured to limit a beam width of the light beam to a width appropriate to the reflection surface, and then to ensure an irradiation position of the light beam in a main-scanning direction to come into the reflection surface of the oscillating mirror, by causing the light beam to pass through an opening of the aperture.

Abstract: A pair of substrate portions each being tabular-shaped has side portions located closer to a mirror portion and connected, at both ends thereof in the oscillation axis direction, by a pair of supporting beam portions, and also has outer side portions fixed to a fixing member. An excitation device is formed on at least one substrate portion. The pair of substrate portions is disposed symmetrically in the direction perpendicular to the oscillation axis. A pair of torsion beam portions extends outward from two opposite sides of the mirror portion on the oscillation axis, and each is connected to the center of each supporting beam portion in a longitudinal direction. An edge of the piezoelectric element on an outer side thereof in the direction perpendicular to the oscillation axis is spaced from an outer side portion of the at least one substrate portion in a direction closer to the mirror portion.

Abstract: An electron beam apparatus such as a sheet beam based testing apparatus has an electron-optical system for irradiating an object under testing with a primary electron beam from an electron beam source, and projecting an image of a secondary electron beam emitted by the irradiation of the primary electron beam, and a detector for detecting the secondary electron beam image projected by the electron-optical system; specifically, the electron beam apparatus comprises beam generating means 2004 for irradiating an electron beam having a particular width, a primary electron-optical system 2001 for leading the beam to reach the surface of a substrate 2006 under testing, a secondary electron-optical system 2002 for trapping secondary electrons generated from the substrate 2006 and introducing them into an image processing system 2015, a stage 2003 for transportably holding the substrate 2006 with a continuous degree of freedom equal to at least one, a testing chamber for the substrate 2006, a substrate transport mech

Abstract: Methods and apparatus include improving print quality of a bi-directionally scanning electrophotographic (EP) device, such as a laser printer or copy machine, according to temperature. A moving galvanometer or oscillator reflects a laser beam to create forward and reverse scan lines of a latent image. During use, the actual ambient temperature is obtained and used make corrections to improve print quality, such as by producing the latent image with a signal altered from an image data input signal to help ensure proper alignment of the forward and reverse scan lines.

Abstract: An optical scanning element performs scanning with light by bringing a mirror portion into a swinging state by generating resonance oscillations of the mirror portion due to torsional oscillations. The optical scanning element has a first resonance frequency and a second resonance frequency which generate longitudinal oscillations and lateral oscillations on a lower region side and a high region side of a resonance frequency of the torsional oscillations respectively. Outputting of a drive signal is started by setting a frequency of a drive signal which is used for oscillating the optical scanning element to a specific frequency which falls between the first resonance frequency and the second resonance frequency and is higher than the resonance frequency of the torsional oscillations and, thereafter, the frequency of the outputted drive signal is shifted to the resonance frequency of the torsional oscillations after outputting of the drive signal is started.

Abstract: In a bi-directionally scanning electrophotographic (EP) device, methods and apparatus include storing alignment information. In one aspect, pre-characterization parameters of the EP device are stored in memory, such as NVRAM, resistant to the removal of power. In another, actual parameters of the EP device are learned during calibration and stored in the same memory. A controller has local or remote access to the memory and makes comparisons of the pre-characterized and learned parameters to implement corrections. Especially, scan alignment corrections are implemented to alter future scanning of scan lines of latent images on a photoconductor whereby the scan lines are formed in alternating directions. Certain contemplated parameters include, but are not limited to, a scan detect to print distance from a sensor to the start of imaging, temperature, pressure, a scanning mechanism drive signal parameter, such as pulse width, or sensor delay information.

Abstract: A micro-structure produced by utilizing a MEMS technology or the like includes: a frame including a portion having a first layer and a portion having a second layer on the lower side of the first layer; a movable body including a portion having the first layer and a portion having the second layer; and at least one swing supporting portion which is having the first layer, and connects the portion having the first layer in the frame and the portion having the first layer in the movable body, to support the movable body to be capable of swinging. A frame side end portion of the swing supporting portion is supported from underneath by the portion having the second layer in the frame, and a movable body side end portion of the swing supporting portion is supported from underneath by the portion having the second layer in the movable body.

Abstract: An optical device includes: an axis member including a plate-shaped attachment portion and an elastic support portion that swingably supports the attachment portion around a predetermined axis; a rigid member attached to one side of the attachment portion; and a light reflecting member attached to the other side of the attachment portion and having an area larger than that of the attachment portion.

Abstract: In a method for driving a micro mirror such as MEMS mirror and a display apparatus using the method, there are provided a mirror driving unit for driving the micro mirror which operates in a resonant mode and a nonresonant mode, a driving-condition setting unit for setting a mirror driving condition, a switching unit for switching on/off a mirror driving signal in the nonresonant mode, and a look-up table for indicating the relationship of a mirror response with respect to the driving condition already known in advance. The switching unit controls the transmission of the nonresonant-mode mirror driving signal while grasping the mirror response state with respect to the mirror driving signal, thereby finely increasing and decreasing a driving torque for the micro mirror. This fine increase and decrease allows the micro mirror to be fluctuated stably, and a further enhancement in the fluctuation rate.

Abstract: A light irradiation device irradiates a specimen in a flow channel with directional light. The light irradiation device includes a light source that emits the directional light, and an irradiation control unit that irradiates the specimen in the flow channel with light, obtains positional information of the specimen, and controls the irradiation of the directional light based on the positional information.

Abstract: A fast variable angle of incidence illumination configuration for a machine vision inspection system, including: a light source that directs a beam along a first optical path portion; a beam steering arrangement that receives the beam and steers it along a second optical path portion; and a beam deflecting arrangement including a plurality of surface portions arranged at respective angles of incidence to receive the beam and deflect it along a third optical path portion to a field of view. The beam steering arrangement includes different surfaces that provide either narrow or wide divergence of the beam toward the deflecting arrangement. The illumination configuration allows for fast adjustment of not only the illumination angle of incidence but also the range of angles (narrow or wide) about the nominal angle. The illumination configuration is particularly suitable for use with light provided by a high-intensity remote light source.

Abstract: Implementations of actuators that use flexures to provide support to the actuators and pivoting mechanisms to the actuators. Such actuators can be electromagnetically activated actuators that include a magnet stator and a coil rotor mounted on a flexure.

Abstract: A light-emitting apparatus, for enabling a beam of light to be projected on a desired target located a distance away to project the beam on the desired target without any or substantially any undesired movement. The apparatus may include a housing, a light generating device located within the housing and operable to generate a beam of light, a sensing device or devices for sensing an undesired action of the housing, a control circuit operable to provide a control signal corresponding to the sensed undesired action, and a drive device operable to counter act all or at least some of the undesired action of said housing in accordance with said control signal. The sensing device or devices may be one or more gyroscopes, accelerometers or other such devices.

Abstract: A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector defines a rotation axis about which the mirror forming base is rotated relative to the frame. The torsion connector has a width measured in a direction which is parallel to the mirror surface and perpendicular to the rotation axis. The width of the torsion connector is relatively great at the first end. The width becomes gradually smaller from the first end toward the second end.

Abstract: An oscillator device includes at least one movable element supported for oscillatory motion around a rotational axis, and a damper member for applying a damping function to the oscillatory motion of the movable element, the damper member being provided along at least a portion of a locus plane defined by an edge of the movable element during oscillatory motion thereof, so that, based on a viscosity of a fluid which is present between the edge of the movable element and a portion of the damper member opposed to the edge of the movable element, the damping function is applied to applied to the oscillatory motion of the movable element.

Abstract: This vibrating mirror element includes a mirror portion reflecting light, a torsionally deformable beam portion connected to the mirror portion for supporting the mirror portion in a vibratile manner, and a driving portion having a connecting portion connected with the beam portion for driving the mirror portion through the torsionally deformable beam portion. The width of the connecting portion of the driving portion is rendered smaller than the width of a portion of the driving portion other than the connecting portion in plan view.

Abstract: A method of lubricating MEMS devices using fluorosurfactants 42. Micro-machined devices, such as a digital micro-mirror device (DMD™) 940, which make repeated contact between moving parts, require lubrication in order to prevent the onset of stiction (static friction) forces significant enough to cause the parts to stick irreversibly together, causing defects. These robust and non-corrosive fluorosurfactants 42, which consists of a hydrophilic chain 40 attached to a hydrophobic fluorocarbon tail 41, are applied by nebulization and replace the more complex lubricating systems, including highly reactive PFDA lubricants stored in polymer getters, to keep the parts from sticking. This lubrication process, which does not require the use of getters, is easily applied and has been shown to provide long-life, lower-cost, operable MEMS devices.

Abstract: This vibrating mirror element includes a pair of first beam portions supporting a mirror portion in a vibratile manner, a pair of second beam portions connected with the pair of first beam portions respectively, and a pair of driving portions connected with the pair of second beam portions respectively. The mirror portion is arranged in a region surrounded by the pair of second beam portions and the pair of driving portions. The width of the pair of first beam portions and the width of the pair of second beam portions are rendered smaller than the width of the pair of driving portions.