Abstract: This disclosure provides systems, methods and apparatus for providing illumination by using a light guide to distribute light. In one aspect, a passivation layer is attached to the light guide of an illumination device. The passivation layer may be an optically transparent moisture barrier and may have a thickness and refractive index which allows it to function as an anti-reflective coating. The passivation layer may protect moisture-sensitive underlying features, such as metallized light turning features that may be present in the light guide. The light turning features may be configured to redirect light out of the light guide. In some implementations, the redirected light may be applied to illuminate a display.

Abstract: A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate may contain electronic circuitry fabricated on the backplane. The electronic circuitry is placed in electrical communication with the array of interferometric modulators and is configured to control the state of the array of interferometric modulators.

Abstract: An interferometric modulating device is provided with a thermal expansion balancing layer on a side of the movable flexible layer opposite the movable reflector such that when temperature changes the distance between the movable reflector and the optical stack does not change significantly, thereby leading to stable color. Additionally, an interferometric modulating device is provided with a stiffening layer between the movable flexible layer and the movable reflector and at least one hollow void exists on the surface where the movable reflector and the stiffening layer contact each other so that the movable reflector is more rigid to bending, thereby reducing the temperature sensitivity of the movable reflector.

Abstract: The present invention provides a display apparatus, comprising: an a light source for emitting illumination light for transmitting along illumination light path; a display device includes a plurality of pixels for modulating the illumination light for reflecting the illumination light along a projection light path after said illumination light is modulated by said display device; light path change actuator for changing the projection light paths; and a control circuit for controlling the light source, wherein the control circuit controls the light source in response to changes of the projection light path.

Abstract: In various embodiments described herein, a display device includes a front illumination device that comprises a light guide disposed forward of an array of display elements, such as an array of interferometric modulators, to distribute light across the array of display elements. The light guide may include a turning film to deliver uniform illumination from a light source to the array of display elements. For many portable display applications, the light guide comprises the substrate used in fabricating the display elements. The display device may include additional films as well. The light guide, for example, may include a diffuser and/or an optical isolation layer to further enhance the optical characteristics of the display.

Abstract: A digital micromirror device (DMD), a method of manufacturing the DMD and an optical processor incorporating a DMD. In one embodiment, the DMD includes: (1) a first group of micromirrors having a first modulation structure based on a first wavelength of light and a second group of micromirrors having a second modulation structure based on a second wavelength of light, the second wavelength differing from the first wavelength.

Abstract: A micromirror device includes an elastic hinge for supporting a mirror on a substrate, and an address electrode for deflecting the mirror. The device further includes a protective layer and an oriented monolayer laid to cover a stopper also functioning as an address electrode provided below the mirror and between the mirror and the substrate.

Abstract: System and method for simultaneous display of multiple images using a single light modulator array. A preferred embodiment comprises a light source that produces a light with desired spectral characteristics, a color filter optically coupled to the light source, and an array of light modulators optically coupled to the color filter. The color filter filters light from the light source to produce light of desired wavelengths and the array of light modulators simultaneously displays multiple images onto a display plane. Portions of the array of light modulators are designed so that each portion can independently display an image and the light source provides needed light to display the image.

Abstract: A display element, such as an interferometric modulator, includes a transparent conductor configured as a first electrode and a movable minor configured as a second electrode. Advantageously, the partial reflector is positioned between the transparent conductor and the movable mirror. Because the transparent conductor serves as an electrode, the partial reflector does not need to be conductive. Accordingly, a greater range of materials may be used for the partial reflector. In addition, a transparent insulative material, such as a dielectric, may be positioned between the transparent conductor and the partial reflector, for example, in order to decrease a capacitance of the display element without changing a gap distance between the partial reflector and the movable minor. Thus, a capacitance of the display element may be reduced without changing the optical characteristics of the display element.

Abstract: Anti-stiction systems may include one or more anti-stiction electrodes driven to provide an electrical force that counteracts a stiction force acting upon a moveable portion of an interferometric modulator. The anti-stiction electrode(s) may be disposed on a back glass or on another such substrate. The anti-stiction electrode(s) may be configured to apply an electrical force to substantially all of the interferometric modulators in a display device at once and/or may be configured to apply an electrical force only to a selected area. In some embodiments, the sum of an anti-stiction electrical force and a mechanical restoring force of a moveable part of an interferometric modulator is sufficient to counteract a stiction force.

Abstract: Embodiments include systems and methods for reducing visible artifacts such as Moiré, or interference, patterns, in displays. One embodiment includes a display device comprising a plurality of light modulators and a plurality of illumination elements configured to direct light to the light modulators. The directed light of the plurality of illumination elements collectively defines an nonuniformly varying pattern of light.

Abstract: A fluorescent imaging device includes an irradiation section that irradiates an object to be examined with excitation light and reference light, an image pickup section that picks up a fluorescence image based on the excitation light and a reflected light image based on the reference light, a comparison section that compares relative intensity between the fluorescent image generated from the fluorescence image and the reflected light image generated from the reflected light image, and a selection section that selectively outputs one of the reflected light image and the fluorescent image based on the comparison result.

Abstract: A display apparatus (20) includes an electromagnetic radiation source (22) and digital micro-mirror device (21) having a plurality of micro-mirror elements on a surface thereof. The electromagnetic radiation source (22) is arranged to illuminate the digital micro-mirror device (21) and at least one micro-mirror element of the digital micro-mirror device (21) either reflects electromagnetic radiation along a primary path (23) to an exit lens (23) to form a desired image to be viewed by an operator or along a secondary path (25) to an electromagnetic radiation dump (26). The digital micro-mirror device (21) is also operable to generate a test image at the electromagnetic radiation dump (26) at a predetermined time.

Abstract: Various embodiments of the invention relate to methods and systems for generating the color white in displays created from interferometric modulators and more specifically, to the generation of the color white through the use of reflected light at two wavelengths. In one embodiment, a display device displays the color white. The color white is generated by reflecting light from two pluralities of interferometric modulator types. The first modulator type reflects colored light at a specific wavelength. The second modulator type reflects colored light selected to be at a wavelength complementary to the first. The combined light reflected from the two types appears white in the display.

Abstract: Embodiments of the present invention relate to interferometric display devices comprising an interferometric modulator and a solar cell and methods of making thereof. In some embodiments, the solar cell is configured to provide energy to the interferometric modulator. The solar cell and the interferometric modulator may be formed above the same substrate. A layer of the solar cell may be shared with a layer of the interferometric modulator.

Abstract: A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate may contain electronic circuitry fabricated on the backplane. The electronic circuitry is placed in electrical communication with the array of interferometric modulators and is configured to control the state of the array of interferometric modulators.

Abstract: There is provided a projection apparatus including a light source, a micromirror element which tilts a plurality of micromirrors arranged in an array +A° or ?A° (A>0) separately from an array surface to form a light image with light components reflected by the plurality of micromirrors, an illumination optical system which uses light emitted from the light source and causes illumination light whose incidence angle is (2A+?)° (?>0) to enter the micromirror element from a direction to which a less than 45° turn is made from a narrow side direction of the array surface of the micromirror element, and a projection optical system which a light image output from the micromirror element enters and which projects the light image onto a projection object.

Abstract: DMDs (digital mirror devices) as currently produced by Texas Instruments show handedness with regard to mirror deflection axes and image raster. At present only one isomer (one hand-type) is produced, which we call the (L)DMD. For the superposition of (L)DMDs an additional folding is required in all arrangements of the state of the art, which results in sophisticated and expensive designs, e.g. the trichroic prism assembly (TPA) of 3-chip DMD-projectors. We uncover a superposition method using a pair of stereo-isomeric MEMSs (both the right-handed and the left-handed stereo-isomeric topologies are used). This eliminates the necessity of this previously required additional folding. As a consequence simplified and improved superposition systems can be designed. Minimal back focal length and symmetric designs lead to smaller size, lighter weight and reduced cost.

Abstract: The invention relates to methods to improve SLMs, in particular to reflecting micromechanical SLMs, for applications with simple system architecture, high precision, high power handling capability, high throughput, and/or high optical processing capability. Applications include optical data processing, image projection, lithography, image enhancement, holography, optical metrology, coherence and wavefront control, and adaptive optics. A particular aspect of the invention is the achromatization of diffractive SLMs so they can be used with multiple wavelengths sequentially, simultaneously or as a result of spectral broadening in very short pulses.

Abstract: The present invention provides a display apparatus, comprising: a light source or light sources for emitting a luminous flux or luminous fluxes having a plurality of colors; a spatial light modulator for modulating the luminous flux(es) having a plurality of colors incoming from the light sources; and controller for processing video image input data, which is input, and controlling the light source(s) and the spatial light modulator, wherein the controller generates a plurality of video image signals of colors constituting a video image based on the video image input data, and controls the light source(s) so as to cause the light source(s) having at least two colors, from among the light source(s) having a plurality of colors, to perform pulse emission in sequence and modulate the pulse emission during a period shorter than a modulation period controlled under the spatial light modulator is with the video image signal of one color from among the video image signals.

Abstract: An illumination device for uniformly illuminating an image generating micro-display that includes a coherent light source, a beam shaping and speckle reduction device located on an optical path between said coherent light source and said image generating micro-display, wherein the beam shaping and speckle reduction device includes a dynamic diffractive optical element, and a processor which is configured to control said dynamic diffractive optical element so that a sequence of different hologram patterns is generated on said dynamic diffractive optical element, the different hologram patterns being uncorrelated to each other.

Abstract: A display substrate includes an insulation substrate, a gate line formed on the insulation substrate, a data line formed on the insulation substrate and crossing the gate line, a switching element formed on the insulation substrate and electrically connected to the gate line and the data line, and a pixel electrode formed on the insulation substrate. The pixel electrode is electrically connected to the switching element and includes a reflective electrode layer which reflects light and an absorption electrode layer which absorbs light.

Abstract: Modulator devices are selectably adjustable between at least two states, wherein the transmission and/or reflection of particular wavelengths of light are modified. Certain modulator devices are substantially uniformly adjustable over a wide range of wavelengths, including visible and infrared wavelengths. Other modulator devices are adjustable over visible wavelengths without significantly affecting infrared wavelengths. In addition, the modulator devices may be used in conjunction with fixed thin film reflective structures.

Abstract: At least some subpixels in an interferometric modulator display are formed in a triangular shape. Such triangular subpixels may be formed and/or addressed in a variety of manners. At least some individual triangular subpixels may be separately addressable. However, a plurality of triangular subpixels may be addressable as a group, e.g., as a group of 2, 3, 4 or more. A single pixel may include varying numbers of triangular subpixels. For example, a single pixel may include 3, 6, 9, 12, 15, 18, 21 or some other number of triangular subpixels. Alternatively, a single pixel may include 4, 8, 12, 16, 20, or some other number of triangular subpixels. A single pixel may include triangular subpixels that are configured to be separately addressable and/or triangular subpixels are configured to be addressable as a group.

Abstract: A package structure and method for packaging a MEMS device is described. In one embodiment, the MEMS base device can include a substrate having a MEMS device formed thereon, a backplate, an exposed or activated desiccant disposed between the backplate and the transparent substrate, and a cover at least partially encapsulating said desiccant. In another embodiment, a MEMS display device can be manufactured by contacting the substrate and/or backplate with a cover which at least partially encapsulates a desiccant, joining the backplate and the substrate to form a package, and exposing or activating the desiccant.

Abstract: An interferometric modulator array device with backlighting is disclosed. The interferometric modulator array device comprises a plurality of interferometric modulator elements, wherein each of the interferometric modulator elements comprises an optical cavity. The interferometric modulator array includes an optical aperture region, and at least one reflecting element is positioned so as to receive light passing through the optical aperture region and reflect at least a portion of the received light to the cavities of the interferometric modulator elements. In some embodiments, the interferometric modulator elements may be separated from each other such that an optical aperture region is formed between adjacent interferometric modulator elements.

Abstract: An illumination optical system for projection lithography for the illumination of an illumination field has a facet mirror. An optical system, which follows the illumination optical system, has an object field which can be arranged in the illumination field of the illuminate optical system. The facet mirror has a plurality of facets to reflectively guide part bundles of a bundle of illumination light. Reflection faces of the facets are tiltable in each case. In a first illumination tilt position, the tiltable facets guide the part bundle impinging on them along a first object field illumination channel to the illumination field. In a different illumination tilt position, the tiltable facets guide the part bundle impinging on them along a different object field illumination channel to the illumination field.

Abstract: Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal.

Abstract: A full color range analog controlled interferometric modulation device is provided. The device includes a transparent substrate, and a transparent fixed-position electrically conductive electrode with a bottom surface overlying the substrate. A transparent spacer overlies the fixed-position electrode, and an induced absorber overlies the spacer. An optically reflective electrically conductive moveable membrane overlies the induced absorber. A cavity is formed between the induced absorber and the moveable membrane having a maximum air gap dimension less than the spacer thickness. In one aspect, the distance from the top surface of the fixed-position electrode to a cavity lower surface is at least twice as great as the cavity maximum air gap dimension. In another aspect, at least one anti-reflective coating (ARC) layer is interposed between the substrate and the fixed-position electrode, and at least one ARC layer is interposed between the fixed-position electrode and the spacer.

Abstract: An interferometric light modulating device having two viewing surfaces is provided. In some embodiments, the device can generate two distinct images, one on each side of the device, simultaneously.

Abstract: Embodiments include devices and methods for wavelength filtering. For example, one embodiment includes a display comprising a plurality of the display elements each comprising a movable reflector, a first partial reflector, and a second partial reflector. The first partial reflector is positioned at a first distance from the movable reflector and forms a first optical resonant cavity therebetween. The second partial reflector is positioned at a second distance from said first partial reflector and forming a second optical resonant cavity therebetween. In various embodiments, the movable reflector is movable with respect to the first partial reflector to alter the first optical cavity. Other embodiments include a method of making devices.

Abstract: An optical interference display panel is disclosed that has a substrate, an optical interference reflection structure, and an opaque protection structure. The optical interference reflection structure has many color-changeable pixels and is formed on the substrate. The opaque protection structure is adhered and fixed onto the substrate with an adhesive and encloses the optical interference reflection structure between the substrate and the opaque protection structure. The opaque protection structure blocks and/or absorbs light, and light is thus not emitted outward by passing through defects in the optical interference reflection structure Moreover, the opaque protection structure and the adhesive also prevent the optical interference reflection structure from being damaged by an external environment.

Abstract: The present invention discloses a spatial light modulator includes a plurality of pixel elements disposed on a substrate. Each of the pixel elements comprises a deflectable micromirror. Specifically, instead of SRAM, the spatial light modulator is implemented with a DRAM in each of the pixel elements. The DRAM in each of the pixel elements has a smaller number of transistors than SRAM. The spatial light modulator can be manufactured with smaller pixel size and circuit configuration with improved withstand voltage. Further improvements can also be achieved for manufactured the spatial light modulator with smaller capacitor with better layout configuration for wire connections and control signal transmissions.

Abstract: An electro-wetting display panel including an active device array substrate, a dielectric layer, a wall structure, a first liquid containing dyes, a second liquid, and an opposite substrate is provided. The active device array substrate includes a substrate, scan lines, data lines, and pixels. The pixels are electrically connected with the scan lines and the data lines accordingly. Each pixel includes an active device, a transparent pixel electrode, and a reflective layer. The transparent pixel electrode located above the reflective layer is electrically connected with the active device. The reflective layer has a bumpy surface. The dielectric layer is disposed on the active device array substrate. The wall structure is disposed on the dielectric layer. The first liquid is disposed on the dielectric layer. The opposite substrate is disposed above the active device array substrate. The second liquid is disposed between the active device array substrate and the opposite substrate.

Abstract: A light modulation device that modulates an incident luminous flux according to image information to form an image, includes: a light modulation section that is disposed in each of pixels constituting the image, wherein the light modulation section includes a condensing lens that concentrates the incident luminous flux, a shutter that is configured to be movable to a first position in which the shutter allows the luminous flux concentrated by the condensing lens to pass, or a second position in which the shutter blocks the luminous flux concentrated by the condensing lens, and a driver that moves the shutter to the first position or the second position.

Abstract: A spatial light modulator includes an array of elements to modulate light in accordance with image data. The modulator has a display panel having first and second surfaces arranged adjacent to the array of elements such that the second surface is directly adjacent the array of elements to allow a viewer to view an image produced by modulation of light The modulator may also include a light source to provide light to the display panel and illumination dots on the first surface of the display panel to reflect light from the source to the array of elements.

Abstract: A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.

Abstract: A micromirror device includes an elastic hinge for supporting a mirror on a substrate, and an address electrode for deflecting the mirror. The device further includes a protective layer and an oriented monolayer laid to cover a stopper also functioning as an address electrode provided below the mirror and between the mirror and the substrate.

Abstract: An interferometric modulator is provided having a faster deformation time constant on actuation than relaxation time constant upon release from actuation. In some embodiments, apertures are formed in a mechanical membrane to decrease pressure, including liquid and/or gas pressures, on the membrane when actuated. In other embodiments, a dampening layer is disposed in close proximity above the membrane to apply greater downward pressure on the membrane and therefore slow the motion of the membrane when released from an actuated state. Other embodiments comprise structures, such as a heating element or vacuum device, to manipulate pressures above and/or below the mechanical membrane to affect the mechanical persistence of the display device.

Abstract: An iterferometric modulator array is integrated with collapsible cavity MEMS electrical switches. The electrical switches may have similar physical geometry as the display elements. The switches may form row or column select functions for the display.

Abstract: A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate may contain electronic circuitry fabricated on the backplane. The electronic circuitry is placed in electrical communication with the array of interferometric modulators and is configured to control the state of the array of interferometric modulators.

Abstract: In certain embodiments, a microelectromechanical (MEMS) device comprises a substrate having a top surface, a movable element over the substrate, and an actuation electrode disposed laterally from the reflective surface. The movable element comprises a deformable layer and a reflective element mechanically coupled to the deformable layer. The reflective element includes a reflective surface. The movable element is responsive to a voltage difference applied between the actuation electrode and the movable element by moving in a direction generally perpendicular to the top surface of the substrate.

Abstract: In one embodiment, a method includes transmitting one or more light beams by a first portion of a light modulator formed outwardly from a substrate. The one or more transmitted light beams are spatially integrated. A second portion of the light modulator is formed outwardly from the substrate. The second portion of the light modulator spatially integrates the transmitted light beams.

Abstract: A MEMS device is electrically actuated with a voltage placed across a first electrode and a moveable material. The device may be maintained in an actuated state by latch electrodes that are separate from the first electrode.

Abstract: An interferometric modulator (Imod) cavity has a reflector and an induced absorber. A direct view reflective flat panel display may include an array of the modulators. Adjacent spacers of different thicknesses are fabricated on a substrate by a lift-off technique used to pattern the spacers which are deposited separately, each deposition providing a different thickness of spacer. Or a patterned photoresist may be used to allow for an etching process to selectively etch back the thickness of a spacer which was deposited in a single deposition. A full-color static graphical image may be formed of combined patterns of interferometric modulator cavities. Each cavity includes a reflector, and an induced absorber, the induced absorber including a spacer having a thickness that defines a color associated with the cavity.

Abstract: A micromirror device includes an elastic hinge for supporting a mirror on a substrate, and an address electrode for deflecting the mirror. The device further includes a protective layer and an oriented monolayer laid to cover a stopper also functioning as an address electrode provided below the mirror and between the mirror and the substrate.

Abstract: Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal.

Abstract: A driving voltage adjusting device for a microelectromechanical optical (MEMO) device. The adjusting device comprises a parameter generator and a driving device. The driving device outputs an adjusting driving voltage to the MEMO device to a parameter from the parameter generator.

Abstract: The current disclosure shows how to make a fast switching array of mirrors for projection displays. Because the mirror does not have a via in the middle connecting to the underlying spring support, there is an improved contrast ratio that results from not having light scatter off the legs or vias like existing technologies. Because there are no supporting contacts, the mirror can be made smaller making smaller pixels that can be used to make higher density displays. In addition, because there is not restoring force from any supporting spring support, the mirror stays in place facing one or other direction due to adhesion. This means there is no need to use a voltage to hold the mirror in position. This means that less power is required to run the display.

Abstract: A micromechanical device and system utilizing a supplemental reset pulse to ensure deflectable members deflect to the desired position. After loading data into a micromechanical device, a reset pulse is used to position the deflectable member to a position indicated by the data. A supplemental reset pulse is then applied to ensure the deflectable member is driven to the position indicated by the data. The method and system are also used to ensure the deflectable members are driven to a neutral position.