Abstract: Described is an apparatus, method for manufacturing, and systems comprising a MEMS device, for example, an interferometric modulator, comprising a substrate, a movable mirror, a deformable layer, and a support structure. In some embodiments, the support structure comprises a plurality of support posts. A connector secures the movable mirror secured to the deformable layer. At least one of the connector and the support post is a composite comprising a first component and a second component, where at the first component forms at least a portion of at least one of the perimeter of the connector and support post.

Abstract: A microshutter array has a frame having a light transmissive portion. Linear microshutter elements extend across the light transmissive portion and in parallel to each other. Each microshutter element has a flat blade extended in a length direction and first and second torsion arms extending outwards from each side of the blade in the length direction, the blade extending across the light transmissive portion. There is at least one electrode associated with each linear microshutter element and extended in the length direction parallel to the microshutter element.

Abstract: A display apparatus (20) includes an electromagnetic radiation source (22) and digital micro-mirror device (21) having a plurality of micro-mirror elements on a surface thereof. The electromagnetic radiation source (22) is arranged to illuminate the digital micro-mirror device (21) and at least one micro-mirror element of the digital micro-mirror device (21) either reflects electromagnetic radiation along a primary path (23) to an exit lens (23) to form a desired image to be viewed by an operator or along a secondary path (25) to an electromagnetic radiation dump (26). The digital micro-mirror device (21) is also operable to generate a test image at the electromagnetic radiation dump (26) at a predetermined time.

Abstract: Parallel data bus architecture, lithography system and method for substrate patterning with a high-resolution image by data generation transferring, display or printing high edge placement accuracy images from multiple exposures of plurality of predefined patterns with lower edge placement accuracy. Data bus architecture includes n predetermined patterns in n memory arrays each storing a low resolution pattern to be formed onto microelement array with a data bus connecting memory arrays to an image transducer memory array. Data bus includes switches allowing data transfer from any one memory array to the image transducer array with a memory control unit connected to memory arrays and one or more data bus switches so 2m?1 columns of pattern data stored in the mth memory array are sequentially transferred to 2m?1 memory cell columns of the image transducer memory array, m an integer begging at 1 incremented by 1 to n.

Abstract: A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate may contain electronic circuitry fabricated on the backplane. The electronic circuitry is placed in electrical communication with the array of interferometric modulators and is configured to control the state of the array of interferometric modulators.

Abstract: Interferometric modulators having a separable modulator architecture are disclosed having a reflective layer suspended from a flexible layer over a cavity. The interferometric modulators have one or more anti-tilt members that inhibit undesirable movement of the reflective layer, such as curling and/or tilting. The stabilization of the reflective layer by the anti-tilt members can improve the quality of the optical output of the interferometric modulators, as well as displays comprising such interferometric modulators.

Abstract: The present invention provides image projection system implemented with a spatial light modulator, for modulating an illumination light projected from a light source wherein said spatial light modulator comprising an image projection system implemented with a spatial light modulator for modulating an illumination light projected from a light source wherein said spatial light modulator comprising: at least two electrically conductive layers functioning as two different electrical wirings and said conductive layers having respectively a first and a second longitudinal directions overlapping and crossing each other; and a fixed electric potential layer electrically connected to a fixed electric potential, wherein the two different conductive layers and fixed electric potential layer overlapping one another and disposed at a location along a light path of the illumination light emitted from the light source to block said illumination light.

Abstract: A micromirror device comprises a plurality of mirrors arranged on a substrate, an elastic hinge for supporting any each of the mirrors to be deflectable in a plurality of directions, an electrode arranged to face the mirror, and a driving circuit, which is connected to the mirror via the elastic hinge, for applying to the mirror an address voltage for independently controlling the deflection of the mirror.

Abstract: In particles for image displaying used in an image display device, in which one or more kind of particles are sealed between opposed substrates, at least one substrate being transparent, and, in which the particles are made to fly and move so as to display an image, each particle has a micro-irregularity at its surface. Moreover, in an image display device, in which one or more kind of particles are sealed between opposed substrates, at least one substrate being transparent, and, in which the particles, to which an electrostatic field produced by two kinds of electrodes having different potentials is applied, are made to fly and move so as to display an image, use is made of each particle having a micro-irregularity at its surface.

Abstract: A lighting system operating using a digital mirror as its operative device. The digital mirror is used to shape the light which is a passed through advanced optical devices in order to produce an output.

Abstract: Broad band white color can be achieved in MEMS display devices by incorporating a material having an extinction coefficient (k) below a threshold value for wavelength of light within an operative optical range of the interferometric modulator. One embodiment provides a method of making the MEMS display device comprising depositing said material over at least a portion of a transparent substrate, depositing a dielectric layer over the layer of material, forming a sacrificial layer over the dielectric, depositing an electrically conductive layer on the sacrificial layer, and forming a cavity by removing at least a portion of the sacrificial layer. The suitable material may comprise germanium, germanium alloy of various compositions, doped germanium or doped germanium-containing alloys, and may be deposited over the transparent substrate, incorporated within the transparent substrate or the dielectric layer.

Abstract: Display systems that utilize digital micro-mirror device (DMD) technology are finding wide application in the areas of projection systems for color display. The common name for such systems is digital light processing projection systems or DLP projection systems. The systems and methods described herein utilize the non-imaging light to monitor and calibrate the projected image since the high levels of illumination and extreme temperatures of the imaging light require careful attention to the manner of light collection. Light collection is accomplished in a waste gate area by a light collector, e.g., an optical fiber mat, and the collected light is communicated to an associated sensor. The technique is non-invasive and may be applied to existing designs with minimal modification.

Abstract: An electronic device comprises an array of electro wetting cells, each cell comprising first and second liquids (14,18) which are immiscible in each other. An electrode arrangement (60a,60b) is used to control the position of the interface between the first and second liquids, and comprises a first electrode and a second electrode. Each cell comprises a first switching device (64a) for applying a cell drive voltage to the first electrode (60a), and a second switching device (64b) for simultaneously applying the same cell drive voltage to the second electrode (60b). The cell circuit can be produced without requiring any additional control lines to those required for a single electrode and associated switching device, but the use of two switching devices enables the ultimate signal applied to each electrode to be different as a result of different capacitive effects. This then enables control over the way the liquid interface moves in response to control voltages.

Abstract: Provided is a dynamic image regulator. The dynamic image regulator is an application device based on a micro-opto-electro-mechanical system (MOEMS). The dynamic image regulator includes a spatial light modulator comprising a plurality of holes and a plurality of controllable movable screens respectively provided at the holes, and transmitting or blocking emitted light for each respective hole; and an amplitude modulator modulating an amplitude of light passing through the spatial light modulator.

Abstract: An optical modulator element comprises: a substrate; an obliquely displacing member capable of displacing obliquely, the obliquely displacing member being above the substrate and having at least one opening portion through which a light incident on the substrate from a light source is passed; and an extended portion extended from a surface of the obliquely displacing member to correspond to the opening portion and to block the light incident on the opening portion in answer to a displacement of the obliquely displacing member.

Abstract: In certain embodiments, a microelectromechanical (MEMS) device comprises a substrate having a top surface, a movable element over the substrate, and an actuation electrode disposed laterally from the reflective surface. The movable element comprises a deformable layer and a reflective element mechanically coupled to the deformable layer. The reflective element includes a reflective surface. The movable element is responsive to a voltage difference applied between the actuation electrode and the movable element by moving in a direction generally perpendicular to the top surface of the substrate.

Abstract: Each pixel of a spatial light modulator comprises a movable mirror, a light sensitive element and control circuitry to drive an actuator set the movable mirror to a state determined by a signal received by the light sensitive element.

Abstract: A light modulator device includes a bottom charge plate, a top charge plate, and a pixel plate supported by at least one flexure, wherein the flexure is a piece-wise linear flexure.

Abstract: The micro-electro-mechanical mirror device according to the present invention includes a platform pivotable about two perpendicular axes, and a hinge structure disposed beneath the platform. The hinge structure includes first and second hinges and a gimbal ring fabricated in a single layer beneath the platform layer. One end of the hinge structure extends from the undersurface of the platform, while the other end extends from a pedestal, which extends upwardly from a substrate.

Abstract: The present invention aims at providing a mirror device, comprising a plurality of mirror elements, wherein each of the mirror elements comprises a deflectable mirror, and an elastic member for deflectably supporting the mirror, wherein the mirror allows to be controlled under a first deflection control state in which incident light is reflected toward a first direction, a second deflection control state in which the incident light is reflected toward a second direction, and a third deflection control state in which the mirror oscillates between the first deflection control state and second deflection control state, wherein the mirror device reproduces gradations by combining the first through third deflection control states, and the natural oscillation cycle T of the oscillation system constituted by the mirror and elastic member satisfies: 110 [?sec]>T=2?*?(I/K)>2 [?sec], where “I” is the moment of rotation of the oscillation system and “K” is the spring constant of the elastic member.

Abstract: A tunable laser system is provided. The tunable laser system includes a light source, a grating, a corner mirror array, and a receiver. In which, the light source emits a beam, and the grating is located in front of the light source for reflecting the beam to form a first reflective beam. Also, the corner mirror array is located in front of the grating for receiving the first reflective beam and forms a second reflective beam accordingly. In addition, the receiver is used to receive a third reflective beam formed from reflecting the second reflective beam through the grating.

Abstract: The present invention provides a mirror device, comprising: a plurality of deflectable mirrors; an elastic member for deflectably supporting the mirror; a drive electrode for driving the mirror; a control circuit for giving electric charge to the drive electrode and controlling the deflecting direction of the mirror; and a substrate on which the drive electrode and the elastic member, wherein the drive electrode is placed within an area on the substrate the mirror is projected on, has an outer form constituted by sides approximately in parallel to the outer peripheral lines of the present mirror and by sides approximately parallel to the deflection axis of the present mirror, or a form obtained by dividing the aforementioned outer form into a plurality thereof, and also fills the role of a stopper for regulating the deflection angle of the mirror.

Abstract: A method and a material for creating an antireflective coating on an integrated circuit. A preferred embodiment comprises applying a dark polymer material on a reflective surface, curing the dark polymer material, and roughening a top surface of the dark polymer material. The roughening can be achieved by ashing the dark polymer material in an ash chamber. The dark polymer material, preferably a black matrix resin or a polyimide black matrix resin, when ashed in an oxygen rich atmosphere for a short period of time, forms a surface that is capable of absorbing light as well as randomly refracting light it does not absorb. A protective cap layer may be formed on top of the ashed dark polymer material to provide protection for the dark polymer material.

Abstract: A plurality of reflective spatial light modulator arrays combined together to form a larger display. Each array can include a plurality of light modulating elements disposed on a substrate. Dead space may exist between active areas and/or at a perimeter of the light modulating elements. A plurality of optical elements each having an input aperture and an output aperture can be used to reduce the effect of the dead space. The input apertures are disposed distally and the output apertures are disposed proximally respectively to the light modulating elements such that light received propagates exits the output apertures to the light modulating elements. The input apertures are larger than the output apertures thereby reducing the amount of dead space between active areas of light modulating elements seen be a viewer.

Abstract: An ornamental display device having an interferometric modulator for displaying an ornamental image. The ornamental device may have a patterned diffuser formed on a transparent substrate to provide an ornamental image or information. The ornamental device may also be a piece of jewelry or an article that may be worn. The image displayed may have an iridescent appearance. A controller may also be used to control images displayed on multiple ornamental device to provide coordinated images based on externals received or pre-programmed images.

Abstract: One embodiment of an micromechanical device includes a first contact surface, a moveable component having a second contact surface, where the second contact surface interacts with the first contact surface during device operation, and a gas-phase lubricant disposed between the first contact surface and the second contact surface, where the gas-phase lubricant is adapted to reduce stiction-related forces between the first contact surface and the second contact surface. One advantage of the disclosed device is that a gas-phase lubricant has a high diffusion rate and, therefore, is self-replenishing, meaning that it can quickly move back into a contact region after being physically displaced from the region by the contacting surfaces of the device during operation. Consequently, the gas-phase lubricant is more reliable than conventional solid or liquid lubricants in preventing stiction-related device failures.

Abstract: In accordance with the teachings of the present invention, a spatial light modulator mirror metal having enhanced reflectivity is provided. In a particular embodiment of the present invention, a light processing system includes a light source operable to provide a light beam along a light path and a spatial light modulator positioned in the light path, the spatial light modulator comprising an array of pixel elements, each pixel element comprising a deformable micro-mirror operable to reflect the light beam in at least one direction. At least a portion of each deformable micro-mirror comprises an Al—Cu alloy. A controller electrically connected to the spatial light modulator is operable to provide electrical signals to the spatial light modulator to cause the spatial light modulator to selectively deform the pixel elements, thereby selectively reflecting incident light beams along a projection light path.

Abstract: Additional control flexibilities to generate more gray scales for an image display system is achieved by controlling the intensity distribution of the light projection from a light source to a deflecting mirror to further coordinate with the control of the intermediate states of the deflecting mirror. The control light source intensity distribution can provide incident light with wide varieties of intensity distributions including non-uniform, symmetrical and non-symmetrical, different distributions of polarizations, various cross sectional shapes of the incident lights and other combinations of all of the above variations. More stable and better control of gray scale control is also achieved by optimizing the intensity distributions of the incident light to produce the best visual effects of the image display.

Abstract: The present invention relates to a method for manufacturing a MEMS device, including the actions of: providing a substrate having a back and front surface essentially in parallel with each other, defining in said substrate at least one hidden support by removing material from said substrate, connecting said at least one hidden support onto a wafer with at least one actuation electrode capable to actuate at least a part of said substrate, wherein a rotational axis of said reflective surface is essentially perpendicular to said hidden support. The invention also relates to the MEMS as such.

Abstract: An interferometric modulator is formed by a stationary layer and a mirror facing the stationary layer. The mirror is movable between the undriven and driven positions. Landing pads, bumps or spring clips are formed on at least one of the stationary layer and the mirror. The landing pads, bumps or spring clips can prevent the stationary layer and the mirror from contacting each other when the mirror is in the driven position. The spring clips exert force on the mirror toward the undriven position when the mirror is in the driven position and in contact with the spring clips.

Abstract: A projection apparatus comprising a light source for emitting incident light and a mirror device that includes a plurality of mirror elements each guiding the incident light to the ON position towards a projection light path under pulse width modulation (PWM) control corresponding to one frame or sub-frame or to the OFF state so as not to guide the incident light to a projection path. The light source is turned off outside the period in which the mirror element with the maximum brightness is in the ON state.

Abstract: A lithographic scanning apparatus includes a light projection device for seamlessly and uniformly projecting a scanning light onto a light exposing area. The light projecting device further includes an array of micromirrors having a predefined distribution pattern of reflectance variations for reflecting an incident light onto the light exposing area to seamlessly and uniformly scanning a reflecting light over the light exposing area. In one of a lithographic scanning apparatus, the micromirrors of the micromirror array are coated with a reflective coating of different reflectance to provide the predefined distribution pattern of reflectance variations. In another lithographic scanning apparatus, the micromirrors of the micromirror array are coated with stripes of reduced reflectance whereby each micromirror may have predefined total reflectance to provide the predefined distribution pattern of reflectance variations.

Abstract: An optical device includes a non-transparent substrate. The optical device further includes a first optical layer which is at least partially transmissive and at least partially reflective to incident light. The optical device further includes a second optical layer which is at least partially reflective to incident light. The second optical layer is spaced from the first optical layer. At least one of the first optical layer and the second optical layer is movable between a first position with a first distance between the first and second optical layers and a second position with a second distance between the first and second optical layers. Movement of the at least one of the first optical layer and the second optical layer between the first and second positions modulates the reflectivity of the device.

Abstract: Methods and apparatus for reducing back-glass deflection in an interferometric modulator display device are provided. In one embodiment, an interferometric modulator display is provided that includes a including a substrate, an optical stack formed on the substrate, a moveable reflective layer formed over the optical stack, and a backplate attached to the substrate. The moveable reflective layer includes one or more first posts extending therefrom, in which one or more of the first posts are operable to protect the moveable reflective layer by contacting at least a portion of the backplate if the backplate is deflected.

Abstract: In various embodiments of the invention, an interferometric display device is provided having an external film with a plurality of structures that redirect light from an inactive area of the display to an active area of the display. Light incident on the external film that would normally continue towards an inactive area of the display is either reflected, refracted, or scattered towards an active area of the display comprising moveable and static reflective surfaces that form an optical cavity.

Abstract: Provided are a system and method for reducing failures due to hinge memory. The method, in one embodiment, includes providing a torsional element having an amount of hinge memory, wherein the hinge memory is at least partially created using an average operational temperature. The method, in this embodiment, further includes subjecting the torsional element having the hinge memory to a temperature equal to or greater than the average operational temperature while the torsional element is in a parked state for an amount of time to reduce the amount of the hinge memory.

Abstract: An electro-optical display device comprises: an active matrix unit including a substrate having one surface and the other surface and a plurality of switching elements provided on the one surface of the substrate; a shutter unit provided on the active matrix unit, and a first microlens array provided on the other surface of the substrate of the active matrix unit, the first microlens array having a plurality of microlenses formed on the other surface of the substrate in a corresponding relationship with the plurality of window portions.

Abstract: An image forming device for use in an optical projection device includes an optical interface and an array of movable elements selectively movable toward or away from the optical interface to selectively locally frustrate total internal reflection at the optical interface such that light totally internally reflected at the optical interface defines an image. A projection display device includes an optical projector system including the image forming device.

Abstract: A system and method for patterning a beam of radiation based on a pupil field distribution. In an embodiment, the distribution of the field in an area of the pupil plane affecting an image and an illumination mode are selected so as to render an image with desired characteristics. Additionally and/or alternatively, an illumination mode is selected so as to render an image with desired characteristics. The distribution of the field in an area of the pupil plane affecting an image is then realized using the spatial light modulator The system and method include using an illumination system, a pattern generator, and a projector. The illumination system supplies a beam of radiation. The pattern generator patterns the beam of radiation based on a data set corresponding to a field distribution in a pupil plane. The projector projects the patterned beam onto a target portion of an object.

Abstract: A light modulator is arranged as an array of rows and columns of interferometric display elements. Each element is divided into sub-rows of sub-elements. Array connection lines transmit operating signals to the display elements, with one connection line corresponding to one row of display elements in the array. Sub-array connection lines electrically connect to each array connection line. Switches transmit the operating signals from each array connection line to the sub-rows to effect gray scale modulation.

Abstract: Improvements in an interferometric modulator that has a cavity defined by two walls.

Abstract: Various embodiments of the invention relate to methods and systems for generating the color white in displays created from interferometric modulators and more specifically, to the generation of the color white through the use of reflected light at two wavelengths. In one embodiment, a display device displays the color white. The color white is generated by reflecting light from two pluralities of interferometric modulator types. The first modulator type reflects colored light at a specific wavelength. The second modulator type reflects colored light selected to be at a wavelength complementary to the first. The combined light reflected from the two types appears white in the display.

Abstract: A spatial optic modulating system with speckle reduction and a method thereof are disclosed. According to an embodiment of the present invention, a spatial optic modulating system includes a spatial optic modulator, which modulates and reflects an image transferred in accordance with an upward or downward movement of a ribbon that is operated according to a contraction or expansion of a piezoelectric element, an image lens unit, which transfers an image modulated from the spatial optic modulator as a diffraction image to a scanner, and a phase modulator, which modulates a phase of the diffraction image transferred from the image lens unit. With the present invention, an image, from which a speckle is removed, can be displayed by modulating a phase of an image projected by using a spatial optic modulator.

Abstract: An optical deflection device for a display application. The optical deflection device includes a semiconductor substrate including an upper surface region and one or more electrode devices provided overlying the upper surface region. The optical deflection device also includes a hinge device including a silicon material and coupled to the upper surface region. The optical deflection device further includes a spacing defined between the upper surface region and the hinge device and a mirror structure including a post portion coupled to the hinge device and a mirror plate portion coupled to the post portion and overlying the hinge device.

Abstract: Micromirror devices, especially for use in digital projection are disclosed. Other applications are contemplated as well. The devices employ a superstructure that includes a mirror supported over a hinge set above a substructure. Various improvements to the superstructure over known micromirror devices are provided. The features described are applicable to improve manufacturability, enable further miniaturization of the elements and/or to increase relative light return. Devices can be produced utilizing the various optional features described herein, possibly offering cost savings, lower power consumption, and higher resolution.

Abstract: A micro-mirror light modulator and associated projection display system. The projection display system includes a light source, a linear light source illumination system that transforms a light emitted from the light source into a thin linear light, a micro-mirror light modulator that selectively diverts the direction of the incident thin linear light to create reflected light, a light transmitting layer that selectively transmits or filters out the reflected light, a condenser lens that focuses the light transmitted by the light transmitting layer, and a scanner that scans the focused light such that the light forms a projected image. The micro-mirror light modulator includes a reflection electrode that deflects toward an electrode when a voltage is applied. The reflection electrode reflects light depending on its deflection state. The micro-mirror light modulator is driven by low voltage, is easily fabricated such that the cost is reduced, and exhibits enhanced image contrast.

Abstract: The present invention relates generally to an apparatus for resetting the location of the reflective part of a diffractive optical modulator. More particularly, the present invention relates to an apparatus for resetting the location of the reflective part of a diffractive optical modulator, which resets the location of the reflective part of the diffractive optical modulator to an initial location thereof at a specific time point, thus increasing the ability to control the location of the reflective part.

Abstract: A MEMS oscillator, such as a MEMS scanner, has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms. For multi-axis oscillators drive signals for two or more axes may be superimposed by a driver circuit and transmitted to the MEMS oscillator. The oscillator responds in each axis according to its resonance frequency in that axis. The oscillator may be driven resonantly in some or all axes. Improved load distribution results in reduced deformation. A simplified structure offers multi-axis oscillation using a single moving body. Another structure directly drives a plurality of moving bodies. Another structure eliminates actuators from one or more moving bodies, those bodies being driven by their support arms.

Abstract: The present invention discloses a method for processing a deformable element of a microstructure for reducing the plastic deformation by oxidizing the deformable element. The method of the present invention can be performed at a variety of stages of the fabrication and packaging processes.

Abstract: An optical lithography system comprises a light source, a spatial light modulator, imaging optics and means for continuously moving a photosensitive substrate relative to the spatial light modulator. The spatial light modulator comprises at least one array of individually switchable elements. The spatial light modulator is continuously illuminated and an image of the spatial light modulator is continuously projected on the substrate; consequently, the image is constantly moving across the surface of the substrate. While the image is moving across the surface, elements of the spatial light modulator are switched such that a pixel on the surface of the substrate receives, in serial, doses of energy from multiple elements of the spatial light modulator, thus forming a latent image on the substrate surface. The imaging optics is configured to project a blurred image of the spatial light modulator on the substrate, enabling sub-pixel resolution feature edge placement.