Abstract: Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are provided. The method of forming a MEMS structure includes forming a wiring layer on a substrate comprising actuator electrodes and a contact electrode. The method further includes forming a MEMS beam above the wiring layer. The method further includes forming at least one spring attached to at least one end of the MEMS beam. The method further includes forming an array of mini-bumps between the wiring layer and the MEMS beam.

Abstract: A variable capacitance semiconductor structure is disclosed. Embodiments include a capacitor having three plates, a top plate, a middle plate, and a bottom plate. The top plate serves as a positive plate. The middle and bottom plates serve as ground plates for the capacitor. A switching circuit selects between the middle plate and the bottom plate for use as the ground plate of the capacitor. The middle plate is slotted, allowing electric fields to penetrate through the middle plate to the bottom plate. The slots prevent the electric fields from terminating at the middle plate. A different capacitance value can be selected, depending on whether the middle plate or bottom plate is selected as the ground plate. Logic circuitry is configured to control the selection of plates to achieve a variety of capacitance values.

Abstract: A semiconductor device includes a first static actuator having a first drive electrode and a second drive electrode, the first drive electrode and the second drive electrode being capable of coming close to each other upon shifting from an open state to a close state due to an electrostatic attractive force against an elastic force thereof; a detection circuit configured to detect a temperature of the first static actuator; and a drive circuit configured to apply a first voltage between the first drive electrode and the second drive electrode to maintain the first static actuator in the closed state between the first drive electrode and the second drive electrode, and to switch a polarity of the first voltage every first time period. The drive circuit varies a length of the first time period based on a detection result of the detection circuit.

Abstract: The present invention relates to a variable-area capacitor for a micromechanical sensor, a micromechanical comb grid capacitor accelerometer and a micromechanical comb grid capacitor gyroscope. Among them, the variable-area capacitor structure comprises of a movable and a fixed electrodes in each capacitor unit; a front surface of aforesaid movable electrode is parallel to that of aforesaid fixed electrode; the front surface of aforesaid movable electrode is in a rectangular shape, and the front surface of the fixed electrode is in a triangular or sawteeth shape or the front surface of the movable electrode is in a triangular or sawteeth shape, and the front surface of the fixed electrode is in a rectangular form; the triangular front surface is only overlapped with one long side of aforesaid rectangular front surface. Micromechanical sensors with variable-area capacitor structures of the invention can adjust elasticity coefficient as compared with present technology.

Abstract: A novel semiconductor variable capacitor is presented. The semiconductor structure is simple and is based on a semiconductor variable capacitor with MOS compatible structure suitable for integrated circuits, which has at least three terminals, one of which is used to modulate the capacitance value between the other two terminals of the device, by increasing or decreasing its DC voltage with respect to one of the main terminals of the device. Furthermore, the present invention decouples the AC signal and the DC control voltage preventing distortion of the RF signal. The present invention describes a controllable capacitor whose capacitance value is not necessarily linear with its control voltage, but although possibly abrupt in its characteristic, is utilized to manufacture a semiconductor variable capacitor with digital control to improve its noise and linearity performance while maintaining high quality factor.

Abstract: An embodiment of a tunable capacitor can include a plurality of capacitors connected in series where at least two capacitors of the plurality of capacitors share a common electrode where the at least two capacitors are in lateral proximity and a bias that is capable of being applied to the at least two capacitors whereby the at least two capacitors vibrate in opposite phase to each other when the bias and an RF signal is applied to the at least two capacitors.

Abstract: An apparatus including a die; a carrier coupled to the die; and at least one capacitor positioned in or on the carrier, the at least one capacitor including a first electrode, a second electrode and a dielectric material; and a magnet positioned such that a magnetic field at least partially actuates the second electrode toward the first electrode. A method including disposing a die, a first electrode of a capacitor and a magnet on a sacrificial substrate; forming a dielectric layer on the first electrode; patterning a conductive material coupled to the first electrode; patterning a second electrode on the dielectric layer; and removing the sacrificial substrate. A method including exposing a suspended first electrode of a capacitor in a package to a magnetic field; driving a current in a first direction through the first electrode; and establishing a voltage difference between the first electrode and a second electrode.

Abstract: Micro-electro-mechanical system (MEMS) variable capacitors and actuation components and related methods are provided. A MEMS variable capacitor can include first and second feed lines extending substantially parallel to one another. Further, MEMS variable capacitors can include first and second capacitive plates being spaced apart from the first and second feed lines. The first and second capacitive plates can be separately movable with respect to at least one of the first and second feed lines for varying the capacitance between the first and second feed lines over a predetermined capacitance range.

Abstract: A capacitive transducer (1) comprises a polymer film (2) having a first surface and a second surface, a first electrically conductive layer (3) arranged on the first surface of the polymer film (2), and a second electrically conductive layer (3) arranged on the second surface of the polymer film (2). The polymer film (2) is at least partly made from a material having a molecular weight which is at least 21,000 g/mol. The inventors have surprisingly found that silicone polymer materials with high molecular weights, such as liquid silicone rubbers (LSR) or high temperature vulcanizing (HTV) elastomers, have high electrical breakdown strengths, even though technical data sheets from manufacturers state almost identical electrical breakdown strengths similar to that of RTV-2 elastomers. Using such materials in capacitive transducers allows high electrical fields to be applied to transducers without risking electrical breakdown, thereby increasing performance of transducers.

Abstract: The invention provides a stable oxide material system for a capacitor, electronic device or a memory device having an effective high-k value with an effective zero alpha while exhibiting low leakage current density. The stable oxide material comprises Mx-Si1-xO2, wherein the elements M & Si are mixed such that the insulator layer comprises staggered edge-linked SiO2-MO2 bonding chains to provide a stable 3-dimensional single crystal system.

Abstract: According to one embodiment, an actuator includes a substrate, a lower electrode disposed on the substrate, an upper electrode, a support and a driving unit. The upper electrode is opposed to the lower electrode. The support supports the upper electrode. The driving unit is connected between the lower electrode and the upper electrode and feeds a driving voltage. The driving voltage at which the lower and upper electrodes start to come into contact with each other is defined as a pull-in voltage. A capacitance between the lower and upper electrodes is defined as a pull-in capacitance. There exist a first region and a second region. In the second region, a change rate of a capacitance ratio changes more slowly than in the first region, when the absolute value of the potential difference is further increased. The driving unit feeds the driving voltage in the second region.

Abstract: There is provided a voltage variable capacitor that can be formed on a semiconductor circuit, has a large variable ratio of capacitances and a high Q value, and achieves a highly linear relation of a control voltage and an oscillation frequency when the capacitor forms a VCO. The voltage variable capacitor is formed of a plurality of MOS capacitance elements (CM1 to CMn) having lower electrodes connected in common, the same number of non-variable capacitors (C1 to Cn) having one ends connected to upper electrodes of the plurality of MOS capacitance elements and the other ends connected in common, and a unit (VB1 to VBn and resistors) applying different fixed bias voltages to connection points of these MOS capacitance elements and non-variable capacitors, in which a control voltage is applied to the lower electrodes connected in common of the plurality of MOS capacitance elements.

Abstract: An electrical contactor for use in a high voltage bus utilizes two capacitor plates and a dielectric element movable in a gap between the plates under a charging voltage applied to the plates. The dielectric element is biased to a contactor off, or open, position by a biasing element, such as a spring. Once activated, the contactor remains closed under the influence of the charging voltage across the capacitor plates, yet does not draw a current during this state. The contactor may be released by a controllable discharge circuit placed across the capacitor plates.

Abstract: A capacitance element body 2 is configured by two or more capacitors, the capacitors being formed of a dielectric layer 3 and at least three internal electrodes, the internal electrodes each being laminated via the dielectric layer 3 and arranged to allow a center of gravity of an electrode body forming electrostatic capacitance to be arranged on a straight line in a lamination direction. In the capacitance element body 2, said two or more capacitors are serially connected in a lamination direction of the internal electrodes. Furthermore, external terminals 20 to 23, each being electrically connected to an electrode body forming electrostatic capacitance, are formed in side surfaces of the capacitance element body 2.

Abstract: A complex oxide includes a chemical compound represented by ABO3 (Chemical Formula 1). In the Chemical Formula 1, A is one or more elements selected from Ba, Ca, and Sr; and B is one or more elements selected from Ti, Zr, Hf, and Sn. When a field having a size of 1 ?m×1 ?m on a surface of the complex oxide is observed with an atomic force microscope (AFM), a typical particle size is greater than or equal to 300 nm and less than 660 nm. Here, the typical particle size is a maximum length of a maximum particle observed in the field.

Abstract: Systems, devices, and methods for micro-electro-mechanical system (MEMS) tunable capacitors can include a fixed actuation electrode attached to a substrate, a fixed capacitive electrode attached to the substrate, and a movable component positioned above the substrate and movable with respect to the fixed actuation electrode and the fixed capacitive electrode. The movable component can include a movable actuation electrode positioned above the fixed actuation electrode and a movable capacitive electrode positioned above the fixed capacitive electrode. At least a portion of the movable capacitive electrode can be spaced apart from the fixed capacitive electrode by a first gap, and the movable actuation electrode can be spaced apart from the fixed actuation electrode by a second gap that is larger than the first gap.

Abstract: An electronic device includes an inductive element, and variable capacitors. Each variable capacitor includes: first and third capacitors, both having a first terminal electrically connected to a first terminal of the inductive element; and second and fourth capacitors, both having a first terminal electrically connected to a second terminal of the inductive element. A first switch circuit electrically connects or isolates a second terminal of the first capacitor to/from a second terminal of the second capacitor. A second switch circuit electrically connects or isolates a second terminal of the third capacitor to/from a second terminal of the fourth capacitor. A third switch circuit electrically connects or isolates the second terminal of the first capacitor to/from the second terminal of the fourth capacitor. A fourth switch circuit electrically connects or isolates the second terminal of the third capacitor to/from the second terminal of the second capacitor.

Abstract: The invention relates to electronic device having an operation temperature range, wherein the electronic device comprises a tunable capacitor (CST) comprising a first electrode (BE), a second electrode (TE), and a dielectric (FEL) arranged between the first electrode (BE) and the second electrode (TE). The dielectric (FEL) comprises dielectric material (FEL) having a value of a relative dielectric constant (?r) varying at least within the operation temperature range. The electronic device further comprises a temperature varying means (RES) being thermally coupled to the tunable capacitor for providing a temperature of the dielectric (FEL) causing a predetermined capacitance of the tunable capacitor (CST). The invention, which relies on the idea of varying temperature to vary a capacitance of a capacitor stack, provides an alternative tunable capacitor type for the known types.

Abstract: A circuit is proposed by means of which a ceramic component having two electrodes can be provided with a uniform, but periodically alternating BIAS voltage. The component has properties dependent on the level of the BIAS voltage and, for the purpose of an increased service life, is connected to a generator for generating a BIAS voltage and to means for periodically reversing the polarity of the BIAS voltage present at the electrodes. In a method for operating the component having variable properties, a uniform BIAS voltage, the polarity of which is periodically reversed, however, is applied to the electrodes, and the service life of the component is thus increased.

Abstract: An energy recovery device including: at least one capacitor with variable capacitance, the capacitor including a fixed electrode, a dielectric layer, and a liquid electrode; and a mechanism to inject an electric charge into the capacitor and to remove the electric charge therefrom, including a charge injection electrode forming a portion of the second face positioned upstream from the fixed electrode in the direction of displacement of the liquid electrode, and a charge removal electrode forming a portion of the second face positioned downstream from the fixed electrode in the direction of displacement of the liquid electrode.

Abstract: A variable leaf capacitor is disclosed. In accordance with some embodiments of the present disclosure, a variable leaf capacitor may comprise a first alternating current coupling capacitor having a first terminal coupled to a first differential node and a second terminal coupled to a first common-mode node, a second alternating current coupling capacitor having a first terminal coupled to a second differential node and a second terminal coupled to a second common-mode node, and a varactor having a bias terminal, a first common-mode terminal coupled to the first common-mode node, and a second common-mode terminal coupled to the second common-mode node, wherein the capacitance of the varactor is based on the voltage from the first common-mode terminal of the varactor to the bias terminal of the varactor and on the voltage from the second common-mode terminal of the varactor to the bias terminal of the varactor.

Abstract: A vacuum capacitor includes a fixed electrode, a movable electrode, a movable electrode shaft, a magnetic flux receiving unit, a magnetic flux generating unit and a capacitance control unit. The fixed electrode is formed from a plurality of electrode members in a vacuum casing. The movable electrode is formed from a plurality of electrode members arranged in gaps formed between the electrode members of the fixed electrode in the vacuum casing. The movable electrode shaft supports the movable electrode. Capacitance appearing between the movable electrode and the fixed electrode is varied by rotation of the movable electrode shaft. The magnetic flux receiving unit rotates the movable electrode shaft in the vacuum casing. The magnetic flux generating unit is located outside the vacuum casing and rotates the magnetic flux receiving unit by magnetic attraction. The capacitance control unit rotates the magnetic flux generating unit.

Abstract: The present invention can easily adjust capacitance of a vacuum capacitor while maintaining a vacuum state in a vacuum chamber of the vacuum capacitor. A fixed electrode 4 is formed by arranging a plurality of flat electrode members 5 in layers at a certain distance in an axial direction of a vacuum chamber 1b. A movable electrode 7 is formed by arranging a plurality of flat electrode members 8 in layers at a certain distance in the axial direction of the vacuum chamber 1b and fixing the electrode members 8 to a movable electrode shaft 9. By rotation of the movable electrode shaft 9, each electrode member 8 is inserted into and extracted from a gap between the electrode members 5 of the fixed electrode 4 in noncontact with the electrode members 5 of the fixed electrode 4. A magnetic flux receiving portion 106b is fixed to a seal member 102 side of a disk member 106a that is provided at the movable electrode shaft 9.

Abstract: A variable capacitance device includes a fixing member, a fixed electrode having a first end side fixed by the fixing member, an actuator element having a first end side fixed by the fixing member directly or indirectly, a movable electrode provided to connect to the actuator element directly or indirectly and disposed to approximately face the fixed electrode, and a driving section deforming a second end side of the actuator element, to change a distance between the fixed electrode and the movable electrode.

Abstract: A multi-layered capacitor includes three or more capacitor layers. A first layer includes a first DC-biased, tunable capacitor. A second layer, acoustically coupled to the first layer, includes a second DC-biased, tunable capacitor. A third layer, acoustically coupled to the second layer, includes a third DC-biased, tunable capacitor. Each dielectric of the first, second, and third capacitors has a resonance of about the same frequency, within 5%, and inner electrodes of the first, second, and third capacitors have a resonance of about the same frequency, within 5%. The resonance of each layer is a function of at least thickness, density, and material. The first, second, and third layers are biased to generate destructive acoustic interference, and the multi-layer capacitor is operable at frequencies greater than 0.1 GHz.

Abstract: A variable capacitor includes a metal oxide film having a perovskite structure, first and second electrode films having the metal oxide film placed therebetween and to be coupled to an external voltage source, and a bias voltage source configured to provide a bias voltage that is applied in series or parallel to a capacitance of a capacitor including the metal oxide film and the first and second electrode films, wherein the bias voltage applied by the bias voltage source to the capacitance is adapted to maximize a voltage dependency of a relative permittivity of the metal oxide film.

Abstract: A wide range tunable capacitor bank is provided. The capacitor bank comprises a variable capacitor, the capacitance value of which is adjustable within a predetermined capacitance range defined by a minimum capacitance value and a maximum capacitance value. The capacitor bank further comprises one or more switched capacitors each electrically connected in circuit to the variable capacitor. The variable capacitor is configured to allow the capacitance value thereof to be adjusted within the predetermined capacitance range and the one or more switched capacitors are configured to be selectively actuated to permit continuous tuning of the capacitor bank over a second capacitance range that is greater than the predetermined capacitance range. Applications in which the capacitor bank may be implemented, and a method of fabricating an integrated system comprising a plurality of passive components, such as, for example, those of the capacitor bank and high quality factor inductors, are also provided.

Abstract: There is proved a variable capacitor that includes a substrate, a signal line disposed on a surface of the substrate for feeding a signal, a ground electrode disposed on the surface, and a movable electrode opposed the signal line and the ground electrode, the movable electrode operable to move toward and away from the signal line and the ground electrode. The movable electrode can be displaced by an electrostatic attraction between the movable electrode and the signal line and between the movable electrode and the signal line. An amount of displacement of the movable electrode varies according to an amount of the voltage which generates the electrostatic attraction.

Abstract: Disclosed herein is a variable capacitor and its driving method, the variable capacitor including, a movable first electrode; and a second electrode formed with an insulating film, fixed in place, and its insulating film contacting the first electrode that is moved.

Abstract: A ceramic header configured to form a portion of an electronic device package includes a mounting portion configured to provide a mounting surface for an electronic device. In addition, the ceramic header includes one or more conductive input-output connectors operable to provide electrical connections from a first surface of the ceramic header to a second surface of the ceramic header. The ceramic header also includes one or more thermally polished surfaces.

Abstract: A high voltage varactor that provides a large tuning ratio and a high DC biasing capability includes a non-coplanar interdigitated structure having a stacked structure with a plurality of substantially parallel coplanar first electrode fingers and a plurality of substantially parallel coplanar second electrode fingers. The plurality of substantially parallel coplanar second electrode fingers are interdigitated with the plurality of substantially parallel coplanar first electrode fingers and are not coplanar with the plurality of substantially parallel coplanar first electrode fingers. A voltage tunable dielectric layer may be interposed between the plurality of substantially parallel coplanar first electrode fingers and the plurality of substantially parallel coplanar second electrode fingers. The voltage tunable dielectric layer may be a BST layer, or any other voltage tunable dielectric layer.

Abstract: The present subject matter relates to MEMS tunable capacitors and methods for operating such capacitors. The tunable capacitor can feature a primary stationary actuator electrode on a substrate, a secondary stationary actuator electrode on the substrate, a stationary RF signal capacitor plate electrode on the substrate, a sprung cantilever disposed over the substrate, a beam anchor connecting a first end of the sprung cantilever to the substrate, and one or more elastic springs or other biasing members connecting a second end of the sprung cantilever to the substrate, the second end being located distally from the first end. The spring cantilever can be movable between an OFF state defined by the potential difference between the stationary and moveable actuator electrodes being zero, and an ON state defined by a non-zero potential difference between the stationary and moveable actuator electrodes.

Abstract: An embodiment of the present invention provides a method, comprising reducing the losses due to electro-mechanical coupling and improving Q in a multilayered capacitor by placing a first capacitor layer adjacent at least one additional capacitor layer and sharing a common electrode in between the two such that the acoustic vibration of the first layer is coupled to an anti-phase acoustic vibration of the at least one additional layer.

Abstract: According to one embodiment, a MEMS device includes an electrode on a substrate, a movable structure which is supported in midair above the electrode by first and second anchor portions on the substrate, and moves toward the electrode, a first spring structure which connects the first anchor portion to the movable structure and uses a ductile material, and a second spring structure which connects the second anchor portion to the movable structure and uses a brittle material.

Abstract: The present disclosure describes tuning capacitors with tapered and reconfigurable quality factors. Digitally tuned capacitors (DTCs) that provide a variable quality factor (Q) while maintaining a constant or near constant capacitance as well as DTCs that provide one or more Q values in a tapered distribution while maintaining a constant or near constant capacitance are described. The present disclosure also describes DTCs that provide one or more capacitances in a tapered distribution and one or more Q values in a tapered distribution.

Abstract: A MEMS device includes a substrate, a fixed electrode that is provided on the substrate and allows a signal to pass therethrough, a movable electrode that is provided above the substrate in a manner to face the fixed electrode and allows a signal to pass therethrough, a driving line that is provided inside the substrate and used to apply a driving voltage to displace the movable electrode, and a resistance that is provided in a first via hole formed inside the substrate and used to cutoff a signal. The fixed electrode or the movable electrode is connected to the driving line through the first resistance.

Abstract: Provided is a MEMS device that includes first and second lower electrodes on a substrate. The MEMS device also includes a first driving electrode forming a capacitance element having a first capacitance between the first lower electrode and the first driving electrode, a second driving electrode forming a capacitance element having a second capacitance between the second lower electrode and the second driving electrode, and an upper electrode supported in midair above the driving electrodes. The upper electrode moves toward the driving electrodes and has a variable third capacitance between the first driving electrode and the upper electrode and a variable fourth capacitance between the second driving electrode and the upper electrode.

Abstract: A novel semiconductor variable capacitor is presented. The semiconductor structure is simple and is based on a semiconductor variable MOS capacitor structure suitable for integrated circuits, which has at least three terminals, one of which is used to modulate the equivalent capacitor area of the MOS structure by increasing or decreasing its DC voltage with respect to another terminal of the device, in order to change the capacitance over a wide ranges of values. Furthermore, the present invention decouples the AC signal and the DC control voltage avoiding distortion and increasing the performance of the device, such as its control characteristic. The present invention is simple and only slightly dependent on the variations due to the fabrication process. It exhibits a high value of capacitance density and, if opportunely implemented, shows a linear dependence of the capacitance value with respect to the voltage of its control terminal.

Abstract: According to one embodiment, a MEMS element comprises a first electrode fixed on a substrate, a second electrode formed above the first electrode to face it, and vertically movable, a first anchor portion formed on the substrate and configured to support the second electrode, and a first spring portion configured to connect the second electrode and the first anchor portion. The first spring portion includes a liner layer includes a brittle material in contact with the second electrode and the first anchor portion, and a base layer formed on the liner layer, includes a brittle material having a composition different from that of the liner layer, and having a film thickness larger than that of the liner layer.

Abstract: A capacitor is provided with a first electrode to which a direct current voltage is applied; a dielectric layer, which is arranged on the first electrode and is composed of an oxide dielectric material; and a second electrode, which is arranged on the dielectric layer, has a first portion where at least a part in contact with the dielectric layer is composed of a conductive oxide material having oxidizing property, and has a direct current voltage lower than that applied to the first electrode applied.

Abstract: This disclosure provides systems, methods and apparatus for a variable capacitance apparatus. In one aspect, an apparatus includes a plurality of electromechanical systems varactors connected in parallel. Each of the plurality of electromechanical systems varactors includes a first, a second, and a third metal layer. The first metal layer includes a first bias electrode. The second metal layer is spaced apart from the first metal layer to define a first air gap, and includes a first radio frequency electrode. A third metal layer is spaced apart from the second metal layer to define a second air gap, and includes a second radio frequency electrode and a second bias electrode. The second bias electrode of each of the plurality of electromechanical systems varactors has a different projected area perpendicular to a surface of the second metal layer and onto the surface of the second metal layer.

Abstract: An embodiment of the present disclosure provides a method to reduce acoustic vibration in a multilayered capacitor stimulated by a radio frequency signal by placing a first capacitor layer adjacent to second capacitor layer sharing a common electrode such that the acoustic vibration is reduced by applying one or more anti-acoustic vibration bias voltages to the multilayered capacitor. Other embodiments are disclosed.

Abstract: Driving is made possible in a moving range equivalent to or wider than the conventional range, with a driving voltage having a range smaller than a pull-in voltage. An electronic element includes a fixed portion provided with a first driving electrode and a first signal electrode, and a movable portion provided with a second driving electrode and a second signal electrode, movable with respect to the fixed portion and provided to generate a spring force to make restoration to a predetermined position. An electrostatic force is generated between the first and second driving electrodes by a voltage applied therebetween so that the electrostatic force resists against the spring force; and the first and second driving electrodes and the first and second signal electrodes are arranged so that the electrostatic force is generated in a direction in which a spacing distance between the first and second signal electrodes is widened.

Abstract: A method for manufacturing a mirror device is presented. The method includes forming a mirror from a first substrate and forming a hinge/support structure from a second substrate. The hinge/support structure is formed with a recessed region and a torsional hinge region. The mirror is attached to the hinge/support structure at the recessed region. Further, a driver system is employed to cause the mirror to pivot about the torsional hinge region.

Abstract: A microstructural body includes a substrate such as an electrode substrate, a support portion, one post that fixes the support portion to the substrate, a frame-shaped movable portion provided around outer periphery of the support portion, and an elastic support portion that elastically connects the movable portion and the support portion. The elastic support portion supports the frame-shaped movable portion such that the movable portion is movable relative to the support portion. The elastic support portion includes torsion springs and an elastically deformable connecting portion.

Abstract: An energy recovery device including: at least one capacitor with variable capacitance, the capacitor including a fixed electrode, a dielectric layer, and a liquid electrode; and a mechanism to inject an electric charge into the capacitor and to remove the electric charge therefrom, including a charge injection electrode forming a portion of the second face positioned upstream from the fixed electrode in the direction of displacement of the liquid electrode, and a charge removal electrode forming a portion of the second face positioned downstream from the fixed electrode in the direction of displacement of the liquid electrode.

Abstract: This disclosure provides systems, methods and apparatus for electromechanical systems variable capacitance devices. In one aspect, an electromechanical systems variable capacitance device includes a substrate with a bottom bias electrode on the substrate. A first radio frequency electrode above the bottom bias electrode defines a first air gap. A non-planarized first dielectric layer is between the bottom bias electrode and the first radio frequency electrode. A metal layer above the first radio frequency electrode defines a second air gap. The metal layer includes a top bias electrode and a second radio frequency electrode.

Abstract: A variable capacity element has a substrate, a pair of capacitor electrodes, a pair of driver electrodes, and a pair of capacitor wirings why one of the capacitor electrodes is movable by applying a voltage between the driver electrodes. A pair of driver electrodes are connected to the pair of capacitor electrodes, being insulated from the capacitor electrodes. A pair of capacitor wiring extend in parallel each other from connecting portions with the pairs of the capacitor electrodes, being electrically connected with the capacitor electrodes.

Abstract: An embodiment of a tunable capacitor can include a plurality of capacitors connected in series where at least two capacitors of the plurality of capacitors share a common electrode where the at least two capacitors are in lateral proximity and a bias that is capable of being applied to the at least two capacitors whereby the at least two capacitors vibrate in opposite phase to each other when the bias and an RF signal is applied to the at least two capacitors.

Abstract: A variable capacitor and a control method thereof capable of responding to applications of electronic apparatuses including various electronic devices and communication mobile devices. The variable capacitor includes a pair of electrodes formed so as to sandwich a ferroelectric material layer, in which polarization processing higher than a coercive field in hysteresis characteristics of polarization has been performed to the ferroelectric material layer, and the capacitance can be varied in accordance with a control voltage applied to the electrodes.