Abstract: A liquid metal jet X-ray source including an electromagnetic pump for pumping the liquid metal. The electromagnetic pump includes a core having a core diameter and an outer yoke with a thickness of at least 20% of the core diameter. Preferably, the thickness of the outer yoke is at least 20% of the core diameter plus 6% of a radial distance between an outside of the core and an inside of the yoke.

Abstract: A modular laser-produced plasma X-ray system includes a liquid metal flow system enclosed within a low-pressure chamber, the flow system including a liquid metal, wherein in at least one location on the liquid metal forms a metal target directly illuminated by laser pulses, a circulation pump within the liquid metal flow system for circulating the liquid metal, a laser pulse emitter configured to transmit laser pulses into the chamber via a laser window, focusing optics, located between the emitter and the metal target, the focusing optics directing the laser pulses to strike the metal target at a target location to form X-ray pulses, and an X-ray window positioned within the chamber to enable the X-ray pulses to exit the chamber.

Abstract: An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface. The X-ray detector has an energy resolution not less than 1 keV or the X-ray detector has no energy analysis function.

Abstract: Presented systems and methods facilitate efficient and effective generation and delivery of radiation. A radiation generation system can comprise: a particle beam gun, a high energy dissipation anode target (HEDAT); and a liquid anode control component. In some embodiments, the particle beam gun generates an electron beam. The HEDAT includes a solid anode portion (HEDAT-SAP) and a liquid anode portion (HEDAT-LAP) that are configured to receive the electron beam, absorb energy from the electron beam, generate a radiation beam, and dissipate heat. The radiation beam can include photons that can have radiation characteristics (e.g., X-ray wavelength, ionizing capability, etc.). The liquid anode control component can control a liquid anode flow to the HEDAT. The HEDAT-SAP and HEDAT-LAP can cooperatively operate in radiation generation and their configuration can be selected based upon contribution of respective HEDAT-SAP and the HEDAT-LAP characteristics to radiation generation.

Abstract: An image processing apparatus obtains at least three radiation images obtained based on radiation emitted onto an object, and corresponding to at least three types of energy, and separates a predetermined substance having a known attenuation coefficient in the object and a remaining substance other than the predetermined substance in the object, based on the at least three radiation images and calculating an effective atomic number of the remaining substance.

Abstract: Methods and means for reduced ng the overall diameter of an x-ray tube by recessing the vacuum pumping port stub within the ground plane of the x-ray tube without adversely affecting the electrostatic fields within the vacuum tube itself are provided. In one embodiment, x-ray tubes of smaller diameter, which can be used within the highly confined diameters typically found within the pressure housings of borehole tools are used.

Abstract: This invention provides a method to optimize an x-ray beam for more than one structure within the field of view. The preferred embodiment comprises a modular construction of a collimator comprising multiple materials of varying thickness. A first attenuation is performed by the first portion of the collimator to optimize a first anatomic feature and a second attenuation is performed by the second portion of the collimator to optimize a second anatomic feature.

Abstract: A system for generating X-ray beams from a liquid target includes a vacuum chamber, a diamond window assembly, an electron source, a target material flow system, and an X-ray detector/imager. An electron beam from the electron source travels through the diamond window assembly and into a dynamic target material of the flow system. Preferably, the dynamic target material is lead bismuth eutectic in a liquid state. Upon colliding with the dynamic target material, X-rays are generated. The generated X-rays exit through an X-ray exit window to be captured by the X-ray detector/imager. Since the dynamic target material is constantly in fluid motion within a pipeline of the flow system, the electron beam always has a new target area which is at a controlled operational temperature and thus, prevents overheating issues. By providing a small focus area for the electron beams, the overall imaging resolution of the X-rays is also improved.

Abstract: A system for generating X-ray beams from a liquid target includes a vacuum chamber, a diamond window assembly, an electron source, a target material flow system, and an X-ray detector/imager. An electron beam from the electron source travels through the diamond window assembly and into a dynamic target material of the flow system. Preferably, the dynamic target material is lead bismuth eutectic in a liquid state. Upon colliding with the dynamic target material, X-rays are generated. The generated X-rays exit through an X-ray exit window to be captured by the X-ray detector/imager. Since the dynamic target material is constantly in fluid motion within a pipeline of the flow system, the electron beam always has a new target area which is at a controlled operational temperature and thus, prevents overheating issues. By providing a small focus area for the electron beams, the overall imaging resolution of the X-rays is also improved.

Abstract: An x-ray emitter includes an x-ray tube and an x-ray emitter housing. In an embodiment, the x-ray tube includes an evacuated x-ray tube housing, a cathode for emitting electrons and an anode for generating x-rays as a function of the electrons. Further, in an embodiment, the x-ray emitter housing includes the x-ray tube and outside of the x-ray tube, a gaseous cooling medium. In an embodiment, the x-ray emitter further includes a compressor for a forced convection of the gaseous cooling medium for cooling the x-ray tube, a pressure ratio between the intake side and pressure side of the compressor being greater than 1.3.

Abstract: A method of inspecting a structure during additive manufacturing of the structure and additive manufacturing systems are presented. An additive manufacturing system comprises additive manufacturing equipment comprising a casing and an additive manufacturing head configured to form a plurality of layers of a structure within the casing; and an x-ray backscatter imaging system configured to send an x-ray beam into a structure formed within the additive manufacturing equipment and detect scattered x-rays for imaging and analysis of the structure during fabrication.

Abstract: A heat dissipation structure includes a housing. The housing has a bottom surface, a liquid inlet channel, a liquid outlet channel and a protruding portion. The liquid inlet channel and the liquid outlet channel are located at two opposite ends of the housing and above the bottom surface. The liquid inlet channel and the liquid outlet channel extend along a first direction. The protruding portion is located between the liquid inlet channel and the liquid outlet channel and above the bottom surface. The protruding portion protrudes towards a direction away from the bottom surface. The protruding portion has a protruding surface facing away from the bottom surface. A distance between the protruding surface and the bottom surface is increased first and then decreased along the first direction.

Abstract: An EUV collector mirror for an extreme ultra violet (EUV) radiation source apparatus includes an EUV collector mirror body on which a reflective layer as a reflective surface is disposed, a heater attached to or embedded in the EUV collector mirror body and a drain structure to drain melted metal from the reflective surface of the EUV collector mirror body to a back side of the EUV collector mirror body.

Abstract: An electrode assembly for use in an electrochemical cell for the production of ozone from water is provided, the electrode assembly comprising an electrode body formed from a polycrystalline diamond, the electrode body comprising first and second opposing contact surfaces, the first contact surface for contacting a semi-permeable membrane; wherein the electrode assembly further comprises a first layer comprising an electrically conductive material, the first layer extending across at least a portion of the second contact surface of the electrode body. An electrochemical cell comprising the electrode assembly and its use in the production of ozone by the electrolysis of water is also provided.

Abstract: An x-ray tube includes an electron emitter to emit an electron beam; and a multilayer anode including a first anode layer facing the electron beam and a second anode layer facing away from the electron beam. The first anode layer includes a first anode material to generate a braking radiation via the electron beam and the second anode layer includes a second anode material to generate a further x-ray radiation via the braking radiation. The further x-ray radiation is relatively more monochromatic than the braking radiation and wherein the first anode layer and the second anode layer adjoin in a planar manner.

Abstract: The present inventive concept relates to an X-ray source comprising: a liquid target source configured to provide a liquid target moving along a flow axis; an electron source configured to provide an electron beam; and a liquid target shaper configured to shape the liquid target to comprise a non-circular cross section with respect to the flow axis, wherein the non-circular cross section has a first width along a first axis and a second width along a second axis, wherein the first width is shorter than the second width, and wherein the liquid target comprises an impact portion being intersected by the first axis; wherein the x-ray source is configured to direct the electron beam towards the impact portion such that the electron beam interacts with the liquid target within the impact portion to generate X-ray radiation.

Abstract: Methods and systems for x-ray based semiconductor metrology utilizing a clean, hard X-ray illumination source are described herein. More specifically, a laser produced plasma light source generates high brightness, hard x-ray illumination having energy in a range of 25,000 to 30,000 electron volts. To achieve high brightness, a highly focused, very short duration laser beam is focused onto a dense Xenon target in a liquid or solid state. The interaction of the focused laser pulse with the high density Xenon target ignites a plasma. Radiation from the plasma is collected by collection optics and is directed to a specimen under measurement. The resulting plasma emission is relatively clean because of the use of a non-metallic target material. The plasma chamber is filled with Xenon gas to further protect optical elements from contamination. In some embodiments, evaporated Xenon from the plasma chamber is recycled back to the Xenon target generator.

Abstract: An inspection radiation source is provided. The inspection radiation source includes an electron accelerator for generating an electron current, and a target for the electron current including a first part and a second part. This first part is configured to be at least partly exposed to the electron current on an impact area having a first width in a direction substantially perpendicular to the electron current, and inhibit propagation of the electron current. The second part has a second width in the direction substantially perpendicular to the electron current, the second width of the second part being smaller than the first width of the impact area, the second part being configured to be at least partly exposed to the electron current, and generate inspection radiation by emitting X-rays in response to being exposed to the electron current.

Abstract: According to one embodiment, an X-ray tube assembly includes a cathode emitting electrons, an anode target generating X-rays when the electrodes emitted from the cathode collide with the anode target, an anode block, a coolant pipe, and a protective film. The anode block includes a tube portion, and a bottom portion closing one end side of the tube portion and joined to the anode target. The coolant pipe is located on an inner side of the tube portion, includes an outlet from which a coolant is discharged toward the bottom portion, and forms a flow passage of the coolant between the coolant pipe and the anode block. The protective film covers an inner surface of the bottom portion and is formed of hard gold containing nickel.

Abstract: A target for a radiation source of invasive electromagnetic radiation has at least one target element, which is configured to generate invasive electromagnetic radiation when irradiated with particles and is coupled to a substrate arrangement for dissipating heat out of the target element, wherein: the target element has a peripheral surface which forms a first part of the outer surface of the target element; the outer surface of the target element is also formed by a side surface of the target element; an extension of the side surface defines a thickness (D) of the target element; a peripheral line of the side surface forms a borderline of the peripheral surface; the target has an end face, as part whereof the side surface of the target element is exposed for irradiation with particles; and the substrate arrangement is in contact with the peripheral surface.

Abstract: In one embodiment, an X-ray source includes a source target configured to generate X-rays when impacted by an electron beam. The source target includes one or more thermally conductive layers; and one or more X-ray generating layers interleaved with the thermally conductive layers, wherein at least one X-ray generating layer comprises regions of X-ray generating material separated by thermally conductive material within the respective X-ray generating layer.

Abstract: A droplet discharge apparatus may include a droplet discharge unit configured to discharge droplets of a target substance stored in a tank at intervals through an opening of a nozzle connected to the tank, a speed sensor configured to measure the speed of a droplet discharged from the droplet discharge unit, and a calculation unit configured to calculate the volume of the target substance consumed per unit time, based on cross-sectional area of the opening of the nozzle and the speed of the droplet.

Abstract: A method of making microstructures having re-entrant or doubly re-entrant topology includes forming a mold defining the negative surface features of the re-entrant or doubly re-entrant topology that is to be formed. In one embodiment, a soft or flowable material is formed on a first substrate and the mold is contacted with the same to form a solid, now positive surface having the re-entrant or doubly re-entrant topology. The mold is then released from the first substrate. The microstructures are secured to a second, different substrate, and the first substrate is removed. Any residual microstructure material located between adjacent microstructures may be removed to form the separate microstructures on the second substrate. The second substrate may be thin and flexible any manipulated into useful or desired shapes having the microstructures on one side thereof.

Abstract: A target is for generating X-ray radiation by way of loading with a particle stream containing charged particles. In an embodiment, the target includes a layer structure including at least two metallic layers. A target surface, loadable by the particle stream, is formed by a first layer of the at least two metallic layers of the layer structure including a material including a first metallic element. A second layer of the at least two metallic layers of the layer structure includes a material including a second metallic element. Finally, an ordinal number of the first metallic element is less than an ordinal number of the second metallic element.

Abstract: Technology is described for steep angle of a focal track of an anode of an x-ray tube. In one example, an anode includes a disc-shaped anode and a focal track. The disc-shaped anode includes a bearing-facing surface, a window-facing surface positioned opposite the bearing-facing surface, and a focal track positioned between the window-facing surface and the bearing-facing surface, wherein the focal track is angled with respect to the window-facing surface, and the angle between the focal track and the window-facing surface is between 45° and 89°.

Abstract: An x-ray anode for generating x-radiation includes a carrier body and a first emission layer and at least one second emission layer, which generate x-radiation when they are impinged by electrons. The emission layers are separated by an intermediate layer on one side of the carrier body and are arranged a distance apart in a central direction of the x-ray anode.

Abstract: A compact source for high brightness x-ray generation is disclosed. The higher brightness is achieved through electron beam bombardment of multiple regions aligned with each other to achieve a linear accumulation of x-rays. This may be achieved through the use of x-ray targets that comprise microstructures of x-ray generating materials fabricated in close thermal contact with a substrate with high thermal conductivity. This allows heat to be more efficiently drawn out of the x-ray generating material, and allows bombardment of the x-ray generating material with higher electron density and/or higher energy electrons, leading to greater x-ray brightness. The orientation of the microstructures allows the use of a take-off angle at or near 0°, allowing the accumulation of x-rays from several microstructures to be aligned and be used to form a beam in the shape of an annular cone.

Abstract: A fluid injector for x-ray tubes and a method to provide a liquid anode by liquid metal injection, wherein the fluid injector includes a device to inject fluid from an opening in a chamber of the device as a fluid jet generated by an arrangement to change the volume within the chamber, and includes a reservoir to store the anode material, which is fluidically connected by a pipe with the chamber of the device, where the pipe has a part formed in the fluid flow direction that is shaped to block fluid flow from the chamber to the reservoir during injection, and where the includes injecting fluid in a direction towards an electron beam and refilling the chamber with liquid metal from the reservoir.

Abstract: An assembly of a gadolinium target and a titanium backing plate, wherein the gadolinium target-titanium backing plate assembly has a solid-phase diffusion-bonded interface at a bonding interface between the gadolinium target and the titanium backing plate. An object of the present invention is to discover a backing plate that is suitable for the gadolinium sputtering target, explore the optimal bonding conditions, improve the deposition rate, stabilize the sputtering process, and prevent the occurrence of warpage and separation of the target material and the backing plate by increasing the bonding strength between the target material and the backing plate, as well as inhibit the generation of particles during sputtering.

Abstract: A rotatable anode target for an X-ray tube (1) of the present invention includes a metallic disc (2) which includes a first crystal structure; a metallic cylinder (3) which is joined with the metallic disc and includes a second crystal structure, where a first average aspect ratio of first crystal grains positioning at a first region within 2 mm from an interface between the metallic disc and the metallic cylinder is less than 2, and a second average aspect ratio of second crystal grains positioning at a second region within 2 mm from the interface is 2 or more and 8 or less. It is thereby possible to provide an X-ray tube target which has high heat release performance and where thermal deformation is difficult to occur.

Abstract: The present invention provides a standing wave electron linear accelerator comprising a modulator and a magnetron for producing radio frequency microwaves; a plurality of accelerating tubes for accelerating electrons; a microwave transmission system for feeding the microwaves into the plurality of accelerating tubes; a plurality of electron guns for emitting electron beams into the plurality of accelerating tubes; a plurality of targets impinged by the electrons from a plurality of accelerating tubes to form continuous spectrums of X-rays; a plurality of shielding devices for shielding the continuous spectrums of X-rays generated by the targets; and a microwave distributor disposed adjacent to the end of the microwave transmission system, wherein the microwave distributor has a microwave inlet and a plurality of microwave outlets for distributing the microwaves in the microwave transmission system into the accelerating tubes.

Abstract: A substrate is transported to a coating processing unit. An annular region of one surface of the substrate is processed. The substrate is carried into an edge exposure unit. Positions of a peripheral edge of the substrate and an inner edge of the annular region are detected. A position deviation amount of a center of the substrate held by a spin chuck from a rotation center of the spin chuck is calculated. Based on schedule management information, a relationship between orientations of the substrate held by the spin chuck at the time of carrying of the substrate into the coating processing unit and the substrate held by the substrate rotation unit at the time of carrying of the substrate into the edge exposure unit is specified. Based on the relationship, a position deviation direction of the center of the substrate from the rotation center is determined.

Abstract: An X-ray generating tube including a transmission target having a minute focal spot. The X-ray generating tube includes a transmission target having a first surface configured to be irradiated with an electron beam; an electron emitting source configured to irradiate the transmission target with the electron beam obliquely; and a tubular forward shield member to define an extraction angle of an extracted X-ray beam. The forward shield member is disposed such that a central axis of the electron beam and a central axis of the X-ray beam whose extraction angle is defined are located at the same side with respect to a virtual normal plane perpendicular to the surface and a projection of the central axis of the electron beam to the surface.

Abstract: A transmissive-type target includes a target layer, and a transmissive substrate configured to support the target layer. The transmissive substrate has a pair of surfaces facing each other and is formed of polycrystalline diamond. In the transmissive substrate, one of the pair of surfaces includes polycrystalline diamond having a first average crystal grain diameter which is smaller than a second average crystal grain diameter of polycrystalline diamond included on the other surface opposing thereto. The target layer is supported by any one of the pair of surfaces.

Abstract: Positions of an outer periphery of a rotating substrate and a processing liquid nozzle are detected. An amplitude of a change with time of the position of the outer periphery of the substrate detected during rotation is acquired. In a direction passing through a rotational center and parallel with the rotating substrate, a relative position of the processing liquid nozzle with respect to the spin chuck is periodically changed at a frequency equal to a rotational frequency of the spin chuck and the acquired amplitude. A difference between a phase of a change with time of the position of the processing liquid nozzle and a phase of a change with time of the position of the outer periphery of the substrate is adjusted to not more than a predetermined value. A processing liquid is discharged from the processing liquid nozzle to a peripheral portion of the rotating substrate.

Abstract: Various of the disclosed embodiments contemplate systems and methods that compensate for the limited dynamic range of certain X-Ray detector systems, such as CAT-Scan detector systems. In some embodiments, the system alternates between different photon emission flux values and then gives more consideration to an attenuation value associated with a more favorable detection flux. In this manner, different object densities may be accounted for and may be more properly imaged despite the particular characteristics of the X-Ray system.

Abstract: There is provided a method of image reconstruction based on energy-resolved image data from a photon-counting multi-bin detector or an intermediate storage. The method comprises processing (S1) the energy-resolved image data by performing at least two separate basis decompositions using different number of basis functions for modeling linear attenuation, wherein a first basis decomposition is performed using a first smaller set of basis functions to obtain at least one first basis image representation, and wherein a second basis decomposition is performed using a second larger set of basis functions to obtain at least one second basis image representation. The method also comprises reconstructing a first image based on said at least one first basis image representation obtained from the first basis decomposition, and combining the first image with information representative of said at least one second basis image representation.

Abstract: A rotary X-ray anode has a support body and a focal track formed on the support body. The support body and the focal track are produced as a composite by powder metallurgy. The support body is formed from molybdenum or a molybdenum-based alloy and the focal track is formed from tungsten or a tungsten-based alloy. Here, in the conclusively heat-treated rotary X-ray anode, at least one portion of the focal track is located in a non-recrystallized and/or in a partially recrystallized structure.

Abstract: A radiation tube includes an enclosure having an opening portion, an electron source disposed inside the enclosure, a target unit configured to generate radiation by being bombarded with electrons emitted from the electron source, and a front shield disposed on the opening portion and joined to the target unit. The front shield has a slit-shaped opening that shields some of the radiation radiated from the target unit. The radiation is radiated through the opening in the shape of a fan beam.

Abstract: An alignment system for aligning apertures in an X-ray backscatter system is provided. Additionally, a method for aligning apertures in an X-ray backscatter system is provided. Further, a computer-readable storage device including computer-executable instructions for aligning apertures in an X-ray backscatter system is provided.

Abstract: An X-ray phase-shift contrast imaging method and the system thereof are provided. The X-ray phase-shift contrast imaging method utilizes characteristic X-rays of high throughput irradiating at the target from different positions or with different focal positions so as to form different X-ray images. The X-ray images are compared to define the voxels and combined to obtain a 3-D X-ray image. By using X-ray phase-shift contrast for imaging the soft tissue, the level of the image contrast may be enhanced several orders of magnitude and the linear energy transfer of the high energy photon beam is greatly reduced. Hence, the radiation dose absorbed by the tissue may be greatly reduced.

Abstract: The present invention relates to a transmission type target having a diamond base material as the transmissive base material. The transmission type target includes a target layer containing a metal carbide constituted of at least one metal selected from the group consisting of molybdenum, tantalum, and tungsten and carbon; and a diamond base material supporting the target layer. The transmission type target inhibits the composition of the target layer from varying with the drive history of the transmission type target and inhibits the output of radiation from varying over a long time.

Abstract: In a target structure according to the present invention, a target is provided on a central area of an insulating substrate, and a first conductive member for supplying a voltage to the target is provided on a peripheral area of the insulating substrate which is exclusive of an area overlapping the target and is not covered by the target, so that the first conductive member is in contact with and electrically connected to the peripheral portion of the target. Consequently, it is possible to easily form a voltage supply line to the target without preventing diffusion of a heat generated in the target to the substrate and while suppressing emission of an unnecessary X-ray.

Abstract: A multiradiation generation apparatus according to the present invention includes a plurality of radiation sources arranged in a row. Each of the radiation sources includes an electron source configured to emit electrons and a target unit configured to generate radiation upon receiving electrons emitted from the electron source. At least one of the radiation sources is a dual-purpose radiation source used for both tomosynthesis imaging and non-tomosynthesis imaging, and the other radiation sources are single-purpose radiation sources used only for tomosynthesis imaging.

Abstract: A rotary X-ray anode has a support body and a focal track formed on the support body. The support body and the focal track are produced as a composite by powder metallurgy. The support body is formed from molybdenum or a molybdenum-based alloy and the focal track is formed from tungsten or a tungsten-based alloy. Here, in the conclusively heat-treated rotary X-ray anode, at least one portion of the focal track is located in a non-recrystallized and/or in a partially recrystallized structure.

Abstract: A method of forming a layer, the method including providing a substrate having at least one surface adapted for deposition thereon; and directing a particle beam towards the surface of the substrate, the particle beam including moderately charged ions (MCIs), substantially all the MCIs independently have charges from ±2 to ±6 and kinetic energies of not greater than about 200 eV, wherein the MCIs do not penetrate more than about 30 ? into the surface of the substrate to form a layer on the substrate.

Abstract: The present invention pertains to a method and apparatus for generating a beam of charged particles, accelerating the charged particles toward a first side of a layer of X-ray target material configured to emit Bremsstrahlung radiation through a second side, receiving the Bremsstrahlung radiation on a first face of an additional layer of a different X-ray target material configured to emit characteristic fluorescence X-rays with energy above 20 keV through a second face, wherein the additional layer of X-ray target material is located within 3 mm of the second side of the first layer of material. The first X-ray target material can have an atomic number greater than 21.

Abstract: An x-ray tube having a coated x-ray tube frame inner surface and a coated anode assembly is provided. The x-ray tube includes an x-ray tube frame in which an anode assembly is disposed therein. A cathode assembly is also disposed within the x-ray tube frame that emits an electron beam to strike a target surface of the anode assembly and form x-rays. A plasma-sprayed tungsten oxide coating is formed on an inner surface of the x-ray tube frame and on the anode assembly to dissipate heat created by the electron beam.

Abstract: A sputter coating apparatus for sputter coating a substrate in a processing chamber includes a target of sputter coating material supported within the processing chamber. The target has a sputtering surface and a back surface. The target is affixed to a backing plate such that the back surface of the target is disposed adjacent to a first surface of the backing plate. The backing plate is in fluid communication with a source of cooling fluid. The target back surface has a first layer selected to have a high thermal emissivity coefficient. The backing plate first surface carries a second layer having a high emissivity coefficient. The target back surface first layer and the backing plate first surface second layer provide enhanced heat transfer between the target and the backing plate via thermal radiation.

Abstract: An X-ray tube includes a cathode, an anode with an electron receiving surface, and a window facing the electron receiving surface of the anode. On the electron receiving surface of the anode it includes a layer of anode material. Deeper in the anode than the layer of anode material, there is a block of attenuator material. The atomic number of the attenuator material is less than one third of the atomic number of the anode material.