Target Patents (Class 378/143)
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Patent number: 8053746Abstract: The present invention relates to an irradiation device for irradiating an irradiation object with heavy charged particles at an irradiation station, comprising a particle accelerator for providing a particle beam and a swivelling device for swivelling the particle beam impinging on the irradiation object, wherein the swivelling device comprises a carrier pivotable about an axis. In accordance with the invention, the irradiation device is characterized in that the particle accelerator is mounted on the pivotable carrier.Type: GrantFiled: April 5, 2007Date of Patent: November 8, 2011Assignee: Varian Medical Systems Particle Therapy GmbHInventors: Jan Hein Timmer, Holger Goebel, Stefan Schmidt, Juergen Heese, Michael Schillo
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Publication number: 20110249803Abstract: The present invention refers to hybrid anode disk structures for use in X-ray tubes of the rotary anode type and is concerned more particularly with a novel light weight anode disk structure (RA) which comprises an adhesion promoting protective silicon carbide (SiC) interlayer (SCI) deposited onto a rotary X-ray tube's anode target (AT), wherein the latter may e.g. be made of a carbon-carbon composite substrate (SUB?). Moreover, a manufacturing method for robustly attaching a coating layer (CL) consisting of a high-Z material (e.g. a layer made of a tungsten-rhenium alloy) on the surface of said anode target is provided, whereupon according to said method it may be foreseen to apply a refractory metal overcoating layer (RML), such as given e.g. by a tantalum (Ta), hafnium (Hf), vanadium (V) or rhenium (Re) layer, to the silicon carbide interlayer (SCI) prior to the deposition of the tungsten-rhenium alloy.Type: ApplicationFiled: December 14, 2009Publication date: October 13, 2011Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V.Inventor: Michael David Drory
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Patent number: 8036341Abstract: Stationary x-ray target assemblies manufactured using a metal deposition process to form one or more metal layers of the target. In particular, the metal deposition process is used to form an x-ray target metal layer and/or a stress buffer zone on an x-ray target substrate. The stress buffer zone improves material properties of the metals and/or the bonding between the x-ray target metal layer and the substrate. Improved bonding between the x-ray target metal layer and the substrate also improves the heat dissipation properties of the stationary x-ray target assembly.Type: GrantFiled: August 14, 2008Date of Patent: October 11, 2011Assignee: Varian Medical Systems, Inc.Inventor: David S. K. Lee
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Publication number: 20110228909Abstract: An embodiment of the invention relates to a cathode cup (20) comprising a receptacle for holding an electron emitter (21), wherein the cathode cup is provided at least in the area facing the electron emitter (21) with a surface comprising a plurality of cavities (23). Further, the invention provides an electron source and an x-ray system comprising such a cathode cup (20).Type: ApplicationFiled: December 1, 2009Publication date: September 22, 2011Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V.Inventors: Stefan Hauttmann, Zoryana Terletska
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Publication number: 20110211676Abstract: A method and an apparatus for locally applying material to the surface of an anode of an X-ray source as well as a corresponding anode is presented. Anode material such as a repair material for filling a recess (121) in an X-ray emitting surface (115) is applied to the X-ray emitting surface of an anode (101). The location where such material is to be applied may be detected using a laser beam (133). The applied repair material including particles (41) of anode material such as tungsten, rhenium or molybdenum, is subsequently locally sintered using a high-energy laser beam (151). The sintered material may then be melted using a high-energy electron beam (163). Using such method, a damaged surface of an anode may be locally repaired. Alternatively, structures of different anode materials or of protrusions having different levels can be provided on the X-ray emitting surface (115) in order to selectively manipulate the X-ray emitting characteristics of the anode (101).Type: ApplicationFiled: August 4, 2008Publication date: September 1, 2011Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V.Inventors: Ralf Dorscheid, Gereon Vogtmeier, Rainer Pietig
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Patent number: 7983394Abstract: A multiple wavelength x-ray source includes a multi-thickness target, having at least a first and a second thickness. The first thickness can substantially circumscribe the second thickness. An electron beam can be narrowed to impinge primarily upon second thickness or expanded to impinge primarily upon the first thickness while maintaining a constant direction of the beam. This invention allows the target thickness to be optimized for the desired output wavelength without the need to redirect or realign the x-rays towards the target.Type: GrantFiled: December 17, 2009Date of Patent: July 19, 2011Assignee: Moxtek, Inc.Inventors: Krzysztof Kozaczek, Sterling Cornaby, Steven Liddiard, Charles Jensen
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Publication number: 20110116604Abstract: Methods for the plasma-based generation of X-radiation are described with the steps: provision of a target material (50) in the form of a free flow structural formation (51) in a vacuum chamber (20), and irradiation of the target material (50) in order to produce a plasma condition in which the X-radiation is radiated therefrom, the flow structural formation (51) being formed in such a way that the target material has, at least at the location of the irradiation, a surface (52) with a local curvature minimum. Devices for the imple mentation of the methods and, in particular, X-ray sources for the plasma-based generation of X-radiation are also described.Type: ApplicationFiled: June 9, 2004Publication date: May 19, 2011Inventors: Manfred FAUBEL, Ales CHARVAT, Jurgen TROE, Bernd ABEL, Jens ASSMAN, Eugene LUGOVOI
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Publication number: 20110103553Abstract: According to one embodiment, there is provided an X-ray tube target. The X-ray tube target has a structure in which a carbon base material is bonded with an Mo base material or Mo alloy base material with a joint layer. The joint layer includes an MoNbTi diffusion phase, an NbTi alloy phase, an Nb-rich phase and a ZrNb alloy phase when the ratios of components in the joint layer are detected by EPMA.Type: ApplicationFiled: January 6, 2011Publication date: May 5, 2011Applicants: KABUSHIKI KAISHA TOSHIBA, TOSHIBA MATERIALS CO., LTD.Inventors: Akihisa NITTA, Shinichi YAMAMOTO, Hiromichi HORIE
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Patent number: 7929667Abstract: An x-ray metrology tool having only one x-ray source. The x-ray source includes a liquid metal source for heating and melting at least one metal and producing a liquid metal jet, a liquid metal collector for acquiring the liquid metal jet, a liquid metal circulation system for returning liquid metal from the liquid metal collector to the liquid metal source, and an electron beam source for directing an electron beam at the liquid metal jet anode, thereby producing an incident x-ray beam that is directable towards a sample. A detector receives emissions from the sample in response to the incident x-ray beam, and produces signals indicative of properties of the sample. A controller controls the x-ray source, acquires the signals from the detector, and determines the properties of the sample based at least in part on the signals.Type: GrantFiled: September 29, 2009Date of Patent: April 19, 2011Assignee: KLA-Tencor CorporationInventors: Guorong V. Zhuang, John Fielden
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Publication number: 20110058655Abstract: A target for X-ray generation has a substrate and a target portion. The substrate is comprised of diamond and has a first principal surface and a second principal surface opposed to each other. A bottomed hole is formed from the first principal surface side in the substrate. The target portion is comprised of a metal deposited from a bottom surface of the hole toward the first principal surface. An entire side surface of the target portion is in close contact with an inside surface of the hole.Type: ApplicationFiled: August 30, 2010Publication date: March 10, 2011Applicants: TOKYO ELECTRON LIMITED, HAMAMATSU PHOTONICS K.K.Inventors: Katsuya OKUMURA, Katsuji Kadosawa, Tomofumi Kiyomoto, Motohiro Suyama, Atsushi Ishii
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Patent number: 7903786Abstract: A target assembly for generating x-rays includes a target substrate, and an emissive coating attached to the target substrate, the emissive coating including a textured material including a plurality of granular protrusions arranged to increase gray body emissive characteristics of the target assembly above that of the target substrate.Type: GrantFiled: August 25, 2008Date of Patent: March 8, 2011Assignee: General Electric CompanyInventors: Dalong Zhong, Dennis M. Gray, Michael Hebert, Thomas Raber, Gregory Alan Steinlage, Thomas C. Tiearney
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Publication number: 20110038465Abstract: Systems and methods are provided for field emission device. An array of carbon nanotubes is arranged in a variable height distribution over a cathode substrate. An anode is provided to accelerate the emitted electrons toward an x-ray plate. Voltage is supplied across the array of carbon nanotubes to cause emission of electrons. The pointed height distribution may be linear or parabolic, and a peak height of the variable height distribution may occur in a center of the array. A side gate may also be provided adjacent the array of carbon nanotubes to provide improved electron emission and focusing control.Type: ApplicationFiled: November 18, 2009Publication date: February 17, 2011Applicant: INDIAN INSTITUTE OF SCIENCEInventor: Debiprosad Roy Mahapatra
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Patent number: 7885387Abstract: The present invention is made to provide an extreme ultraviolet light source target or an X-ray source target having a good operationality. An extreme ultraviolet light source target in accordance with an aspect of the present invention is obtained by including a heavy metal such as tin into a matrix made of a polymeric material such as hydroxylpropylcellulose (HPC). The target can be manufactured by mixing the heavy metal and the polymeric material with a solvent, and evaporating the solvent. Since the target uses the polymeric material as a matrix, the target can be easily deformed to have a desired shape. For this reason, the target can be easily attached to a target holder irrespective of the shape of the holder, resulting in a good operationality of the target. Furthermore, an emission efficiency can be improved by including the heavy metal at a low density.Type: GrantFiled: August 29, 2005Date of Patent: February 8, 2011Assignee: Osaka UniversityInventors: Keiji Nagai, Qincui Gu, Takayoshi Norimatsu, Shinsuke Fujioka, Hiroaki Nishimura, Katsunobu Nishihara, Noriaki Miyanaga, Yasukazu Izawa
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Patent number: 7876883Abstract: A conical anode X-ray source with a spot size approximately one tenth of the size of existing mammography devices. The source produces the same or higher radiance than the prior art. It also produces almost no high-energy Bremstrahlung. The electron beam is directed into a conical anode so that it strikes the reflecting surface at an angle which produces total internal reflection. The X-rays emitted via the reflection would ordinarily exit the small end of the conical anode in a diverging conical pattern—producing an undesirable “ring” configuration at the image plane. A homogenizing optic is therefore preferably added to the small end of the conical anode. The homogenizing optic is sized to reflect the X-rays emerging from the conical anode and thereby create a uniform “spot” source at the far end of the homogenizing optic.Type: GrantFiled: April 10, 2009Date of Patent: January 25, 2011Inventor: David O'Hara
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Publication number: 20110007872Abstract: An x-ray tube target and method of repairing a damaged x-ray tube target. The x-ray tube target includes an original substrate and a portion of the original substrate that includes a new portion of a substrate and a new target track that is attached to a void in the original substrate. The method includes removal and replacement of damaged materials on used anode targets of x-ray tubes, thereby enabling recovery of used anode targets without the use of expensive and time consuming layer deposition methods. The method also avoids the high costs and long development cycles associated with known repair and refabrication methods for anode targets of x-ray tubes.Type: ApplicationFiled: December 31, 2009Publication date: January 13, 2011Applicant: GENERAL ELECTRIC COMPANYInventors: Gregory Alan Steinlage, Michael Scott Hebert
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Patent number: 7867548Abstract: A solution is provided that includes a non-aqueous organic solvent within which a solute has been dissolved. A thermal-fluid ejection mechanism is provided that has fluid-ejection nozzles and that is capable of thermally ejecting the solution. A device medium is provided that has a three-dimensional surface on which the solution is to be ejected. The fluid-ejection nozzles of the thermal fluid-ejection mechanism are controlled to eject the solution onto the three-dimensional surface of the device medium in accordance with a desired pattern.Type: GrantFiled: October 27, 2006Date of Patent: January 11, 2011Assignee: Hewlett-Packard Development Company, L.P.Inventors: David Otis, Jeffrey A Nielsen, Wayne E Gisel, Gerald F Meehan, David Leigh, Isaac Farr, NK Peter Samuel
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Molybdenum alloy; and X-ray tube rotary anode target, X-ray tube and melting crucible using the same
Patent number: 7860220Abstract: This invention provides a molybdenum alloy having excellent high-temperature strength, an X-ray tube rotary anode target having high-temperature strength, an X-ray tube, and a melting crucible. The molybdenum alloy, having an oxygen content of not more than 50 ppm, comprising 0.2 to 1.5% of a carbide by weight and the balance, molybdenum, wherein the carbide is at least one selected from titanium carbide, hafnium carbide, zirconium carbide, and tantalum carbide, and a part of the carbides has an aspect ratio of not less than 2.Type: GrantFiled: October 27, 2006Date of Patent: December 28, 2010Assignees: Kabushiki Kaisha Toshiba, Toshiba Materials Co., Ltd.Inventors: Hitoshi Aoyama, Shinichi Yamamoto -
Publication number: 20100316193Abstract: An X-ray anode includes a coating and a support body. In addition to a strength-imparting region, the support body has a region formed of a diamond-metal composite material. The diamond-metal composite material is formed of 40 to 90% by volume diamond particles, 10 to 60% by volume binding phase(s) formed of a metal or an alloy of the metals of the group consisting of Cu, Ag, Al and at least one carbide of the elements of the group consisting of Tr, Zr, Hf, V, Nb, Ta, Cr, Mo, W, B, and Si. The highly heat-conductive region can be form-lockingly connected at the back to a heat-dissipating region, for example formed of Cu or a Cu alloy. The X-ray anode has improved heat dissipation and lower composite stress.Type: ApplicationFiled: September 25, 2008Publication date: December 16, 2010Applicant: PLANSEE METALL GMBHInventors: Peter Rödhammer, Wolfgang Glatz, Bernhard Tabernig, Hannes Wagner
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Patent number: 7852987Abstract: The X-ray tube having a rotating and linearly translating anode includes an evacuated shell having a substantially cylindrical anode rotatably mounted therein. The substantially cylindrical anode may be rotated through the usage of any suitable rotational drive, and the substantially cylindrical anode is further selectively and controllably linearly translatable about the rotating longitudinal axis thereof. A cathode is further mounted within the evacuated shell for producing an electron beam that impinges on an outer surface of the substantially cylindrical anode, thus forming a focal spot thereon. X-rays are generated from the focal spot and are transmitted through an X-ray permeable window formed in the evacuated shell.Type: GrantFiled: May 18, 2009Date of Patent: December 14, 2010Assignee: King Fahd University of Petroleum and MineralsInventors: Jihad Hassan Al-Sadah, Ezzat Abbas Mansour, Nabil Maalej
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Patent number: 7835502Abstract: An x-ray target pedestal assembly and a method of protecting the x-ray target from breaking down as a result of the extreme heat that is produced when an electron beam is aimed at the target to produce x-rays. The target is submerged in cooling fluid and is rotated by a constant flow of the cooling fluid over and around the target in order to dissipate heat. The fluid is guided by integrated flow diverters in the target cover. The target may also be protectively coated either in its entirety or along the electron beam path in order to further protect it from the heat of the electron beam impact or from breakdown as a result of attack of free radicals or other chemically reactive components of the cooling fluid which are produced in the extreme target environment.Type: GrantFiled: February 11, 2009Date of Patent: November 16, 2010Assignee: Tomotherapy IncorporatedInventors: David Arthur Spence, Richard Cary Schmidt
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Publication number: 20100284518Abstract: A high flux X-ray tube anode target assembly (101). The assembly includes a support shaft (107) connected to a pivot assembly (109). The assembly further includes a movable anode target (105) having a target surface (106) disposed at one end of the support shaft. The target surface includes a single radius of curvature. The radius of curvature extends from a pivot point (110). The assembly also includes a drive member (119) operably arranged with respect to the support shaft to provide motion to the anode target. The assembly is configured to maintain a substantially fixed distance between the pivot point and the target surface.Type: ApplicationFiled: December 31, 2007Publication date: November 11, 2010Inventors: Anupam Singh Ahlawat, Prasad Balaji Narasimha Paturi
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Publication number: 20100284517Abstract: An X-ray tube anode target assembly (101) having a support shaft (107) connected to a pivot assembly (109) and a movable anode target (105) having a target surface (106) disposed at one end of the support shaft and a contact element (108) disposed at the opposite end of the support shaft. A first drive assembly (115) is operably arranged with respect to the support shaft to provide oscillatory motion to the anode target about a first axis substantially parallel to the support shaft and a drive cylinder (125) is operably arranged with respect to the contact element to provide a pivoting motion to the support shaft. A second drive assembly (127) is operably arranged with respect to the drive cylinder to provide an oscillatory motion to the drive cylinder, the second drive cylinder being further configured to provide a linear motion parallel to the first axis.Type: ApplicationFiled: December 31, 2007Publication date: November 11, 2010Inventors: Prasad Balaji Narasimha Paturi, Anupam Singh Ahlawat, Maheshwara Murthy
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Patent number: 7831021Abstract: An X-ray target assembly includes a substrate, a target supported by the substrate adapted to generate X-rays when impinged by an electron beam, and an enclosure over the target providing a volume for the target. The enclosure is made of a material substantially transparent to electrons. The volume is substantially vacuum or filled with an inert gas.Type: GrantFiled: August 31, 2009Date of Patent: November 9, 2010Assignee: Varian Medical Systems, Inc.Inventors: Richard Schumacher, David K. Jensen, Maynard C. Harding, Randall D. Robinson
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Publication number: 20100266103Abstract: A photoneutron-x ray source includes a photoneutron conversion target, which outputs both photoneutrons and x-rays simultaneously. The photoneutron-x ray source includes an x-ray generator for generating an x-ray main beam that is applied to the photoneutron conversion target. The photoneutron conversion target generates photoneutrons upon the application of the x-ray main beam to the photoneutron conversion target. The photoneutron conversion target has a body that defines a passageway extending through the body and that is structured such that a first x-ray beam of the x-ray main beam can pass through the passageway without any reaction with the body, while a second x-ray beam of the x-ray main beam can enter the body and react with the body to emit the photoneutrons.Type: ApplicationFiled: June 19, 2008Publication date: October 21, 2010Inventors: Kejun Kang, Haifeng Hu, Yigang Yang, Zhiqiang Chen, Qitian Miao, Jianping Cheng, Yuanjing Li, Yinong Liu, Hua Peng, Tiezhu Li, Ziran Zhao, Yaohong Liu, Wanlong Wu
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Patent number: 7809113Abstract: The present invention relates to an X-ray source for emitting a characteristic X-ray and a fluorescent X-ray analyzing apparatus using the X-ray source. A secondary target is arranged in superposition on a primary target. An electron beam generated by an electron gun enters the primary target, which passes and emits a continuous X-ray. The secondary target transmits and emits a characteristic X-ray excited by the continuous X-ray emitted from the primary target. The primary target and the secondary target are superposed one on the other, so that the continuous X-ray emitted from the primary target efficiently excites the secondary target thereby to efficiently generate the characteristic X-ray.Type: GrantFiled: October 5, 2007Date of Patent: October 5, 2010Assignee: Toshiba Electron Tubes & Devices Co., Ltd.Inventors: Nobutada Aoki, Akiko Kakutani
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Patent number: 7783011Abstract: A transmission type X-ray tube includes an electrode lead (4) holding a cathode filament (7) and a stem unit (1) to which a sealing member (5), an exhaust tube (2), and the like are attached by brazing, and an irradiation window frame (8) having an X-ray irradiation window (9) attached by brazing. The other end side (52) of the sealing member (5) is attached to an open end (83) of the irradiation window frame (8) by welding. Thus, it is possible to obtain a high-quality transmission type X-ray tube having a long service life at a low cost.Type: GrantFiled: February 24, 2009Date of Patent: August 24, 2010Assignee: Hitachi Medical CorporationInventors: Yuichi Ito, Toru Moriike, Seiji Hosoya, Yoshihiko Dan, Makoto Otsuka
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Patent number: 7783010Abstract: A method of manufacturing a radiation source in one example comprises selecting at least one of a target, a collimator, or target shielding consisting essentially of at least one isotope having a neutron production threshold greater than a peak acceleration energy of the source, and assembling the source including the selected material. A simulation may be used to assist in design a radiation source meeting neutron production requirements and optionally other requirements.Type: GrantFiled: October 14, 2008Date of Patent: August 24, 2010Assignee: Varian Medical Systems, Inc.Inventor: James E. Clayton
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Patent number: 7773726Abstract: In an X-ray source 1 and an X-ray tube 4, there is formed a shield portion 42 adapted to shield the portion W where a target support body 18 and an opening portion 34 on the other end side of a valve 20 are fixed to each other when viewed from the one end side of the valve 20. Therefore, the generation of discharge between the one end side of the valve 20 and the fixation portion W can be suppressed. Also, the other end portion of the valve 20 is formed as a narrowed portion 37 and the opening portion 34 on the other end side of the valve 20 is fixed to the target support body 18, whereby the shapes of the valve 20 and the shield portion 42 can be made simpler than in conventional X-ray tubes in which an inner cylindrical portion is formed in a valve. Such a simple structure can improve the stability of an electric field in the valve 20 when generating X-rays and thereby achieve an effective suppression of the generation of discharge in the valve 20.Type: GrantFiled: December 9, 2005Date of Patent: August 10, 2010Assignee: Hamamatsu Photonics K.K.Inventor: Tutomu Inazuru
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Publication number: 20100189221Abstract: The present disclosure describes a self-contained irradiator comprising at least one X-ray source inside a shielded enclosure, the one or more sources each operable to emit X-ray flux across an area substantially equal to the proximate facing surface area of material placed inside the enclosure to be irradiated. The irradiator may have multiple flat panel X-ray sources disposed, designed or operated so as to provide uniform flux to the material being irradiated. The advantages of the irradiator of the present disclosure include compactness, uniform flux doses, simplified thermal management, efficient shielding and safety, the ability to operate at high power levels for sustained periods and high throughput.Type: ApplicationFiled: January 22, 2010Publication date: July 29, 2010Inventors: Mark Eaton, Mitali More, Mike Olla
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Publication number: 20100172475Abstract: A fast dose modulation using a z-deflection in a rotating anode or a rotating frame tube, where the electron beam is deflected from a first focal spot region to a second focal spot region being formed on the anode, wherein only the electromagnetic beam generated in the first focal spot region contributes to the useful electromagnetic exposure beam, wherein the second focal spot region is designed to avoid emission of electromagnetic beams into the direction of a useful electromagnetic beam direction.Type: ApplicationFiled: June 17, 2008Publication date: July 8, 2010Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V.Inventor: Rolf Karl Otto Behling
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Patent number: 7734015Abstract: The present invention relates to an X-ray tube in which X-rays are generated by making electrons from an electron gun incident onto an X-ray target of an anode, disposed inside an anode housing unit, and the generated X-rays are taken out from an X-ray emission window. The anode has a straight main body and a protruding portion, extending along an axis line direction of the main body from a tip of the main body. An inclined surface, onto which the electrons emitted from the electron gun collide, and a pair of side surfaces, disposed in parallel while sandwiching the inclined surface, are formed on the protruding portion. A distance between the pair of side surfaces of the protruding portion is shorter than a width of the main body in the same direction as the distance.Type: GrantFiled: October 4, 2006Date of Patent: June 8, 2010Assignee: Hamamatsu Photonics K.K.Inventors: Tomoyuki Okada, Tutomu Inazuru
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Publication number: 20100111260Abstract: An x-ray tube assembly includes an x-ray tube envelope, a cathode assembly and a transmission anode assembly. The transmission anode assembly includes an x-ray generation layer and an anode substrate. The x-ray generation layer may be annular and mounted on a rotating disc-shaped anode substrate or cylindrical and mounted on a rotating and/or oscillating cylindrical anode substrate.Type: ApplicationFiled: April 20, 2007Publication date: May 6, 2010Inventors: Joseph W. Motz, Donald R. Ouimette
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Publication number: 20100098218Abstract: A modular x-ray source for an imaging system includes a structure forming a cavity and having a first wall and a second wall, at least one target positioned on the first wall within the cavity and configured to receive a first electron beam at a first spot position and a second electron beam at a second spot position, and a shielding material positioned on the second wall.Type: ApplicationFiled: October 16, 2008Publication date: April 22, 2010Inventors: Mark E. Vermilyea, Yang Cao, Louis Paul Inzinna, Dennis M. Jacobs, Xi Zhang, Yun Zou
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Publication number: 20100080358Abstract: In one example, an x-ray target comprises a substrate, a target core, and a target track. The substrate and target core are attached together utilizing a carbide layer and a braze layer.Type: ApplicationFiled: September 26, 2008Publication date: April 1, 2010Applicant: VARIAN MEDICAL SYSTEMS, INC.Inventors: David S.K. Lee, John E. Postman
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Publication number: 20100044591Abstract: A radiation source includes a beam generator configured to generate a radiation beam to be used to produce a radiation output of the radiation source, and a beam monitor, configured to monitor the radiation beam. A lithographic apparatus includes the radiation source. A device manufacturing method includes generating a first type of radiation by utilizing a beam of a second type of radiation, monitoring a quality of the second type of radiation, and projecting a patterned beam of the first type of radiation onto a substrate.Type: ApplicationFiled: August 13, 2009Publication date: February 25, 2010Applicant: ASML NETHERLANDS B.V.Inventors: Erik Roelof Loopstra, Jan Bernard Plechelmus Van Schoot, Gerardus Hubertus Petrus Maria Swinkels
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Publication number: 20100046717Abstract: A target assembly for generating x-rays includes a target substrate, and an emissive coating attached to the target substrate, the emissive coating including a textured material including a plurality of granular protrusions arranged to increase gray body emissive characteristics of the target assembly above that of the target substrate.Type: ApplicationFiled: August 25, 2008Publication date: February 25, 2010Inventors: Dalong Zhong, Dennis M. Gray, Michael Hebert, Thomas Raber, Gregory Alan Steinlage, Thomas C. Tiearney
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Publication number: 20100040202Abstract: Stationary x-ray target assemblies manufactured using a metal deposition process to form one or more metal layers of the target. In particular, the metal deposition process is used to form an x-ray target metal layer and/or a stress buffer zone on an x-ray target substrate. The stress buffer zone improves material properties of the metals and/or the bonding between the x-ray target metal layer and the substrate. Improved bonding between the x-ray target metal layer and the substrate also improves the heat dissipation properties of the stationary x-ray target assembly.Type: ApplicationFiled: August 14, 2008Publication date: February 18, 2010Applicant: VARIAN MEDICAL SYSTEMS, INC.Inventor: David S.K. Lee
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Patent number: 7664229Abstract: The present invention relates to an X-ray tube, having a structure enabling capturing of a clear magnified transmission image and enabling increase of a magnification factor of the magnified transmission image, and an X-ray source including the X-ray tube. In the X-ray tube, X-rays are generated by making electrons from an electron gun incident onto an X-ray target of an anode, disposed inside an anode housing unit, and the generated X-rays are taken out from an X-ray emission window. In particular, the anode housing unit has a pair of conductive flat portions disposed parallel to a reference plane, orthogonal to an electron incidence surface of the X-ray target, and so as to sandwich the X-ray target.Type: GrantFiled: October 4, 2006Date of Patent: February 16, 2010Assignee: Hamamatsu Photonics K.K.Inventors: Tomoyuki Okada, Tutomu Inazuru
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Publication number: 20100028234Abstract: The present invention provides a method for producing Cu67 radioisotope suitable for use in medical applications. The method comprises irradiating a metallic zinc-68 (Zn68) target with a high energy gamma ray beam. After irradiation, the Cu67 is isolated from the Zn68 by any suitable method (e.g., chemical and/or physical separation). In a preferred embodiment, the Cu67 is isolated by sublimation of the zinc (e.g., at about 500-700° C. under reduced pressure) to afford a copper residue containing Cu67. The Cu67 can be further purified by chemical means (i.e., dissolution in acid, followed by ion exchange).Type: ApplicationFiled: July 29, 2009Publication date: February 4, 2010Applicant: UChicago Argonne, LLC.Inventors: David A. Ehst, Delbert L. Bowers
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Patent number: 7649977Abstract: A neutron-gamma ray tomography system comprises a source, a detector array, and an image processor. The source illuminates an object with a dual neutron-gamma ray beam. The detector array characterizes neutron and gamma ray attenuation in the object. The image processor generates tomography as a function of the neutron and gamma ray attenuation.Type: GrantFiled: September 12, 2007Date of Patent: January 19, 2010Assignee: Hamilton Sundstrand CorporationInventor: Gregory A. Johnson
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Publication number: 20100008471Abstract: The present invention is directed to an anode for an X-ray tube. The X-ray tube has an electron aperture through which electrons emitted from an electron source travel subject to substantially no electrical field and a target in a non-parallel relationship to the electron aperture and arranged to produce X-rays when electrons are incident upon a first side of the target, wherein the target further comprises a cooling channel located on a second side of the target. The cooling channel comprises a conduit having coolant contained therein. The coolant is at least one of water, oil, or refrigerant.Type: ApplicationFiled: June 4, 2009Publication date: January 14, 2010Inventor: Edward James Morton
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Patent number: 7639781Abstract: An x-ray tool for determining a characteristic of an oilfield fluid. The tool may include a generator portion housing a collimator about a target from which x-rays are emitted. In this manner x-rays may be attenuated right at the target such that a majority of shielding otherwise necessary for safety concerns may be eliminated. Rather, by employing the target within the collimator, shielding of the generator may be limited to a single shielding plate within the generator portion that is positioned parallel to the target at the opposite end of an x-ray tube therebetween. As a result of this configuration, an x-ray tool for analysis of oilfield fluids may be provided with a minimum weight of shielding material. Thus, hand-held user friendly embodiments may be safely employed at the oilfield.Type: GrantFiled: January 18, 2008Date of Patent: December 29, 2009Assignee: Schlumberger Technology CorporationInventors: Rod Shampine, Joel L. Groves, Anthony Durkowski, Etienne Vallee, Peter Wraight
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Patent number: 7623629Abstract: A transmission type X-ray tube includes an electrode lead (4) holding a cathode filament (7) and a stem unit (1) to which a sealing member (5), an exhaust tube (2), and the like are attached by brazing, and an irradiation widow frame (8) having an X-ray irradiation window (9) attached by brazing. The other end side (52) of the sealing member (5) is attached to an open end (83) of the irradiation window frame (8) by welding. Thus, it is possible to obtain a high-quality transmission type X-ray tube having a long service life at a low cost.Type: GrantFiled: March 31, 2005Date of Patent: November 24, 2009Assignee: Hitachi Medical CorporationInventors: Yuichi Ito, Toru Moriike, Seiji Hosoya, Yoshihiko Dan, Makoto Otsuka
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Publication number: 20090285363Abstract: A target assembly for generating x-rays includes a target substrate, and an emissive coating applied to a portion of the target substrate, the emissive coating comprising one or more of a carbide and a carbonitride.Type: ApplicationFiled: May 16, 2008Publication date: November 19, 2009Inventors: Dalong Zhong, Dennis M. Gray, Michael Hebert, Don Mark Lipkin, Thomas Raber, Gregory Alan Steinlage, Thomas C. Tiearney
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Publication number: 20090272915Abstract: The present invention aims to suppress calorific value and prolong a lifetime of an apparatus that generates soft X-rays. Thus, the present invention provides a static elimination apparatus that includes an emitter as an electron emitting portion and a target, in which a thin film formed of diamond particles each having a particle size of 2 nm to 100 nm is formed on a surface of the emitter. The thin film has a diamond XRD pattern in an XRD measurement and, in a Raman spectroscopic measurement, a ratio of an sp3 bonding component to an sp2 bonding component within the film of 2.5 to 2.7:1. When a DC voltage is applied to the emitter, with a threshold electric field intensity of 1 V/?m or less, electrons larger in number than the prior art are emitted from the emitter and moreover, a temperature of the emitter is hardly increased, thus obtaining a longer lifetime.Type: ApplicationFiled: April 10, 2007Publication date: November 5, 2009Inventors: Hitoshi Inaba, Yoshinori Okubo, Yoshiyuki Yagi, Shunichi Sato, Kazuhito Nishimura
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Patent number: 7609816Abstract: Generation of 2 ?W average output power at 13.9 nm from a table-top laser-pumped Ni-like Ag laser operating at 5 Hz repetition rate using a silver-coated helical target which is rotated and advanced such that the target surface is renewed between pulses, is described. Greater than 2×104 soft x-ray laser pulses were obtained using a single target. Similar results were obtained at 13.2 nm for Ni-like Cd using a cadmium-coated target. Uninterrupted operation of laser-pumped soft x-ray lasers at a repetition rates of about 10 Hz for periods of several hours enables the generation of pulsed, high average power soft x-rays for applications. Other embodiments of the renewable laser target are described.Type: GrantFiled: May 21, 2007Date of Patent: October 27, 2009Assignee: Colorado State University Research FoundationInventor: Jorge J. Rocca
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Patent number: 7605385Abstract: An electrode-less discharge source of extreme ultraviolet (EUV) radiation (10) efficiently assembles a hot, dense, uniform, axially stable plasma column (5) with magnetic pressure and inductive current drive. It employs theta-pinch-type magnetic compression of plasma confined in a magnetic mirror. Plasma, confined in a magnetic mirror, is made to radiate by resonant magnetic compression. The device comprises a radiation-source gas input nozzle (1), an optional buffer-gas input flow (2), mirror-field coils (9a, 9b), theta-pinch coils (8a, 8b), a plasma and debris dump (11), and an evacuation port (7). The circular currents yield an axially stable plasma-magnetic-field geometry, and a reproducible, stable, highly symmetrical EUV source.Type: GrantFiled: July 28, 2005Date of Patent: October 20, 2009Assignee: Board of Regents of the University and Community College System of Nevada, on behlaf of the University of NevadaInventor: Bruno Bauer
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Patent number: 7593509Abstract: In one example, an x-ray device is provided that includes an enclosure having an x-ray transmissive window. A cathode assembly that includes an electron source capable of emitting electrons is disposed within the enclosure. An anode is also disposed in the enclosure between the cathode assembly and the window. The anode includes a body portion and a target surface that is positioned on the body portion so as to face away from the electron source of the cathode assembly. The anode further includes a drift tunnel that defines a path through which electrons pass from the electron source to the target surface. Finally, this example includes a voltage source electrically connected so as to provide a potential field that causes some of the electrons to impact the target surface and produce x-rays for emission through the window.Type: GrantFiled: September 27, 2007Date of Patent: September 22, 2009Assignee: Varian Medical Systems, Inc.Inventors: John Richardson, Robert Treseder
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Patent number: 7583791Abstract: An X-ray tube target assembly and method of manufacturing same is provided. The X-ray tube target assembly comprises an injection molded target disk. The injection molded target disk includes an injection molded hub member and an injection molded outer member. The injection molded outer member comprises a plurality of injection molded outer member segments that are removably attached together and removably attached to the hub member to form the injection molded target disk. A target track is formed on an outer surface on one side of an outer periphery of the injection molded outer member.Type: GrantFiled: November 27, 2007Date of Patent: September 1, 2009Assignee: General Electric Co.Inventors: Ron Kent Hockersmith, Michael Scott Hebert, Thomas Dean Schaefer, Ethan James Westcot
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Patent number: 7576343Abstract: The present invention provides a method of delivering solid material at a position far enough from any surrounding solid with high enough target density without scattering debris to the environment. In the present invention, radiation is generated from plasma produced by laser irradiation on a material. This material is a cluster of particles that is composed of many fine particles bound together with a binder that vaporizes at temperature lower than melting point of fine particles. Density of particles in a particle-cluster 8 is increased by vaporizing a solvent 7 by heating a droplet 5 with the irradiation of laser 6. Solvent of a droplet occupies large fraction of the droplet in order to stabilize droplet generation. This solvent is vaporized prior to delivery to a vacuum chamber 9 for plasma generation. This vaporization helps to avoid degradation of vacuum of the chamber 9. The diameter of a particle-cluster thus condensed is several tens ?m.Type: GrantFiled: March 24, 2004Date of Patent: August 18, 2009Assignee: National Institute of Advanced Industrial Science and TechnologyInventor: Toshihisa Tomie