Abstract: The present invention provides a transmission type X-ray tube and a reflection type X-ray tube. The transmission type X-ray tube comprises a target and a filter material. The target has at least one element which produces X-rays as being excited. The X-rays comprise characteristic K? and K? emission energies of the element for producing images of an object impinged by the X-rays. The filter material through which the X-rays pass has a k-edge absorption energy that is higher than the K? emission energies and is lower than the K? emission energies. The thickness of the filter material is at least 10 microns and less than 3 millimeters.

Abstract: An x-ray source for use in Phase Contrast Imaging is disclosed. In particular, the x-ray source includes a cathode array of individually controlled field-emission electron guns. The field emission guns include very small diameter tips capable of producing a narrow beam of electrons. Beams emitted from the cathode array are accelerated through an acceleration cavity and are directed to a transmission type anode, impinging on the anode to create a small spot size, typically less than five micrometers. The individually controllable electron guns can be selectively activated in patterns, which can be advantageously used in Phase Contrast Imaging.

Abstract: There is provided a target for an X-ray generator, including: a holder part made of an electrically conductive material and having an opening part; a diamond plate air-tightly joined to the holder part so as to close the opening part; a thin film target provided on a surface of the diamond plate, with its outer peripheral part extending to the holder part to be electrically connected to the holder part, wherein the holder part is configured to be electrically connected to a power supply of the X-ray generator, and the diamond plate is incorporated into the X-ray generator with one side disposed in a vacuum atmosphere where the thin film target is formed, and an opposite side thereto disposed at a side where the diamond plate is brought into thermal contact with a refrigerant and cooled.

Abstract: In one embodiment, an X-ray source is provided that includes one or more electron emitters configured to emit one or more electron beams and one or more source targets configured to receive the one or more electron beams emitted by the one or more electron emitters and, as a result of receiving the one or more electron beams, to emit X-rays. Each source target of the X-ray source includes a first layer having one or more first materials; and a second layer in thermal communication with the first layer and having one or more second materials. The first layer is positioned closer to the one or more emitters than the second layer, the first material has a higher overall thermal conductivity than the second layer, and the second layer produces the majority of the X-rays emitted by the source target.

Abstract: The present application is directed to an anode for an X-ray tube. The X-ray tube has an electron aperture through which electrons emitted from an electron source travel subject to substantially no electrical field and a target in a non-parallel relationship to the electron aperture and arranged to produce X-rays when electrons are incident upon a first side of the target, wherein the target further comprises a cooling channel located on a second side of the target. The cooling channel comprises a conduit having coolant contained therein. The coolant is at least one of water, oil, or refrigerant.

Abstract: We disclose targets for generating x-rays using electron beams, along with their method of fabrication. The targets comprise a number of microstructures fabricated from an x-ray target material arranged in close thermal contact with a substrate such that the heat is more efficiently drawn out of the x-ray target material. This in turn allows irradiation of the x-ray generating substance with higher electron density or higher energy electrons, which leads to greater x-ray brightness, without inducing damage or melting. The microstructures may comprise conventional x-ray target materials (such as tungsten) that are patterned at micron-scale dimensions on a thermally conducting substrate, such as diamond. The microstructures may have any number of geometric shapes to best generate x-rays of high brightness and efficiently disperse heat. In some embodiments, the target comprising microstructures may be incorporated into a rotating anode geometry, to enhance x-ray generation in such systems.

Abstract: An X-ray tube 10 with an anode 30 comprising at least a rod shaped body with a front wall having target area 32 as target for an electron beam 27 on its frontal side provides a high intensity of X-ray radiation if the anode 30 has at least one cavity extending to the front wall, the cavity having a coating 50 of at least one inorganic salt.

Abstract: Provided is an X-ray tube. The X-ray tube includes an electrode on which an electron beam impacts to generate an X-ray, and a window on which the electrode is disposed and through which the X-ray generated from the electrode is transmitted. The electrode includes a channel passing through the electrode, and the electron beam is provided into the channel to generate the X-ray.

Abstract: The present system and method for simulating particles and waves is useful for calculations involving nuclear and full spectrum radiation transport, quantum particle transport, plasma transport and charged particle transport. The invention provides a mechanism for creating accurate invariants for embedding in general three-dimensional problems and describes means by which a series of simple single collision interaction finite elements can be extended to formulate a complex multi-collision finite element.

Abstract: An x-ray generator includes a voltage source and a voltage divider network coupled thereto, a housing, and an insulator carried within the housing. An emitter cathode is carried within the housing and emits electrons and undesirable conductive particles. In addition, there is a shielding electrode carried within the housing downstream of the emitter cathode and coupled to the voltage divider network. A target is carried within the housing downstream of the at least one shielding electrode. The voltage divider is configured so that the emitter cathode and the shielding electrode have a voltage difference therebetween such that an electric field generated in the housing accelerates electrons emitted by the emitter cathode to toward the target. The shielding electrode is shaped to capture the undesirable conductive particles emitted by the emitter cathode that would otherwise strike the insulator.

Abstract: The present invention relates to X-ray generating technology in general, in particular, it relates to an anode disk element (1) for an X-ray generating device (21). The generation of electromagnetic radiation may be considered to be quite inefficient, since a substantial part of energy applied to a focal track is converted to heat rather than X-radiation. Thus, a limiting factor in the operation of X-ray tubes is the cooling of the anode element and more specifically the focal track. In the present invention, an anode disk element is provided, with an improved dissipation of heat from the focal track. Thus, the anode disk element may sustain increased heat while maintaining structural integrity. The anode disk element (1) comprises at least a first surface (2) and a second surface (3), with the first surface (2) comprising a focal track (4) and the second surface (3) comprising a conductive coating (5).

Abstract: A system and method for x-ray tube components is disclosed. The method of fabricating an x-ray tube component includes providing a powder into an electrically conductive die constructed to have a cavity shaped as the x-ray tube component being fabricated and simultaneously applying a mechanical pressure and an electric field to the die so as to cause sintering of the powder and thereby fabricate the x-ray tube component, wherein the electric field applied to the die directly passes through the die to the powder, so as to generate heat internally within the powder responsive to the applied electric field.

Abstract: Techniques for generating EUV light include directing a first pulse of radiation toward a target material droplet to form a modified droplet, the first pulse of radiation having an energy sufficient to alter a shape of the target material droplet; directing a second pulse of radiation toward the modified droplet to form an absorption material, the second pulse of radiation having an energy sufficient to change a property of the modified droplet, the property being related to absorption of radiation; and directing an amplified light beam toward the absorption material, the amplified light beam having an energy sufficient to convert at least a portion of the absorption material into extreme ultraviolet (EUV) light.

Abstract: An anode disk element for the generation of X-rays that provides improved dissipation of heat from a focal track includes an anisotropic thermal conductivity. The anode disk element includes a focal track and at least one heat dissipating element. The anode disk element is rotatable about a rotational axis with the focal track being rotationally symmetrical to the rotational axis. The at least one heat dissipating element is configured for heat dissipation from the focal track in the direction of reduced thermal conductivity of the anode disk element.

Abstract: A device for generating X-rays includes at least one electron source for the emission of an electron beam that defines a plane having a predetermined width value in a width dimension and a predetermined length value in a length dimension. The width dimension is substantially perpendicular to the length dimension. The device also includes at least one window frame at least partially defining at least one liquid metal flow path. The device further includes at least one electron window coupled to the at least one window frame. The at least one electron window is positioned within the at least one liquid metal flow path and is configured to receive the electron beam. The at least one electron window emits X-rays in response to an incidence of electrons thereon. The at least one electron window includes a surface curved in at least one of the width dimension and the length dimension.

Abstract: A transmissive target includes a target layer configured to include target metal and generate X-ray when receiving electrons and a substrate configured to support the target layer and include carbon as a main component. A carbide region including carbide of the target metal and a non-carbide region including the target metal are disposed in a mixed manner on a boundary surface between the substrate and the target layer on a target layer side.

Abstract: A system and method for x-ray tube components is disclosed. The method of fabricating an x-ray tube component includes providing a powder into an electrically conductive die constructed to have a cavity shaped as the x-ray tube component being fabricated and simultaneously applying a mechanical pressure and an electric field to the die so as to cause sintering of the powder and thereby fabricate the x-ray tube component, wherein the electric field applied to the die directly passes through the die to the powder, so as to generate heat internally within the powder responsive to the applied electric field.

Abstract: A method (100) creates a braze joint (58) between an anode plate (52) and a piece of graphite (56) of an x-ray tube (38). The method (100) includes receiving (102) the anode plate (52) and the piece of graphite (56). A barrier layer (66) and a braze layer (62) are arranged (104, 106, 108) between the anode plate (52) and the piece of graphite (56), where the barrier layer (66) is between the piece of graphite (56) and the brazing layer (62). The barrier layer (66) is heated (110) with the braze layer (62) to create the braze joint (58) between the anode plate (52) and the piece of graphite (56).

Abstract: Closed-loop circulation for providing liquid metal to an interaction region at which an electron beam is to impact upon the liquid metal to produce X-rays is presented. In a method, the pressure of the liquid metal is raised to at least 10 bar using a high-pressure pump. The pressurized liquid metal is then conducted to a nozzle and ejected into a vacuum chamber in the form of a spatially continuous jet. After passage through the vacuum chamber, the liquid metal is collected in a collection reservoir, and the pressure of the liquid metal is raised to an inlet pressure, e.g. using a primer pump, suitable for the inlet of the high-pressure pump. Also, a corresponding circulation system and an X-ray source provided with such circulation system.

Abstract: According to one embodiment, an X-ray tube including an electron emission source which emits an electron, an anode target which comprises a target layer emitting an X-ray by the electron from the electron emission source, and a substrate supporting the target layer and composed from a carbide-strengthened molybdenum alloy, an evacuated outer surrounding envelope which contains the electron emission source and the anode target, a diffusion barrier layer which is integrally formed with the substrate by a powder metallurgy method on a part of a top surface of the substrate and is composed of a high-melting-point metal lacking of carbon-element content compared with carbon-element content in the substrate, and a thermal radiation film which is formed on at least a part of a top surface of the diffusion barrier layer and composed of metallic oxide.

Abstract: Techniques for generating EUV light include directing a first pulse of radiation toward a target material droplet to form a modified droplet, the first pulse of radiation having an energy sufficient to alter a shape of the target material droplet; directing a second pulse of radiation toward the modified droplet to form an absorption material, the second pulse of radiation having an energy sufficient to change a property of the modified droplet, the property being related to absorption of radiation; and directing an amplified light beam toward the absorption material, the amplified light beam having an energy sufficient to convert at least a portion of the absorption material into extreme ultraviolet (EUV) light.

Abstract: A method includes creating a gas flow in a gas cell and cooling a portion of the gas flow to create a thermally-induced temperature gradient in the gas flow. The method also includes directing at least one laser beam through at least a portion of the gas flow with the thermally-induced temperature gradient. The gas flow can be directed axially along a length of the gas cell or transverse to the length of the gas cell, and the at least one laser beam can be directed axially along the length of the gas cell through at least the portion of the gas flow. The gas flow may represent a first gas flow, and the method may further include creating a second gas flow in the gas cell and cooling a portion of the second gas flow to create a thermally-induced temperature gradient in the second gas flow.

Abstract: A control method for a target supply device may employ a target supply device, provided in an EUV light generation apparatus including an image sensor, that includes a target generator having a nozzle and configured to hold a target material and a pressure control unit configured to control a pressure within the target generator, and the method may include outputting the target material in the target generator from a nozzle hole in the nozzle by pressurizing the interior of the target generator using the pressure control unit, determining whether or not a difference between an output direction of the target material outputted from the nozzle hole that is detected by the image sensor and a set direction is within a predetermined range, and holding the pressure in the target generator using the pressure control unit until the difference falls within the predetermined range.

Abstract: A radiation transmission type target to be used for a radiation tube has a target metal 12 placed on a substrate 13, and has an antistatic member 14 placed on a surface of the substrate 13 opposite to a surface on which the target metal 12 is placed. The target suppresses its electrostatic charge, and enables the radiation tube to stable operate.

Abstract: Closed-loop circulation for providing liquid metal to an interaction region at which an electron beam is to impact upon the liquid metal to produce X-rays is presented. In a method according to the invention, the pressure of the liquid metal is raised to at least 10 bar using a high-pressure pump. The pressurized liquid metal is then conducted to a nozzle and ejected into a vacuum chamber in the form of a spatially continuous jet. After passage through the vacuum chamber, the liquid metal is collected in a collection reservoir, and the pressure of the liquid metal is raised to an inlet pressure, e.g. using a primer pump, suitable for the inlet of the high-pressure pump. The invention also relates to a corresponding circulation system and an X-ray source provided with such circulation system.

Abstract: During operation of an x-ray source, an electron source emits a beam of electrons. Moreover, a repositioning mechanism selectively repositions the beam of electrons on a surface of a target based on a feedback parameter, where a location of the beam of electrons on the surface of the target defines a spot size of x-rays output by the x-ray source. In response to receiving the beam of electrons, the target provides a transmission source of the x-rays. Furthermore, a beam-parameter detector provides the feedback parameter based on a physical characteristic associated with the beam of electrons and/or the x-rays output by the x-ray source. This physical characteristic may include: at least a portion of an optical spectrum emitted by the target, secondary electrons emitted by the target based on a cross-sectional shape of the beam of electrons; an intensity of the x-rays output by the target; and/or a current from the target.

Abstract: The present invention relates in particular to methods and apparatuses for generating and/or providing X-ray radiation with specific radiation characteristics, in particular with a specific radiation dose rate curve (10). In order to provide simple and cost efficient solution, it is provided according to the invention, that the X-ray radiation is generated and/or provided, by composing and/or adapting the X-ray radiation with the specific radiation characteristics, in particular with the specific radiation dose rate curve (10), proportionally from a first specification X-ray radiation with a defined first radiation characteristics, in particular with a predetermined first radiation dose rate curve (11) and a second specification X-ray radiation, which is different from the first specification X-ray radiation, with defined second radiation characteristics, in particular with a predetermined second radiation dose rate curve (12).

Abstract: An anode with a linear main direction of extent for an x-ray device, has an anode body and a focal track layer, which is connected to the anode body in a material-bonding manner on a focal track layer volume portion of the anode body. At least one cooling channel for the cooling of the anode body and the focal track layer is arranged in the interior of the anode body and at least the focal track layer volume portion is formed of a material with at least a basic matrix of refractory metal. The focal track layer volume portion extends as far as to the cooling channel.

Abstract: A transmission-type X-ray target includes a flat plate-shaped diamond substrate having a first surface and a second surface facing the first surface and a target layer that is located on the first surface. A residual stress of the first surface is lower than a residual stress of the second surface.

Abstract: In a target structure according to the present invention, a target is provided on a central area of an insulating substrate, and a first conductive member for supplying a voltage to the target is provided on a peripheral area of the insulating substrate which is exclusive of an area overlapping the target and is not covered by the target, so that the first conductive member is in contact with and electrically connected to the peripheral portion of the target. Consequently, it is possible to easily form a voltage supply line to the target without preventing diffusion of a heat generated in the target to the substrate and while suppressing emission of an unnecessary X-ray.

Abstract: An x-ray apparatus (1), has an electron beam source (2), a target (4), onto which the electron beam (3) is directed to form a focal spot (5; 5a, 5b) on the target (4), x-ray optics (6) for collecting x-rays emitted from the focal spot (5; 5a, 5b) to form an x-ray beam (8) and a sample position (9) at which the x-ray beam (8) is directed. The x-ray apparatus (1) further includes an electrostatic or electromagnetic electron beam deflection device (10) suitable for moving the focal spot (5; 5a, 5b) on the target (4). The extension of the focal spot (5; 5a, 5b) in any direction (x, y, z) is at least a factor of 1.5 smaller than the extension of the target (4). An x-ray apparatus is thereby provided with simplified alignment of the x-ray optics with respect to a microfocus x-ray source.

Abstract: In particular embodiments, the present disclosure provides targets including a metal layer and defining a hollow inner surface. The hollow inner surface has an internal apex. The distance between at least two opposing points of the internal apex is less than about 15 ?m. In particular examples, the distance is less than about 1 ?m. Particular implementations of the targets are free standing. The targets have a number of disclosed shaped, including cones, pyramids, hemispheres, and capped structures. The present disclosure also provides arrays of such targets. Also provided are methods of forming targets, such as the disclosed targets, using lithographic techniques, such as photolithographic techniques. In particular examples, a target mold is formed from a silicon wafer and then one or more sides of the mold are coated with a target material, such as one or more metals.

Abstract: An integrated X-ray source is provided. The integrated X-ray source includes a target for emitting X-rays upon being struck by one or more excitation beams, and one or more total internal reflection multilayer optic devices in physical contact with the target to transmit at least a portion of the X rays through total internal reflection to produce X-ray beams, wherein the optic device comprises an input face for receiving the X rays and an output face through which the X-ray beams exit the integrated X-ray source.

Abstract: An X-ray emitting target including a diamond substrate, a first layer disposed on the diamond substrate and including a first metal, and a second layer disposed on the first layer and including a second metal whose atomic number is 42 or more and which has a thermal conductivity higher than that of the first metal. The layer thickness of the first layer is greater than or equal to 0.1 nm and smaller than or equal to 100 nm. The target is prevented from overheating, so that output variation due to rising temperature is suppressed. Thus it is possible to emit stable and high output X-rays.

Abstract: An X-ray emitting target including a diamond substrate, a first layer disposed on the diamond substrate and including a first metal, and a second layer disposed on the first layer and including a second metal whose atomic number is 42 or more and which has a thermal conductivity higher than that of the first metal. Carbide of the first metal is present at a boundary between the diamond substrate and the first layer. The target is prevented from overheating, so that output variation due to rising temperature is suppressed. Thus it is possible to emit stable and high output X-rays.

Abstract: A system for applying a target track material to an x-ray tube target includes a controller configured to direct a beam of energy toward an x-ray tube target, and direct a solid stock material toward the beam of energy to cause the solid stock material to melt and deposit as a melted material on the x-ray tube target.

Abstract: A radiation generating unit of the present invention includes an electron beam source that emits an electron beam and can change the size of a region to be irradiated with the electron beam on a target while maintaining constant the center position of the region to be irradiated with the electron beam. Furthermore, a target is adopted where the number of types of target layers included in the region to be irradiated with the electron beam can be changed by changing the size of the region to be irradiated with the electron beam. The radiation quality can be switched without changing the radiation focus, and the radiation quality of a high energy radiation can be largely changed.

Abstract: Techniques for generating EUV light include directing a first pulse of radiation toward a target material droplet to form a modified droplet, the first pulse of radiation having an energy sufficient to alter a shape of the target material droplet; directing a second pulse of radiation toward the modified droplet to form an absorption material, the second pulse of radiation having an energy sufficient to change a property of the modified droplet, the property being related to absorption of radiation; and directing an amplified light beam toward the absorption material, the amplified light beam having an energy sufficient to convert at least a portion of the absorption material into extreme ultraviolet (EUV) light.

Abstract: A target for generating x-rays includes a target substrate comprising molybdenum and having a beveled surface according to a desired track angle, a track comprising tungsten and configured to generate x-rays from high-energy electrons impinging thereon, wherein the track comprises a brazing surface having an area that is less than an area of the beveled surface of the target substrate, and a braze joint attaching the brazing surface of the track to the beveled surface of the target substrate.

Abstract: The present invention relates to X-ray generating technology in general. Providing an electron collecting element of an X-ray generating device statically may allow for the manufacture of X-ray systems with reduced moving parts and actuating parts, possibly reducing manufacturing costs and sources for failure. Consequently, an electron collecting element with increased thermal loadability is presented. According to the present invention, an electron collecting element (28) is provided, comprising a surface element (22) and a heat conducting element (26). The heat conducting element (26) comprises a first thermal conductivity in a first direction and at least a second thermal conductivity in at least a second direction. The first thermal conductivity is greater than the second thermal conductivity. The first direction is substantially perpendicular to the surface element (22).

Abstract: A radiation emission target includes a target layer that generates radiation when irradiated with an electron beam and a substrate composed of diamond, the substrate supporting the target layer. The substrate has a Knoop hardness of 60 GPa or more and 150 GPa or less.

Abstract: The present disclosure relates to a liquid anode radiation source (10) having the ability of turning upside down. The liquid anode radiation source (10) comprises a body (12) equipped with inlet and outlet having a wall (15) limiting the anode space (17), where the outlet connected to the inlet outside the body (12) will define a continuous flow path closing through the body, the inlet has a wall limiting an internal cross-section changing towards the anode space (17), wherein the cross-section of the inlet a deflector (11) is arranged in a position free of contacting the wall, filling out the cross-section partially and movable to the direction perpendicular to the cross-section; the liquid anode material (14) arranged in the flow path; the circulation unit inserted in the flow path in such a way that it can ensure the unidirectional movement of the anode material in the flow path.

Abstract: An EUV radiation source includes a fuel supply configured to supply fuel to a plasma formation location. The fuel supply includes a nozzle configured to eject droplets of fuel, and a droplet accelerator configured to accelerate the fuel droplets. The EUV radiation source includes a laser radiation source configured to irradiate the fuel supplied by the fuel supply at the plasma formation location.

Abstract: The present invention provides a transmission type radiation generating target which can suppress the exfoliation or the crack of a target layer in an interface between a supporting substrate and the target layer, even when the density of incident electrons has been enhanced or the potential of the target has been enhanced. The transmission type radiation generating target includes a supporting substrate, and a target layer which is arranged on the supporting substrate and generates radiation in response to irradiation with an electron beam, wherein the target layer has an opening through which the supporting substrate is exposed, and the opening overlaps with a position at which the density of the irradiation with the electron beam is maximum.

Abstract: Described herein are devices for converting a broadband x-ray beam to at least one substantially monochromatic x-ray beam. The devices may be an adaptor for existing x-ray machines or for use with a standalone machine. The device 20 includes a shielded housing 22 having an inner cavity and a fluorescent target 26, 26? disposed in the inner cavity 24 wherein the fluorescent target 26, 26? emits at least one substantially monochromatic x-ray beam when exposed to a broadband x-ray beam. The housing 22 includes a first opening 30 in the housing 22 configured to allow the broadband x-ray beam from an x-ray source to enter the inner cavity 24 and irradiate the fluorescent target 26, 26? and a second opening 34 in the housing configured to allow the at least one substantially monochromatic x-ray beam emitted by the fluorescent target to exit the housing 22. Also described herein are sources of monochromatic x-rays 60, 84, 112, as well as diagnostic and therapeutic methods of using of monochromatic x-ray beams.

Abstract: A distributed X-ray source (3) and an imaging system (1) comprising such an X-ray source (3) are proposed. The X-ray source (3) comprises an electron beam source arrangement (19) and an anode arrangement (17). The electron beam source arrangement (19) is adapted to emit electron beams (24) towards at least two locally distinct focal spots (27) on the anode arrangement (17). Therein, the X-ray source is adapted for displacing the anode arrangement (17) with respect to the electron beam source arrangement (19). While the provision of a plurality of focal spots allows acquisition of projection images under different projection angles thereby allowing reconstruction of three-dimensional X-ray images e.g. in tomosynthesis application, a displacement motion of the anode arrangement (17) with respect to the electron beam source arrangement (19) may allow for distributed heat flux to the anode arrangement thereby possibly reducing cooling requirements.

Abstract: The present invention pertains to a method and apparatus for generating a beam of charged particles, accelerating the charged particles toward a first side of a layer of X-ray target material configured to emit Bremsstrahlung radiation through a second side, receiving the Bremsstrahlung radiation on a first face of an additional layer of a different X-ray target material configured to emit characteristic fluorescence X-rays with energy above 20 keV through a second face, wherein the additional layer of X-ray target material is located within 3 mm of the second side of the first layer of material. The first X-ray target material can have an atomic number greater than 21.

Abstract: Illustrative embodiments of the present disclosure are directed to devices and methods for X-ray monitoring. Various embodiments of the present disclosure use a target that incorporates a monitor layer. The monitor layer is disposed adjacent to a target layer so that electrons that pass through the target layer enter the monitor layer. As electrons enter the monitor layer, electrical charge is generated within the monitor layer. This electrical charge is measured and used to determine a characteristic of the X-ray generation within the target layer.

Abstract: In a radiation source and a method for the generation of X-radiation, a liquid is arranged in a liquid line, the liquid being completely surrounded by the liquid line in the direction of an evacuated chamber. A portion of the liquid line is permeable to an electron beam such that the electron beam extending through the chamber is able to enter via the liquid line so as to interact with the liquid in an interaction zone for the generation of X-radiation. The radiation source ensures a good dissipation of heat from the interaction zone and prevents liquid from entering the chamber.

Abstract: A miniature X-ray source device for effecting radiation therapy at least comprising a vacuum tube containing a cathode and an anode spaced apart at some distance from each other; emitting means for emitting free electrons from the cathode; electric field generating means for applying during use a high-voltage electric field between the cathode and the anode for accelerating the emitted free electrons towards the anode, as well as an exit window for X-ray radiation being generating at the anode. The present invention provides an improved miniature X-ray source device, that can also properly be used in treating skin cancer and which is easy to handle. The anode is provided with a flat X-ray emitting surface. In particular, the cathode exhibits a concave shaped surface having a center part surrounded by an upright circumferential edge, wherein the center part of the concave shaped surface is provided with an electron emitting material.