Target Patents (Class 378/143)
-
Patent number: 7570741Abstract: Diamond based proton beam target (12) designs for use in contraband detection/indentification systems. Such novel Diamond based proton beam targets (12) are used in Electrostatic and RF Accelerator based devices for generating proton beams (10) that impinge on the targets (12) for generating single or multiple monoenergetic gamma ray (15) beams used in detection/measurement of contraband.Type: GrantFiled: August 6, 2004Date of Patent: August 4, 2009Assignee: Contraband Detection Systems, L.L.C.Inventors: Stephan T. Melnychuk, Raymond J. Meilunas
-
Patent number: 7567650Abstract: The present invention relates to an X-ray source for the generation of fluorescent X-rays. The X-ray source is realized by an electron source for the emission of electrons and a target which emits X-rays in response to the incidence of the electrons, the target comprising a ring-shaped primary target for the emission of primary X-rays in response to the incidence of the electrons and a secondary target for the emission of fluorescent X-rays in response to the incidence of the primary X-rays. To obtain an enhanced radiance, it is proposed that the primary target comprises a liquid metal channel arranged in a radial direction relative to a central axis, and that a liquid metal circulates in the liquid metal channel during operation of the X-ray source in the radial direction from an inner side to an outer side of the ring-shaped primary target.Type: GrantFiled: May 12, 2004Date of Patent: July 28, 2009Assignee: Koninklijke Philips Electronics N.V.Inventors: Geoffrey Harding, Bernd R. David
-
Patent number: 7558377Abstract: An x-ray anode has an emission layer and a carrier with carrier material to support the emission layer. The carrier material is a metallized carbon fiber material with a portion in which the fibers are specifically directed. A high heat dissipation from the emission layer and a coefficient of heat expansion of the carrier that is advantageous for bonding with the emission layer are achieved.Type: GrantFiled: August 17, 2007Date of Patent: July 7, 2009Assignee: Siemens AktiengesellschaftInventors: Joerg Freudenberger, Eberhard Lenz
-
Patent number: 7558374Abstract: A system and method for generating X-rays comprising a waveguide having a cavity extending therethrough, a first sidewall, and a second sidewall opposite the first sidewall, the second sidewall having an opening extending therethrough forming or including a target therein. An electron emitter coupled to an inner surface of the first sidewall for emitting electrons into the cavity, microwaves coupled into the cavity generating an electric field for accelerating the electrons through the cavity and toward the target in the opening of the second sidewall for generating X-rays.Type: GrantFiled: March 12, 2007Date of Patent: July 7, 2009Assignee: General Electric Co.Inventor: Sergio Lemaitre
-
Patent number: 7555102Abstract: In particular embodiments, the present disclosure provides systems and methods for imaging a subject using radiation emitted from a laser produced plasma generating by irradiating a target with a laser. In particular examples, the target includes at least one radiation enhancing component, such as a fluor, cap, or wire. In further examples, the target has a metal layer and an internal surface defining an internal apex, the internal apex of less than about 15 ?m, such as less than about 1 ?m. The targets may take a variety of shapes, including cones, pyramids, and hemispheres. Certain aspects of the present disclosure provide improved imaging of a subject, such as improved medical images of a radiation dose than typical conventional methods and systems.Type: GrantFiled: April 5, 2007Date of Patent: June 30, 2009Inventors: Nathalie Renard-Le Galloudec, Thomas E. Cowan, Yasuhiko Sentoku, Jennifer Rassuchine
-
Patent number: 7551722Abstract: Disclosed are an X-ray target having a micro focus size and capable of producing X-rays of high intensity, and apparatuses using such an X-ray target. The X-ray target (1) has a structure in which a first cap layer (21), a target layer (22), and a second cap layer (23) are successively laminated, wherein the first and second cap layers (21 and 23) are each composed of a material which is lower in electron beam absorptivity than that of which the target layer (22) is composed. An X-ray generator using the X-ray target (1) can generate highly intense and nanofocus (several nm) X-rays (17). Using the X-ray generator, an X-ray microscope allows obtaining a high resolution transmission image, an X-ray diffraction apparatus allows obtaining an X-ray diffraction image of a very small area, and a fluorescent X-ray analysis apparatus allows making the fluorescent X-ray analysis of a minute area.Type: GrantFiled: April 8, 2005Date of Patent: June 23, 2009Assignee: Japan Science and Technology AgencyInventors: Ken-ichi Ohshima, Jinpei Harada
-
Publication number: 20090141864Abstract: A method for generating x-ray radiation, comprising the steps of forming a target jet by urging a liquid substance under pressure through an outlet opening, the target jet propagating through an area of interaction; and directing at least one electron beam onto the target jet in the area of interaction such that the electron beam interacts with the target jet to generate x-ray radiation; wherein the full width at half maximum of the electron beam in the transverse direction of the target jet is about 50% or less of the target jet transverse dimension. A system for carrying out the method is also disclosed.Type: ApplicationFiled: May 8, 2007Publication date: June 4, 2009Applicant: Jettec ABInventors: Hans M. Hertz, Mikael Otendal, Tomi Tuohimaa
-
Publication number: 20090129551Abstract: The present invention provides an electrode, typically an anode, for use in an x-ray generating apparatus comprising an electron source. The electrode comprises a housing, a diamond member mounted to the housing, and a target located on the diamond member, which target in use is bombarded with electrons from the electron source so as to generate x-rays. A bonding layer is located between the housing the diamond member, which bonding layer comprises an alloy having a solidus or melting point of less than 900° C. A particularly preferred alloy comprises silver, copper and indium. This arrangement assists in dissipating heat generated at the electrode surface whilst retaining the structural integrity of the electrode.Type: ApplicationFiled: October 9, 2008Publication date: May 21, 2009Inventors: Peter Robert Butler, Simon Charles Page
-
Patent number: 7525111Abstract: An EUV light source and method include a magnetic plasma confinement mechanism creating a magnetic field in the vicinity of a target ignition site to confine the plasma to the vicinity of the target ignition site, which is controlled using outputs from a target tacking system.Type: GrantFiled: June 20, 2006Date of Patent: April 28, 2009Assignee: Cymer, Inc.Inventor: Norbert Bowering
-
Patent number: 7522707Abstract: In some embodiments, an X-ray target includes a target cap formed of a substrate material and a focal track layer of emitting material, and at least one of the substrate material and the emitting material has a density greater than about 95.0% of theoretical density. In some embodiments, a method of manufacturing an X-ray target includes forming an intermediate target cap form of substrate material and a focal track layer of emitting material, and compacting the intermediate target cap form by application of gas pressure at elevated temperature to form a final target cap form, and at least the substrate material is dense substrate material having a final density greater than an intermediate density or the emitting material is dense emitting material having a final emitting material density greater than an intermediate emitting material density.Type: GrantFiled: November 2, 2006Date of Patent: April 21, 2009Assignee: General Electric CompanyInventors: Gregory Alan Steinlage, Thomas Carson Tiearney, Jr., Michael Scott Hebert, Paul Alfred Siemers, Kirk Alan Rogers, Ray Alden Henrichsen
-
Patent number: 7515688Abstract: The invention relates to an anode module 1 for a liquid-metal anode X-ray source which has an electron entry window 3 in the region of focus 2. It is provided according to the invention that an X-ray beam exit window 4 lies opposite the electron entry window 3 of the anode module 1 and the exit angle ? of the X-ray beams 7 between an electron beam 6 entering through the electron entry window 3 along the direction of incidence 5 and the X-ray beams 7 exiting through the X-ray beam exit window 4 is between 5° and 50°, in particular 15°. The invention also relates to an X-radiator with an electron source for the emission of electrons and a liquid-metal anode emitting X-ray beams 7 when the electrons strike, which has an anode module 1 with the above-named features.Type: GrantFiled: March 30, 2005Date of Patent: April 7, 2009Assignee: GE Homeland Protection, Inc.Inventor: Geoffrey Harding
-
Publication number: 20090086919Abstract: A composite target for generating x-rays includes a target substrate and at least one material applied to the target substrate with a laser beam.Type: ApplicationFiled: October 2, 2007Publication date: April 2, 2009Inventors: Gregory Alan Steinlage, Michael Hebert, Michael Lathrop, Kirk A. Rogers, Thomas C. Tiearney, JR.
-
Publication number: 20090086920Abstract: One or more components of an x-ray target assembly are manufactured using an electroforming process. The electroforming is carried out by providing an electroforming apparatus that includes an electrolyte, a metal anode, and an electrically conductive cathode. The cathode includes an intermediate x-ray target assembly upon which the metal is to be deposited and/or an electrically conductive mold for forming a component of an x-ray target assembly. The x-ray target component (e.g., a substrate or focal track) is formed by submersing the cathode in the electrolyte and applying a voltage across the anode and the cathode to cause the metal from the anode to be electroformed on the intermediate target and/or the mold. The electroforming is continued until a desired thickness of metal is achieved. The electroforming process can be used to manufacture an x-ray target substrate, focal track, stem, barrier, or other metal layer of the target assembly.Type: ApplicationFiled: September 30, 2007Publication date: April 2, 2009Inventors: David S.K. Lee, John E. Postman, Dennis Runnoe
-
Publication number: 20090074146Abstract: An X-ray imaging system is provided that includes a target for emitting X-rays and having at least one target focal spot, and an array of multilayer optic devices for transmitting X-rays through total internal reflection. The array of multilayer optics devices are in optical communication with the at least one target focal spot. Further, a method for imaging an object with an X-ray imaging machine is provided. Also, a method for forming a stack of multilayer optic devices is provided.Type: ApplicationFiled: September 19, 2007Publication date: March 19, 2009Applicant: GENERAL ELECTRIC COMPANYInventors: Susanne Madeline Lee, Forrest Frank Hopkins, Peter Michael Edic
-
Patent number: 7505565Abstract: An x-ray anode for use in an x-ray tube is provided. The x-ray anode includes a substrate material, a target material, and one or more graded coefficient of thermal expansion material layers. The target material is coupled to the one or more graded coefficient of thermal expansion material layers and the graded coefficient of thermal expansion material layers are coupled to the substrate material. A method of making the x-ray anode is also provided.Type: GrantFiled: January 17, 2006Date of Patent: March 17, 2009Assignee: General Electric Co.Inventors: Thomas C. Tiearney, Jr., Brian D. Lounsberry
-
Patent number: 7505563Abstract: An anode for an X-ray source is formed in two parts, a main part and a collimating part. The main part has the target region formed on it. The two parts between them define an electron aperture through which electrons pass to reach the target region, and an X-ray aperture through which the X-rays produced at the target leave the anode. The anode produces at least the first stage of collimation of the X-ray beam produced.Type: GrantFiled: February 19, 2008Date of Patent: March 17, 2009Assignee: Rapiscan Systems, Inc.Inventors: Edward James Morton, Russell David Luggar, Paul De Antonis
-
Publication number: 20090052625Abstract: There is disclosed a device including: an electron beam generation device 10 which accelerates a pulse electron beam 1 to transmit the beam through a predetermined rectilinear orbit 2; a laser generation device 20 which generates a pulse laser light 3; a laser light introduction device 30 which introduces the pulse laser light 3 onto the rectilinear orbit 2 so as to collide with the pulse electron beam 1; a metal target 42 which generates a particular X-ray 5 by collision with the pulse electron beam 1: and a target moving device 40 capable of moving the metal target between a collision position 2a on the rectilinear orbit and a retreat position out of the orbit. A collision surface of the metal target 42 is positioned spatially at the same position as that of the collision point 2a. At the retreat position of the metal target, the pulse electron beam 1 collides with the pulse laser light 3 to generate a monochromatic hard X-ray 4.Type: ApplicationFiled: May 11, 2006Publication date: February 26, 2009Applicants: IHI CORPORATION, THE UNIVERSITY OF TOKYO, NATIONAL INSTITUTE OF RADIOLOGICAL SCIENCESInventors: Hiroyuki Nose, Daisuke Ishida, Namio Kaneko, Hisaharu Sakae, Mitsuru Uesaka, Atsushi Fukasawa, Katsuhiro Dobashi
-
Publication number: 20090052628Abstract: The invention is directed to a novel foil for use as an entrance window foil during the production of [18F] by irradiation of [18O] using a particle accelerator. The foil is a high strength cobalt based alloy foil, thin film coated with an inert and refractory metal such as niobium.Type: ApplicationFiled: August 24, 2007Publication date: February 26, 2009Applicant: GOVERNORS OF THE UNIVERSTY OF ALBERTAInventors: John Scott WILSON, Stephen Andrew McQUARRIE, Richard JOHNSON
-
Publication number: 20090041197Abstract: A method of manufacturing a radiation source in one example comprises selecting at least one of a target, a collimator, and target shielding consisting essentially of at least one isotope having a neutron production threshold less than a peak acceleration energy of the source, and assembling the source including the selected material.Type: ApplicationFiled: October 14, 2008Publication date: February 12, 2009Inventor: James E. Clayton
-
Patent number: 7489763Abstract: A rotary anode x-ray radiator has an anode produced from a first material as well as a cathode. A structure for accommodation of at least one heat conductor element produced from a second material is provided on an external side of the anode facing away from the cathode, in an annular segment situated opposite the anode. The second material exhibits a higher heat conductivity than the first material. The heat conductor elements are accommodated in the structure to form expansion gaps.Type: GrantFiled: July 25, 2006Date of Patent: February 10, 2009Assignee: Siemens AktiengesellschaftInventor: Eberhard Lenz
-
Patent number: 7483517Abstract: The invention relates to a device for generating X-rays (18) comprising an electron source (3) for emitting electrons accommodated in a vacuum space (2), a liquid metal circuit including a liquid metal for emitting X-rays as a result of the incidence of electrons and a pumping means (11) for causing a flow of the liquid metal through a constriction (7) where the electrons emitted by the electron source (3) impinge upon the liquid metal, and a radiation window (12) bounding said constriction (7), which is transparent to electrons and X-rays and separates the constriction (7) from the vacuum space (2).Type: GrantFiled: March 31, 2005Date of Patent: January 27, 2009Assignee: Koninklijke Philips Electronics N.V.Inventors: Hans Barschdorf, Bernd R. David, Axel Thran
-
Patent number: 7471769Abstract: An X-ray source and an X-ray apparatus with an X-ray source are provided, the X-ray source includes a liquid metal target which flows through a system of ducts and is conducted through a duct section which has a flow cross-section that is reduced relative to that of the system of ducts. The X-ray source provides a pressure source for acting on the liquid metal target such that the pressure in the liquid metal target at the area of the reduced flow cross-section equals essentially a selectable reference value or remains essentially in a pressure range between selectable limit values of the pressure. A comparatively small thickness of a window can thus be realized in conjunction with a comparatively high flow speed.Type: GrantFiled: June 20, 2002Date of Patent: December 30, 2008Assignee: Koninklijke Philips Electronics N.V.Inventors: Geoffrey Harding, Bernd David, Rainer Willi Eckart, Jens Peter Schlomka
-
Patent number: 7469040Abstract: X-ray tube (11/12) for high dose rates, a corresponding method for generating high dose rates with X-ray tubes (11/12) as well as a method for producing corresponding X-ray devices (11/12), in which an anode (31/32) and a cathode (21/22) are disposed opposite each other in a vacuumized internal chamber (41/42), electrons e? being accelerated to the anode (31/32) by means of impressible high voltage. The anode (31/32) is made of a layer or coating of a metal having a high atomic number, for conversion of the electrons (e?) into X-ray radiation (?) with cooling. The cathode (21/22) comprises a substrate substantially transparent for X-ray radiation (?). In particular, the likewise substantially transparent for X-ray radiation (?). In particular, the cathode (31/32) can close off the vacummized internal chamber (41/42) toward the outside.Type: GrantFiled: March 2, 2004Date of Patent: December 23, 2008Assignee: Comet Holding AGInventors: Kurt Holm, Mark Joachim Mildner, Lars-Ola Nilsson, Adrian Riedo, Toni Waber
-
Patent number: 7460646Abstract: A method for generating extreme ultraviolet and/or soft X-ray radiation by a plasma that can be generated through irradiation of a material. In order to obtain a reduction in the contamination of an optical illumination system as well as an instantaneous optimization of the power of a radiation source, at least a quantity of the material is controlled by a blocking device.Type: GrantFiled: March 9, 2004Date of Patent: December 2, 2008Assignee: Koninklijke Philips Electronics N.V.Inventor: Peter Zink
-
Patent number: 7456417Abstract: Target 1 that is arranged in the disc direction is sprayed from nozzle 2 that has a slit-shaped aperture. Target 1 is conveyed on a gas stream. He gas is used in this example. Nozzle 2 may be vibrated by a piezo apparatus to spray disc-shaped target 1. Target 1 that is sprayed from nozzle 2 reaches the irradiation position of laser light with its direction unchanged since the exterior of nozzle 2 is maintained in a high vacuum. Synchronized with delivery of target 1, pulse laser light 5 from Nd:YAG light source 4 is focused by lens 3 and irradiated onto target 1. The spot diameter of the laser is the same 1 mm diameter as that of target 1. The thickness is not more than 1000 nm. Therefore, virtually the entire target is converted into plasma, debris generation is inhibited and the conversion efficiency is elevated.Type: GrantFiled: January 11, 2006Date of Patent: November 25, 2008Assignee: Nikon CorporationInventors: Katsuhiko Murakami, Hideya Inoue
-
Patent number: 7443958Abstract: The invention relates to an electron window 1 for a liquid-metal anode 2 in the form of a membrane 4. It is provided according to the invention that the electron window 1 has ridges 10 and depressions 11. In addition, the invention relates to a liquid-metal anode 2 into which such an electron window 1 according to the invention is inserted. The invention further relates to an X-radiator which has a liquid-metal anode 2 according to the invention. The invention also relates to a method for operating a liquid-metal anode 2 in which, during the production of X-radiation, stronger turbulence 5 is produced in the flow of the liquid metal below the electron window 1 at the ridges 10.Type: GrantFiled: March 21, 2005Date of Patent: October 28, 2008Assignee: GE Homeland Protection, Inc.Inventor: Geoffrey Harding
-
Publication number: 20080260102Abstract: A target for generating x-rays includes a target substrate comprising at least one layer of a target material, a track comprising at least one layer of a track material, the track configured to generate x-rays from high-energy electrons impinging thereon, and a braze joint attaching the target substrate to the track.Type: ApplicationFiled: April 20, 2007Publication date: October 23, 2008Inventors: Gregory Alan Steinlage, Michael Hebert
-
Patent number: 7436932Abstract: In one example, a radiation source comprises a housing and an acceleration chamber within the housing, with a peak acceleration energy greater than the lowest neutron production threshold of tantalum. A source of charged particles is supported by the housing to emit charged particles into the acceleration chamber. A target is supported by the housing downstream of the acceleration chamber. The target consists essentially of at least one isotope having a neutron production threshold greater than the peak acceleration energy. No neutrons are therefore generated. The source may also comprise a collimator, target shielding, and/or housing shielding comprising at least one isotope having a neutron production threshold greater than the peak acceleration energy, reducing or eliminating neutron generation as compared to the prior art, as well. Systems comprising the source, methods of operation of the source, and methods of manufacture of the source are also disclosed.Type: GrantFiled: June 24, 2005Date of Patent: October 14, 2008Assignee: Varian Medical Systems Technologies, Inc.Inventor: James E. Clayton
-
Patent number: 7436931Abstract: The present invention relates to an X-ray source comprising an electron source (1) for the emission of electrons (E), a target (4) for the emission of characteristic, substantially monochromatic X-rays (C) in response to the incidence of the electrons (E) and an outcoupling means (11) for outcoupling of the X-rays. To achieve characteristic, substantially monochromatic X-rays with a high power loadability electrons are incident on a metal foil (5) of a thickness of less than 10 ?m and a base arrangement (7, 12) is arranged wherein the metal of said metal foil (5) has a high atomic number allowing the generation of X-rays (C) and the material substantially included in the base arrangement (7, 12) has a low atomic number not allowing the generation of X-rays (C).Type: GrantFiled: December 3, 2003Date of Patent: October 14, 2008Assignee: Koninklijke Philips Electronics N.V.Inventor: Geoffrey Harding
-
Patent number: 7430276Abstract: A mammography method images breast tissue with an end window X-ray transmission tube to detect the presence of neovascular micro-vessels as defining vascular structure associated with a suspect tumorous mass. A kit therefor has a high-efficiency, end window X-ray transmission tube and a supply of a contrast agent.Type: GrantFiled: February 24, 2005Date of Patent: September 30, 2008Assignee: Nanodynamics-88Inventors: Chia-Gee Wang, Thomas Vullo
-
Patent number: 7424096Abstract: Disclosed herein are systems and methods for advancing tape/ribbon through a targeting area where laser ablation of the tape occurs in laser produced plasma equipment. Disclosed systems include a first positioning surface perpendicular to further positioning devices, where all of the positioning components work to precisely position the advancing tape in the point source area. After the first positioning device, the remaining positioning surfaces are parallel and provide positioning forces on the tape along a single horizontal axis, but in alternately opposing directions. Such forces assist to precisely position the tape in the desired target location, and to control the rate of advancement of the tape by imparting friction on the tape in alternating, opposing directions. A steady drive roller serves to pull the tape through the system, and works in conjunction with the friction imparted by the positioning surfaces to advance the tape at a substantially constant velocity.Type: GrantFiled: December 16, 2004Date of Patent: September 9, 2008Assignee: JMAR Research, Inc.Inventors: Harry Rieger, Andrew Stone
-
Patent number: 7406156Abstract: An x-ray tube has a cathode and an anode produced from a first material, the anode having a heat conductor element on the first side thereof facing away from the cathode. To improve the performance of the x-ray tube, the heat conductor element is composed of graphite doped with titanium having a heat conductivity of at least 500 W/mK.Type: GrantFiled: August 15, 2006Date of Patent: July 29, 2008Assignee: Siemens AktiengesellschaftInventor: Eberhard Lenz
-
Patent number: 7391851Abstract: Metallic solutions at room temperature used a laser point source target droplets. Using the target metallic solutions results in damage free use to surrounding optical components since no debris are formed. The metallic solutions can produce plasma emissions in the X-rays, XUV, and EUV(extreme ultra violet) spectral ranges of approximately 11.7 nm and 13 nm. The metallic solutions can include molecular liquids or mixtures of elemental and molecular liquids, such as metallic chloride solutions, metallic bromide solutions, metallic sulphate solutions, metallic nitrate solutions, and organo-metallic solutions. The metallic solutions do not need to be heated since they are in a solution form at room temperatures.Type: GrantFiled: August 14, 2006Date of Patent: June 24, 2008Assignee: University of Central Florida Research Foundation, Inc.Inventor: Martin Richardson
-
Patent number: 7382864Abstract: Systems, methods and apparatus are provided through which in some embodiments an X-Ray energy target includes composite material that varies spatially in thermal properties, and in some embodiments, the composite material varies spatially in strength properties. In some embodiments, the spatial variance is a continuum and in other embodiments, the spatial variance is a plurality of distinct portions.Type: GrantFiled: September 15, 2005Date of Patent: June 3, 2008Assignee: General Electric CompanyInventors: Michael Scott Hebert, Gregory Alan Steinlage
-
Publication number: 20080118031Abstract: The present invention is directed a molybdenum alloy consisting essentially of a) molybdenum present in a major amount, b) tantalum and tungsten as major metal alloy additions and c) a minor amount of an element selected from the group consisting of boron, hafnium, carbon and mixtures thereof. The invention is also directed to an X-ray tube anode composed of a molybdenum alloy body having a focal track thereon, with the body consisting essentially of the above-described molybdenum alloy.Type: ApplicationFiled: November 17, 2006Publication date: May 22, 2008Inventors: Leah F. Haywiser, Leonid Natan Shekhter
-
Patent number: 7368742Abstract: The invention is directed to an arrangement for metering target material for the generation of short-wavelength electromagnetic radiation from an energy beam induced plasma, in particular X radiation and EUV radiation. The object of the invention is to find a novel possibility for metering target material for the generation of short-wavelength electromagnetic radiation from an energy beam induced plasma which makes it possible to provide reproducibly supplied mass-limited targets in such a way that only the amount of target material for plasma generation that can be effectively converted to radiating plasma in the desired wavelength region arrives in the interaction chamber and, therefore, debris generation and the gas burden in the interaction chamber are minimized.Type: GrantFiled: July 15, 2005Date of Patent: May 6, 2008Assignee: XTREME technologies GmbHInventors: Guido Hergenhan, Diethard Kloepfel
-
Publication number: 20080101541Abstract: In some embodiments, an X-ray target is produced by the method of: stacking a primary substrate layer and a focal track layer, the primary substrate layer being formed of primary substrate material, the focal track layer being formed of emitting material; and bonding the emitting material to the primary substrate material by heating a primary compacted interface to an elevated temperature while maintaining the elevated pressure for a time period to form a primary bonded interface of the emitting material and the primary substrate material. In some embodiments, an X-ray target includes a focal track layer of emitting material, a primary substrate layer bonded to the focal track in a primary bonded interface, and a secondary substrate layer bonded to the primary substrate material in a secondary bonded interface by one of diffusion bonding, diffusion brazing and brazing.Type: ApplicationFiled: November 1, 2006Publication date: May 1, 2008Applicant: GENERAL ELECTRIC COMPANY, A NEW YORK CORPORATIONInventors: Gregory Alan Steinlage, Michael Scott Hebert, Kirk Alan Rogers, Donald Robert Allen
-
Patent number: 7366280Abstract: An imaging system includes a gantry rotating around an object on a table. A cathode emitter is coupled to the gantry and generates an electron beam. An anode, also coupled to the gantry, is stationary with respect to the cathode emitter and generates an x-ray flux in response to the electron beam. A detector is coupled to the gantry and is adapted to receive the x-ray flux and generate therefrom a detector signal.Type: GrantFiled: June 19, 2003Date of Patent: April 29, 2008Assignee: General Electric CompanyInventor: Brian D. Lounsberry
-
Patent number: 7359487Abstract: According to one aspect of the invention a robust anode structure and methods of making and using said structure to produce ionizing radiation are disclosed. An ionizing radiation producing layer is bonded to the target side of a highly conductive diamond substrate, by a metal carbide layer. The metal carbide layers improves the strength and durability of the bond, thus improving heat removal from the anode surface and reducing the risk of delaminating the ionizing radiation producing layer, thus reducing degradation and extending the anode's life. A smoothing dopant is alloyed into the radiation producing layer to facilitate keeping the layer surface smooth, thus improving the quality of the x-ray beam emitted from the anode. In an embodiment, the heat sink comprises a metal carbide skeleton cemented diamond material. In another embodiment, the heat sink is bonded to the diamond substrate structure in a high temperature reactive brazing process.Type: GrantFiled: September 15, 2005Date of Patent: April 15, 2008Assignee: ReVera IncorporatedInventor: Bruce Newcome
-
Patent number: 7355191Abstract: Systems and methods are disclosed for cleaning a chamber window of an extreme ultraviolet (EUV) light source. The window may have an inside surface facing a chamber interior and an opposed outside surface and the light source may generate debris by plasma formation. For the system, a subsystem may be positioned outside the chamber and may be operable to pass energy through the window to heat debris accumulating on the inside surface of the window. In a first embodiment, the subsystem may place a flowing, heated gas in contact with the outside surface of the window. In another embodiment, electromagnetic radiation may be passed through the window.Type: GrantFiled: November 28, 2005Date of Patent: April 8, 2008Assignee: Cymer, Inc.Inventors: Alexander N. Bykanov, William F. Marx
-
Patent number: 7349525Abstract: An anode for an X-ray source is formed in two parts, a main part (18) and a collimating part (22). The main part (18) has the target region (20) formed on it. The two parts between them define an electron aperture (36) through which electrons pass reach the target region (20), and an X-ray aperture through which the X-rays produced at the target leave the anode. The anode produces at least the first stage of collimation of the X-ray beam produced.Type: GrantFiled: April 23, 2004Date of Patent: March 25, 2008Assignee: Rapiscan Systems, Inc.Inventors: Edward James Morton, Paul De Antonis
-
Patent number: 7346147Abstract: A linear source of x-rays is disclosed wherein an elongated filament, mounted within a cylindrically formed anode, provides electrons around the filament, and along the length of said filament. The anode that comprises a high Z material such as gold, receives the electrons and emits X-rays in a 360 degree arc and along a substantial length of the anode. In one embodiment the tube is used for irradiation purposes.Type: GrantFiled: July 27, 2005Date of Patent: March 18, 2008Inventors: Randol E. Kirk, Daniel F. Gorzen
-
Patent number: 7346148Abstract: This invention relates to a microfocus X-ray tube having a heat-dissipation solid formed on the target adhesively. Specifically, the heat-dissipation solid defining an opening is formed on the target surface irradiated with an electron beam. Heat generated adjacent the target surface by impingement of an electron beam having passed through the opening is promptly distributed by heat conduction through the surface solid. The heat-dissipation solid contributes to lowering of a surface temperature of the target layer with which the electron beam collides, and a reduction of evaporation of a material forming the target, thereby extending an X-ray generating time.Type: GrantFiled: December 28, 2006Date of Patent: March 18, 2008Assignee: Shimadzu CorporationInventor: Masaaki Ukita
-
Patent number: 7340036Abstract: An X-ray generator includes an electron source generating an electron beam, a target generating an X-ray by a collision of the electron beam and extending in a direction orthogonal to the electron beam, and a cylindrical electrode covering a collision portion of the target to which the electron beam collides and having a bore allowing the electron beam to pass through. The electron source and the target are arranged in such a way that the X-ray is radiated in the direction orthogonal to an optical axis of the electron beam. A depression equivalent to a notch of the target is provided in a collision face side of the electron beam on the target and also in a reverse location of a tip of the target located on an outgoing radiation side of the X-ray relative to a collision location of the electron beam on the target.Type: GrantFiled: June 22, 2007Date of Patent: March 4, 2008Assignee: Shimadzu CorporationInventors: Sadamu Tomita, Tomomi Tamura, Hidenobu Ishida
-
Patent number: 7332731Abstract: A radiation system for providing a projection beam of radiation is disclosed. The radiation system includes an extreme ultraviolet source for providing extreme ultra violet radiation, and a contamination barrier that includes a plurality of closely packed foil plates for trapping contaminant material coming from the radiation source. The contamination barrier encloses the extreme ultraviolet radiation source.Type: GrantFiled: December 6, 2005Date of Patent: February 19, 2008Assignee: Asml Netherlands, B.V.Inventors: Derk Jan Wilfred Klunder, Maarten Marinus Johannes Wilhelmus Van Herpen
-
Patent number: 7321653Abstract: An x-ray target assembly is provided comprising a center hub element affixed to a drive shaft and an outer disc including a plurality of tab extensions removably engaging the periphery of the center hub element. A target element is mounted on an upper outer disc surface.Type: GrantFiled: August 16, 2005Date of Patent: January 22, 2008Assignee: General Electric Co.Inventors: Ron K. Hockersmith, Michael Scott Hebert
-
Patent number: 7313226Abstract: A plurality of high atomic number wires are sintered together to form a porous rod that is parted into porous disks which will be used as x-ray targets. A thermally conductive material is introduced into the pores of the rod, and when a stream of electrons impinges on the sintered wire target and generates x-rays, the heat generated by the impinging x-rays is removed by the thermally conductive material interspersed in the pores of the wires.Type: GrantFiled: September 14, 2005Date of Patent: December 25, 2007Assignee: Calabazas Creek Research, Inc.Inventors: Louis R. Falce, R. Lawrence Ives
-
Patent number: 7308078Abstract: X-ray generation apparatus including an elongated target body and a mount from which the body projects to a tip remote from the mount. The target body includes a substance that, on being irradiated by a beam of electrons of suitable energy directed onto the target body from laterally of the elongate target body, generates a source of x-ray radiation from a volume of interaction of the electron beam with the target body. The mount provides a heat sink for the target body.Type: GrantFiled: January 31, 2006Date of Patent: December 11, 2007Assignee: XRT LimitedInventors: Stephen William Wilkins, Peter Robert Miller
-
Patent number: 7305066Abstract: An X-ray generating apparatus for generating X-rays by irradiating a target with an electron beam. Wherein the apparatus includes a vibration applying means for vibrating the target in directions parallel to a surface thereof. A colliding spot of the electron beam is movable on the target while maintaining an X-ray focus in the same position on the electron beam without fluctuating the X-ray focal position. This enlarges an actual area of electron collision on the target to disperse the generated heat, thereby to suppress a local temperature rise of the target due to the electron collision. The X-ray generating apparatus is compact, and has a long life and a high X-ray intensity.Type: GrantFiled: July 17, 2003Date of Patent: December 4, 2007Assignee: Shimadzu CorporationInventor: Masaaki Ukita
-
Patent number: 7302043Abstract: A laser produced plasma device comprises a shutter assembly for mitigating the contaminating effects of debris generated by the plasma. In one embodiment, the shutter assembly includes a rotatable shutter having at least one aperture that provides a line-of-sight between a radiation source and an exit of the device during a first period of rotation of the shutter, and obstructs the line-of-sight between the radiation source and the exit during a second period of rotation. The shutter assembly in this embodiment also includes a motor configured to rotate the shutter to permit passage of the X-rays through the at least one aperture during the first period of rotation, and to thereafter rotate the shutter to obstruct passage of the debris through the at least one aperture during the second period of rotation.Type: GrantFiled: July 27, 2005Date of Patent: November 27, 2007Assignee: Gatan, Inc.Inventors: Scott H. Bloom, Harry Rieger, James J. Alwan