Abstract: Measurement of thickness of layers of a circuit structure is obtained, where the thickness of the layers is measured using an optical critical dimension (OCD) measurement technique, and the layers includes a high-k layer and an interfacial layer. Measurement of thickness of the high-k layer is separately obtained, where the thickness of the high-k layer is measured using a separate measurement technique from the OCD measurement technique. The separate measurement technique provides greater decoupling, as compared to the OCD measurement technique, of a signal for thickness of the high-k layer from a signal for thickness of the interfacial layer of the layers. Characteristics of the circuit structure, such as a thickness of the interfacial layer, are ascertained using, in part, the separately obtained thickness measurement of the high-k layer.

Abstract: The disclosure is directed to metal fatigue analytics and alert systems.

Abstract: The present invention relates to a method and a device for measuring scattering of X-rays wherein the compound to be analyzed is installed in a receptacle comprising an X-ray-permeable flat bottom, wherein the X-ray diffraction analysis is undertaken by sending an X-ray stream upwards toward said X-ray-permeable bottom and by measuring the stream of scattered X-rays reflected downwards, and wherein a fluid thermostatically controlled to the same temperature as that of the compound to be analyzed in the receptacle is projected toward the X-ray permeable flat bottom, from outside the receptacle.

Abstract: Systems and methods for characterizing films by X-ray photoelectron spectroscopy (XPS) are disclosed. For example, a system for characterizing a film may include an X-ray source for generating an X-ray beam having an energy below the k-edge of silicon. A sample holder may be included for positioning a sample in a pathway of the X-ray beam. A first detector may be included for collecting an XPS signal generated by bombarding the sample with the X-ray beam. A second detector may be included for collecting an X-ray fluorescence (XRF) signal generated by bombarding the sample with the X-ray beam. Monitoring/estimation of the primary X-ray flux at the analysis site may be provided by X-ray flux detectors near and at the analysis site. Both XRF and XPS signals may be normalized to the (estimated) primary X-ray flux to enable film thickness or dose measurement without the need to employ signal intensity ratios.

Abstract: An x-ray source emits a cone beam to a rotating, x-ray-opaque disc with radial slots. The slots break the cone beam into fan beams that are emitted to an x-ray-opaque plate that produces a scanning x-ray pencil beam as each fan beam moves across a slit in the plate. A backscatter detector is adjacent to the plate. A collimator is adjacent. The pencil beam enters the object space through slits in the detector and collimator. The pencil beam moves rapidly in the y direction in the object space, producing backscatter x-rays from the object. The collimator only passes backscattered x-rays at a selected distance from the detector. Simultaneously, the assemblage of x-ray source, disc, plate, detector, and collimator moves slowly in the x and z directions. The backscattered x-rays passed by the collimator are processed to form planar images at various depths in the object space.

Abstract: An x-ray diffraction imaging (XDI) system having a system axis includes at least one x-ray source configured to generate x-rays directed toward an object that includes at least one substance. The at least one x-ray source is further configured to irradiate at least one voxel defined within the object with x-rays arriving from a plurality of directions, each direction defined by an angle of incidence with respect to the system axis. The system also includes at least one detector configured to detect scattered x-rays after the x-rays have passed through the object. The system further includes at least one processor coupled to the at least one detector. The processor is programmed to generate a plurality of XDI profiles of the object voxel. Each XDI profile is a function of an associated angle of incidence.

Abstract: The invention relates to a device for the delivery of a beam of X-rays for analysis of a sample (50), comprising: a source block (100) comprising X-ray emission means; an optical block (200) placed downstream of the source block (100), said optical block (200) comprising an optical monochromator component (210) having a reflecting surface (212) provided for conditioning X-rays emitted by the source block (100) according to unidimensional or bidimensional optical effect; and definition means (300) of X-rays comprising: an anti-diffusing member (310) for spatially delimiting X-rays conditioned by the optical monochromator component (210), placed downstream of the optical monochromator component (210) and comprising one or more plates (311) having portions (313) arranged to form a delimiting orifice (312), said portions (313) being coated with a monocrystalline material limiting the scattering of X-rays; a cut-off member (320) of X-rays emitted by the source block (100), comprising X-ray absorption means arr

Abstract: Embodiments of devices and methods for evaluating tissue are disclosed. In one embodiment, a method for measuring a characteristic of a tissue may include passing a current through the tissue, measuring a signal corresponding to the voltage resulting from passing the current through the tissue, analyzing current passed through the tissue and resulting voltage to determine the electrical characteristics of the tissue; and analyzing the electrical characteristics of the tissue to determine a status of the tissue. Disposable sensors are disclosed.

Abstract: A method for correcting erroneous intensity measurements caused by defective pixels of the detector for a single-crystal X-ray diffraction system uses collected diffraction images and a defective pixel list to modify three-dimensional reflection profiles by replacing profile elements affected by the defective pixels with corresponding profile elements from a model profile. Reflection positions on the detector are predicted using an orientation matrix for the crystal and a three-dimensional observed profile is constructed for each reflection. A model profile is constructed using normalized profile data from multiple reflection profiles. The observed profiles are compared with the defective pixel list to determine which profile elements are affected by defective pixels, and those elements are replaced by corresponding elements from the model profile.

Abstract: A radiation imaging apparatus according to the present invention includes a radiation source, a reflective structure where at least three reflective substrates are arranged with an interval and radiations being incident into a plurality of passages whose both sides are put between the reflective substrate are reflected and parallelized by the reflective substrate at both sides of the passage to be emitted from the passage, a radiation detector, and an image construction unit that constructs an image of an object based on an intensity of the radiation which is emitted from each of the passages, transmits the object and is detected by the radiation detector. When one edge of the reflective structure is an inlet of the radiation and the other edge is an outlet of the radiation, a pitch of the reflective substrates at the outlet is larger than a pitch at the inlet.

Abstract: An X-ray imaging system is provided with an X-ray source (11), first and second absorption gratings (31, 32), and a flat panel detector (FPD) (30), and obtains a phase contrast image of an object H by performing imaging while moving the second absorption grating (32) in x direction relative to the first absorption grating (31). The following mathematical expression is satisfied where p1? denotes a period of a first pattern image at a position of the second absorption grating (32), and p2? denotes a substantial grating pitch of the second absorption grating (32), and DX denotes a dimension, in the x-direction, of an X-ray imaging area of each pixel of the FPD (30). Here, “n” denotes a positive integer.

Abstract: Peak positions and integrated intensities of diffraction X-ray are determined on the basis of X-ray diffraction measurement data output from an X-ray diffractometer, the number of determined peaks of the diffraction X-ray is counted, and analysis processing is started when the counted number of peaks reaches a preset peak number. The analysis processing is repetitively executed on the basis of X-ray diffraction measurement data. The peak positions and the integrated intensities of the diffraction X-ray are determined from the X-ray diffraction measurement data obtained from the start of the measurement till the analysis processing concerned, and qualitative analysis of collating the determined peak positions and integrated intensities with standard peak card data whose data base is made in advance and searching materials contained in a measurement sample, and quantitative analysis of determining the quantities of the materials contained in the measurement sample are executed.

Abstract: Disclosed is an imaging apparatus for EUV spectroscopy, EUV microscopy, EUV lithography, and x-ray imaging. This new imaging apparatus could, in particular, make significant contributions to EUV lithography at wavelengths in the range from 10 to 15 nm, which is presently being developed for the manufacturing of the next-generation integrated circuits. The disclosure provides a novel adjustable imaging apparatus that allows for the production of stigmatic images in x-ray imaging, EUV imaging, and EUVL. The imaging apparatus of the present invention incorporates additional properties compared to previously described objectives. The use of a pair of spherical reflectors containing a concave and convex arrangement has been applied to a EUV imaging system to allow for the image and optics to all be placed on the same side of a vacuum chamber.

Abstract: There is provided an image processing device including a body hair detection unit that detects a body hair region corresponding to body hair from a process target image that includes skin, a texture structure estimation unit that estimates a structure of skin texture in the process target image, and an interpolation unit that interpolates the body hair region detected by the body hair detection unit based on the structure of the skin texture estimated by the texture structure estimation unit.

Abstract: In accordance with an embodiment, a measuring apparatus includes an electromagnetic wave applying unit, a detecting unit, a data processing unit, a film structure transforming unit, and a film structure measuring unit. The electromagnetic wave applying unit generates electromagnetic waves to apply it to a periodic structure of films on a substrate. The detecting unit detects the electromagnetic waves scattered or reflected by the substrate. The data processing unit calculates a surface shape of the periodic structure. The film structure transforming unit calculates a virtual film structure regarding the internal structure of the periodic structure. The film structure measuring unit calculates the thickness of each layer constituting the periodic structure by fitting a first reflectance profile by actual measurement regarding the periodic structure to a second reflectance profile obtained by a simulation using the virtual film structure to restructure the shape of the periodic structure.

Abstract: A method for analyzing an object includes measuring a first reflectivity of light from a surface and measuring a second reflectivity of light from the object, after the object is formed on the surface. A variation between the first and second reflectivities is calculated, and the variation is transformed by a predetermined transform. A thickness of the object is determined based on the transformed variation.

Abstract: A portable backscatter advanced imaging technology scanner with automated threat or target recognition including: a floor assembly having a cantilever drive assembly for rotating the floor assembly, the floor assembly being able to be partitioned into multiple parts for reassembly; at least one x-ray tube oriented towards selected sides of a test subject; a detector assembly oriented on the circumference of the floor assembly, the detector assembly being able to partitioned into multiple parts for reassembly; a storage unit to store images from detected scattered photons on the detector assembly; and a processing unit to detect, identify and classify concealed objects on the test subject.

Abstract: A variable-geometry backscatter inspection system has a radiation detector array including one or more backscatter radiation detectors. The position of a second backscatter radiation detector is variable with respect to the position of a first backscatter radiation detector, so that the size of the detector array may be varied by moving the second radiation detector into or out of a predefined alignment with the first radiation detector. The system may include a movable base, and at least one of the detectors is movable with respect to the base. Methods of inspecting an object include forming a detector array by moving a second radiation detector into a predefined alignment with a first radiation detector, illuminating the object with a pencil beam of penetrating radiation, and detecting backscattered radiation with the detector array.

Abstract: The invention concerns a device and a process for adjusting the range of an ion beam, in particular for irradiation in tumor therapy. For this purpose, first the reference position of a target volume to be irradiated is determined. Subsequently, the range of an ion beam is configured such that said beam is adjusted to the reference position of the target volume, in such a manner that the Bragg peak, i.e. the maximal energy loss and thereby the maximal damage occurs in the region of the target volume which is to be destroyed. In the case that it has been determined that the reference position has been altered by a movement of the target volume, the ion beam is then deflected from the beam axis such that the ion beam is directed to various regions of a range modulator, in order that the ion beam experience a correspondingly adjusted energy loss in passing through the range modulator.

Abstract: In an X-ray detector operating in a rolling shutter read out mode, by precisely synchronizing sample rotation with the detector readout, the effects of timing skew on the image intensities and angular positions caused by the rolling shutter read out can be compensated by interpolation or calculation, thus allowing the data to be accurately integrated with conventional software. In one embodiment, the reflection intensities are interpolated with respect to time to recreate data that is synchronized to a predetermined time. This interpolated data can then be processed by any conventional integration routine to generate a 3D model of the sample. In another embodiment a 3D integration routine is specially adapted to allow the time-skewed data to be processed directly and generate a 3D model of the sample.

Abstract: In a method of detecting inhomogeneity of a layer, an incident light may be irradiated to at least two regions of the layer at a first incident angle position. First reflected lights reflected from the two regions of the layer may be sensed. The incident light may be irradiated to the at least two regions of the layer at a second incident angle position. Second reflected lights reflected from the two regions of the layer may be sensed. The first reflected lights and the second reflected lights may be compared with each other to obtain the inhomogeneity of the layer. Thus, the layer having a spot may be found.

Abstract: A method for manufacturing a structure by using a silicon mold, in which disturbances in arrangement due to charges are reduced, can be provided. The method for manufacturing a structure includes the steps of forming a recessed portion in a silicon substrate, cleaning, drying, or conveying the silicon substrate while charges of a plurality of portions sandwiched between the recessed portion are removed, and filling a metal into the recessed portion of the silicon substrate subjected to the cleaning, drying, or conveying.

Abstract: An x-ray photoelectron spectroscopy apparatus for measuring film stack characteristics, of the type having an x-ray source and an x-ray photoelectron spectroscopy module coupled to a contiguous vacuum environment, including an ultraviolet source and an ultraviolet photoelectron spectroscopy module coupled to the vacuum environment.

Abstract: A X-ray scattering measurement device and measurement method can measure, with high resolution, the intensity of X-rays which have undergone small-angle scattering and diffraction with reflection geometry and can easily and accurately measure a microstructure on the surface of a sample. The X-ray scattering measurement device is suitable for microstructural measurement on the surface of a sample includes an X-ray source that generates an X-ray; a first mirror and a second mirror that continuously reflect the generated X-ray; a sample stage that supports the sample; and a two-dimensional detector that detects the X-ray scattered on the surface of the sample. The first mirror focuses the generated X-ray onto the two-dimensional detector within a plane parallel to the surface of the sample, and the second mirror focuses the X-ray reflected by the first mirror onto the surface of the sample within a plane perpendicular to the surface of the sample.

Abstract: Provided are a method and an apparatus of precisely measuring the intensity profile of an x-ray nanobeam, which can measure x-rays having different wavelengths with one knife edge and can perform optimal measurements corresponding to the depth of focus of an x-ray beam and the conditions of other measurement devices, using a dark field measurement method which enables precise measurements of the profile of an x-ray beam using a knife edge and using diffracted and transmitted x-rays. The knife edge (4) is formed of a heavy metal which advances the phase of an x-ray passing therethrough and is fabricated in such a manner that the thickness may change in the longitudinal direction continuously or in a stepwise fashion.

Abstract: A compound zone plate comprising a first zone plate frame including a first zone plate, a second zone plate frame including a second zone plate, and a base frame to which the first zone plate frame and the second zone plate frame are bonded. In examples, two more zone plates are added to make a four element optic. In the assembly process, the microbeads are used to ensure the parallelism, dial in the distance precisely between the zone plates by selecting the microbead size, possibly in response to the width of the frames, and ensure low friction lateral movement enabling nanometer precision alignment of the zone plates with respect to each other prior to being fixed by the adhesive. That is, when the frames are pressed together to ensure parallelism, it is still possible to align them to each other since the microbead layer facilitates the inplane movement of the alignment process.

Abstract: A method for analysis includes directing a converging beam of X-rays toward a surface of a sample and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum of the sample. The diffraction spectrum is corrected to compensate for a non-uniform property of the converging beam.

Abstract: An apparatus for analyzing bacteria is described that includes an analytic sample preparation section for preparing an analytic sample by treating a specimen so as to generate a morphological difference between Gram-negative bacteria and Gram-positive bacteria, a detector for detecting optical information from each particle contained in the analytic sample and an analyzing section for detecting Gram-positive bacteria contained on the basis of the detected optical information. A method for analyzing bacteria is also described.

Abstract: A medical image display system is shown. The medical image display system includes, a fringe scanning type capturing apparatus or a Fourier transformation type capturing apparatus; an image processing section; a display section; and a control section. The capturing apparatus includes, an X-ray source; a first grating and a second grating; a subject table; and an X-ray detector. The image processing section generates a plurality of reconstructed images for diagnosis based on an image signal of a subject captured with the capturing apparatus. The display section displays at least two of the plurality of reconstructed images. The control section detects an abnormal candidate on each of the plurality of reconstructed images and controls display order of the plurality of reconstructed images displayed on the display section based on a result of detecting.

Abstract: An incident X-ray is emitted in a wide angular sector toward an amorphous material specimen which backscatters the X-rays. The method comprises: a step of recording experimental photon intensity measurements as a function of the angle of incidence; a step of correcting the experimental intensity, taking into account at least the absorption phenomena inside the specimen dependent on the penetration length l of the incident wave inside the specimen before reflection; a normalization step referring the corrected intensity arising from the experimental intensity to an electron intensity according to a normalization coefficient (?); a step of calculating a discretized function Q.

Abstract: An X-ray analysis apparatus has at least one X-ray aperture (4; 4a, 4b) which delimits an X-ray beam (RS) emitted by an X-ray source (2). The at least one X-ray aperture (4; 4a, 4b) is disposed at a separation from the sample (5) and has a single crystal aperture body (8) with a through pinhole (9). The single crystal aperture body (8) forms a peripheral continuous edge (10) which delimits the X-ray beam (RS) and starting from which the pinhole (9) widens like a funnel in a direction of an outlet opening (11) of the X-ray aperture (4; 4a, 4b) in a first area (B1). The X-ray analysis apparatus reduces impairment of X-ray measurements due to parasitic scattered radiation and at little expense.

Abstract: Multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors preferably include a shutter and a cold shield that reduce ice formation on the detector. By providing detectors surrounding the sample, a large solid angle is provided for improved detection and x-rays are detected regardless of the direction of sample tilt.

Abstract: The invention provides a method of detecting neoplastic or neurological disorders comprising exposing skin or nails to X-ray diffraction and detecting changes in the ultrastructure of the skin or nails, and also provides an instrument when used in the method of detection.

Abstract: A portable, for example, a hand-held-type, X-ray measurement apparatus, wherein the vibration or hand-shaking of the X-ray measurement apparatus is detected by a vibration-detection sensor such as a distance sensor, a gyro sensor, or the like, and a measurement value for the X-ray intensity obtained using a two-dimensional X-ray detector is corrected on the basis of a variation quantity obtained using the vibration-detection sensor. The correction may be a correction related to an X-ray source, a correction related to an X-ray detector, a correction calculated using the CPU of a computer and a software program, or the like.

Abstract: For a quasi-monochromatic x-ray radiation with high radiation intensity, an x-ray radiator generates quasi-monochromatic x-ray radiation to expose a subject from a point-shaped radiation source that emits a polychromatic x-ray radiation, and having a diffraction device to diffract the polychromatic x-ray radiation. The diffraction device has a super-mirror made of crystalline material with a flat surface. In the super-mirror, the crystalline material has at least one (in particular continuous) variation of the lattice plane spacing of the crystal lattice. The radiation source and the diffraction device are arranged such that quasi-monochromatic x-ray radiation is generated from the polychromatic x-ray radiation by partial reflection at the super-mirror.

Abstract: A compound zone plate comprising a first zone plate frame including a first zone plate, a second zone plate frame including a second zone plate, and a base frame to which the first zone plate frame and the second zone plate frame are bonded. In examples, two more zone plates are added to make a four element optic. In the assembly process, the microbeads are used to ensure the parallelism, dial in the distance precisely between the zone plates by selecting the microbead size, possibly in response to the width of the frames, and ensure low friction lateral movement enabling nanometer precision alignment of the zone plates with respect to each other prior to being fixed by the adhesive. That is, when the frames are pressed together to ensure parallelism, it is still possible to align them to each other since the microbead layer facilitates the inplane movement of the alignment process.

Abstract: A system and method for performing dose verification during radiation therapy. The system images photons created by Compton scatter events in the patient receiving treatment using a Compton camera imager (CCI). A dose reconstruction method is provided to reconstruct acquired Compton scatter photon data to produce an image showing dose deposition in the subject.

Abstract: A system for securing a patient eye at a known position in an external coordinate system is disclosed. The system includes a head support for supporting the patient's head, an eye-contact device including a concave contact surface adapted to be placed against the front surface of a patient's eye, and a port in fluid communication with the contact surface, by which a vacuum can be applied to the device to remove air between the eye and the contact surface, to stabilize the position of the eye with respect to the contact device, and a biasing mechanism operatively connected to the contact device for biasing the contact device against the eye with a force sufficient to the hold the contact device against the eye, when the eye is stabilized with respect to the device by removal of air between the eye and the device's contact surface.

Abstract: A method and apparatus for identifying a response to a plurality of x-rays are provided. In one advantageous embodiment, an apparatus comprising a housing, an x-ray tube, an anode, and an x-ray detector are provided. The housing has a longitudinal axis. The x-ray tube is associated with the housing and configured to generate a plurality of x-rays. The anode is associated with the housing and configured to rotate around the longitudinal axis to a direction and direct the plurality of x-rays generated by the x-ray tube toward a surface of an object in the direction. The x-ray detector is associated with the housing and configured to detect a response to the plurality of x-rays reflected from the surface of the object.

Abstract: Approaches for deriving scatter information using inverse tracking of scattered X-rays is disclosed. In certain embodiments scattered rays are tracked from respective locations on a detector to a source of the X-ray radiation, as opposed to tracking schemes that proceed from the source to the detector. In one such approach, the inverse tracking is implemented using a density integrated volume that reduces the integration steps performed.

Abstract: A method for processing the surface of a component, or the processing of an optical element through an ion beam, directed onto the surface to be processed, whereby the surface is lowered and/or removed at least partially, and wherein the ions have a kinetic energy of 100 keV or more, as well as optical elements processed in accordance with the method.

Abstract: The crystal structure of the product, crystals of the MarR protein, a regulator of multiple antibiotic resistance in Escherichia coli, and methods of crystallization of the MarR protein are described.

Abstract: A shutter arrangement for an X-ray housing includes a shutter 10 for example of solid tantalum. In embodiments, the shutter has a through hole 22 and slides between a closed and an open position on the inner face of the X-ray housing, in the open position the through hole 22 aligns with an opening 8 in the housing.

Abstract: A technique for generating three-dimensional information using radio frequency modulated X-rays includes both a method and an apparatus. In a first aspect, the method includes modulating an X-ray signal with first and second radio frequencies; transmitting the modulated X-ray signal; receiving backscatter; and processing the received backscatter to range a target in the field of view. In another aspect, an apparatus includes a transmitter and a receiver. The transmitter is capable of: modulating an X-ray signal with first and second radio frequencies and transmitting the modulated X-ray signal into a field of view. The receiver is capable of receiving backscatter from the transmitted X-ray signal. Other aspects include variations on these. For example, some aspects are computer implemented, such as a software implemented method, a program storage medium encoded with instruction to perform such a method, and a computing apparatus performed to program such a method.

Abstract: Multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors preferably include a shutter and a cold shield that reduce ice formation on the detector. By providing detectors surrounding the sample, a large solid angle is provided for improved detection and x-rays are detected regardless of the direction of sample tilt.

Abstract: An improved microcalorimeter-type energy dispersive x-ray spectrometer provides sufficient energy resolution and throughput for practical high spatial resolution x-ray mapping of a sample at low electron beam energies. When used with a dual beam system that provides the capability to etch a layer from the sample, the system can be used for three-dimensional x-ray mapping. A preferred system uses an x-ray optic having a wide-angle opening to increase the fraction of x-rays leaving the sample that impinge on the detector and multiple detectors to avoid pulse pile up.

Abstract: In an X-ray diffraction method, an X-ray parallel beam is incident on a sample, and diffracted X-rays from the sample are reflected at a mirror and thereafter detected by an X-ray detector. The reflective surface of the mirror is a combination of plural flat reflective surfaces, the respective centers of which are located on an equiangular spiral having a center that is located on a surface of the sample. The X-ray detector is one-dimensional position-sensitive in a plane parallel to the diffraction plane. X-rays that have been reflected at different flat reflective surfaces reach different points on the X-ray detector respectively. A correction is performed for separately recognizing different reflected X-rays that may have been reflected at the different flat reflective surfaces, and might be mixed with each other on the same detecting region of the X-ray detector.

Abstract: Disclosed is a radiation image conversion panel wherein luminance is improved by preventing the disorder of the structure of phosphor columnar crystals, thereby eliminating the scattering and refraction of optical elements which is emitted by an X-ray-irradiated phosphor and propagated in the direction of a photoelectric conversion element. Moreover disclosed is a radiation image detector using the same.

Abstract: An on-line EDXRD analyser including (i) a housing defining an analysis zone and having a passageway through it to allow transport of material in a process stream to pass through the analysis zone, (ii) a collimated source of polychromatic X-rays, (iii) an energy-resolving (ER)X-ray detector, (iv) a primary beam collimator disposed between the source of X-rays and the (ER)X-ray detector comprising an annular slit which defines an incident beam of polychromatic X-rays to irradiate a portion of the analysis zone, (v) a scatter collimator disposed between the primary beam collimator and the ERX-ray detector, the scatter collimator comprising an annular slit which defines a diffracted beam of X-rays scattered by the material to converge towards the ERX-ray detector, and (vi) a detector collimator comprising a conical opening which further defines the diffracted beam of X-rays scattered by the material.

Abstract: A wavelength-classifying type X-ray diffraction device bombards a sample with characteristic X-rays generated from an X-ray generation source, and detects characteristic X-rays diffracted by the sample using an X-ray detector. The X-ray generation source is composed of several metals of different atomic number, respective metals generating several characteristic X-rays of different wavelengths. An X-ray detector is composed of several pixels for receiving X-rays and outputting pulse signals corresponding to X-ray wavelengths. Pixels are respectively furnished with classification circuits. The classification circuits classify and output pixel output signals based on each of characteristic X-ray wavelengths. X-ray intensity is detected on a per-wavelength basis in individual pixels 12. Measurement data based on different wavelength X-rays are acquired simultaneously in just one measurement.