Of Charging Load-holding Or -supporting Element From Source And Transporting Element To Working, Treating, Or Inspecting Station Patents (Class 414/806)
  • Publication number: 20090263215
    Abstract: Embodiments of the present invention generally provide an apparatus and method for transferring substrates in a processing system (e.g., a cluster tool) that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint when compared to conventional techniques.
    Type: Application
    Filed: April 13, 2009
    Publication date: October 22, 2009
    Applicant: APPLIED MATERIALS, INC.
    Inventors: JEFFREY C. HUDGENS, JAGAN RANGARAJAN, MICHAEL R. RICE, PENCHALA N. KANKANALA
  • Publication number: 20090257861
    Abstract: A method for transferring articles from a first to a second machine, which packs the articles in containers, using a transport line, interposed between the machines, which removably receives and moves the trays, each tray affording at least a seating complementarily shaped to an article, as well as at least two stores, for receiving the trays, respectively associated to a first station located at a start of the line and a second station located downstream of the first station with a first store containing a predetermined number of empty trays, the method comprising a partial filling of the second store with trays containing articles, and is such that a temporary malfunctioning of the first machine maintains the second machine in service up to emptying of the second store, and a temporary malfunctioning of the second machine maintains the first machine in service up to complete filling of the second store.
    Type: Application
    Filed: March 30, 2009
    Publication date: October 15, 2009
    Applicant: MARCHESINI GROUP S.P.A.
    Inventor: Giuseppe Monti
  • Publication number: 20090252579
    Abstract: A method and apparatus for transporting groups of filled beverage bottles to a beverage bottle packaging machine in a beverage bottling plant, and a method and apparatus for transporting groups of containers to a container handling machine in a container processing plant. The abstract of the disclosure is submitted herewith as required by 37 C.F.R. §1.72(b). As stated in 37 C.F.R. §1.72(b): A brief abstract of the technical disclosure in the specification must commence on a separate sheet, preferably following the claims, under the heading “Abstract of the Disclosure.” The purpose of the abstract is to enable the Patent and Trademark Office and the public generally to determine quickly from a cursory inspection the nature and gist of the technical disclosure. The abstract shall not be used for interpreting the scope of the claims. Therefore, any statements made relating to the abstract are not intended to limit the claims in any manner and should not be interpreted as limiting the claims in any manner.
    Type: Application
    Filed: March 25, 2009
    Publication date: October 8, 2009
    Inventors: Josef DUPPER, Thomas LELIE, Ludger PAULS
  • Publication number: 20090252892
    Abstract: A process apparatus for treatment of a substrate comprising a load chamber for loading the substrate, a process chamber for processing the substrate, a sealing plane separating the process chamber from the load chamber and means for vertically moving the substrate from the load chamber to the process chamber, and a method for treating the substrate are provided. The load chamber is located in one of the lower and upper portions of the process apparatus, and the process chamber is located in the other of the lower and upper portions of the process apparatus. The process apparatus and method of the present invention will provide easy maintenance and reduced costs by reducing the number of movements for loading the substrate.
    Type: Application
    Filed: March 24, 2009
    Publication date: October 8, 2009
    Applicant: OC OERLIKON BALZERS AG
    Inventor: Jurgen Weichart
  • Publication number: 20090252577
    Abstract: An automatic load transfer device is provided for automated material handling systems of the type having a tow AGV pulling a train of trailers along a predetermined path between stations. The device has a base positioned adjacent to the path with spaced apart rails that support a movable carriage which shifts between retracted and extended positions. A conveyor having a plurality of side-by-side fingers with moving conveyor elements is supported on the carriage by a lift which shifts the conveyor between lowered and raised positions. The carriage, conveyor elements, and lift have separate drives that are operably connected with a controller which sequentially activates the same to load and/or unload loads onto and/or from the trailers.
    Type: Application
    Filed: April 4, 2008
    Publication date: October 8, 2009
    Inventors: Monte R. Tuffs, Garry A. Koff, Jerry L. Redmann, JR.
  • Publication number: 20090252580
    Abstract: A semiconductor-processing apparatus includes: a wafer handling chamber; a wafer processing chamber; a wafer handling device; a first photosensor disposed in the wafer handling chamber in front of the wafer processing chamber at a position where the wafer partially blocks light received by the first photosensor at a ready-to-load position and substantially entirely blocks light received by the first photosensor when the wafer moves from the ready-to-load position toward the wafer processing chamber in the x-axis direction; and a second photosensor disposed in the wafer handling chamber in front of the wafer processing chamber at a position where the wafer does not block light received by the second photosensor at the ready-to-load position and partially blocks light received by the second photosensor when the wafer moves from the ready-to-load position toward the wafer processing chamber in the x-axis direction.
    Type: Application
    Filed: April 3, 2008
    Publication date: October 8, 2009
    Applicant: ASM Japan K.K.
    Inventors: Masahiro Takizawa, Masaei Suwada, Masayuki Akagawa
  • Patent number: 7597531
    Abstract: Embodiments of the invention are directed to a method of controlling a mover device The method includes generating a moving force from a moving force generating unit to move a processing base with respect to a movable base, thereby moving the processing base with respect to a fixed base as a result of the movement of the processing base with respect to the movable base; moving the movable base on the fixed base in the opposite direction to the moving direction of the processing base by virtue of a reaction force caused by the moving force generated from the moving force generating unit to move the processing base, so that the movable base moves in the opposite direction to the moving direction of the processing base on the fixed base. The method further includes controlling the moving velocity of the processing base with respect to the fixed base.
    Type: Grant
    Filed: January 28, 2005
    Date of Patent: October 6, 2009
    Assignee: SEN Corporation, an SHI and Axcelis Company
    Inventors: Keiji Okada, Michiro Sugitani, Yoshitomo Hidaka, Junichi Murakami, Fumiaki Sato, Mitsukuni Tsukihara, Suguru Hirokawa, Masamitsu Shinozuka
  • Patent number: 7597530
    Abstract: A method for conveying an object and a conveying apparatus are provided. The method includes steps of loading a first object at a first position by a transmission apparatus, loading a second object onto a carrying platform, providing a supporter having a first holder and a second holder, unloading the second object by the transmission apparatus, and adjusting a position of the supporter relative to that of the carrying platform for locating the first object on the carrying platform. The provided method and conveying apparatus adopts a single supporter for conveying the objects. The object standby for being processed and the processed one can be loaded and unloaded with greater safety and stability thereby.
    Type: Grant
    Filed: December 2, 2004
    Date of Patent: October 6, 2009
    Assignee: Hannstar Display Corporation
    Inventors: Po-nan Tai, Ching-yun Chen, Hung-wei Cheng
  • Publication number: 20090245982
    Abstract: A unit for opening an insert of a test tray which comprises an accommodating space for accommodating a semiconductor device and a support for supporting the semiconductor device accommodated in the accommodating space, the unit includes a body, a pair of opening devices provided in the body to open the insert, and a positioning guide unit protruding to be inserted into an accommodating space for a semiconductor device when opening the insert and supporting the semiconductor device that is transferred into the accommodating space to be spaced upward apart from a support provided in the accommodating space.
    Type: Application
    Filed: March 19, 2009
    Publication date: October 1, 2009
    Applicant: TECHWING CO., LTD.
    Inventors: Yun Sung NA, Tae Hung KU, Jung Woo HWANG
  • Publication number: 20090245983
    Abstract: A clam shell wafer holder includes a base and a lid pivotally connected with the base by an integral hinge. The base includes a rotatable wafer support, and the lid includes a universal frame and a pin holder attachment spaced inwardly from the frame. Only two contact pins are formed in a wafer-facing surface of the pin holder attachment. The contact pins are manually aligned with and contact two points on a wafer when the lid is closed against the base. A method for holding a wafer for plating is provided using the disclosed holder apparatus.
    Type: Application
    Filed: March 31, 2009
    Publication date: October 1, 2009
    Inventors: Kennith Ray Law, Rodney Allen Biskeborn
  • Publication number: 20090232626
    Abstract: A component test apparatus performing a test on an electronic component is disclosed. The component test apparatus includes a component loading device, a transport hand, and a component unloading device. A plurality of functional stations have mutually different functions and are spaced apart at equal intervals along a movement direction of the transport hand. The transport hand has a plurality of index units that are capable of holding the electronic component independently from one another and operating independently from one another. The index units are spaced apart at intervals equal to the intervals at which the functional stations are spaced apart along a transport direction of the electronic component from a loading position toward a test position.
    Type: Application
    Filed: March 3, 2009
    Publication date: September 17, 2009
    Applicant: SEIKO EPSON CORPORATION
    Inventors: Masakuni SHIOZAWA, Hiroaki FUJIMORI
  • Publication number: 20090227437
    Abstract: A receiving apparatus of a folding box gluing machine for receiving guide elements, in particular a roller rail, and/or tools, such as folding devices. The guide elements and/or tools can be moved from an active position above the folding box transport plane into a parked position. The receiving apparatus has a frame, to which the guide elements and/or tools are fastened, and this frame can be pivoted about a pivot axis, the pivot axis being oriented parallel to the folding box transport direction. The receiving apparatus has a stop device which fixes the position of the frame in its parked position, with the result that said frame can be reached ergonomically by the machine operator. The frame can be moved from a horizontal position, in which the guide elements and/or tools are situated in their active position, by a pivoting movement about the pivot axis by less than 90° into an oblique position, in which the guide elements and/or the tools are situated in their parked position.
    Type: Application
    Filed: March 5, 2009
    Publication date: September 10, 2009
    Applicant: HEIDELBERGER DRUCKMASCHINEN AKTIENGESELLSCHAFT
    Inventors: Wolfgang Diehr, Maik Stumberger
  • Publication number: 20090226286
    Abstract: A wafer lift-out apparatus for lifting out, from a container in which a plurality of semiconductor wafers and a spacer are housed in such a manner that the semiconductor wafers and the spacer are alternately stacked and that a part of the spacer is exposed from between the semiconductor wafers, one of the semiconductor wafers includes: a wafer suction mechanism for sucking the semiconductor wafers; a carrying mechanism for carrying the wafer suction mechanism; and a spacer retaining mechanism for retaining the part of the spacer. The spacer retaining mechanism retains the part of the spacer when the carrying mechanism lifts up the wafer suction mechanism while the wafer suction mechanism sucks one of the semiconductor wafers housed in the container.
    Type: Application
    Filed: March 5, 2009
    Publication date: September 10, 2009
    Applicant: SEIKO EPSON CORPORATION
    Inventor: Kunimitsu MIKAMI
  • Publication number: 20090226294
    Abstract: An operating method is disclosed for a processing system that comprises multiple process modules each adapted to perform substantially the same process upon a substrate. During process module conditioning as a preparatory step for executing a required process recipe, each time one process module completes conditioning, successive transfer of unprocessed substrates from a cassette to the process module is started on an associated substrate transfer route, and successive processes that use the process module are started for the unprocessed substrates. The processing system can be operated efficiently, even if the nonuniformity of the conditioning time required exists between process modules of the same specifications.
    Type: Application
    Filed: October 6, 2006
    Publication date: September 10, 2009
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Koichi Sekido, Hirofumi Yamaguchi, Bae Junghwan
  • Publication number: 20090220323
    Abstract: This core plugging station relates generally to preparing rolls of previously wound material for an unwinding machine. The core plugging station improves the automation of moving rolls of sheet form material and the like to be loaded in preparation for unwinding. When a previously loaded roll has been unwound a spent core station disposes of the remaining core. The process sequentially moves rolls of material having cores from a core plugging station to an unwinding station and sequentially moves spent rolls of material from the unwinding station back to a spent core station.
    Type: Application
    Filed: February 24, 2009
    Publication date: September 3, 2009
    Inventors: Daniel J. Pienta, David M. Pienta
  • Publication number: 20090214326
    Abstract: A tray handling apparatus comprises a plurality of guides, a chuck device, a linear movement device, and a rack and pinion device. A space defined by the erected guides is used to hold a tray stack. The chuck of the chuck device is located at the center position of the bottom area of the space. The linear movement device is used to move the chuck relative to the guides. The rack and pinion device is used to cause the guides to move symmetrically. When an operator moves any one of the guides, the other guides move symmetrically and the center of the bottom area of the space surrounded by the guides remains at the same location during the movement of the guides. The operator does not need to adjust the position of the chuck if the positions of the guides are changed.
    Type: Application
    Filed: February 24, 2009
    Publication date: August 27, 2009
    Applicant: CHENG MEI INSTRUMENT TECHNOLOGY CO., LTD.
    Inventor: CHENG TAO TSAI
  • Patent number: 7578650
    Abstract: Apparatus and method for reducing the load on an automated material handling system during processing of materials are disclosed. A materials processing tool with one or more load ports is equipped with at least one movable buffer attached to the tool front end. The buffer is configured to receive a materials pod from the automated material handling system at a storage location and move the pod to one or more of the one or more of the load ports and/or receive a pod from one or more of the one or more load ports and move the pod to the storage location. Any pod in the buffer is accessible either manually or by the material handling system.
    Type: Grant
    Filed: July 29, 2004
    Date of Patent: August 25, 2009
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Martin P. Aalund, Ami Appelbaum
  • Publication number: 20090202336
    Abstract: Methods and systems are provided. The invention includes performing a handshake directly between a load port associated with process equipment and material handling equipment; and transferring a carrier between the material handling equipment and the load port based on the handshake. Numerous other aspects are provided.
    Type: Application
    Filed: February 11, 2009
    Publication date: August 13, 2009
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Vinay K. Shah, Sushant S. Koshti
  • Publication number: 20090202323
    Abstract: An alignment device to align a plate for electronic circuits comprises transport members able to transport the plate along a transport axis, at least from an entrance position to an alignment position defining an alignment plane. The device also comprises mobile members provided with: first movement members able to move the mobile members in a first direction directed along a first axis substantially perpendicular to the alignment plane so as to associate the mobile members with the plate; second movement members able to rotate the plate, associated with the mobile members, around the first axis; and at least third movement members able to move the plate, associated with the mobile members, in a second direction, directed along a second axis substantially transverse to the first axis and substantially co-planar with the transport axis.
    Type: Application
    Filed: October 23, 2008
    Publication date: August 13, 2009
    Applicant: APPLIED MATERIALS BACCINI SPA CON SOCIO UNICO
    Inventor: Andrea BACCINI
  • Publication number: 20090196712
    Abstract: A racking assembly for receiving and storing at least one pipe, the racking assembly comprising a setback assembly including a selectively rotatable member having a plurality radial slots sized to receive a first portion of the pipe(s) in sliding engagement, and a base placed distal from the selectively rotatable member and coupled thereto so as to permit mutual rotation, the base arranged to support the pipe(s) on a support face of the base; a barrier located about a peripheral edge of the base, such that the setback assembly rotates relative to the barrier, the barrier arranged to prevent the pipe(s) from moving radially from the base, the barrier having a gap sized to permit selective lateral movement of the pipe(s); where mutual rotation of the selectively rotatable member and the base permit alignment of the gap and a selected slot of the selectively rotatable member, and so permitting the pipe stands to be moved laterally into the setback assembly.
    Type: Application
    Filed: February 2, 2009
    Publication date: August 6, 2009
    Inventors: Asbjorn Mortensen, Kok Seng Foo, Rune Henriksen, Yeong Jin King
  • Publication number: 20090196720
    Abstract: The invention relates to a method for storing articles (21) in a set-down location (20), and retrieving them therefrom, with a load-bearing means (1) with a loading platform (2) which can be displaced transversally to a rack aisle (R) and, for receiving articles (21), is pushed between a rack shelf (24) and the articles (21). In order to enable a secure automatic retrieval of different articles (21) from a planar rack shelf (24) and the storing thereof, it is provided that the loading platform (2), as it receives articles, is lowered on the side facing the set-down location (20), preferably during displacement in a direction transverse to the rack aisle (R).
    Type: Application
    Filed: July 23, 2007
    Publication date: August 6, 2009
    Inventors: Helmut Kostmann, Martin Trummer, Heinrich Amminger
  • Publication number: 20090196717
    Abstract: An apparatus and method of handling substrates is disclosed. A detecting system, capable of determining whether a substrate is tilted in relation to the platen, is positioned proximate to the substrate. In some embodiments, the detecting system is a distance measuring system. In other embodiments, it is an angle sensor. The detecting system is in communication with a controller, which, in turn, is in communication with a substrate handling robot. If, based on information received from the detecting system, the controller determines that the substrate is tilted beyond an acceptable range, it is assumed that the substrate has remained attached to the platen. In such a case, the substrate handling robot does not attempt to remove it from the platen. In this way, the substrate is not damaged.
    Type: Application
    Filed: January 29, 2009
    Publication date: August 6, 2009
    Inventor: Scott C. Holden
  • Publication number: 20090193954
    Abstract: This invention resolves the problem in which a robot of the existing method cannot efficiently carry coarse aluminum castings to a first and a second machining unit. A robot holds an untreated coarse aluminum casting that is located at a predetermined carrying-in corner with the holding means and carries it to the first machining unit. Then, at the first machining unit it holds the treated coarse aluminum casting that has been treated by the first machining unit with the holding means as well as transferring the untreated coarse aluminum casting from the holding means to the first machining unit. Then it carries the treated coarse aluminum casting that has been treated by the first machining unit to the second machining unit.
    Type: Application
    Filed: June 29, 2005
    Publication date: August 6, 2009
    Inventor: Koji Takishita
  • Publication number: 20090191044
    Abstract: A regulation method for ordering a flow of two lines of products includes at least: —a first step of slowing when the spacing value between a first product pertinaing to one of the lines and a second product, situated immediately upstream and pertaining to another of the lines is less than a first set value; and—a second step of slowing when the value of the spacing between a downstream product of the first line and the proximal product situated immediately upstream on the second line is lower than a second set value, the first step of slowing and second step of slowing being respectively implemented selectively so as to place in phase the spacings between the products of the first and second lines according to a sequence determined as a function of the device for transferring to cavities.
    Type: Application
    Filed: August 14, 2007
    Publication date: July 30, 2009
    Applicant: SIDEL PARTICIPATIONS
    Inventors: Guillaume Duchemin, Christophe Poupon
  • Publication number: 20090185892
    Abstract: A substrate processing apparatus comprises a storage container for storing multiple substrates and whose substrate loading and unloading opening is shut by a lid, a loading and unloading port for carrying the storage container into and out of the case, a placement unit for placing the storage container in the loading and unloading port, a storage chamber provided adjacent to the loading and unloading port for storing the storage container, an opening and closing device for opening and closing the substrate loading and unloading opening of the storage container placed in the placement unit, a transfer device containing a holding mechanism for supporting the bottom of the storage container and transferring the storage container supported in the holding mechanism, over the opening and closing device between the inside and outside of the storage chamber, and an elevator mechanism for raising and lowering the placement unit between the placement unit height position where the opening and closing device opens and c
    Type: Application
    Filed: March 17, 2009
    Publication date: July 23, 2009
    Applicant: HITACHI KOKUSAI ELECTRIC INC.
    Inventor: Yukinori Aburatani
  • Patent number: 7563068
    Abstract: As part of a system for processing workpieces, a workpiece support arrangement, separate from a process chamber arrangement supports at least two workpieces at least generally in a stacked relationship to form a workpiece column. A transfer arrangement transports at least two of the workpieces between the workpiece column and the process chamber arrangement by simultaneously moving the two workpieces at least generally along first and second transfer paths, respectively, that are defined between the workpiece column and the first and second process stations. The transfer arrangement can simultaneously move untreated and treated workpieces. Vertical motion swing arms and coaxial swing arms are described. A pair of spaced apart swing arms, the workpiece column and the processing stations can cooperatively define a pentagonal shape. Timing belt backlash elimination, a dual degree of freedom slot valve and low point chamber pumping, for removing chamber contaminants, are also described.
    Type: Grant
    Filed: January 11, 2007
    Date of Patent: July 21, 2009
    Assignee: Mattson Technology, Inc.
    Inventors: Leszek Niewmierzycki, David Barker, Daniel J. Devine, Michael Kuhlman, Ryan Pakulski, Hongqing Shan, Martin Zucker
  • Publication number: 20090180849
    Abstract: A photo spinner apparatus, including a spin coater for coating a plurality of wafers with photoresist, a bake device for hardening the photoresist coated by the spin coater, a developer for developing the photoresist hardened in the bake device, a transfer unit for transferring the plurality of wafers between the developer, the bake device, and the spin coater, and an indexer including a wafer carrier loader to vertically stack a plurality of wafer carriers into which the plurality of wafers transferred by the transfer unit are loaded.
    Type: Application
    Filed: January 7, 2009
    Publication date: July 16, 2009
    Inventor: Yong-Su Kim
  • Publication number: 20090173446
    Abstract: The present invention relates to a substrate support that facilitates aligning a substrate and prevents the substrate from being damaged by arc discharge in processing a substrate using plasma, a substrate processing apparatus including the substrate support, and a method of aligning the substrate. A substrate support, which includes a main body on which a substrate is placed and a subsidiary body disposed around the side of the main body and having a slope declining from a position above the main body to the upper side of the main body, is provided, such that it is easy to align the substrate and it is possible to damage due to arc discharge in processing the substrate using plasma.
    Type: Application
    Filed: December 31, 2008
    Publication date: July 9, 2009
    Inventors: Dong-Ju Yang, Min-Seok Oh, Ki-Yeup Lee, Sang-Gab Kim, Shin-Il Choi, Hong-Kee Chin, Yu-Gwang Jeong, Seung-Ha Choi, Jae-Ho Jang
  • Publication number: 20090175707
    Abstract: A substrate container for storing at least one substrate is provided. The substrate container includes a housing assembly encompassing the at least one substrate, the housing assembly having a container door for access into an inner region of the housing assembly. The housing assembly includes a support structure defined along sidewalls of the housing assembly. The support structure has a plurality of edge support constraints protruding into the inner region of the housing assembly. The plurality of edge support constraints support opposing edge regions of the at least one substrate so as to cause the at least one substrate to deflect around an axis.
    Type: Application
    Filed: January 3, 2009
    Publication date: July 9, 2009
    Inventor: Anthony C. Bonora
  • Publication number: 20090175708
    Abstract: A device for stabilizing an elongated steel sheet when continuously transporting the steel sheet in a transport direction along a predetermined transport path. The device includes at least a first pair, a second pair and a third pair of electromagnets with at least one electromagnet on each side of the steel sheet. The electromagnets are adapted to stabilize the steel sheet with respect to the predetermined transport path. The first and second electromagnets are elongated in a direction essentially perpendicular to the transport direction. The first and second electromagnets are substantially arranged on each side of a longitudinal center line for the steel sheet. The center line is essentially parallel to the transport direction. The third electromagnet is arranged adjacent to the center line.
    Type: Application
    Filed: March 23, 2006
    Publication date: July 9, 2009
    Applicant: ABB Research Ltd.
    Inventors: Peter Lofgren, Jan-Erik Eriksson, Mats Molander, Carl-Fredrik Lindberg, Conny Svahn
  • Publication number: 20090169353
    Abstract: A pallet inspection and repair system includes a pallet in-feed for receiving pallets for inspection, and an automated pallet inspection system for inspecting the pallets. A processor cooperates with the automated pallet inspection system to generate a repair recipe for each pallet based on the inspecting, and compares the repair recipes to determine at least one performance repair parameter for the pallets. The at least one performance repair parameter corresponds to a type of repair to be made to the pallets.
    Type: Application
    Filed: December 28, 2007
    Publication date: July 2, 2009
    Applicant: CHEP Technology Pty Limited
    Inventors: Steve Townsend, Michael David Lucas
  • Publication number: 20090165950
    Abstract: A substrate treating apparatus and a method for transferring a substrate are provided. The substrate treating apparatus includes a first treating unit having a dual layer structure in which a first treating portion performing a coating process and a second treating portion performing a developing process are arranged in a vertical direction, a first buffer unit providing a place where substrates treated at the first treating portion stand by, a second buffer unit providing a place where the substrates treated at the second treating portion stand by, a second treating unit performing an exposing process, and an interface unit transferring the substrates between the first and second buffer units and the second treating unit. The interface unit includes a frame disposed adjacent to the first treating unit and a first substrate receiving portion disposed in the frame and receiving the substrates that are received in the first buffer unit and will be transferred to the second treating unit.
    Type: Application
    Filed: November 4, 2008
    Publication date: July 2, 2009
    Inventors: Duk-Sik Kim, Joon-Jae Lee
  • Publication number: 20090162172
    Abstract: A substrate treating apparatus that transports a plurality of substrates with a transport unit includes the following elements. A treating section for treating the substrates, a table for receiving a FOUP (Front Opening Unified Pod) storing the plurality of substrates, and an attaching and detaching unit disposed between the treating section and the table for attaching and detaching a lid to/from an access opening of the FOUP placed on the table. The transport unit is movable to a transfer position opposed to the access opening of the FOUP across the attaching and detaching unit, and has a plurality of support members for supporting the plurality of substrates, the transport unit being arranged to transport the substrates as held by the support members between the treating section and the FOUP.
    Type: Application
    Filed: December 19, 2008
    Publication date: June 25, 2009
    Inventor: Yukiteru MIYAMOTO
  • Publication number: 20090155026
    Abstract: A method is provided for transferring a substrate from a first substrate holder, e.g., a pre-alignment unit, to a second substrate holder, e.g., a substrate table in a lithographic apparatus, by means of a transfer unit on the basis of transfer data available thereto. First, the substrate is provided on the first substrate holder. Subsequently, a position error of the substrate is measured, and positioning adjustment data are calculated based on the position error as measured. Then, the second substrate holder is moved relative to a reference position thereof in accordance with the positioning adjustment data. Finally, the substrate is transferred by means of the transfer unit from the first substrate holder to the second substrate holder in accordance with the transfer data, and placed on the second substrate holder as moved.
    Type: Application
    Filed: October 9, 2008
    Publication date: June 18, 2009
    Applicant: ASML Netherlands B.V.
    Inventors: Jozef Augustinus Maria ALBERTI, Gerardus Petrus Matthijs Van Nunen, Frans Erik Groensmit, Rene Theodorus Petrus Compen
  • Publication number: 20090155028
    Abstract: A wafer carrier for a rotating disc CVD reactor includes a unitary plate of a ceramic such as silicon carbide defining wafer-holding features such as pockets on its upstream surface and also includes a hub removably mounted to the plate in a central region of the plate. The hub provides a secure connection to the spindle of the reactor without imposing concentrated stresses on the ceramic plate. The hub can be removed during cleaning of the plate.
    Type: Application
    Filed: December 12, 2007
    Publication date: June 18, 2009
    Applicant: Veeco Instruments Inc.
    Inventors: Vadim Boguslavskiy, Alexander I. Gurary
  • Publication number: 20090142166
    Abstract: Provided is an FIMS system in which loading is possible in a manner in which multiple thin pods are vertically stacked together, with an information pad being arranged on an abutment surface of the main body of each pod abutting a door and on the side surface of the door corresponding to the abutment surface. When there is detected a state in which the door is pushed in toward a mini-environment, information imparted to the information pad can be detected by the FIMS system.
    Type: Application
    Filed: November 20, 2008
    Publication date: June 4, 2009
    Applicant: TDK CORPORATION
    Inventors: Toshihiko MIYAJIMA, Hiroshi Igarashi
  • Publication number: 20090142176
    Abstract: A wafer carrying apparatus or cassette is disclosed, which includes a binding or retention unit, so as to prevent wafers from being damaged by crash, inadvertent egress or exiting, and so on. The wafer carrying apparatus includes a main body provided with a plurality of wafer insertion grooves formed on inner sides and an opening formed on a front surface to take wafers in and out, a binding unit configured to move up and down on the front surface of the main body, its position relative to the insertion grooves being variable so as to close and open the insertion grooves, and a mechanism for varying the position of the binding unit relative to the insertion grooves, the mechanism being connected to the binding unit.
    Type: Application
    Filed: February 2, 2009
    Publication date: June 4, 2009
    Inventor: Jong Sok CHOI
  • Publication number: 20090127315
    Abstract: An apparatus for manufacturing a semiconductor device is provided. The apparatus has a bonding head, a stage, and a system for appropriately setting the amount of a descending movement of the bonding head. The bonding head incorporates a heater. A camera is capable of capturing an image of a gap between the bonding head and the stage under the condition that the bonding head holds a first bonding object and the stage has a second bonding object mounted thereon and before the first and second bonding objects come in contact with each other. A controller calculates the amount of the descending movement of the bonding head based on the image captured by the camera, and causes the bonding head to descend based on the calculated amount of the descending movement.
    Type: Application
    Filed: October 22, 2008
    Publication date: May 21, 2009
    Inventor: Takanori OKITA
  • Publication number: 20090110518
    Abstract: An electronic device manufacturing system is disclosed. The system includes a processing tool having one or more processing chambers each adapted to perform an electronic device manufacturing process on one or more substrates; a substrate carrier adapted to couple to the system and carry one or more substrates; and a component adapted to create a sealed environment relative to at least a portion of the substrate carrier and to substantially equalize the sealed environment with an environment within the substrate carrier. Methods of the invention are described as are numerous other aspects.
    Type: Application
    Filed: October 23, 2008
    Publication date: April 30, 2009
    Applicant: Applied Materials, Inc.
    Inventors: Michael Robert Rice, Jeffrey C. Hudgens
  • Publication number: 20090107879
    Abstract: A packing member for a honeycomb structure includes a holding member and a covering member. The holding member includes a recessed portion having a bottom face and a side face. The holding member is configured to hold the honeycomb structure in the recessed portion. The recessed portion has a corner portion which includes a border portion between the bottom face and the side face. The covering member covers at least the recessed portion and is provided to form a gas layer between the covering member and the corner portion.
    Type: Application
    Filed: September 22, 2008
    Publication date: April 30, 2009
    Applicant: IBIDEN CO., LTD.
    Inventors: Mutsuo Otsuka, Andras Teleki
  • Publication number: 20090104014
    Abstract: The carrier frame relating to the present invention comprises a base layer member, a frame layer member, and a positioning layer member having multiple openings for storing electronic components. A spring layer member is mounted in a hollow part surrounded by the frame layer member between the positioning layer member and the base layer member. At each opening of the spring layer member, a small spring providing an elastic force for fastening the electronic components between an edge of the corresponding opening of the positioning layer member and the small spring is formed integrally with the spring layer member. At one end in the longitudinal direction of the spring layer member, a large spring providing an elastic force along the longitudinal direction by being in contact with an inner surface of the frame layer member in the mounted state is formed integrally with the spring layer member.
    Type: Application
    Filed: October 6, 2008
    Publication date: April 23, 2009
    Inventors: Toshihiko SATOU, Kazuhiko Takahashi, Kazuto Nishida, Satoru Waga
  • Patent number: 7521089
    Abstract: Method and apparatus for controlling the migration of reaction by-product gases from a chemical vapor deposition (CVD) process chamber to a transfer vacuum chamber shared by other process chambers. Separate regulated flows of purge gas are provided to the CVD process chamber and the transfer vacuum chamber before establishing a pathway for substrate transfer. A pressure differential is created between the transfer vacuum chamber and the CVD process chamber that reduces or prevents the migration of CVD reaction by-product gases arising from the establishment of the substrate transfer pathway. While the pathway is established, a directional flow of purge gas is maintained from the transfer vacuum chamber into the CVD process chamber.
    Type: Grant
    Filed: June 13, 2002
    Date of Patent: April 21, 2009
    Assignee: Tokyo Electron Limited
    Inventors: Joseph T. Hillman, John G. North, Steven P. Caliendo, John J. Hautala
  • Publication number: 20090097953
    Abstract: A device for operating on a package includes a housing having a portion adapted to be coupled to the package, and a fan coupled to the housing for generating a vacuum within the housing to selectively retain or release the package relative to the housing. A method of operating on the package includes decreasing a distance between the housing and the package, actuating the fan coupled to the housing to generate a vacuum therein, retaining the package relative to the housing using the vacuum generated by the fan, and releasing the vacuum in the housing to release the package relative to the housing.
    Type: Application
    Filed: October 11, 2008
    Publication date: April 16, 2009
    Applicant: R.A. JONES & CO., INC.
    Inventors: Jerome Brugger, Matthew R. Lukes
  • Publication number: 20090097950
    Abstract: A substrate processing system includes a control section configured to control a series of transfer operations and preset to control operation of a container transfer apparatus, operation at a substrate access area, and operation of a substrate handling apparatus independently of each other. The control section includes a schedule creating portion configured to create a transfer schedule by individually adjusting operation timing of the container transfer apparatus, operation timing at the substrate access area, and operation timing of the substrate handling apparatus such that, in a state while a first lot of substrates are treated in the processing system, but the container transfer apparatus and the substrate access area are unoccupied, a container with a second lot of unprocessed substrates stored therein is transferred onto the substrate access area, thereby making total transfer time pertinent.
    Type: Application
    Filed: October 14, 2008
    Publication date: April 16, 2009
    Inventors: Osamu Tanaka, Takafumi Tsuchiya, Tohru Iwabae
  • Publication number: 20090097958
    Abstract: A device and method for transporting and handling catalyst for a chemical reactor.
    Type: Application
    Filed: October 9, 2008
    Publication date: April 16, 2009
    Applicant: Tubemaster, Inc.
    Inventors: Guillermo Camoriano, Clifford L. Johns
  • Publication number: 20090097948
    Abstract: The invention relates to a device (1) and to a method for moving liquid containers (2). Said device comprises a support unit (3) which is implemented to receive the liquid containers (2); a base unit (5) in relation to which the support unit (3) is mounted in an essentially horizontally free oscillating manner by means of connection elements (7); and movement means (6) for moving the support unit (3) in relation to the base unit (5). The inventive device (1) is characterized in that the support unit (3) comprises at least one support element (20,21) whereon at least one movement mass (8) is movably fastened. The at least one movement mass (8) interacts with a movement means (6) which is fastened to the same support element (20,21) and can also be moved thereby. Thereby, the movements of the at least one movement mass (8) set the same supporting support element (20,21) and the liquid containers (2) received by the support surface (28) of the support unit (3) into corresponding counter movements.
    Type: Application
    Filed: May 4, 2006
    Publication date: April 16, 2009
    Inventors: Adi Zuppiger, Roland Fuchs, Urs Knecht
  • Publication number: 20090092464
    Abstract: Items of laundry have to be stretched out by a spreading device (14) before they are inserted into a mangle or any other laundry treatment device. To this end, the spreading device (14) has spreading clips (15) which can be moved away from one another. In the case of relatively large items of laundry, the spreading clips (15) have to cover a relatively large distance in order to spread out the item of laundry. This reduces the insertion rate. The invention provides for the items of laundry to be preliminarily spread out before being passed to the spreading clips (15), so that the spreading clips (15) receive the item of laundry in a state in which it is already virtually spread out. The spreading clips (15) only have to cover a small residual distance in order to spread out the item of laundry completely. As a result, the spreading device (14) can spread out the item of laundry very quickly.
    Type: Application
    Filed: September 16, 2008
    Publication date: April 9, 2009
    Inventors: Jurgen Sielermann, Friedhelm Mehrhoff, Engelbert Heinz
  • Publication number: 20090092472
    Abstract: A method of conveying a glass substrate utilizing an improved non-contact lifting device. The non-contact lifting device employs the Bernoulli effect to create a pressure differential across the glass substrate. The Bernoulli device of the present invention comprises an increased holding or lifting power, and reduces the opportunity for contact between the device and the glass substrate if the device is tilted with respect the plane of the glass substrate surface.
    Type: Application
    Filed: May 27, 2008
    Publication date: April 9, 2009
    Inventors: Weiwei Luo, Samuel Odei Owusu, Ye Guang Pan, Babak Robert Raj, Yawei Sun, Naiyue Zhou
  • Publication number: 20090081007
    Abstract: An integrated robotic mechanism is disclosed for improving transport equipment, integrating an object movement with other functionalities such as alignment or identification. The disclosed integrated robot assembly can comprise a multiple end effector for moving a plurality of workpieces, a single end effector for moving a single workpiece, a rotation chuck incorporated on the robot body to provide alignment capability, and an optional identification subsystem for identify the object during transport. The present invention robot assembly can be used in a sorter or stocker equipment, in processing equipment, and a transfer system.
    Type: Application
    Filed: September 22, 2007
    Publication date: March 26, 2009
    Applicant: Dynamic Micro Systems, Semiconductor Equipment GmbH
    Inventors: Farzad (Fred) Tabrizi, David Barker
  • Publication number: 20090081013
    Abstract: A machine and process for commercial and industrial food waste densification and removal combining a leak proof trailer, a densification system, a trash container, and a dumping mechanism, into a unified collection apparatus. An organic waste generator such as a restaurant can easily store large amounts of its organic liquid and semi-liquid refuse and wastes onsite until the unit is full, then a trash hauler can transport this waste in the leak proof trailer to a municipal landfill or other processing location.
    Type: Application
    Filed: July 25, 2008
    Publication date: March 26, 2009
    Inventors: David Lowe, Harry Vernon McGahey, JR.