Abstract: Techniques for simultaneously plating features of varying sizes on a semiconductor substrate are provided. In one aspect, a method for electroplating includes: placing a shield over a wafer, offset from a surface of the wafer, which covers portions of the wafer and leaves other portions of the wafer uncovered; and depositing at least one metal onto the wafer by electroplating to simultaneously form metallurgical features of varying sizes on the wafer based on the shield altering local deposition rates for the portions of the wafer covered by the shield. An electroplating apparatus is also provided.

Abstract: Provided is a planographic printing plate precursor including: a support; and an image recording layer formed on the support, in which a region on the plate surface on the image recording layer side from an end portion of the planographic printing plate precursor to a portion inside the end portion by 5 mm contains a polymer containing a functional group represented by the following Formula (A), and the content of the polymer per unit area in the region is greater than the content of the polymer per unit area in a region other than the above-described region by an amount of 10 mg/m2 or greater.

Abstract: A structure for pattern formation adapted for optically forming a pattern, characterized by comprising: a photocatalyst-containing layer provided on a substrate, the photocatalyst-containing layer containing a material of which the wettability is variable through photocatalytic action upon pattern-wise exposure.

Abstract: The present invention provides novel methods of fabricating microelectronics structures, and the resulting structures formed thereby, using EUV lithographic processes. The method involves utilizing an assist layer immediately below the photoresist layer. The assist layer can either be directly applied to the substrate, or it can be applied to any intermediate layer(s) that may be applied to the substrate. The preferred assist layers are formed from spin-coatable, polymeric compositions. The inventive method allows reduced critical dimensions to be achieved with improved dose-to-size ratios, while improving adhesion and reducing or eliminating pattern collapse issues.

Abstract: A method of inhibiting photoresist pattern collapse which includes the steps of providing a substrate; providing a photoresist layer on the substrate; exposing and developing the photoresist layer; applying a top anti-reflective coating layer to the photoresist layer; rinsing the photoresist layer; and drying the photoresist layer.

Abstract: The appearance of a color print viewed under UV illumination is predicted using a target comprising color patches each printed using a known coverage of printer colorant(s). In one case, the target is illuminated using a UV light source and an electronic image of the target is captured using a digital camera or the like. In another case, a spectrophotometer is used both with and without a UV cutoff filter to measure the target. The captured image data or the spectrophotometric measurements are used to derive a UV printer characterization model that relates any arbitrary combination of printer colorants to a predicted UV color appearance value. Metameric colorant mixture pairs for visible light and UV light viewing can be determined using the UV model together with a conventional visible light printer characterization model. A visual matching task is used to determine a correction factor for the UV printer characterization model.

Abstract: A printing plate to form a precise pattern, a method for manufacturing the printing plate, and a method for fabricating an LCD device using the printing plate in which the printing plate includes a substrate having at least one trench and sidewall elements formed at an inner perimeter of the at least one trench.

Abstract: A lithographic structure consisting essentially of: an organic antireflective material disposed on a substrate; a vapor-deposited RCHX material, wherein R is one or more elements selected from the group consisting of Si, Ge, B, Sn, Fe and Ti, and wherein X is not present or is one or more elements selected from the group consisting of O, N, S and F; and a photoresist material disposed on the RCHX material. The invention is also directed to methods of making the lithographic structure, and using the structure to pattern a substrate.

Abstract: A lithographic printing plate precursor includes, in the following order: a support; an intermediate layer; and an image-forming layer, and the intermediate layer contains a polymer (A) comprising a repeating unit (a1) represented by the formula (I) as defined herein.

Abstract: The invention is principally to provide an archival optical recording medium of high quality which has satisfactory recording/reading characteristics when used in high-speed recording and high-density recording. The invention accomplishes the object with an optical recording medium comprising a resin substrate, a recording layer comprising an organic dye, and a reflective layer, wherein the reflective layer has a first reflective layer and a second reflective layer in this order from the side close to the recording layer, the second reflective layer has a thermal conductivity lower than the thermal conductivity of the first reflective layer, and the first reflective layer has a film thickness larger than the thickness of the second reflective layer.

Abstract: Provided is a method for forming a resist lower layer material for use in a multilayer resist process, especially two-layer resist process or three-layer resist process, having a function of neutralizing an amine contaminant from a substrate, thereby reducing a harmful effect such as trailing skirts of a resist pattern of an upper layer resist. Specifically, there is provided a material for forming a lower layer of a chemically amplified photoresist layer comprising a crosslinkable polymer and a thermal acid generator that can generate an acid by heating at 100° C. or greater and is represented by the general formula (1a): R1CF2SO3?(R2)4N+??(1a), as well as a resist lower layer substrate comprising a resist lower layer formed using said material.

Abstract: The invention relates to an imaging element and a method of using the imaging element to form a recording element. The imaging element includes a composition sensitive to actinic radiation from a source of radiation having a range of wavelengths and a photoluminescent tag that is responsive to at least one wavelength from the source of radiation. The photoluminescent tag can be used to authenticate the identity of the element, provide information about the element, and/or to establish one or more conditions in a device used to prepare the recording element from the imaging element.

Abstract: Positive-working imageable elements comprise a radiation absorbing compound and inner and outer layers on a substrate having a hydrophilic surface. The inner layer comprises a specific polymeric binder represented by Structure (I): -(A)w-(B)x-(C)y-(D)z-??(I) wherein A represents recurring units derived from one or more N-alkoxymethyl (alkyl)acrylamides or alkoxymethyl (alkyl)acrylates, B represents recurring units derived from one or more ethylenically unsaturated polymerizable monomers having a pendant cyano group, C represents recurring units derived from one or more ethylenically unsaturated polymerizable monomers having one or more carboxy, sulfonic acid, or phosphate groups, D represents recurring units derived from one or more ethylenically unsaturated polymerizable monomers other than those represented by A, B, and C, w is from about 3 to about 80 weight %, x is from about 10 to about 85 weight %, y is from about 2 to about 80 weight %, and z is from about 10 to about 85 weight %.

Abstract: A lithographic printing plate precursor includes: a support; and a photosensitive layer containing (A) an initiator compound, (B) a polymerizable compound and (C) a binder, wherein the photosensitive layer or other layer in contact with the support contains as (D) a component different from the component (C), a copolymer containing (a1) a repeating unit having at least one ethylenically unsaturated bond introduced through an ion pair and (a2) a repeating unit having at least one functional group capable of interacting with a surface of the support.

Abstract: A lithographic printing plate precursor having a good press life with a practical energy amount, which can be on-press developed without passing through a development processing step after recording an image by a laser of emitting an infrared ray, is provided, which is a lithographic printing plate precursor capable of performing a development and printing by loading on a printing press after imagewise exposure and supplying an oily ink and an aqueous component, the lithographic printing plate precursor comprising a support and an image recording layer, wherein the image recording layer comprises (A) a polymerization initiator, (B) a polymerizable monomer, (C) a binder polymer, and (D) a crosslinked resin particle having a reactive group or (F) a microcapsule containing a polymerizable monomer in the capsule wall, and the image recording layer is imagewise polymerization-curable upon irradiation of actinic ray.

Abstract: A negative-working photopolymerization type photosensitive lithographic printing plate precursor capable of conducting image recording with laser, includes: a hydrophilic support; a photopolymerizable photosensitive layer containing (i) a sensitizing dye having an absorption maximum in a wavelength range of from 360 to 450 nm, (ii) a hexaarylbiimidazole compound and (iii) an addition polymerizable compound having an ethylenically unsaturated double bond; and a protective layer, in this order, wherein the protective layer has oxygen permeability at 25° C. under one atmosphere of from 25 ml/m2·day to 200 ml/m2·day.

Abstract: A method is provided for forming a stable thin film on a substrate. The method includes depositing a co-polymer composition having a first component and a second component onto a substrate to form a stable film having a first thickness. The first component has first dielectric properties not enabling the first component by itself to produce the stable film having the first thickness. However, the second component has second dielectric properties which impart stability to the film at the first thickness. In a preferred embodiment, the second component includes a leaving group, and the method further includes first thermal processing the film to cause a solvent but not the leaving group to be removed from the film, after which second thermal processing is performed to at least substantially remove the leaving group from the film. As a result, the film is reduced to a second thickness smaller than the first thickness, and the film remains stable during both the first and the second thermal processing.

Abstract: Hardmask compositions having antireflective properties useful in lithographic processes, methods of using the same, and semiconductor devices fabricated by such methods, are provided. Antireflective hardmask compositions of the invention include: (a) a polymer mixture including a first polymer that includes one or more of the following monomeric units wherein A is a bivalent radical selected from the group consisting of carbonyl, oxy, alkylene, fluoroalkylene, phenyldioxy, and any combination thereof; R1 and R2 are each independently a bivalent radical selected from the group consisting of an alkylene, an arylene, and any combination thereof; and x, y, and z are 0 or integers; and a second polymer including an aryl group; (b) a crosslinking component; and (c) an acid catalyst.

Abstract: A polymer having a polymerizable group and an alkyleneoxy groups on side chains thereof, and a polymerizable composition containing the polymer. The polymerizable composition preferably contains a polymerizable compound and a polymerization initiator. Also provided is a planographic printing plate precursor having a polymerizable layer on a hydrophilic support, the polymerizable layer containing a polymer having a polymerizable on a side chain thereof. The planographic printing plate precursor can form an image without being subjected to an alkali development. An undercoat layer containing a specific copolymer may be provided between the support and the photopolymerizable layer.

Abstract: Novel, wet developable anti-reflective coating compositions and methods of using those compositions are provided. The compositions comprise a polymer and/or oligomer having acid functional groups and dissolved in a solvent system along with a crosslinker and a photoacid generator. The preferred acid functional group is a carboxylic acid, while the preferred crosslinker is a vinyl ether crosslinker. In use, the compositions are applied to a substrate and thermally crosslinked. Upon exposure to light, the cured compositions will decrosslink, rendering them soluble in typical photoresist developing solutions (e.g., alkaline developers).

Abstract: A lithographic printing plate precursor having a photosensitive layer containing (A) at least one saccharide selected from the group consisting of an oligosaccharide and a polysaccharide, (B) a binder polymer, (C) a compound having an addition polymerizable ethylenic unsaturated bond, and (D) a polymerization initiator, or a lithographic printing plate precursor having an undercoat layer comprising (A) at least one saccharide selected from the group consisting of an oligosaccharide and a polysaccharide, and a photosensitive layer containing (B) a binder polymer, (C) a compound having an addition polymerizable ethylenic unsaturated bond, and (D) a polymerization initiator.

Abstract: The use of a positive resist composition that includes a resin with a specific structure improves the resolution and yields a resist pattern with a favorable shape. In addition, when a resist layer is formed on either a magnetic film or a metallic oxidation prevention film formed on the magnetic film, the layer is less prone to tailing and undercutting phenomena.

Abstract: Printing members that include a plasma polymer layer exhibit enhanced tolerance for high imaging-power densities. The plasma polymer layer may contain or be adjacent to an oleophilic metal such as copper.

Abstract: A planographic printing plate precursor comprises a substrate having disposed thereon a hydrophilic layer which includes hydrophilic graft chains and a crosslinked structure formed through hydrolytic polycondensation of an alkoxide of an element selected from Si, Ti, Zr and Al. An aluminum substrate for a planographic printing plate includes a hydrophilic surface which is formed by a hydrophilic polymer including a functional group that chemically bonds to the aluminum substrate directly or is chemically bindable to the aluminum substrate via structural component having a crosslinking structure. A surface-hydrophilic member comprises a substrate having disposed thereon a hydrophilic layer, wherein the hydrophilic layer includes hydrophilic graft chains and a crosslinked structure formed through hydrolytic polycondensation of an alkoxide of an element selected from Si, Ti, Zr and Al.

Abstract: A planographic printing plate precursor comprises a substrate having disposed thereon a hydrophilic layer which includes hydrophilic graft chains and a crosslinked structure formed through hydrolytic polycondensation of an alkoxide of an element selected from Si, Ti, Zr and Al. An aluminum substrate for a planographic printing plate includes a hydrophilic surface which is formed by a hydrophilic polymer including a functional group that chemically bonds to the aluminum substrate directly or is chemically bindable to the aluminum substrate via structural component having a crosslinking structure. A surface-hydrophilic member comprises a substrate having disposed thereon a hydrophilic layer, wherein the hydrophilic layer includes hydrophilic graft chains and a crosslinked structure formed through hydrolytic polycondensation of an alkoxide of an element selected from Si, Ti, Zr and Al.

Abstract: An image recording material of the present invention comprises an anodized aluminum support, an intermediate layer containing a polymer having a carboxylic acid group in a side chain thereof and formed on the aluminum support, and a photosensitive layer containing at least 50% by weight or more of novolak type phenol resin and a photothermal conversion agent and recordable by IR laser beam. A planographic printing plate excellent in printing durability can be obtained by subjecting the image recording material imagewise to IR laser exposure treatment and to development treatment, and then heating the image recording material at 150 to 300° C.

Abstract: A donor substrate for laser induced thermal imaging (LITI) and a method of fabricating an organic light emitting display (OLED) using the donor substrate are provided. A conductive frame is disposed on and connected to an anti-static layer of the donor substrate and frames the periphery of the donor substrate. The conductive frame is connected to a grounded stage. An organic layer is formed using LITI, and the generation of static electricity is controlled.

Abstract: Radiation-sensitive element comprising (a) a substrate with at least one hydrophilic surface and (b) a radiation-sensitive coating on at least one hydrophilic surface of the substrate, wherein the coating comprises: (i) at least one free-radical polymerizable monomer and/or oligomer and/or polymer with at least one ethylenically unsaturated group each, (ii) at least one absorber selected from photoinitiators and sensitizers, which is capable of absorbing radiation of a wavelength in the range of 250 to 1,200 nm and (iii) at least one stabilizer comprising in its molecule at least one group capable of inhibiting free-radical polymerization, and at least one other group capable of sorption at the hydrophilic surface of the substrate.

Abstract: Disclosed is a presensitized plate composed of a support having thereon an image recording layer which includes: an infrared absorber (A) that is a cyanine dye having at least one fused ring composed of a nitrogen-containing heterocycle in combination with an aromatic ring or a second heterocycle, and having on the aromatic ring or second heterocycle an electron-withdrawing group or a heavy atom-containing group, a radical generator (B), and a radical-polymerizable compound (C), and which is removable with printing ink and/or dampening water. The presensitized of the present invention can be imaged with an infrared light-emitting laser to directly record an image from digital data on a computer or the like and is then subjected to on-machine development without carrying out a development step, which is capable of providing a large number of good impressions with a practical amount of energy.

Abstract: A thermal transfer donor element is provided which comprises a support, a light-to-heat conversion layer, an interlayer, and a thermal transfer layer. When the above donor element is brought into contact with a receptor and imagewise irradiated, an image is obtained which is free from contamination by the light-to-heat conversion layer. The construction and process of this invention is useful in making colored images including applications such as color proofs and color filter elements.

Abstract: There are provided a fluorine-containing ethylenic monomer having hydroxyl group or fluoroalkyl carbonyl group and represented by the formula (1): and the formula (14): respectively, wherein X1 and X2 are the same or different and each is H or F; X3 is H, F, Cl or CF3; Rf1 and Rf2 are the same or different and each is a perfluoroalkyl group having 1 to 20 carbon atoms; Rf3 is a fluorine-containing alkylene group having 1 to 40 carbon atoms or a fluorine-containing alkylene group having ether bond which has 1 to 100 carbon atoms and the sum of carbon atom and oxygen atom of two or more; a is 0 or 1, a fluorine-containing polymer having a structural unit of the above-mentioned monomer and a composition for a photoresist. The monomer has good polymerizability, particularly radical polymerizability, and the polymer obtained by polymerizing the monomer has excellent optical characteristics and is useful as a base polymer for an antireflection film and for a composition for a resist.

Abstract: The present invention provides a planographic printing element suitable to receive and bond with a subsequently applied hydrophilic layer comprises a substrate layer, such as polyester film or paper, having coated thereon an adhesion layer, said adhesion layer comprising a polymer having a glass transition temperature of less than 15C and containing functional groups such as hydroxyl, epoxy or glycidyl groups capable of reacting with the hydrophilic layer. The polymer may be a terpolymer of a hydroxyalkyl methacrylate, an alkyl acrylate and an aminoalkyl methacrylate. The polymer may be mixed with gelatin and the mixture applied to the substrate as a coating. The hydrophilic layer, which may comprise metal oxide particles, such as aluminium oxide and/or titanium dioxide particles in a sodium silicate binder, is subsequently applied as a coating to the adhesion layer.

Abstract: Radiation-sensitive elements are described whose radiation-sensitive coating comprises both a photopolymerizable oligomer with a biuret structural unit and a photopolymerizable phosphazene oligomer.

Abstract: A presensitized plate comprising a support for a lithographic printing plate including an anodized layer formed on an aluminum plate and a recording layer recordable by infrared laser exposure on the support, wherein in a section of the anodized layer after the recording layer is provided, an atomicity ratio of carbon to aluminum (C/Al) represented by Auger Electron Spectroscopic analysis is 1.0 or less. In the case of being used as an on-machine development type, it exhibits a good on-machine development characteristic, a high sensitivity, a high press life, and high scum resistance during printing and while left (ink discharging). In the case of being used as a conventional thermal positive or negative working type, it exhibits an efficient use of heat for image formation, a high sensitivity, a high press life, and a slight possibility of scum occurrence at non-image areas.

Abstract: A presensitized plate in which an image recording layer is formed on a support for a lithographic printing plate obtainable by performing a treatment with an aqueous solution containing one or more divalent or multivalent cations at a concentration ranging from 0.0001 mol/L to less than 0.020 mol/L is excellent in both scum resistance and press life when processed into a lithographic printing plate.

Abstract: Imageable elements, useful as on press developable lithographic printing plate precursors, are disclosed. The elements comprise an imageable layer over a substrate and an one or more adhesion promoting ingredients. The imageable layer comprises a polymerizable compound and a polymeric binder. The adhesion promoting ingredients are titanium chelate and/or co-polymers of a monomer having a polethylene oxide side chain with a monomer having either an acidic group or an anhydride group that has been ring opened to form an acidic group or groups.

Abstract: A printing plate for computer-to plate lithography having a laser-ablatable member supported by a substrate. At least one portion of the laser-ablatable member is formed form an acrylic polymer containing laser-sensitive particles. The laser-sensitive particles absorb imaging radiation and cause the portion of the laser-ablatable member containing the laser sensitive particles and any overlying layers to be ablated.

Abstract: Disclosed is a support for a lithographic printing plate, wherein an adhering amount of a rare-earth element atom to a surface thereof is 0.1 to 20 mg/mg2, and a presensitized plate provided with an image recording layer on the support for a lithographic printing plate. The presensitized plate achieving both high scum resistance and long press life can be realized, which is the same in the case the image recording layer containing an infrared absorbent, where scum would easily occur, is provided onto the support.

Abstract: A negative photoresist composition is used for the formation of thick films and includes (A) a novolak resin, (B) a plasticizer, (C) a crosslinking agent and (D) an acid generator. The composition is applied onto a substrate and thereby yields a photoresist film 5 to 100 ?m thick. Likewise, the composition is applied onto a substrate of an electronic part, is patterned, is plated and thereby yields a bump.

Abstract: Substrates for lithographic printing plate precursors and lithographic printing plate precursors are disclosed. The substrates comprise an aluminum or aluminum alloy support and the a layer of interlayer material on the support. The interlayer material is a co-polymer that comprise (1) acid groups and/or phosphonic acid groups, and (2) silyl groups substituted with three alkoxy and/or phenoxy groups. The lithographic printing plate precursors additionally comprise an imageable layer over the interlayer.

Abstract: A negative planographic printing plate precursor includes a negative recording layer on a support. The support has a hydrophilic surface with hydrophilic graft polymer chains present therein. The negative recording layer contains a radical generator, a radical-polymerizing compound, and a photo-thermal converting agent. Preferably, the hydrophilic graft polymer chains are directly bonded to the support surface or to an intermediate layer formed on the support surface, or are introduced into a crosslinked polymer film structure.

Abstract: An improved digitally imageable relief printing element having an increased direct-cure imaging speed upon exposure to lasers and other digital sources of actinic radiation. The printing elements of the invention comprise a reflective layer beneath a photosensitive resin layer so that instead of being absorbed by the reflective layer, photons of actinic radiation are reflected back up into the photosensitive layer, thereby speeding up the curing rate of the printing element.

Abstract: Thermally imageable, positive working, multilayer imageable elements useful as lithographic printing plate precursors are disclosed. The elements comprise a substrate; an underlayer over the substrate; a top layer over the underlayer, and a photothermal conversion material. The top layer comprises a binder and an ionic liquid. A preferred binder is poly(methyl methacrylate).

Abstract: The invention relates to a recording material for the production of offset printing plates, having a web- or plate-form support, a radiation-sensitive layer on the front of the support and a continuous, pigment particle-free layer on the back of the support. The back layer essentially consists of an organic polymeric material having a glass transition temperature Tg of at least 45° C., and its surface has a Bekk smoothness of from 5 to 800 s. It also relates to a process for the production of this recording material.

Abstract: The present invention relates to modified pigment products comprising a pigment having attached at least one organic group represented by the formula —X-Sp-Alk, wherein X, which is directly attached to the pigment, represents an arylene, heteroarylene, or alkylene group, Sp represents a spacer group, and Alk represents an alkenyl or alkyl group containing 50-200 carbon atoms. The use of these modified pigment products in non-aqueous dispersion compositions and in several applications, including printing plates, electrophoretic displays, liquid crystal displays, and ink, coating, toner, and polymer compositions is also disclosed.

Abstract: A lithographic printing plate precursor comprising an aluminum substrate, an image-recording layer and a hydrophilic film, the aluminum substrate being subjected to an electrochemical surface-roughening treatment in an aqueous solution comprising hydrochloric acid and provided with the hydrophilic film having a heat conductivity of 0.05 to 0.5 W/mK and/or at least one of a density of 1,000 to 3,200 kg/m3 and a porosity of 20 to 70%; and a lithographic printing plate precursor comprising an aluminum substrate, an image-recording layer and a hydrophilic film, the aluminum substrate having a surface-roughened shape comprising a small pit wherein an average opening size of the small pit is 0.01 to 3 ?m and a ratio of an average depth of the small pit to the average opening size is 0.1 to 0.5, and being provided with the hydrophilic film having a heat conductivity of 0.05 to 0.5 W/mK and/or at least one of a density of 1,000 to 3,200 kg/m3 and a porosity of 20 to 70%.

Abstract: The present invention also includes an imageable element, comprising a substrate and a thermally imageable composition comprising a thermally sensitive polymer which exhibits an increased solubility in an aqueous developer solution upon heating. The thermally sensitive polymer includes at least one covalently bonded unit and at least one thermally reversible non-covalently bonded unit, which includes a two or more centered H-bond within each of the non-covalently bonded unit. The present invention also includes a method of producing the imaged element. The present invention still further includes a thermally imageable composition comprising comprising a thermally sensitive polymer according to the present invention and a process for preparing the thermally sensitive polymer, which is a supramolecular polymer.

Abstract: A thermal transfer donor element is provided which comprises a support, a light-to-heat conversion layer, an interlayer, and a thermal transfer layer. When the above donor element is brought into contact with a receptor and imagewise irradiated, an image is obtained which is free from contamination by the light-to-heat conversion layer. The construction and process of this invention is useful in making colored images including applications such as color proofs and color filter elements.

Abstract: A conditioner composition for a printing plate with metallic non-print areas on the printing surface contains a polymeric or oligomeric component. The polymeric component adheres to the metal (particularly, aluminum) surface of the non-print area(s) of the printing member, and has a hydrophilic portion. The conditioned printing plate is particularly useful for printing single fluid inks having an emulsified hydrophilic fluid phase.

Abstract: Disclosed is planographic printing plate precursor comprising a support having disposed thereon an image forming layer containing a fluorine macromolecular compound having a structural unit derived from a monomer represented by the following general formula (I). In the general formula (I), R0 represents a hydrogen atom, a methyl group, a cyano group or a halogen atom. X represents a single bond or a divalent connecting group. R1 to R6 each independently represent a hydrogen atom, an alkyl group, a fluorine atom or an alkyl group in which at least one hydrogen atom is substituted with a fluorine atom. Further, at least one of R1 to R6 represents a fluorine atom or an alkyl group in which at least one hydrogen atom is substituted with a fluorine atom.