Abstract: A method of gate work function adjustment includes the steps as follow. First, a substrate is provided, wherein a metal gate is disposed on the substrate, a source doping region and a drain doping region are disposed in the substrate at opposite sites of the metal gate, wherein the metal gate is divided into a source side adjacent to the source doping region, and a drain side adjacent to the drain doping region. Later, a mask layer is formed to cover the source doping region and the drain doping region. After that, an implantation process is performed to implant nitrogen into the metal gate so as to make a first nitrogen concentration of the source side higher than a second nitrogen concentration of the drain side. Finally, the mask layer is removed.

Abstract: Semiconductor devices and methods for forming semiconductor devices are provided, including semiconductor devices that comprise one or more diffusion region in a semiconductor, the one or more diffusion regions being adjacent to a gate formed adjacent to a surface of the semiconductor (e.g., a semiconductor substrate). The one or more diffusion regions comprise a first width at a depth below the surface of the semiconductor and a second width near the surface of the semiconductor, the second width of the one or more diffusion regions being less than about 40% greater than the first width.

Abstract: A method and circuit in which the drive strength of a FinFET transistor can be selectively modified, and in particular can be selectively reduced, by omitting the LDD extension formation in the source and/or in the drain of the FinFET. One application of this approach is to enable differentiation of the drive strengths of transistors in an integrated circuit by applying the technique to some, but not all, of the transistors in the integrated circuit. In particular in a SRAM cell formed from FinFET transistors the application of the technique to the pass-gate transistors, which leads to a reduction of the drive strength of the pass-gate transistors relative to the drive strength of the pull-up and pull-down transistors, results in improved SRAM cell performance.

Abstract: A method for forming a metal gate is provided. First, a dummy material is formed to completely cover a substrate. Second, a dopant is selectively implanted into the dummy material. Then, some of the dummy material is removed to expose part of the substrate and to form a dummy gate including a dopant region disposed between a first region and a second region. Later an interlayer dielectric layer is formed to surround the dummy gate. Next, a selective etching step is carried out to remove the first region to form a recess without substantially removing the dopant region. Afterwards, the recess is filled with a material set to form a metal gate.

Abstract: Methods of fabricating semiconductor devices including providing a substrate having a channel region defined therein; forming an insulation layer on the substrate; forming a gate trench for forming a gate electrode having a sidewall portion, a bottom portion and an edge portion between the sidewall portion and the bottom portion on the insulation layer, the gate electrode trench overlapping the channel region; and forming a gate electrode in the gate electrode trench. Forming the gate electrode includes forming a first metal layer pattern in the gate electrode trench and forming a second metal layer pattern on the first metal layer pattern.

Abstract: In a method of manufacturing a transistor, a gate structure is formed on a substrate. First impurities are implanted into the substrate to form an impurity region at an upper portion of the substrate adjacent to the gate structure. An epitaxial layer is formed on the impurity region. An insulation layer having an opening partially exposing the epitaxial layer is formed on the substrate. Second impurities are implanted into a portion of the epitaxial layer exposed by the opening.

Abstract: A method of fabricating a castellated-gate MOSFET tetrode device capable of fully depleted operation is disclosed. The device is formed on a semiconductor substrate region having an upper portion with a top surface and a lower portion with a bottom surface. A source region and a drain region are formed by ion implantation into the semiconductor substrate region, with adjoined primary and secondary channel-forming regions also disposed therein between the source and drain regions, thereby forming an integrated cascode structure. A plurality of thin semiconductor channel elements are formed by etching a plurality of spaced gate slots to a first predetermined depth into the substrate. The formation of first, second, and additional gate structures are described in two possible embodiments which facilitate the formation of self-aligned source and drain regions.

Abstract: A semiconductor device according to one embodiment includes: a first transistor comprising a first gate electrode formed on a semiconductor substrate via a first gate insulating film, a first channel region formed in the substrate under the first film, and first epitaxial crystal layers formed on both sides of the first channel region in the substrate, the first layers comprising a first crystal; and a second transistor comprising a second gate electrode formed on the substrate via a second gate insulating film, a second channel region formed in the substrate under the second film, second epitaxial crystal layers formed on both sides of the second channel region in the substrate, and third epitaxial crystal layers formed on the second layers, the second layers comprising a second crystal, the third layers comprising the first crystal, the second transistor having a conductivity type different from that of the first transistor.

Abstract: A thin film transistor (TFT) substrate includes first and second TFTs on the same substrate. The first TFT has a feature that a lower conductive layer or a bottom gate electrode layer is provided between the substrate and a first insulating layer while an upper conductive layer or a top gate electrode layer is disposed on a second insulating layer formed on a semiconductor layer which is formed on the first insulating layer. The first conductive layer has first and second areas such that the first area overlaps with the first conductive layer without overlapping with the semiconductor layer while the second area overlaps with the semiconductor layer, and the first area is larger than the second area while the second insulating layer is thinner than the first insulating layer. The second TFT has the same configuration as the first TFT except that the gate electrode layer is eliminated.

Abstract: The invention provides a technique to manufacture a highly reliable semiconductor device and a display device at high yield. As an exposure mask, an exposure mask provided with a diffraction grating pattern or an auxiliary pattern formed of a semi-transmissive film with a light intensity reducing function is used. With such an exposure mask, various light exposures can be more accurately controlled, which enables a resist to be processed into a more accurate shape. Therefore, when such a mask layer is used, the conductive film and the insulating film can be processed in the same step into different shapes in accordance with desired performances. As a result, thin film transistors with different characteristics, wires in different sizes and shapes, and the like can be manufactured without increasing the number of steps.

Abstract: The present invention provides a semiconductor device including SRAM cell units each including a data holding section made up of a pair of driving transistors and a pair of load transistors, a data write section made up of a pair of access transistors, and a data read section made up of an access transistor and a driving transistor, wherein each of the transistors includes a semiconductor layer projecting upward from a base plane, a gate electrode extending from a top to opposite side surfaces of the semiconductor layer so as to stride the semiconductor layer, a gate insulating film between the gate electrode and the semiconductor layer, and source/drain areas, a longitudinal direction of each of the semiconductor layers is provided along a first direction, and for all the corresponding transistors between the SRAM cell units adjacent to each other in the first direction, the semiconductor layer in one of the corresponding transistors is located on a center line of the semiconductor layer along the first dire

Abstract: Semiconductor structures are disclosed that have embedded stressor elements therein. The disclosed structures include at least one FET gate stack located on an upper surface of a semiconductor substrate. The at least one FET gate stack includes source and drain extension regions located within the semiconductor substrate at a footprint of the at least one FET gate stack. A device channel is also present between the source and drain extension regions and beneath the at least one gate stack. The structure further includes embedded stressor elements located on opposite sides of the at least one FET gate stack and within the semiconductor substrate. Each of the embedded stressor elements includes a lower layer of a first epitaxy doped semiconductor material having a lattice constant that is different from a lattice constant of the semiconductor substrate and imparts a strain in the device channel, and an upper layer of a second epitaxy doped semiconductor material located atop the lower layer.

Abstract: A self-aligned transistor gate structure that includes an ion-implanted portion of gate material surrounded by non-implanted gate material on each side. The gate structure may be formed, for example, by applying a layer of GaN material over an AlGaN barrier layer and implanting a portion of the GaN layer to create the gate structure that is laterally surrounded by the GaN layer.

Abstract: A semiconductor device including an n-channel-type MISFET (Qn) having an Hf-containing insulating film (5), which is a high dielectric constant gate insulating film containing hafnium, a rare-earth element, and oxygen as main components, and a gate electrode (GE1), which is a metal gate electrode, is manufactured. The Hf-containing insulating film (5) is formed by forming a first Hf-containing film containing hafnium and oxygen as main components, a rare-earth containing film containing a rare-earth element as a main component, and a second Hf-containing film containing hafnium and oxygen as main components sequentially from below and then causing these to react with one another.

Abstract: A plurality of gate structures are formed on a substrate. Each of the gate structures includes a first gate electrode and source and drain regions. The first gate electrode is removed from each of the gate structures. A first photoresist is applied to block gate structures having source regions in a source-down direction. A first halo implantation is performed in gate structures having source regions in a source-up direction at a first angle. The first photoresist is removed. A second photoresist is applied to block gate structures having source regions in a source-up direction. A second halo implantation is performed in gate structures having source regions in a source-down direction at a second angle. The second photoresist is removed. Replacement gate electrodes are formed in each of the gate structures.

Abstract: According to one embodiment, there is provided a method of manufacturing a semiconductor storage device. In the method, any one of Ge, Sn, C, and N is introduced as impurity to a surface of a semiconductor substrate. In the method, the semiconductor substrate is thermally oxidized so that a tunnel insulating film is formed on the surface of the semiconductor substrate to which the impurity is introduced. In the method, a gate having a charge accumulation layer is formed on the tunnel insulating film. In the method, impurity diffusion regions are formed in the semiconductor substrate in a self-aligned manner using the gate.

Abstract: An impact ionization MOSFET is formed with the offset from the gate to one of the source/drain regions disposed vertically within the device structure rather than horizontally. The semiconductor device comprises a first source/drain region having a first doping level; a second source/drain region having a second doping level and of opposite dopant type to the first source/drain region, the first and second source/drain regions being laterally separated by a silicon-germanium intermediate region having a doping level less than either of the first and second doping levels; a gate electrode electrically insulated from, and disposed over, the intermediate region, the first and second source/drain regions being laterally aligned with the gate electrode; where the entire portion of the first source/drain region that forms a boundary with the intermediate region is separated vertically from the top of the intermediate region.

Abstract: The invention discloses a resistive field effect transistor (ReFET) having an ultra-steep subthreshold slope, which relates to a field of field-effect-transistor logic device and circuit in CMOS ultra-large-scale-integrated circuit (ULSI). The resistive field effect transistor comprises a control gate electrode layer, a gate dielectric layer, a semiconductor substrate, a doped source region and a doped drain region, wherein the control gate is configured to adopt a stacked gate structure in which a bottom layer or a bottom electrode layer, a middle layer or a resistive material layer, and a top layer or a top electrode layer are sequentially formed. Compared with the existing methods for breaking the conventional subthreshold slope limititation, the device of the invention has a larger on-current, a lower operation voltage, and a better subthreshold feature.

Abstract: The present invention discloses a combined-source MOS transistor with a Schottky Barrier and a comb-shaped gate structure, and a method for manufacturing the same.

Abstract: The present invention relates to a method of introducing strain into a channel and a device manufactured by using the method, the method comprising: providing a semiconductor substrate; forming a channel in the semiconductor substrate; forming a first gate dielectric layer on the channel; forming a polysilicon gate layer on the first gate dielectric layer; doping or implanting a first element into the polysilicon gate layer; removing a part of the first gate dielectric layer and polysilicon gate layer to thereby form a first gate structure; forming a source/drain extension region in the channel; forming spacers on both sides of the first gate structure; forming a source/drain in the channel; and performing annealing such that lattice change occurs in the polysilicon that is doped or implanted with the first element in the high-temperature crystallization process, thereby producing a first strain in the polysilicon gate layer, and introducing the first strain through the gate dielectric layer to the channel.

Abstract: A graphene device structure and a method for manufacturing the same are provided. The graphene device structure comprises: a graphene layer; a gate region formed on the graphene layer; and a doped semiconductor region formed at one side of the gate region and connected with the graphene layer, wherein the doped semiconductor region is a drain region of the graphene device structure, and the graphene layer formed at one side of the gate region is a source region of the graphene device structure. The on/off ratio of the graphene device structure may be improved by the doped semiconductor region without increasing the band gaps of the graphene material, so that the applicability of the graphene material in CMOS devices may be enhanced without decreasing the carrier mobility of graphene materials and speed of the devices.

Abstract: An integrated circuit device and method for manufacturing the integrated circuit device is disclosed. The disclosed method provides improved control over a surface proximity and tip depth of integrated circuit device. In an embodiment, the method achieves improved control by forming a lightly doped source and drain (LDD) region that acts as an etch stop. The LDD region may act as an etch stop during an etching process implemented to form a recess in the substrate that defines a source and drain region of the device.

Abstract: A method of forming a semiconductor device comprises providing a semiconductor substrate, providing a semiconductor layer of a first conductivity type over the semiconductor substrate, forming a first region of the first conductivity type in the semiconductor layer, and forming a control region over the semiconductor layer and over part of the first region. A mask layer is formed over the semiconductor layer and outlines a first portion of a surface of the semiconductor layer over part of the first region. Semiconductor material of a second conductivity type is provided to the outlined first portion to provide a second region in the semiconductor layer.

Abstract: A semiconductor device has at least two main carbon-rich regions and two additional carbon-rich regions. The main carbon-rich regions are separately located in a substrate so that a channel region is located between them. The additional carbon-rich regions are respectively located underneath the main carbon-rich regions. The carbon concentrations is higher in the main carbon-rich regions and lower in the additional carbon-rich regions, and optionally, the absolute value of a gradient of the carbon concentration of the bottom portion of the main carbon-rich regions is higher than the absolute value of a gradient of the carbon concentration of the additional carbon-rich regions. Therefore, the leakage current induced by a lattice mismatch effect at the carbon-rich and the carbon-free interface can be minimized.

Abstract: A short channel Lateral MOSFET (LMOS) and method are disclosed with interpenetrating drain-body protrusions (IDBP) for reducing channel-on resistance while maintaining high punch-through voltage. The LMOS includes lower device bulk layer; upper source and upper drain region both located atop lower device bulk layer; both upper source and upper drain region are in contact with an intervening upper body region atop lower device bulk layer; both upper drain and upper body region are shaped to form a drain-body interface; the drain-body interface has an IDBP structure with a surface drain protrusion lying atop a buried body protrusion while revealing a top body surface area of the upper body region; gate oxide-gate electrode bi-layer disposed atop the upper body region forming an LMOS with a short channel length defined by the horizontal length of the top body surface area delineated between the upper source region and the upper drain region.

Abstract: A semiconductor device includes first and second FETs having the same conductivity type. The first FET includes a first gate electrode, a first side wall, and first extension regions respectively provided in a first active region on both sides of the first gate electrodes. The second FET includes a second gate electrode, a second side wall, and second extension regions respectively provided in a second active region on both sides of the second gate electrode. An overlap of each of the first extension regions and the first gate electrode in a gate length direction is longer than an overlap of each of the second extension regions and the second gate electrode. The distance between the first gate electrode and the first side wall is shorter than the distance between the second gate electrode and the second side wall.

Abstract: A system for manufacturing a semiconductor device that has a gate electrode and a pair of diffusion layers formed in a semiconductor substrate on sides of the gate electrode, the system including structure for forming an insulating film and a gate electrode on a semiconductor substrate, obtaining a thickness of an affected layer formed in a surface of the semiconductor substrate, forming a pair of diffusion layers by injecting an impurity element into the semiconductor substrate in areas flanking the gate electrodes based on a predetermined injection parameter, performing activating heat treatment based on a predetermined heat treatment parameter, and deriving the injection parameter or heat treatment parameter in response to the obtained thickness of the affected layer such that the diffusion layers are set to a predetermined sheet resistance.

Abstract: When forming sophisticated transistors, for instance comprising high-k metal gate electrode structures, a significant material loss of an embedded strain-inducing semiconductor material may be compensated for, or at least significantly reduced, by performing a second epitaxial growth step after the incorporation of the drain and source extension dopant species. In this manner, superior strain conditions may be achieved, while also the required drain and source dopant profile may be implemented.

Abstract: Methods of forming p-channel MOSFETs use halo-implant steps that are performed relatively early in the fabrication process. These methods include forming a gate electrode having first sidewall spacers thereon, on a semiconductor substrate, and then forming a sacrificial sidewall spacer layer on the gate electrode. A mask layer then patterned on the gate electrode. The sacrificial sidewall spacer layer is selectively etched to define sacrificial sidewall spacers on the first sidewall spacers, using the patterned mask layer as an etching mask. A PFET halo-implant of dopants is then performed into portions of the semiconductor substrate that extend adjacent the gate electrode, using the sacrificial sidewall spacers as an implant mask. Following this implant step, source and drain region trenches are etched into the semiconductor substrate, on opposite sides of the gate electrode. These source and drain region trenches are then filled by epitaxially growing SiGe source and drain regions therein.

Abstract: In a semiconductor device having a raised source and drain structure, in forming a raised region by etching, etching of an island-like semiconductor film which is an active layer is inhibited. In a method for manufacturing a semiconductor device, an insulating film is formed by oxidizing or nitriding the surface of an island-like semiconductor film, a semiconductor film is formed on a region which is a part of the insulating film, a gate electrode is formed over the insulating film, an impurity element imparting one conductivity type is added to the island-like semiconductor film and the semiconductor film using the gate electrode as a mask, the impurity element is activated by heating the island-like semiconductor film and the semiconductor film, and the part of the insulating film between the island-like semiconductor film and the semiconductor film disappears by heating the island-like semiconductor film and the semiconductor film.

Abstract: A semiconductor device includes a substrate having an active region and an isolation region, a gate pattern crossing both the active region and the isolation region of the substrate, and a protrusion having a surface higher than that of the substrate over at least an edge of the active region contacting a portion of the isolation region under the gate pattern.

Abstract: One aspect of the present subject matter relates to a method for forming strained semiconductor film. According to an embodiment of the method, a crystalline semiconductor bridge is formed over a substrate. The bridge has a first portion bonded to the substrate, a second portion bonded to the substrate, and a middle portion between the first and second portions separated from the substrate. The middle portion of the bridge is bonded to the substrate to provide a compressed crystalline semiconductor layer on the substrate. Other aspects are provided herein.

Abstract: The present disclosure provides a method for fabricating a high-voltage semiconductor device. The method includes designating first, second, and third regions in a substrate. The first and second regions are regions where a source and a drain of the semiconductor device will be formed, respectively. The third region separates the first and second regions. The method further includes forming a slotted implant mask layer at least partially over the third region. The method also includes implanting dopants into the first, second, and third regions. The slotted implant mask layer protects portions of the third region therebelow during the implanting. The method further includes annealing the substrate in a manner to cause diffusion of the dopants in the third region.

Abstract: A semiconductor device includes a first transistor having a threshold voltage (Vth) adjusted to a first Vth by a first dopant having a first peak of concentration at a first depth; and a second transistor having the same channel-type as that of the first transistor and having a Vth adjusted to a second Vth by a second dopant having a second peak of concentration at a second depth equal to the first depth and higher concentration than the first dopant; wherein the first dopant and the second dopant are dopants comprising the same constituent element.

Abstract: A semiconductor device with improved roll-off resistivity and reliability are provided. The semiconductor device includes a gate dielectric overlying a semiconductor substrate, a gate electrode overlying the gate dielectric, a gate silicide region on the gate electrode, a source/drain region adjacent the gate dielectric, and a source/drain silicide region on the source/drain region, wherein the source/drain silicide region and the gate silicide region have different metal compositions.

Abstract: The present invention relates to a transistor and the method for forming the same. The transistor of the present invention comprises a semiconductor substrate; a gate dielectric layer formed on the semiconductor substrate; a gate formed on the gate dielectric layer; a source region and a drain region located in the semiconductor substrate and on respective sides of the gate, wherein at least one of the source region and the drain region comprises at least one dislocation; an epitaxial semiconductor layer containing silicon located on the source region and the drain region; and a metal silicide layer on the epitaxial semiconductor layer.

Abstract: Fabricating high voltage transistors includes forming a buried p-type implant on a p-substrate for each transistor, the transistor having a source side and a drain side, wherein the p-type implant is positioned adjacent the source and is configured to extend under a gate region; depositing a low doping epitaxial layer on the p-substrate and the p-type implant for each high voltage transistor, the low doping epitaxial layer extending from the source to the drain; forming an N-Well in the low doping epitaxial layer for each transistor, wherein the N-Well corresponds to a low voltage transistor N-Well fabricated using a low voltage transistor fabrication process; and forming a p-top diffusion region in or on the N-Well for each transistor, wherein the p-top diffusion region is configured to compensate for a dopant concentration of the N-Well at or near a surface of the N-Well opposing the substrate.

Abstract: A metal-oxide-semiconductor field effect transistor (MOSFET) has a body layer that follows the contour of exposed surfaces of a semiconductor substrate and contains a bottom surface of a shallow trench and adjoined sidewalls. A bottom electrode layer vertically abuts the body layer and provides an electrical bias to the body layer. A top electrode and source and drain regions are formed on the body layer. The thickness of the body layer is selected to allow full depletion of the body layer by the top electrode and a bottom electrode layer. The portion of the body layer underneath the shallow trench extends the length of a channel to enable a high voltage operation. Further, the MOSFET provides a double gate configuration and a tight control of the channel to enable a complete pinch-off of the channel and a low off-current in a compact volume.

Abstract: A semiconductor device and method of manufacturing a semiconductor device. The semiconductor device includes channels for a pFET and an nFET. A SiGe layer is selectively grown in the source and drain regions of the pFET channel and a Si:C layer is selectively grown in source and drain regions of the nFET channel. The SiGe and Si:C layer match a lattice network of the underlying Si layer to create a stress component. In one implementation, this causes a compressive component in the pFET channel and a tensile component in the nFET channel.

Abstract: Disclosed is a semiconductor device having a p-n junction with reduced junction leakage in the presence of metal silicide defects that extend to the junction and a method of forming the device. Specifically, a semiconductor layer having a p-n junction is formed. A metal silicide layer is formed on the semiconductor layer and a dopant is implanted into the metal silicide layer. An anneal process is performed causing the dopant to migrate toward the metal silicide-semiconductor layer interface such that the peak concentration of the dopant will be within a portion of the metal silicide layer bordering the metal silicide-semiconductor layer interface and encompassing the defects. As a result, the silicide to silicon contact is effectively engineered to increase the Schottky barrier height at the defect, which in turn drastically reduces any leakage that would otherwise occur, when the p-n junction is in reverse polarity.

Abstract: A method of forming ultra-shallow lightly doped source/drain (LDD) regions of a CMOS transistor in a surface of a substrate includes the steps of providing a semiconductor substrate, providing a gate stack on the semiconductor substrate, performing a low temperature pocket implantation process on the substrate, performing a low temperature co-implanted ion implantation process on the substrate, and/or performing a low temperature lightly doped source/drain implantation process on the substrate.

Abstract: In a method of the present invention during a salicide process, before a second thermal process, a dopant is implanted at a place located in a region ranging from a NixSi layer at meddle height down to a front thereof, or before formation of the NixSi layer, located in a region ranging from a silicon layer at a depth ranging from a half of a predetermined thickness of a NiSi layer down to a depth where is a predetermined front of the NiSi layer. The dopant is allowed to be heated with the NixSi layer together during the second thermal process to form a Si/NiSi2/NiSi interface which may reduce SBH and improve series resistance to obtain a semiconductor device having an excellent performance.

Abstract: A semiconductor device manufacturing method includes, forming isolation region having an aspect ratio of 1 or more in a semiconductor substrate, forming a gate insulating film, forming a silicon gate electrode and a silicon resistive element, forming side wall spacers on the gate electrode, heavily doping a first active region with phosphorus and a second active region and the resistive element with p-type impurities by ion implantation, forming salicide block at 500° C. or lower, depositing a metal layer covering the salicide block, and selectively forming metal silicide layers. The method may further includes, forming a thick and a thin gate insulating films, and performing implantation of ions of a first conductivity type not penetrating the thick gate insulating film and oblique implantation of ions of the opposite conductivity type penetrating also the thick gate insulating film before the formation of side wall spacers.

Abstract: A method for forming silicide is provided. First, a substrate is provided. Second, a gate structure is formed on the substrate which includes a silicon layer, a gate dielectric layer and at least one spacer. Then, a pair of source and drain is formed in the substrate and adjacent to the gate structure. Later, an interlayer dielectric layer is formed to cover the gate structure, the source and the drain. Afterwards, the interlayer dielectric layer is selectively removed to expose the gate structure. Next, multiple contact holes are formed in the interlayer dielectric layer to expose part of the substrate. Afterwards, the exposed substrate is converted to form silicide.

Abstract: A semiconductor structure is disclosed. The semiconductor structure includes a gate structure disposed on a substrate, a source and a drain respectively disposed in the substrate at two sides of the gate structure, a source contact plug disposed above the source and electrically connected to the source and a drain contact plug disposed above the drain and electrically connected to the drain. The source contact plug and the drain contact plug have relatively asymmetric element properties.

Abstract: A SiC region and a source/drain region are formed such that the SiC region includes a first portion overlapping the source/drain region and a second portion protruding from the source/drain region to a position beneath the LDD region. The concentration of crystalline SiC in the second portion is higher than the concentration of crystalline SiC in the first portion. The SiC region may be formed through a normal implantation before the second spacer is formed, or the SiC region may be formed through a tilt implantation or deposition epitaxially in a recess having a sigma-shape like sidewall after the second spacer is formed.

Abstract: A method of fabricating a metal silicide layer includes forming a metal layer on a substrate, and forming a pre-metal silicide layer by reacting the substrate with the metal layer by performing a first annealing process on the substrate. The method also includes implanting silicon into the substrate using a gas cluster ion beam (GCIB) process, and changing the pre-metal silicide layer into a metal silicide layer by performing a second annealing process on the substrate.

Abstract: A semiconductor device 100 includes a semiconductor substrate 14, a connection electrode 12 disposed on an upper surface of the semiconductor substrate 14 and connected to an integrated circuit thereon, a through electrode 20 which penetrates the semiconductor substrate 14 and the connection electrode 20, and an insulation portion 30 interposed between the semiconductor substrate 14 and the through electrode 20. The through electrode 20 is integrally formed to protrude outward from upper surfaces of the semiconductor substrate 14 and the connection electrode 12, and connected to the connection electrode 12 in a region where the through electrode 20 penetrates the connection electrode 12.

Abstract: A channel is formed at a recessed portion or a projecting portion of a substrate, and a gate insulating film is formed so as to have first to third insulating regions along the channel. Each of the gate insulating films of the first and third insulating regions has a first gate insulating film containing no electric charge trap formed on a plane different from a principal surface of the substrate, an electric charge accumulating film containing an electric charge trap, and a second gate insulating film containing no electric charge trap. The gate insulating film of the second insulating region at the middle is formed on a plane parallel to the principal surface of the substrate and is composed of only a third gate insulating film containing no electric charge trap.

Abstract: A semiconductor device manufacturing method having forming first and second insulating gate portions spaced from each other on a semiconductor substrate, selectively implanting the first conductivity type impurity ions to the first gate electrode and a surface layer of the semiconductor substrate adjacent to the first insulating gate portion, selectively implanting the second conductivity type impurity ions to the second gate electrode and the surface layer adjacent to the second insulating gate portion, after implanting the first and second conductivity types impurity ions, pre-annealing at a first substrate temperature, and after the pre-annealing, main-activating for the first and second types impurity ions at a second substrate temperature higher than the first substrate temperature for a treatment period shorter than a period of the pre-annealing.