Abstract: Apparatus for compressing cryogenic fluid in at least one compression stage comprising at least one piston and at least one sleeve delimiting at least one compression chamber, a shaft that is able to move in translation along a longitudinal axis (A), the shaft being connected to the piston(s) or sleeve(s) and being able to move with an alternating movement in two opposite directions to ensure phases of compression and intake of fluid into the at least one compression chamber by moving the at least one piston and the at least one sleeve in a relative manner, characterized in that the shaft comprises a portion of reduced cross section in the longitudinal direction (A), said portion of reduced cross section separating two adjacent parts of the shaft, the shaft also comprising at least one linking element made of material that is less thermally conductive than the constituent material of the shaft, in particular a composite material, said at least one linking element having two ends connected respectively to the

Abstract: A cryopump includes an accommodation space for a condensed layer of gas, a first-stage cryopanel having an inner surface of the first-stage cryopanel disposed so as to surround the accommodation space, and a second-stage cryopanel disposed so as to be surrounded by the inner surface of the first-stage cryopanel together with the accommodation space. A first-stage heat load is incident on the inner surface of the first-stage cryopanel from outside the cryopump through an intake port, and the gas enters the accommodation space from outside the cryopump. The first-stage cryopanel is cooled to a temperature higher than a condensation temperature of the gas, the second-stage cryopanel is cooled to a temperature of the condensation temperature or less, and the condensed layer is deposited. The cryopump monitors the amount of condensed gas in the accommodation space based on a change in the first-stage heat load.

Abstract: A cryopump includes a cryopanel disposed in a cryopump housing and including a non-combustible adsorbent, a heater heating the non-combustible adsorbent and the cryopanel, a purge valve connecting the cryopump housing to a purge gas source, a rough valve connecting the cryopump housing to a rough pump, a sensor that generates a measurement signal indicating a temperature of the non-combustible adsorbent or an internal pressure of the cryopump housing, and a controller that controls at least one of the heater, the purge valve, and the rough valve based on the measurement signal so as to execute either a sublimation regeneration sequence for sublimating water from the non-combustible adsorbent by exposing the non-combustible adsorbent to a vacuum atmosphere or a dehydration sequence for dehydrating the non-combustible adsorbent by exposing the non-combustible adsorbent to a dry atmosphere at room temperature or a temperature higher than the room temperature.

Abstract: A cryopump system includes a plurality of cryopumps, each cryopump including a rough valve connecting the cryopump to a common rough pump and a pressure sensor measuring a pressure in the cryopump, and a controller that controls, for each cryopump, the rough valve based on a measured pressure from the pressure sensor such that the cryopump is decompressed to a first reference pressure by the common rough pump and thereafter a vacuum is maintained in the cryopump, and the cryopump is further decompressed to a second reference pressure lower than the first reference pressure by the common rough pump. The controller is configured to, based on the measured pressure from the pressure sensor of a first cryopump, open the rough valve of a second cryopump such that the second cryopump is decompressed to the first reference pressure while the vacuum is maintained in the first cryopump.

Abstract: Systems and methods are provided for evacuating a chamber 101. The evacuation system comprises a cooler 320 coupled with the chamber and a controller 350. The controller is configured to determine whether a property of the cooler or the chamber satisfies one or more conditions. Based on the determination that the property satisfies the one or more conditions, the controller is configured to isolate the cooler from the chamber or control the temperature of the cooler to increase at one or more rates. The controller is further configured to control one or more pumps 330,340 to pump the chamber to a base pressure value.

Abstract: A cryopump includes: a cryocooler which includes a high-temperature cooling stage and a low-temperature cooling stage; a radiation shield which surrounds the low-temperature cooling stage, extends in an axial direction, and is thermally coupled to the high-temperature cooling stage; a plurality of adsorption cryopanels which are disposed between a cryopump intake port and the low-temperature cooling stage in the axial direction and are thermally coupled to the low-temperature cooling stage; and a condensation cryopanel which is disposed between the radiation shield and the plurality of adsorption cryopanels in a radial direction, is thermally coupled to the low-temperature cooling stage, and has a tubular shape extending in the axial direction and being open at both ends.

Abstract: A cryocooler includes a motion conversion mechanism that converts rotating motion output by a motor into linear reciprocating motion of a displacer and includes a first component and a second component slidably connected to each other, a measuring instrument that is connected to the motor to output time-series data indicating power consumption of the motor or a current flowing through the motor, and a processing unit that detects abrasion of a sliding surface between a first component and a second component of the motion conversion mechanism on the basis of section data including an intake start timing or an exhaust start timing in the time-series data.

Abstract: There is provided a cryopump including a cryocooler, a cryopanel that is cooled by the cryocooler, a cryopump container that includes a container body, which accommodates the cryopanel, and a cryocooler accommodating tube of which one end is coupled to the container body and the other end is fixed to the cryocooler and into which the cryocooler is inserted, a vent valve for exhausting a fluid from the cryopump container, a first exhaust passage that includes a first exhaust port provided in the container body, is disposed outside the cryopump container, and connects the first exhaust port to the vent valve, and a second exhaust passage that includes a second exhaust port provided in the cryocooler accommodating tube, connects the second exhaust port to the vent valve, and merges with the first exhaust passage between the first exhaust port and the vent valve.

Abstract: Provided is a cryopump including a cryopump vacuum chamber, a cryocooler, a first flange fixed to the cryopump vacuum chamber, a second flange fixed to the cryocooler and airtightly connected to the first flange, and an annular laminated vibration isolation body in which a first annular vibration isolation material, a first annular support member, an intermediate annular vibration isolation material, a second annular support member, and a second annular vibration isolation material are disposed in this order from the first flange toward the second flange. The second annular support member and the first annular support member are fixed to the first flange and the second flange, respectively, such that the first flange and the second annular support member are vibration-isolated from the second flange and the first annular support member.

Abstract: A method for using a shape memory alloy (SMA) with a non-evaporable getter (NEG) employed in a vacuum device is disclosed. The method comprises coupling a NEG component to a SMA component to form an NEG/SMA assembly pair; heating the NEG/SMA assembly pair to activate the NEG component; and packaging the activated NEG component with the SMA component to form an NEG/SMA package having a gas tight seal. The method further comprises installing the NEG/SMA package in the vacuum device; and heating the installed NEG/SMA package such that the SMA component is actuated to expose the activated NEG component to a vacuum chamber in the vacuum device.

Abstract: Embodiments of the present application provide a battery, a power consumption device, a method and a device for producing the battery. The battery includes: a battery cell, including a pressure relief mechanism, wherein the pressure relief mechanism is disposed on a first wall of the battery cell; a thermal management component, wherein a first surface of the thermal management component is attached to the first wall, and the thermal management component is provided with a pressure relief hole opposite to the pressure relief mechanism; and a baffle configured to cover a part of the pressure relief hole, so that when the pressure relief mechanism is actuated, a discharge direction of the emissions entering the pressure relief hole is changed. The battery, the power consumption device, the method and the device for producing the battery provided in the embodiments of the present application can enhance safety of batteries.

Abstract: Devices, systems, methods, and computer-implemented methods to facilitate employing thermalizing materials in an enclosure for quantum computing devices are provided. According to an embodiment, a system can comprise a quantum computing device and an enclosure having the quantum computing device disposed within the enclosure. The system can further comprise a thermalizing material disposed within the enclosure, with the thermalizing material being adapted to thermally link a cryogenic device to the quantum computing device.

Abstract: A vacuum pump, vacuum pump arrangement and method are disclosed. The vacuum pump includes at least one rotor; and a stator, an inlet for receiving gas during operation; and an exhaust for exhausting the gas. The vacuum pump includes a shaft extending through a centre of said pump and comprising a plate mounted on an end of the shaft towards the inlet. The vacuum pump includes control circuitry configured to control an axial position of the plate, a change in axial position of the plate providing a change in inlet conductance of gas to the vacuum pump. The plate is mounted such that it extends beyond the inlet in at least some axial positions of the rotor such that the plate is not on the same side of the inlet as the stator.

Abstract: A cryopump includes a cryopump flange for attachment to the flange on a gate valve, and an annular baffle that axially extends toward the gate valve from the cryopump flange such that the annular baffle forms an annular orifice in association with a valve plate component of the gate valve. The annular orifice may be defined between an upper surface of the annular baffle and the valve plate.

Abstract: The present disclosure provides a semiconductor fabrication apparatus. The semiconductor apparatus includes a processing chamber; a substrate stage provided in the processing chamber and being configured to secure and rotate a semiconductor wafer; a gas injector configured to inject a chemical to the processing chamber; a window attached to the gas injector; and an adjustable fastening device coupled with the gas injector and the window.

Abstract: Systems and methods are provided for evacuating a chamber 101. The evacuation system comprises a cooler 320 coupled with the chamber and a controller 350. The controller is configured to determine whether a property of the cooler or the chamber satisfies one or more conditions. Based on the determination that the property satisfies the one or more conditions, the controller is configured to isolate the cooler from the chamber or control the temperature of the cooler to increase at one or more rates. The controller is further configured to control one or more pumps 330,340 to pump the chamber to a base pressure value.

Abstract: A method for generating an insulating vacuum in a container is provided. The method includes evacuating air from a space between double walls of the container for a first predetermined time period. The method also includes after the first predetermined time period, if a vacuum level within the space has not reached a first predetermined vacuum level, purging the space by supplying a gas into the space and subsequently evacuating the air from the space for a period of time equal to the first predetermined time period. The method also includes repeating the evacuating and purging until the vacuum level within the space reaches the first predetermined vacuum level. The method also includes when the vacuum level within the space reaches the first predetermined vacuum level, evacuating the air from the space for a second predetermined time period.

Abstract: A cryopump includes a refrigerator with at least first and second stages. A radiation shield surrounds the second stage and is in thermal contact with the first stage. The radiation shield includes a drain hole to permit cryogenic fluid to traverse through the drain hole during regeneration. The cryopump also includes a primary pumping surface supporting adsorbent in thermal contact with the second stage. The second stage array assembly includes a primary condensing surface, protected surfaces having adsorbent, and non-primary condensing surfaces. A baffle is disposed over the drain hole. The baffle redirects gas from an annular space disposed between the radiation shield and the vacuum vessel that attempts to traverse through the drain hole to prevent the gas from condensing on a non-primary condensing surface. The baffle directs gas to condense on the primary condensing surface.

Abstract: A multi-stage closed-cycle cryogenic refrigeration system is disclosed. The system includes an adsorption refrigerator having a multi-chambered pump unit that can be flexibly configured in the context of the cryogenic refrigeration system resulting in a more efficient design that has a smaller overall size than prior systems and other advantages.

Abstract: A sea water cooling system including a first fluid cooling loop coupled to a first side of a heat exchanger and to a thermal load, a second fluid cooling loop coupled to a second side of the heat exchanger and including a pump for circulating fluid through the second fluid cooling loop, and a controller operatively connected to the pump, wherein the controller is configured to monitor an actual temperature in the first fluid cooling loop and to adjust a speed of the pump based on the monitored temperature to achieve a predetermined temperature in the first fluid cooling loop. The system may be selectively operable in one of a plurality of operating modes, wherein in a first operating mode the pump operates based entirely on cooling demands of the thermal load, and in a second operating mode the pump operates to maintain a fluid pressure above a predefined pressure.

Abstract: A cryopump includes a second cryopanel unit which is thermally connected to a second cooling stage of a cryocooler, a radiation shield which includes a shield main opening, a shield side opening, and a shield bottom opening, and a cryopump housing having a housing bottom portion which faces the shield bottom opening. A dimension of the shield bottom opening is larger than a distance from the second cryopanel unit to the housing bottom portion.

Abstract: A system for hyperpolarizing a substance is provided. The system includes a cryostat, a polarizer, and a shuttle. The cryostat is operative to generate radicals within the substance by exposing the substance to electromagnetic radiation. The polarizer is operative to hyperpolarize the substance via the radicals, and to quench the radicals within the substance by adjusting a temperature of the substance after the substance has been hyperpolarized. The shuttle is operative to transport the substance while maintaining hyperpolarization of the substance.

Abstract: A cryopump includes a cryopump including: a refrigerator; a first cryopanel including a radiation shield; and a second cryopanel enclosed by the first cryopanel and cooled to a lower temperature than that of the first cryopanel. The radiation shield includes an attaching pedestal located lateral to the second cryopanel for attachment of the refrigerator to the radiation shield, and a shield portion adjacent to the attaching pedestal and enclosing the second cryopanel. A lateral gap is formed between the second cryopanel and the attaching pedestal. A gap part continuing into the lateral gap is formed between the second cryopanel and the shield portion. The second cryopanel is shaped and/or located such that the lateral gap is comparable in width to the gap part.

Abstract: A cold trap includes a cold panel, a cryocooler which cools the cold panel, a stage temperature control unit which determines a control input to the cryocooler to cool a cooling stage of the cryocooler to a target temperature, an input heat estimation unit which estimates an increase of input heat into the cold panel based on the control input to the cryocooler determined by the stage temperature control unit, and a target temperature adjustment unit which adjusts a target temperature based on the increase of the input heat estimated by the input heat estimation unit.

Abstract: A cryopump includes a first cryopanel including a radiation shield and a plate member across a shield opening and a second cryopanel enclosed by the first cryopanel and cooled to a lower temperature than that of the first cryopanel. The plate member includes a plate main portion and a plate peripheral portion adapted to attach the plate main portion to the radiation shield. The plate main portion includes a gas passing region having a multitude of pores through which gases pass to be condensed on the second cryopanel and a gas shielding region formed at a different position in the plate main portion from that of the gas passing region.

Abstract: Disclosed is a mass selective fluid bandpass filter. This filter provides for selecting gas molecules of a specific mass from a gas sample containing molecules of two or more mass species. This provides for a low power, low cost apparatus for producing 3He from terrestrial sources of helium gas by selective enrichment. This invention further discloses a portable, field deployable means of 3He/4He ratio determination employing one or more of the effects consisting of: statistical linear regression plots of heat ramps, variable emission currents within a quadruple mass spectrometer, use of a quadrupole mass spectrometer in concert with ultrahigh vacuum maintained by non-evaporable getter pumps, and/or construction of vacuum housing structures from non-steel or non-stainless steel alloys, and or non metallic materials selected from a group consisting of: aluminum, titanium, ceramics, or glass. This provides a compact, sensitive field deployable unit with low power consumption.

Abstract: A cryopump includes a top cryopanel that partitions a shield cavity into a shield cavity upper portion and a shield cavity lower portion. A radiation shield includes a shield main slit that communicates a shield outside gap into the shield cavity lower portion. The radiation shield may include a shield auxiliary slit that is formed at a different position from that of the shield main slit in an axial direction of the cryopump and that communicates the shield outside gap into the shield cavity lower portion. The shield auxiliary slit may be formed between the top cryopanel and the shield main slit in the axial direction.

Abstract: A filed portable analyzer capable of performing both the sampling and analytical procedures required by U.S. EPA Method 25 utilizing a small volume injection of sample onto a cryotrap cooled by a Stirling linear drive charged with helium to replace the field sampling condensate trap. The cryotrap is followed by the specified sorbent column/traps to ensure precise compatibility with prior reported compliance test results. The analytical system utilizes an oxidation catalyst and reduction catalyst to remove the potential for differing response factors on the FID from different compounds.

Abstract: A cold trap includes a duct, which is for connecting a volume to be evacuated to a vacuum pump, and a cold panel surrounded by the duct. The duct includes an inlet flange at an evacuation target side and an outlet flange at a vacuum pump side. The outlet flange is arranged at a distance from the inlet flange in the extending direction of the duct. The inlet flange has an outer diameter larger than an outer diameter of the outlet flange.

Abstract: A cryopump includes a low-temperature cryopanel, a high-temperature cryopanel provided outside the low-temperature cryopanel, and a housing provided outside the high-temperature cryopanel. The high-temperature cryopanel includes an extension panel extending outward. The housing includes an inlet flange surrounding the extension panel.

Abstract: A method for testing the tightness of a housing involves providing a pressure sensor in a housing, sealing the housing, and detecting a pressure level in the housing.

Abstract: A method for regenerating a cryopump includes stopping a pressure sensor for the cryopump, starting to heat a cryogenic surface for adsorbing gas molecules, starting the rough evacuation of the cryopump while the pressure sensor is stopped, and terminating the rough evacuation while the pressure sensor is stopped. This method may include activating the pressure sensor after the rough evacuation has been terminated.

Abstract: A method for detecting a chemical species includes providing in a vessel an acidic sample containing an ionic chemical species to be measured where a substrate of the species to be formed is ionizable by radiant energy provided by a photoionization detector in detector system and a headspace above the acidic sample, adding a preselected reducing agent to the aqueous sample and forming an ionizable chemical gas species in the aqueous sample where the ionizable chemical gas species evolves out of the aqueous sample and into the headspace forming a gas sample, moving the gas sample containing the ionizable chemical gas species from the headspace of the vessel out of the vessel and through a precolumn, and moving the gas sample containing the ionizable chemical gas species from the precolumn into one of (1) a detector system or (2) an oxygen-retaining column before the detector system.

Abstract: A cryopump includes: a first panel to be cooled by a first stage of a refrigerator; a second panel to be cooled by a second stage of the refrigerator; a panel temperature sensor provided with the first panel and/or the second panel; a stage temperature sensor provided with the first stage and/or the second stage; and a control unit that controls vacuum pumping based on the temperature measured by the stage temperature sensor. The control unit controls regeneration including a heating process of a cryopanel, and uses the temperature measured by the panel temperature sensor exclusively in the regeneration. The control unit completes the heating process based on the temperature measured by the panel temperature sensor.

Abstract: A semiconductor process pump configured to mitigate losses in pump speed during operation. The semiconductor process pump may include a housing having an inlet port for receiving gas molecules therethrough, wherein a forward-most terminus of the inlet port defines an inlet face, one or more working surfaces disposed within the housing, and a mounting flange disposed on an exterior of the housing for facilitating attachment of the pump to a gas enclosure, wherein a forward-most terminus of the mounting flange defines a flange face. The flange face may be offset from the inlet face rearwardly along the housing by a distance d. Thus, when the semiconductor process pump is mounted to a wall of a gas enclosure, the housing may extend into the wall and the inlet face may be disposed within or immediately adjacent the interior of the gas enclosure.

Abstract: A cryopump system includes a cryopump having a first cooling stage and a second cooling stage connected to the first cooling stage, the second cooling stage including a gas adsorber having a hydrogen adsorbing capacity of at least about 2 standard liters. The thermal storage capacity of the second cooling stage is sufficient to enable control of hydrogen pressure within the cryopump to satisfy ignition safety limits and limits on hydrogen flow rate in an exhaust line to be within limits of an abatement system to be coupled to the cryopump, upon warming of the second cooling stage during regeneration of up to a fully loaded cryopump.

Abstract: A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.

Abstract: A refrigeration device of an embodiment includes: a heat-insulating vacuum chamber; a refrigerator cryogenic unit that is provided in the heat-insulating vacuum chamber and is cooled to a lower temperature than 195 K; a catalytic electrode that is provided in the heat-insulating vacuum chamber and contains a transition metal at least in part of a surface thereof; a power supply that applies a voltage to the catalytic electrode; and a heating unit that is provided in the heat-insulating vacuum chamber and heats the catalytic electrode. In this refrigeration device, the catalytic electrode is insulated from the heat-insulating vacuum chamber and the heating unit, and the heating unit is insulated from the heat-insulating vacuum chamber and the catalytic electrode.

Abstract: A means of rapidly melting a large quantity of type II cryogen in a cryopump that is configured to contain the liquid in the warm cryopanel with the inlet to the cryopump facing up or sideways, and venting the liquid and gas in a controlled way. Rapid melting is preferably accomplished by flowing a purge gas that will condense on the cryodeposit. By not allowing the liquid to drain onto the vacuum housing the evaporation rate is limited and the maximum pressure in the cryopump can be controlled by the purge gas flow rate.

Abstract: Faster cool down time is achieved in a low profile cryopump by having heat transferred directly from the inlet louver to the first stage heat station through one or more tapered thermal busses, and by obviating the need of a thermal shield over the second stage cylinder of the expander by having second stage cryopanels that form a nested tent like structure, at least one of which, extends over the cylinder.

Abstract: In a disclosed embodiment, an ultra-cold-matter (UCM) system includes a source cell nested within a hermetically-sealed ultra-high-vacuum (UHV) enclosure. Source particles, e.g., strontium atoms, can be generated within the source cell by heating a non-vapor-phase source material. The source cell is thermally isolated, e.g., by UHV, from the enclosure. Accordingly, heat is retained in the source cell, reducing the amount of heat that must be generated in the source cell to generate the vapor-phase source particles. Particles can exit the source cell to an UHV ultra-cold region where the source particles can be cooled to produce ultra-cold particles thermally isolated from the heat within the source cell.

Abstract: The power recovery system includes: a Stirling engine; and a vaporization device that stores a liquid therein in such a manner that the liquid is kept in contact with an upper portion of a cylinder and vaporizes the liquid by supplying the cold heat of the liquid to the upper portion of the cylinder. The vaporization device includes a liquid container which stores the liquid therein in such a manner that the liquid is kept in contact with the upper portion of the cylinder, and an outer container embracing the liquid container and defining a space portion around the liquid container. The space portion communicates with the liquid container and an exhaust vent. Gas vaporized in the liquid container passes between the liquid container and an outer wall surface of a heat insulating material during passage thereof from the liquid container to the exhaust vent through the space portion.

Abstract: One example includes a battery case sealed to retain electrolyte, an electrode disposed in the battery case, the electrode comprising a framework defining open areas disposed along three axes (“3D framework”) formed of fluorinated carbon including elements that each include a conductive core at least partially surrounded by an electrochemically active portion, wherein a plurality conductive cores form an electrically conductive network, a conductor electrically coupled to the electrode in electrical communication with the conductive network and sealingly extending through the battery case to a terminal disposed on an exterior of the battery case, a further electrode disposed in the battery case, a separator disposed between the electrode and the further electrode and a further terminal disposed on the exterior of the battery case and in electrical communication with the further electrode, with the terminal and the further terminal electrically isolated from one another.

Abstract: A cryopump includes a second-stage cryopanel, a radiation shield that surrounds the second-stage cryopanel and has a shield opening, and a first-stage cryopanel provided in the shield opening. The first-stage cryopanel includes a first panel provided with opening regions thereon in a first distribution, and a second panel arranged closer to the second-stage cryopanel than the first panel and provided with opening regions thereon in a second distribution different from the first distribution when viewed in an arrangement direction of the first and second panels.

Abstract: A cryopump system includes at least one cryopump including a refrigerator including a low temperature cooling stage and a high temperature cooling stage, a low temperature cryopanel cooled by the low temperature cooling stage, and a high temperature cryopanel cooled by the high temperature cooling stage. A compressor unit includes a compressor main body that compresses a working gas supplied to the refrigerator, an operating frequency of the compressor main body being variable. The compressor unit is operated such that a pressure ratio between high pressure and low pressure of the compressor main body is in a range between 1.6 and 2.5.

Abstract: A cryopump 10 includes: a first cryopanel including a radiation shield 18 having a shield opening 20 and a louver 23 arranged in the shield opening 20; a second cryopanel 24 surrounded by the first cryopanel; and a refrigerator 14 configured to cool the first cryopanel to a first cooling temperature and to cool the second cryopanel to a second cooling temperature lower than the first cooling temperature. A rough surface 42 is formed on the louver 23.

Abstract: A cryopump system includes: a plurality of cryopumps connected to a common roughing pump in a rough line and provided with a plurality of rough valves in the rough line, respectively; and a controller configured to control each of the rough valves for regenerating a corresponding one of the plurality of cryopumps. A delay time is set between closing of an open one of the plurality of rough valves and opening of a closed one of the plurality of rough valves. The controller applies the delay time uniformly upon closing of each of the rough valves.

Abstract: Cryogenic pump apparatuses include nanostructure material to achieve an ultra-high vacuum level. The nanostructure material can be mixed with either an adsorbent material or a fixed glue layer which is utilized to fix the adsorbent material. The nanostructure material's good thermal conductivity and adsorption properties help to lower working temperature and extend regeneration cycle of the cryogenic pumps.

Abstract: A semiconductor process pump configured to mitigate losses in pump speed during operation. The semiconductor process pump may include a housing having an inlet port for receiving gas molecules therethrough, wherein a forward-most terminus of the inlet port defines an inlet face, one or more working surfaces disposed within the housing, and a mounting flange disposed on an exterior of the housing for facilitating attachment of the pump to a gas enclosure, wherein a forward-most terminus of the mounting flange defines a flange face. The flange face may be offset from the inlet face rearwardly along the housing by a distance d. Thus, when the semiconductor process pump is mounted to a wall of a gas enclosure, the housing may extend into the wall and the inlet face may be disposed within or immediately adjacent the interior of the gas enclosure.

Abstract: A portable moisture trap for use with a vacuum pump includes: a housing; a cooling chamber positioned at least partially within the housing including a first inlet port and a second outlet port; a lid that sealably attaches to a top portion of the cooling chamber to seal the cooling chamber; a heat sink residing under the cooling chamber; a thermoelectric device having an upper cooling side and a lower heat generating side residing between the cooling chamber and the heat sink; a fan oriented to blow air upwardly toward the heat sink; and a baffle extending downwardly in the cooling chamber from a location proximate the lid to a location proximate an inner bottom surface of the cooling chamber, with the baffle configured to define a physical barrier to urge air received through the first port to flow down toward the inner bottom surface of the cooling chamber before exiting through the second port, to thereby remove moisture from air traveling through the cooling chamber in response to a vacuum pump in fluid