Abstract: A vacuum network control system includes a plurality of nodes configured for control over operational processes of the system. The plural nodes are configured, in a network ring or other topology, as a selectable master node for controlling the operational processes. Control can be distributed among, and passed between, each of the nodes. Each node on the network monitors adjacent network connectors to detect a fault in the network. In response to a detected fault, a disconnect is mapped to the fault, and the network topology is reconfigured for continued communication among the nodes and with external devices.

Abstract: A cryopump pumps gas from a vacuum chamber in a vacuum apparatus performing vacuum processing. The cryopump comprises: a refrigerator; a cryopanel cooled by the refrigerator; and a controller configured to control an operating cycle of the refrigerator such that the cryopanel is controlled so as to have a target temperature. When an operating cycle of the refrigerator has reached a first determination reference, the controller monitors the operating cycle for a first determination period of time, and when the operating cycle has reached a second determination reference, which corresponds to a higher load than the first determination reference, the controller monitors a temperature of the cryopanel for a second determination period of time, which is shorter the first determination period of time.

Abstract: The invention concerns a damping adapter (3) insertable in a suction duct between a service chamber (2) and a vacuum pump (1). The adapter (3) consists of a tubular duct wall (6) in the form of a flexible bellows surrounded by a damping sleeve (7) supported on two end flanges (4, 5). The flexible bellows' plys (6a, 6b) receive a passive damping elastomer (8a) on their outer faces, engaged between the successive plys (6a, 6b). This considerably reduces the transmitting of vibrations from the vacuum pump (1) to the service chamber (2), enabling applications in the microscopy field in particular.

Abstract: An apparatus for efficiently collecting reaction by-products in exhaust gases of a semiconductor processing or flat panel display processing device is provided. The collection apparatus includes a heating section connected to a process chamber of the semiconductor processing or flat panel display processing device. The heating section is designed to preheat the reaction by-products to prevent or reduce liquefaction of the reaction by-products. A by-product pile up section then rapidly cools the heated reaction by-products to convert the same into a solid form.

Abstract: A trap system for cryogenic environments, which brings a gas to a body of the same material in liquid form, allows the liquefied material in the gas bearing tube to pass through a submerged trap combining the newly condensed liquid with that in the reserve. With this apparatus, for example, pure cold Nitrogen gas can be condensed and recycled in a system requiring cryogenic liquid Nitrogen to start the process. This trap system can also be applied to other gaseous materials stored cooled beyond the condensing temperatures. The trap system brings the newly condensed material into the vessel of already condensed material. The gas that has not condensed into liquid, in the case of Liquid Nitrogen, will release into the atmosphere. It is expected that all the gas of the other material will liquefy and be part of the stored liquid because it is stored below its liquefaction temperature—here using Liquid Nitrogen chambers surrounding the vessel of the liquefied material.

Abstract: An active thermal insulation system is disclosed. The system utilizes a cool air source in conjunction with a phase change material and/or conventional insulation. In a controlled manner, the cool air source facilitates the transition of the phase change material from a substantially liquid state to a substantially solid state allowing the solid phase change material to absorb heat. Cool air may be directed to the phase change material via a duct, plenum or other suitable passageway capable of introducing the cool air to the phase change material. A system outlet allows heat created during the phase change material's transition from a liquid state to a solid state to be exhausted to the atmosphere or elsewhere. The system is ideal for desert and other warm weather climates.

Abstract: A helium management control system for controlling the helium refrigerant supply from a common manifold supplies a plurality of cryogenic refrigerators with an appropriate helium supply. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium refrigerant and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the total refrigerant demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly.

Abstract: A condenser and a containment vessel adapted to efficiently condense a gas out of a mixture of condensing and non-condensing gases. In condensers, the fraction of gas within a condenser made up of non-condensing gases can be significantly reduced by withdrawing gas from localised regions of relatively low temperature where the mass fraction of non-condensing gases will be relatively high. In containment vessels, pressures can be reduced by providing a large surface area of the liquid into which the condensing gas condenses in a relatively cool region of the containment vessel. Both these effects result from an appreciation of the manner in which non-condensing gases tend to accumulate in regions which are relatively cold.

Abstract: An exhaust system includes an entrapment vacuum pump equipped with a refrigerator, a master compressor which is driven in a driving frequency band to make constant a pressure difference between gas recovered from the refrigerator via a low-pressure gas recovery pipe and compressed gas supplied to the refrigerator via a high-pressure gas supply pipe, and a first sub-compressor which is driven at a predetermined driving frequency to supply compressed gas at a first gas volume to the refrigerator via a high-pressure gas supply pipe from gas recovered from the refrigerator via a low-pressure gas recovery pipe.

Abstract: A cryogenic refrigerator of a cryopump generates cryogenic cooling in an expansion volume by reciprocally moving a displacer in a cylinder. A cryopanel and a cup-shaped shield are received in a vacuum chamber of the cryopump and are cooled by the cryogenic cooling. The shield protects the cryopanel from radiant heat of the vacuum chamber. A louver is provided at an upper opening of the shield. A hole is formed at a bottom or side of the cup-shaped shield defining a storage part. Molecules in the vacuum chamber are solidified at or absorbed by the cryopanel and the shield. During regeneration, temperature of the cryopanel and the shield is increased. Water molecules desorbed and liquefied from the louver, the shield or the cryopanel are accumulated during regeneration at the storage part that has enough volume to store the water molecules.

Abstract: A cryopump includes a second-stage cryopanel, a radiation shield that surrounds the second-stage cryopanel and has a shield opening, and a first-stage cryopanel provided in the shield opening. The first-stage cryopanel includes a first panel provided with opening regions thereon in a first distribution, and a second panel arranged closer to the second-stage cryopanel than the first panel and provided with opening regions thereon in a second distribution different from the first distribution when viewed in an arrangement direction of the first and second panels.

Abstract: A cryotrap which is set in a vacuum vessel, and has an exhaust panel which condenses and exhausts a gas by cooling, and a cooling stage which is connected to a refrigerator and thereby cooled, includes a cooling storage body fixed on a cooling stage while maintaining thermal contact with it, and a mechanism which thermally connects/disconnects the cooling storage body 6 and the exhaust panel. The mechanism which performs thermal connection/disconnection has a movable unit which has a good heat conductivity and can come into contact with and separate from the exhaust panel and the cooling storage body.

Abstract: A standard size cryopump adapted to be mounted behind a nonstandard gate valve by extending the inlet array to a larger diameter. A standard size cryopump adapted to be mounted behind a nonstandard gate valve by using an extension attached to flanges, where the flanges correspond to the diameter of the nonstandard gate valve.

Abstract: A cryopump includes a radiation shield provided with a main inlet at one end thereof and a sub-inlet in a side thereof; and a cryopanel assembly cooled to a temperature lower than that of the radiation shield. The cryopanel assembly includes an upper structure having at least one cryopanel and a lower structure having at least one cryopanel. The upper and lower structures are arranged inside the radiation shield along a direction away from the main inlet. A frost accommodating space connected to the sub-inlet may be arranged between the upper and lower structures such that an amount of captured gas on an upper end cryopanel of the lower structure is greater than an amount of captured gas on a lower end cryopanel of the upper structure.

Abstract: A cryopump includes: a refrigerator having a first cooling stage and a second cooling stage cooled to a temperature lower than that of the first cooling stage; a radiation shield on side surface of which is formed an opening, in which the refrigerator is inserted through the opening such that the first cooling stage is arranged outside and the second cooling stage is arranged inside, and which is thermally connected to the first cooling stage; and a refrigerator cover thermally connected to the second cooling stage, which extends through the opening from the inside to the outside of the radiation shield, and which is spaced apart from the radiation shield at the opening.

Abstract: A coreless and brushless direct-current motor includes an armature coil wound without core and formed in the shape of a saddle; an outside rotor magnet formed by a permanent magnet, the outside rotor magnet being provided at an outside of the armature coil in the shape of a cylinder so as to face the armature coil, the outside rotor magnet being rotated by the magnetic field; an inside rotor magnet formed by a permanent magnet, the inside rotor magnet being provided in the shape of a cylinder at an inside of the armature coil so that the inside rotor magnet has a pole opposite to the outside rotor magnet and a rotational shaft is independently provided; an output shaft connected to the inside rotor magnet; and a sealing part of a barrier structure which sealing part partitions the armature coil and the outside rotor magnet to an outside of the inside rotor magnet and seals the armature coil and the outside rotor magnet.

Abstract: A cold trap is provided with a cold panel provided in a pumping path such that the panel is exposed, a refrigerator thermally coupled to the cold panel and operative to cool the cold panel; and a controller configured, in a regeneration process for evaporating a gas frozen on the surface of the cold panel and discharging the gas outside using the vacuum pump, to control the refrigerator so as to raise the temperature of the cold panel to a temperature exceeding a non-liquefaction temperature range and to adjust a pressure in the pumping path at the temperature so that the gas frozen on the surface of the cold panel is evaporated without being melted, the non-liquefaction temperature range being a range in which it is guaranteed that a gas frozen on the surface of the cold trap is evaporated without being melted.

Abstract: A cold trap is disclosed with a chamber having partitions or surfaces that direct the incoming wet vapor to substantially all of the cold inner surfaces of the cold trap. Typically, the cold inner surfaces are the inner walls of the chamber. The interaction of the wet vapor and the cold surfaces condense the molecules. The wet vapor minus the condensed molecules may be heated and returned to the source of the wet vapor for reuse. One example of the partitions or surfaces is a spiral inclined plane where the wet vapor flows along the spiral plane that acts to drive the wet vapor toward the cold inner walls of the chamber.

Abstract: This invention relates to a circulation type liquid helium recondensation device with a contaminant-purging function capable of vaporizing and removing contaminants deposited on the refiner in the device. Helium gas vaporizing in the liquid helium storage tank 2 is pumped by the circulating pump 7 and refined in the refiner 6. The refiner is provided with heaters and also a discharge circuit on the inflow side. The vaporized contaminants generated when the refiner 6 is heated by the heaters are pumped by the circulating pump 7 or the dedicated purge pump 8 and vented to the atmosphere via said discharge circuit.

Abstract: A cryopump includes: a cryopump chamber having an inlet port through which a gas to be pumped is introduced; a refrigerator provided with a second cooling stage provided in the cryopump chamber; an intermediate member thermally coupled to the second cooling stage; and a cryopanel having a connecting part connected to the intermediate member at a position farther from the inlet port in the direction in which the gas is introduced than the second cooling stage, and extending from the connecting part toward the inlet port. For example, a cryopump having a suspended panel structure is provided.

Abstract: A cryopump regeneration method includes a temperature raising step of raising the temperature of a cryopanel so as to vaporize gas molecules condensed on the exhaust surface of the cryopanel, an evacuation step of evacuating a pump vessel, a determination step of determining whether the internal pressure of the pump vessel has reached a set pressure higher than the water vapor pressure at 0° C., a pressure rise test step of stopping the evacuation and performing a pressure rise test, and an observation step of observing residual water based on the internal pressure of the pump vessel.

Abstract: A method and system for controlled rate freezing of biological materials is provided. The presently disclosed system and method provides the ability to rapidly cool the biological materials contained in vials or other containers within a cooling unit via forced convective cooling using a laminar and uniform flow of cryogen in proximity to the plurality of vials disposed within the cooling unit. The rapid cooling of the biological materials is achieved by precisely controlling and adjusting the temperature of the cryogen being introduced to the system as a function of time.

Abstract: A cryopump apparatus includes a sensor which detects at least one of the temperature and pressure in a cryopump, a controller which detects a change in at least one of the temperature and pressure in the cryopump on the basis of the detection result obtained by the sensor, thereby determining the connection state between the controller and the cryopump, and a display device which displays an abnormal point for the cryopump estimated from the determination result obtained by the controller.

Abstract: A cooling trap unit including a vacuum vessel with a drain port, a refrigerator connected to the vacuum vessel such that an endothermic unit is located on a vacuum side, and a cooling panel which is fixed to the endothermic unit to be in tight contact with it and condenses or solidifies gas, includes a water reservoir unit capable of storing liquefied liquid in the vacuum vessel, when liquefying the gas condensed or solidified by the cooling panel and discharging the liquid outside the vacuum vessel, such that the liquefied liquid is in contact with the cooling panel, and a detection unit for discharging the liquid stored in the water reserving unit through the drain port based on a detection signal which is obtained by detecting a change in temperature of the liquid and indicates that the temperature reaches a predetermined value

Abstract: In a cryo pump 20 that is used in a process chamber 10 into which a process gas is introduced and that includes a first-stage panel, a heat shield plate 24, and a second-stage panel 28, a notch for allowing for entrance of gas molecules and an additional shield 34 for preventing entrance of heat due to radiation from a room-temperature cryo pump chamber are provided in the heat shield plate 24. Thus, lowering of a performance of the cryo pump caused by the process gas getting between the cryo pump chamber and the heat shield plate can be prevented.

Abstract: The present invention provides a conduit trap, which can also operate as condensation recovery device when installed in a refrigeration system drainage line. The conduit trap is generally a hollow body defining a fluid path that includes an upper conduit 20, having a waste outlet 30 and optionally a condensation collection outlet 32. A lower conduit 22 extends downwardly from the upper conduit and has a narrowing that creates an inner sealing region for receiving a sealing means, such as float 50. Condensation can be directed from the refrigeration system through the conduit trap for recovery or for disposal without exposing the refrigeration drainage line and occupied space in which the refrigeration unit is located to sewer gasses even in dry weather when a gravity based, fluid-filled trap would fail.

Abstract: A cryopanel used for a cryopump, the cryopump including a vacuum chamber having a gas flow-in opening; a stage provided in the vacuum chamber; and a cryocooler configured to cool the stage, the cryopump being configured to solidify or absorb a molecule flowing from the gas flow-in opening into the vacuum chamber, the cryopanel includes a first panel held and cooled by the stage, the first panel having a surface facing toward the gas flow-in opening; and a second panel held by the first panel and extending from the first panel in an upstream direction of a gas flow-in, the second panel having a surface where an absorption material layer is formed.

Abstract: A trapping device is disclosed which is arranged in a vacuum exhaust system (6) for removing gaseous impurities contained in the exhaust gas flowing through the vacuum exhaust system (6) which has a vacuum pump (36) for vacuum exhausting a processing unit (10) wherein a certain process is conducted on a semiconductor wafer. The trapping device comprises an impurity collecting chamber (50) arranged along the exhaust passage in the vacuum exhaust system (6) and a nozzle means (64) which injects a working fluid that is in a supersonic state due to adiabatic expansion for mixing the fluid with the exhaust gas and lowering the temperature of the exhaust gas to or below the critical points of the impurities within the impurity collecting chamber (50).

Abstract: A vacuum device comprises a plurality of cryopumps (10) connected with one or a plurality of vacuum chambers. The cryopumps (10) are connected via media supply conduits (12) and media return conduits (14) with a compressor (16). An adjusting device (18) is connected before at least one of the cryopumps for controlling the amount of media fed to the cryopump. Further, the cryopumps (10) comprise a temperature measuring device. The temperature measuring device and the adjusting device (18) are connected with a controller (28). To allow the desired amount of media to be fed to the cryopumps (10), the adjusting device (18) comprises a throttle (24) in a media supply conduit (12) and a controllable valve in a throttle bypass conduit (22).

Abstract: A system and method is provided to control a purge valve during an unsafe condition associated with a cryopump. An electronic controller may be used to control the opening and closing of one or more purge valves during the unsafe condition. The purge valve can be a cryo-purge valve or exhaust purge valve. The purge valve can be a normally open valve. The electronic controller can release the normally open valve in response to the unsafe condition. The electronic controller can delay its response to the unsafe condition for a safe period of time. Attempts from other systems to control these valves during unsafe conditions can be preempted during unsafe conditions. A user can be inhibited from manually controlling the purge valve during unsafe conditions. A power failure recovery routine may be initiated in response to a restoration of power. The power failure recovery routine can respond to an unsafe condition even if the power failure recovery routine has been manually turned off by a user.

Abstract: In a deposition system, such as a TiN deposition system where TiCl4 and NH3 are reacted in a process chamber to produce TiN thin film coatings, a second reactor is included between the process chamber and the vacuum pump to react enough of the theretofore unreacted feed gases to consume substantially all of at least one of them so that further reactions that could otherwise produce solids, which cause excessive vacuum pump wear, are presented. The second reactor is preferably positioned between a cooled condensation trap downstream from the process chamber and vacuum pump, and it is also applicable in atomic layer deposition (ALD) systems for TiN, WN, and other materials as well as in chemical vapor deposition (CVD) systems for those and other materials.

Abstract: A cluster tool has a transfer chamber, and a load lock chamber. An adaptor is configured to be coupled between the transfer chamber and the load lock chamber. The adaptor has an adaptor housing with an interior space including an entrance with a first valve and an exit with a second valve. The adaptor housing forms a substrate path through the interior space. The first valve connects the interior space and the load lock chamber. The second valve connects the interior space and the transfer chamber. A cryogenic surface is associated with the adaptor. Other pumps can be associated with the adaptor, such as, for example, a turbo pump, or water vapor pump. The cryogenic surface is configured to selectively evacuate the interior space. A wafer is adapted to be moved through the first valve and through the adaptor housing along the path. The wafer is moved through the exit and into the transfer chamber once the second valve is opened. This adaptor can be applied to the process chamber as well as the load lock.

Abstract: A high pressure trapping system is provided to collect chemical vapor by-products in successive stages through chemical reasons conducted at progressively colder temperatures. A hot trap receives chemical vapor exhaust and collects a first waste, typically a solid, as a result of the high temperature completing a chemical reason in the vapor. Surviving gaseous by-products continue to the next process. The following chamber is colder, and collects waste as a solid or a liquid as a result of a chemical process dependent on the cold temperature. Sometimes a third chamber is used for even a colder chemical reaction to collect waste products. As a solid, these waste products are easier to collect, remove, and even reuse.

Abstract: A method is provided of operating an adsorption refrigeration system. The system comprises a primary adsorption pump which is arranged in communication with a primary chamber containing coolant, a secondary adsorption pump and a high fluid impedance conduit which places the secondary adsorption pump and primary chamber into communication. The method comprises saturating the primary and secondary adsorption pumps with coolant whilst each pump is at its respective operational temperature. The pumps are then heated above their operational temperatures to desorb the coolant such that the coolant pressure in the primary chamber and the secondary adsorption pump substantially equalises through the conduit whilst the primary chamber is cooled. The secondary adsorption pump is then cooled causing coolant gas to be adsorbed and therefore a reduction in temperature and pressure of the coolant in the primary chamber is effected.

Abstract: A system and method is provided to control a purge valve during an unsafe condition associated with a cryopump. An electronic controller may be used to control the opening and closing of one or more purge valves during the unsafe condition. The purge valve can be a cryo-purge valve or exhaust purge valve. The purge valve can be a normally open valve. The electronic controller can release the normally open valve in response to the unsafe condition. The electronic controller can delay its response to the unsafe condition for a safe period of time. Attempts from other systems to control these valves during unsafe conditions can be preempted during unsafe conditions. A user can be inhibited from manually controlling the purge valve during unsafe conditions. A power failure recovery routine may be initiated in response to a restoration of power. The power failure recovery routine can respond to an unsafe condition even if the power failure recovery routine has been manually turned off by a user.

Abstract: A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value.

Abstract: A cryopump cooled by a GM type refrigerator is disclosed in which the cold (second stage) cryopanel(s) are in planes that are pitched parallel to the axis of the expander cylinder; the cold end of the first stage expansion space is close to the point where the expander cylinder enters the vacuum housing that contains the cryopanels; and a drain system removes all the liquid argon and water flowing out through a vent port for two orientations of the cryopump.

Abstract: A cylinder used for a cold head of a regenerative cryocooler, the cylinder includes an inside having a hollow-shaped configuration for a regenerative material, wherein the thickness of the cylinder at a high temperature end is greater than the thickness of the cylinder at a low temperature end.

Abstract: A cryopump includes a refrigerator with at least first and second stages. A radiation shield surrounds the second stage and is in thermal contact with the first stage. The radiation shield includes a drain hole to permit cryogenic fluid to traverse through the drain hole during regeneration. The cryopump also includes a primary pumping surface supporting adsorbent in thermal contact with the second stage. The second stage array assembly includes a primary condensing surface, protected surfaces having adsorbent, and non-primary condensing surfaces. A baffle is disposed over the drain hole. The baffle redirects gas from an annular space disposed between the radiation shield and the vacuum vessel that attempts to traverse through the drain hole to prevent the gas from condensing on a non-primary condensing surface. The baffle directs gas to condense on the primary condensing surface.

Abstract: A method and apparatus to shield a cryogenic pump in a physical vapor deposition chamber comprising a physical vapor deposition chamber, a gasket in thermal contact with the physical vapor deposition chamber, at least one post in contact with the gasket, a radiation shield connected at the top of the post, and at least one intermediate ring in contact with the post. A method and apparatus for a radiation shield for a cryogenic pump comprising a cryogenic pump with a region upstream from the cryogenic pump, a gasket in thermal contact the region upstream from the cryogenic pump, at least one post in contact with the gasket, a radiation shield connected at the top of the post, and at least one intermediate ring in contact with the post.

Abstract: The present invention relates to vacuum depositions systems and related deposition methods. Vacuum deposition systems that use one or more cyropanels for localized pumping of a deposition region where a substrate is positioned are provided. The present invention is particularly applicable to pumping and minimizing reevaporation of high vapor pressure deposition materials during molecular beam epitaxy.

Abstract: The cryogenic trap of the invention comprises, in a hollow body (3) having an access valve (2) and an outlet valve (6), a cold core (11) associated with a plate (13) having low thermal inertia and movable between a trapping position in contact with the cold core (11), and a regeneration position spaced apart from the cold core (11) and in contact with a heater ring (14). The plate (13) is in contact with gases to be trapped, and prevents them from passing to the cold core (11). Regeneration requires heating only of the plate (13) carrying the condensed and solidified gases, and it is therefore more rapid.

Abstract: In a communication network system which unifies a system communication network and a master system communication network, each of a plurality of controlled devices is configured to transmit status data to a master controller and receive control data from the master controller so that the controlled device is operated based on the control data. The master controller comprises a control unit configured to receive status data of the controlled devices and transmit control data to the controlled devices, the control unit being configured to transmit the status data to a system controller and receive the control data from the system controller. The system controller comprises a second control unit configured to receive the status data of the controlled devices from the master controller, perform a processing operation based on the status data, and transmit a result of the processing operation to the master controller as the control data.

Abstract: The vacuum properties of a cryogenic NMR probe maintained at a desired operating temperature by a cold head heat exchanger are improved by a separate heat exchanger operating below the temperature of the cold head heat exchanger for maintaining cryo-pumping surfaces at a temperature below said selected operating temperature.

Abstract: The invention relates to a method and a device for the cleaning of a process gas (1) through cryocondensation in a cryogenic cooler (TK). According to the invention the process gas is precooled in a condensate precooler (KVK) in indirect heat exchange with the condensate (5) separated from the process gas (1, 2, 3) in the cryogenic cooler (TK) before it is directed into the cryogenic cooler (TK).

Abstract: The present system and method provides a mechanism for monitoring the level of fullness of a cryopump by measuring the cryopump adsorption capacity. An ion gauge or other total pressure gauge is in contact with the condensing or adsorbing panels of the pump. The gauge sensor, for example, can be connected to a tube or duct leading to the central core of the pump where the adsorbing charcoal is located. At this location in the pump, the gauge is exposed to low-boiling-point gases, such as hydrogen, neon and helium, while being substantially shielded from other gases such as nitrogen, argon, oxygen, or water vapor. By connecting a gauge to this location of the pump, the gauge can be used to monitor the absorption capacity of the pump.

Abstract: A cryopump provides for high pumping speed of Type III gases. An open configuration of a frontal array provides high conductance of gases into a radiation shield which is shaped to focus gases toward a second stage array. The second stage array has an open configuration of baffles coated with adsorbent. Substantially all of the adsorbent has a direct line of sight to the radiation shield or to the opening in the radiation shield, and substantially all of the baffles are coated with adsorbent. In one form, the second stage cryopump array comprises an array of discs fanned to define a generally ball shaped envelope.

Abstract: A cryopump includes a thermal shield where a first panel 56 is provided; and a cryocooler connected to the thermal shield; wherein the thermal shield is divided into a plurality of members including a first member and a second member; the first member forms a thermal path between the first condensing panel and the cryocooler; the second member does not form the thermal path; the first member is made of a material having a thermal conductivity higher than a thermal conductivity of a material of the second member; and a material, having a heat capacity smaller that a heat capacity of the first member in a case where the heat capacity of the first member and the heat capacity of the second member are compared with each other under the conditions of the same volumes, is used as the material of the second member.

Abstract: A cryopump is disclosed. The cryopump includes a cryopump main body connected to a vacuum chamber via an inlet. The cryopump main body includes a vacuum container. A shielding section, a two-stage type cryogenic cooler, a baffle, and first cryopanel and second cryopanels are provided in the vacuum container. A top surface of the first cryopanel is disposed at a position nearest to a surface of the baffle. The top surface of the first cryopanel is disposed almost parallel to the surface of the baffle.

Abstract: A gas turbo pump assembly for connection to a port of a vacuum chamber and having high throughput with low vibration. The assembly comprises a turbo pump and a vibration damper. The pump has a pump body with an external surface and a center axis defining a first axial end and a second axial end of the pump. The pump also has a pump inlet port, the inlet port being coupled to the vacuum chamber port disposed at the first axial end of the pump, and an exit port disposed proximate the second axial end of the pump. The assembly vibration damper is structured to enclose a substantial portion of the pump in a nested arrangement.