Abstract: Apparatuses and methods are provided for facilitating cooling of an electronic component. The apparatus includes a vapor-compression refrigeration system. The vapor-compression refrigeration system includes an expansion component, an evaporator and a compressor coupled in fluid communication via a refrigerant flow path. The evaporator is coupled to and cools the electronic component. The apparatus further includes a contaminant cold trap coupled in fluid communication with the refrigerant flow path. The cold trap includes a refrigerant cold filter and a coolant-cooled structure. At least a portion of refrigerant passing through the refrigerant flow path passes through the refrigerant cold filter, and the coolant-cooled structure provides cooling to the refrigerant cold filter to cool refrigerant passing through the filter. By cooling refrigerant passing through the filter, contaminants solidify from the refrigerant, and are deposited in the refrigerant cold filter.

Abstract: A two-stage pulse tube refrigerator having a compact design, low vibration and low heat loss is provided where at least the 2nd stage is co-axial but preferably, both stages are co-axial with the second stage pulse tube being central and the first stage pulse tube occupying the annular space between the second stage pulse tube and the first stage regenerator. Convection losses associated with different temperature profiles in the pulse tubes and regenerators are minimized by shifting the thermal patterns in the pulse tubes relative to the regenerators by one or more of spacers in the regenerators, physical differences in length with gas channel connections, adjustment of dc flow, and thermal bridges.

Abstract: A two-stage GM cryogenic refrigerator includes a displacer having a low-temperature side and a high-temperature side and a motor configured to drive the displacer. The motor is configured to be rotatable forward in cooling and backward in increasing a temperature. The cryogenic refrigerator further includes a resin provided on an outer circumferential surface of the displacer. A thickness of the resin is thinner on the high-temperature side than on the low-temperature side.

Abstract: A portable moisture trap for use with a vacuum pump includes: a housing; a cooling chamber positioned at least partially within the housing including a first inlet port and a second outlet port; a lid that sealably attaches to a top portion of the cooling chamber to seal the cooling chamber; a heat sink residing under the cooling chamber; a thermoelectric device having an upper cooling side and a lower heat generating side residing between the cooling chamber and the heat sink; a fan oriented to blow air upwardly toward the heat sink; and a baffle extending downwardly in the cooling chamber from a location proximate the lid to a location proximate an inner bottom surface of the cooling chamber, with the baffle configured to define a physical barrier to urge air received through the first port to flow down toward the inner bottom surface of the cooling chamber before exiting through the second port, to thereby remove moisture from air traveling through the cooling chamber in response to a vacuum pump in fluid

Abstract: A cryopump includes an array of cryosorption panels which are surrounded by a cryopump inner open space opened to a cryopump opening and a radiation shield which surrounds the cryopump inner open space. At least one of the cryosorption panels includes a front panel surface divided into an adsorption region of a non-condensable gas and a condensation region of a condensable gas.

Abstract: The primary invention is to cool a water vapor cryopump using a Gas Balanced Brayton cycle refrigerator. The refrigerator is comprised of a compressor, a gas balanced reciprocating engine and a counterflow heat exchanger. It is connected to the cryopump through insulated transfer lines. Options include a gas storage volume with valves that can adjust system pressures, a variable speed engine, gas lines between the compressor and cryopanel that by-pass the engine, and a gas line that by-passes the heat exchanger. This system can cool down and warm up rapidly, rapidly warm and cool the cryopanel without warming the engine, and reduce power input when the cryopanel heat load is reduced.

Abstract: A cryopump includes an array of a plurality of cryosorption panels which are surrounded by a cryopump inner open space opened to a cryopump opening and a radiation shield which surrounds the cryopump inner open space. At least one of the plurality of cryosorption panels includes a panel end which protrudes toward the radiation shield in the cryopump inner open space, and the panel end has a region from which an adsorbent is absent.

Abstract: A cryopump is provided with: a refrigerator that generates a cold state by a heat cycle in which an operating gas inhaled inside is expanded and discharged; a heat shield thermally connected to the refrigerator so as to be cooled to a target temperature; and a control unit that determines a command value for a heat cycle frequency such that a temperature of the heat shield follows the target temperature, and provides the command value to the refrigerator. The control unit estimates whether the refrigerator outputs a refrigerating capacity corresponding to the command value for the frequency based on a flow rate of the operating gas.

Abstract: A cryopump comprises a cryopanel that cools and thus condenses or adsorbs gas, and a pump housing that contains the cryopanel. a regeneration process of the cryopump includes a basic purge process, an evacuation processes, and an optional purge process that is executed additionally if required. The optional purge process includes one or more gas purge steps. In a cryopump control apparatus that controls the cryopump, a deterioration evaluation unit determines whether a re-purge number, which is the total number of gas purge steps that are required to be executed in one regeneration process, reaches a deterioration evaluation criteria number.

Abstract: A refrigerator includes two displacers which are longitudinally adjacent to each other and the high temperature displacer includes a main compartment and an auxiliary compartment for a regenerator material. A direct passage for operating gas is formed between the two displacers. A cryopump includes a low temperature cryopanel, a radiation shield which is cooled to a higher temperature than that of the low temperature cryopanel, and the refrigerator.

Abstract: A cryopump control apparatus controls an evacuation process of a cryopump that includes a cryopanel which cools and thus condenses or adsorbs gas, and a pump housing which contains the cryopanel. The cryopump control apparatus includes a pressure control unit and a vacuum retention evaluation unit. The pressure control unit stops pumping when detecting that a pressure in the pump housing decreases to a reference pressure. The vacuum retention evaluation unit determines whether a difference between pressure values in the pump housing measured at first measurement time and at second measurement time is within an allowable range of pressure change. The first measurement time is determined by adding correction time relating to an operating delay of pumping to a time point when the pressure in the pump housing is detected to be decreased to the reference pressure.

Abstract: A cryopump system includes: a plurality of cryopumps connected to a common roughing pump and provided with a plurality of rough valves, respectively; and a controller configured to control each of the rough valves for regenerating a corresponding one of the plurality of cryopumps. A delay time is set between closing of an open one of the plurality of rough valves and opening of a closed one of the plurality of rough valves.

Abstract: A method of rotating a sample for use in a cryocooler, having the steps of mounting a sample in a sample mounting apparatus, the apparatus comprising a housing having an outer wall surface, an inner wall surface, a mount attached to the inner wall surface for supporting the sample, and a motor for rotating the sample, and an exchange gas to provide thermal communication between the moving sample and the inner housing surfaces; sealing the housing by applying a sealant to adjoining parts of the housing such that the joints are air tight; evacuating the housing; adding an inert gas to the housing; sealing the inert gas in the housing; attaching the outer wall surface of the housing to a cryocooler; and rotating the sample by engaging the motor. Also disclosed is a cryogenic apparatus having a sample holder; a cryo-cooler; a thermal link connecting the sample holder and the cryo-cooler; and a motor attached to the sample holder for rotating a sample.

Abstract: A cryopump and a regenerating method of the cryopump whereby temperatures of a first stage and a second stage can be securely increased to target temperatures and time required for regenerating can be shortened are provided. At the time of regenerating, the temperature of the second stage cooling stage is controlled based on the temperature detected by the second temperature detection part. In the case where the temperature of the first stage cooling stage reaches the limiting temperature, namely critical temperature, of the first stage displacer, the rotation in the reverse direction of the reversible motor is controlled or stopped and thereby the regenerating process is stopped for a while.

Abstract: An inertance tube and a surge volume for a pulse tube refrigerator system may be integrally coupled together, such as by the inertance tube being at least in part a channel in a wall of the surge volume. The surge volume may have a helical channel in an outer wall that forms part of the inertance tube. The surge volume tank may be surrounded by a cover that closes off the channel to form the inertance tube as an integral part of the surge volume. The inertance tube may have a non-circular cross section shape, such as a square shape or non-square rectangular shape. The channel may be tapered, perhaps changing aspect ratio. Alternatively, the inertance tube may be a separate tube having a non-circular shape, which may be wrapped around at least part of the surge volume.

Abstract: A cold trap filter and method is provided for filtering chemical species from a vacuum system of an ion implantation system. A canister is in fluid communication with an exhaust of a high vacuum pump and an intake of a roughing pump used for evacuating an ion source chamber. One or more paddles are positioned within the canister, wherein each paddle has a cooling line in fluid communication with a coolant source. The coolant source passes a coolant through the cooling line, thus cooling the one or more paddles to a predetermined temperature associated with a condensation or deposition point of the chemical species, therein condensing or depositing the chemical species on the paddles while not interfering with a vacuum capacity of the high vacuum and roughing pumps. The paddles can also be electrically biased to electrostatically attract the chemical species to the paddles in one or more biasing steps.

Abstract: A cryopump includes a refrigerator which cools a cryopanel and a controller which receives a control signal representing an operation mode from a beam irradiating apparatus and controls the refrigerator based on the control signal. The operation mode includes an irradiation mode for irradiating a beam to a target and an idle mode for diverting the beam from the target or keeping the beam with a level weaker than that of the irradiation mode. The controller controls the refrigerator such that the cryopanel is cooled in both the irradiation mode and the idle mode to a cooling temperature at which gas molecules are held and allows the cooling temperature in at least a part of the period of the idle mode to be higher than that of the irradiation mode.

Abstract: A cryopump system includes: a cryopump including a refrigerator for executing cooling operation for cooling a cryopanel and heating operation for regenerating the cryopanel; and a compressor for supplying operating gas to the refrigerator. The cryopump system raises the temperature of operating gas in the compressor during the heating operation than the temperature thereof during the cooling operation. The compressor may include a heat exchanger for cooling operating gas to be supplied to the refrigerator, and a bypass passage that circumvents the heat exchanger. The control unit may switch, in accordance with the operation status of the refrigerator, between a flow passage that passes through the heat exchanger and a flow passage that passes through the bypass flow passage.

Abstract: A storage method of a cryopump is provided, the storage method including: closing, with a pump cover, a pump inlet in the cryopump for receiving gases to be pumped by the cryopump; and reducing a pressure in the cryopump through a fluid channel for communicating an interior of the cryopump to an exterior of the cryopump. A start-up method of a cryopump is also provided, the start-up method including releasing a negative pressure in the cryopump by removing a closing member from a cover main body of a pump cover mounted to the cryopump.

Abstract: A helium management control system for controlling the helium refrigerant supply from a common manifold supplies a plurality of cryogenic refrigerators with an appropriate helium supply. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium refrigerant and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the total refrigerant demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly.

Abstract: A cryopump includes a radiation shield provided with a main inlet at one end thereof and a sub-inlet in a side thereof; and a cryopanel assembly cooled to a temperature lower than that of the radiation shield. The cryopanel assembly includes an upper structure having at least one cryopanel and a lower structure having at least one cryopanel. The upper and lower structures are arranged inside the radiation shield along a direction away from the main inlet. A frost accommodating space connected to the sub-inlet may be arranged between the upper and lower structures such that an amount of captured gas on an upper end cryopanel of the lower structure is greater than an amount of captured gas on a lower end cryopanel of the upper structure.

Abstract: A cryopump 10 includes: a first cryopanel including a radiation shield 18 having a shield opening 20 and a louver 23 arranged in the shield opening 20; a second cryopanel 24 surrounded by the first cryopanel; and a refrigerator 14 configured to cool the first cryopanel to a first cooling temperature and to cool the second cryopanel to a second cooling temperature lower than the first cooling temperature. A rough surface 42 is formed on the louver 23.

Abstract: A cryopump includes a thermal shield where a first condensing panel is provided; and a cryocooler connected to the thermal shield; wherein the thermal shield is divided into a plurality of members including a first member and a second member; the first member forms a thermal path between the first condensing panel and the cryocooler; the second member does not form the thermal path; the first member is made of a material having a thermal conductivity higher than a thermal conductivity of a material of the second member; and a material, having a heat capacity smaller than a heat capacity of the first member in a case where the heat capacity of the first member and the heat capacity of the second member are compared with each other under the conditions of the same volumes, is used as the material of the second member.

Abstract: A cryopump includes: a vent valve provided with a cryopump housing to discharge a gas pumped on a cryopanel to the outside of the cryopump housing; and a control unit configured to determine, based on the pressure measured by a pressure sensor, whether a positive pressure is generated in the cryopump housing relative to the external pressure of the cryopump housing, and configured to open the vent valve when it is determined that the positive pressure is generated, and configured to close the vent valve when it is determined that the positive pressure is not been generated. The valve-closing force of the vent valve is arranged such that, when the vent valve is closed by the control unit, the vent valve can be mechanically opened by being subjected to the differential pressure between the internal pressure and the external pressure of the cryopump housing.

Abstract: Methods and systems of purifying an acetylene process gas are described. The methods may include the steps of providing an acetylene vessel containing source acetylene mixed with a solvent impurity, and flowing the source acetylene through a purification container that holds a cooled purifying medium, where at least a portion of the solvent impurity in the source acetylene separates as a liquid impurity on the purifying medium. The method may also include removing the liquid from the purification container and flowing a purified acetylene gas from the purification container. The purified acetylene gas has a concentration of the solvent impurity of about 5 vol. % or less, and the separated liquid impurity is removed without interrupting the flow of the acetylene while the purified acetylene gas flows from the purification container to keep the concentration of the solvent impurity substantially constant in the purified acetylene gas.

Abstract: A method for removal of CO2 from a gas stream by anti-sublimation, comprising the steps of: a) introducing a gas stream containing CO2 into a frosting vessel; b) reducing the temperature of at least a portion of the gas stream in said frosting vessel to a temperature at which solid CO2 is deposited by anti-sublimation; c) discharging the gas stream depleted of CO2 from the frosting vessel; and d) recovering the deposited solid CO2; wherein the pressure of the gas stream in step b) is higher than atmospheric pressure. An anti-sublimation system for removal of CO2 from a gas stream, comprising: a frosting vessel configured to receive the gas stream, said frosting vessel comprising a low temperature refrigeration device configured for reducing the temperature of at least a portion of a gas stream in said frosting vessel to a temperature at which solid CO2 is deposited by anti-sublimation; and a compressor configured to increase the gas pressure of the gas stream which is fed to the frosting vessel.

Abstract: A condenser having improved condensation performance is provided. The condenser includes a plurality of cooling pipes, being disposed in a chassis to which the steam is introduced, through the interior of which cooling water used for heat exchange with steam flows; an inner channel that extends in a top-bottom direction and that is surrounded by the plurality of cooling pipes; a plurality of pipe-supporting plates disposed at a distance from one another in a direction in which the plurality of cooling pipes extend to support the plurality of cooling pipes; and a water receiving portion disposed between the plurality of pipe-supporting plates and being inclined downward from one pipe-supporting plate to the other pipe-supporting plate.

Abstract: A film-forming apparatus includes a processing chamber, and TiCl4 gas and NH3 gas are supplied into the processing chamber for forming a TiN film on a substrate W in the processing chamber by CVD. The processing chamber has a gas exhaust system. The gas exhaust system includes a gas exhaust pipe for exhausting the exhaust gas in the processing chamber a trap mechanism provided to the gas exhaust pipe for trapping a by-product in the exhaust gas, and a heated reaction gas supply mechanism for supplying a heated reaction gas into the exhaust gas. The heated reaction gas is adapted to react with a component in the exhaust gas to produce a by-product. Specifically, NH3 gas is supplied by the heated reaction gas supply mechanism as the heated reaction gas, and NH4Cl is produced as the by-product.

Abstract: A cryopump system includes: a plurality of cryopumps; a plurality of compressor units arranged to operate in parallel in accordance with a control output, respectively, to supply refrigerant gas to the plurality of cryopumps; and a cryopump controller operative to determine the control output for each of the plurality of compressor units. The cryopump controller adjusts a preset value for at least one of the compressor units, the preset value being utilized to determine the control output, so that operation statuses of the respective compressor units are substantially equalized.

Abstract: A cryopump includes: a cryopump housing arranged to define an inner space of the cryopump from an outer environment; an exhaust duct arranged to connect with the cryopump housing so as to exhaust fluid from the inner space of the cryopump to the outer environment; and a filter structure. The filter structure includes: a filter arranged to remove a foreign body from fluid exhausted through the exhaust duct; and a filter mounting member arranged to mount the filter to the exhaust duct, wherein at least a part of a bypass flow passage that diverts fluid from the filter is formed in the filter mounting member.

Abstract: A refrigerator includes a displacer coupling structure, wherein one of two coupled displacers protrudes into the other of the two coupled displacers to the extent that an end of a regenerator built in the one of the two coupled displacers positions itself inside of the other of the two coupled displacers. A cryopump includes: a low temperature cryopanel; a high temperature cryopanel arranged to be cooled to a temperature higher than that of the low temperature cryopanel; and the refrigerator.

Abstract: This device (2) for generating an ion beam (4) including a liquid metal ion source (18) is characterized in that the ion source is surrounded by a cryogenic trap (28) maintained at a low temperature, this cryogenic trap being able to trap volatile chemical species (G) by condensing them before they can reach the ion source.

Abstract: A condenser and a containment vessel adapted to efficiently condense a gas out of a mixture of condensing and non-condensing gases. In condensers, the fraction of gas within a condenser made up of non-condensing gases can be significantly reduced by withdrawing gas from localized regions of relatively low temperature where the mass fraction of non-condensing gases will be relatively high. In containment vessels, pressures can be reduced by providing a large surface area of the liquid into which the condensing gas condenses in a relatively cool region of the containment vessel. Both these effects result from an appreciation of the manner in which non-condensing gases tend to accumulate in regions which are relatively cold.

Abstract: A cluster tool has a transfer chamber, and a load lock chamber. An adaptor is configured to be coupled between the transfer chamber and the load lock chamber. The adaptor has an adaptor housing with an interior space including an entrance with a first valve and an exit with a second valve. The adaptor housing forms a substrate path through the interior space. The first valve connects the interior space and the load lock chamber. The second valve connects the interior space and the transfer chamber. A cryogenic surface is associated with the adaptor. Other pumps can be associated with the adaptor, such as, for example, a turbo pump, or water vapor pump. The cryogenic surface is configured to selectively evacuate the interior space. A wafer is adapted to be moved through the first valve and through the adaptor housing along the path. The wafer is moved through the exit and into the transfer chamber once the second valve is opened. This adaptor can be applied to the process chamber as well as the load lock.

Abstract: The invention relates to a device (2) for generating an ion beam (4), comprising a support (6), an ion source (18), this ion source having a lower end (8) connected to the support (6) and an upper end (10) opposite the lower end (8), and extraction means (12) for extracting the ions emitted by the source, this extraction means (12) comprising a wall (14) having an opening (16), the opening (16) being arranged close to the upper end (10) of the ion source (18) so as to allow the extracted ions to pass through this opening. This device (2) further includes means (M1, M2) for the generation of a magnetic field (B) capable of generating a magnetic field in the opening (16) of the extraction means, the generated magnetic field (B) being capable of deflecting charged particles (20) attracted by the ion source so that these charged particles do not reach the ion source.

Abstract: A unitary pulse tube expander for removable attachment to a SADA II coldfinger and insertion within a Dewar assembly. The regenerator of the pulse tube expander is encased in a regenerator sleeve and a cold cap to create a unitary pulse tube expander that may function as a drop-in replacement for a Stirling type expander in a SADA II coldfinger cryocooler.

Abstract: This disclosure describes a sample drying system and method that provides a high rates of evaporation and sublimation that is commonly employed in compound processing procedures. The drying increases the sample-solute concentration and removes the solvent completely to produce the dried sample as a non-volatile solute precipitate. Re-circulating of drying gas is disclosed along with a solvent cold trap.

Abstract: A cold trap is provided with a cold panel provided in a pumping path such that the panel is exposed, a refrigerator thermally coupled to the cold panel and operative to cool the cold panel; and a controller configured, in a regeneration process for evaporating a gas frozen on the surface of the cold panel and discharging the gas outside using the vacuum pump, to control the refrigerator so as to raise the temperature of the cold panel to a temperature exceeding a non-liquefaction temperature range and to adjust a pressure in the pumping path at the temperature so that the gas frozen on the surface of the cold panel is evaporated without being melted, the non-liquefaction temperature range being a range in which it is guaranteed that a gas frozen on the surface of the cold trap is evaporated without being melted.

Abstract: A process chamber with integrated pumping including a process chamber, refrigerators and arrays, or pumping surface, that are integral to the process chamber.

Abstract: A method and device for separation of chalcogens from waste gases in process installations are provided so that complete and reliable removal of chalcogens occurs continuously during nonstop operation of the process installation in the most effective manner possible. The process installation is connected via a pipeline to an input connector of the device for separation of chalcogens arranged outside of the process installation. The pipeline and the input connector have a heat connection to the process chamber. The device for separation of chalcogens is provided with an outlet connector as well as a gas outlet is equipped with a cooling device so that the input connector is excluded from cooling.

Abstract: A cold trap includes a refrigerator and a cold panel that is thermally connected with the refrigerator to be cooled. A rough surface is formed on the cold panel. The cold trap is arranged, for example, in an evacuation channel for connecting a vacuum chamber with a turbo-molecular pump in order to freeze and capture, on a surface thereof, part of a gas that is to be sucked and pumped into the turbo-molecular pump from the vacuum chamber through the evacuation channel.

Abstract: A cryostat for providing temperature regulation, one purpose being measuring physical properties of materials, the cryostat employing a superconducting magnet assembly for generating variable magnetic field in the sample space and a cryogenic cooler for cooling the sample space. The cryogenic cooler chamber configuration provides for efficient heat exchange between different stages of the cryogenic cooler without the need for physical heat links. This construction enables selective delivery of cooling power from the cryogenic cooler to the desired areas within the cryostat without using flexible physical thermal links. A counter flow exchanger and ambient temperature valves facilitate efficient use of the cryogenic cooler stages. The removal of large heat load generated by the superconducting magnet while operating in the sweeping mode is achieved, in part, by employing a solid plate thermal coupling element between the cryogenic cooler chamber and the magnet assembly.

Abstract: Ice condensed in a portion in a case in which a cryogenic refrigerator is installed, which is cooled by the cryogenic refrigerator, is melted by increasing a temperature of the ice to a melting point of the ice or higher. Then, while the temperature of the melted ice and a pressure thereof are kept to be equal to or higher than a freezing point of water, the pressure is reduced by rough evacuation so as to vaporize water. At a time at which the water is discharged, the pressure is further reduced so as to discharge water vapor. In this manner, regeneration of water is performed in accordance with a state of the water (i.e., a solid state, a liquid state, and a gas state), thereby shortening a regeneration time.

Abstract: A cold trap is provided with a cold panel provided in a pumping path such that the panel is exposed, a refrigerator thermally coupled to the cold panel and operative to cool the cold panel; and a controller configured, in a regeneration process for evaporating a gas frozen on the surface of the cold panel and discharging the gas outside using the vacuum pump, to control the refrigerator so as to raise the temperature of the cold panel to a temperature exceeding a non-liquefaction temperature range and to adjust a pressure in the pumping path at the temperature so that the gas frozen on the surface of the cold panel is evaporated without being melted, the non-liquefaction temperature range being a range in which it is guaranteed that a gas frozen on the surface of the cold trap is evaporated without being melted.

Abstract: Provided is a byproduct collecting apparatus for efficiently collecting reaction-byproducts contained in an exhaust gas exhausted from a process chamber during a semiconductor manufacturing process. The apparatus includes a housing and a trap module. The housing has a gas inlet port and a gas outlet port. The trap module is installed inside the housing and has first plates curved or inclined to guide an exhaust gas flow in a curved fashion.

Abstract: Cryopump components are improved using thin layer heating elements for temperature control or to serve as heaters. These heating elements may be located and prevent pooling during regeneration. The temperature control may also be achieved through the use of ceramic heating elements. The ceramic heating elements may also include a second function of structural support within the cryopump. Temperature control may further be achieved via the radiation shield, where the radiation shield includes a clad sheeting or coating.

Abstract: A plurality of vacuum pumps each having a refrigerator are connected to a common compressor. At least one of the plurality of vacuum pumps performs repeating an operation including a process in which a gas in a low-pressure state is adiabatically compressed when the interior of a cylinder shifts from the low-pressure state to a high-pressure state as a result of a valve operation of the refrigerator, and a process in which a displacer passes through the adiabatically compressed gas. At least another one of the plurality of vacuum pumps performs repeating an operation including a process in which a gas in the high-pressure state is adiabatically expanded when the interior of the cylinder shifts from the high-pressure state to the low-pressure state as a result of the valve operation of the refrigerator, and a process in which the displacer passes through the adiabatically expanded gas.

Abstract: A plurality of vacuum pumps each having a refrigerator are connected to a common compressor. At least one of the plurality of vacuum pumps performs an operation for repeating an operation including a process in which a gas in a low-pressure state is adiabatically compressed when the interior of a cylinder shifts from the low-pressure state to a high-pressure state as a result of a valve operation of the refrigerator, and a process in which a displacer passes through the adiabatically compressed gas. At least another one of the plurality of vacuum pumps performs an operation for repeating an operation including a process in which a gas in the high-pressure state is adiabatically expanded when the interior of the cylinder shifts from the high-pressure state to the low-pressure state as a result of the valve operation of the refrigerator, and a process in which the displacer passes through the adiabatically expanded gas.

Abstract: In an ion implanter, one or more optical heaters are disposed above a pair of support arms. The support arms have an engaged positioned which is disposed beneath a platen and a retractable position displaced vertically away from the platen and rotated away from the platen in a direction parallel to a planar surface thereof. When the support arms are in the retracted position, the one or more optical heaters is configured to provide optical energy incident on surfaces of the cooling pads disposed on the support arms for removal of unwanted materials thereon. In this manner, the optical heaters are used during a regeneration cycle of cryogenic surfaces in an ion implanter.

Abstract: Apparatus and method for controlling the speed for a GM type expander includes relays that interrupt power when the current in the line is zero. The speed controller apparatus limits the maximum speed providing the expander with sufficient gas to meet its cooling requirements.