Abstract: A method for optimizing loop gain of an atomic force microscope (AFM) apparatus includes determining a change in gain of the physical system and adjusting a controller frequency response of the controller in an AFM loop to compensate for the determined change in gain. The AFM loop has a corresponding loop response that includes the product of the controller frequency response and a physical system response of the physical system.

Abstract: An atomic force microscopy sensor includes a substrate, a cantilever beam and an electrostatic actuator. The cantilever beam has a proximal end and an opposite distal end. The proximal end is in a fixed relationship with the substrate and the cantilever beam is configured so that the distal end is in a moveable relationship with respect to the substrate. The electrostatic actuator includes a first electrode that is coupled to the cantilever beam adjacent to the proximal end and a spaced apart second electrode that is in a fixed relationship with the substrate. When an electrical potential is applied between the first electrode and the second electrode, the first electrode is drawn to the second electrode, thereby causing the distal end of the cantilever beam to move.

Abstract: A localized nanostructure growth apparatus that has a partitioned chamber is provided, where a first partition includes a scanning probe microscope (SPM) and a second partition includes an atomic layer deposition (ALD) chamber, where the first partition is hermetically isolated from the second partition, and at least one SPM probe tip of the SPM is disposed proximal to a sample in the ALD chamber. According to the invention, the hermetic isolation between the chambers prevents precursor vapor from damaging critical microscope components and ensuring that contaminants in the ALD chamber can be minimized.

Abstract: Provided are methods and systems for high resolution imaging of a material immersed in liquid by scanning probe microscopy. The methods further relate to imaging a material submersed in liquid by tapping mode atomic force microscopy (AFM), wherein the AFM has a microfabricated AFM probe comprising a nanoneedle probe connected to a cantilever beam. The nanoneedle probe is immersed in the liquid, and the rest of the AFM probe, including the cantilever beam to which the nanoneedle probe is attached, remains outside the liquid. The cantilever is oscillated and the nanoneedle probe tip taps the material to image the material immersed in liquid. In an aspect, the material is supported on a shaped substrate to provide a spatially-varying immersion depth with specially defined regions for imaging by any of the methods and systems of the present invention.

Abstract: A scanner for a scanning probe microscope (SPM) including a head has a scanner body that houses an actuator, and a sensor that detects scanner movement. The scanner body is removable from the head by hand and without the use of tools and has a total volume of less than about five (5) square inches. Provisions are made for insuring that movement of a probe device coupled to the scanner is restricted to be substantially only in the intended direction. A fundamental resonance frequency for the scanner can be greater than 10 kHz.

Abstract: An atomic force microscopy (AFM) method includes a scanning probe that scans a surface of a structure to produce a first structure image. The structure is then rotated by 90° with respect to the scanning probe. The scanning probe scans the surface of the structure again to produce a second structure image. The first and second structure images are combined to produce best fit image of the surface area of the structure. The same method is used to produce the best fit image of a flat standard. The best fit image of the flat standard is subtracted from the best fit image of the structure to obtain a true topographical image in which Z direction run out error is substantially reduced or eliminated.

Abstract: A coupling device for an atomic force microscope with acoustic sample excitation includes a sound generator, in particular an ultrasonic test head, and designed for coupling of sound waves generated using the sound generator into a sample body for the acoustic excitation of the sample body, where the coupling device has a liquid reservoir fillable and/or filled with a liquid in its inner space; the lower side of the sample body can be arranged and/or is arranged laterally displaceably on the liquid reservoir; the end of the sound generator formed for coupling the sound waves into the sample body is arranged in the inner space of the liquid reservoir and/or that sound waves can be coupled into the inner space with this end; and the spatial section of the inner space of the liquid reservoir disposed between this end and the lower side of the sample body is completely fillable and/or filled with the liquid.

Abstract: Methods and systems for improving high resolution imaging using a polarization-modulated tip enhanced optical microscope. A polarizer is configured to alternately create and remove a region of enhanced optical intensity adjacent the tip of the microscope probe at the focus of a light source. The sample being studied emits photons at specific rates relative to a background rate depending on the existence or nonexistence of the region of enhanced optical intensity. Comparing the rate of emissions when the region of enhanced optical intensity exists to when it does not creates a detailed image of the sample. By not requiring the probe to oscillate, this system enhances the resolution of the microscope without potentially causing damage to the sample.

Abstract: An apparatus for atomic force microscopy (AFM) comprises a first actuator configured to move a cantilever along an axis; a second actuator configured to move the cantilever along the axis; an amplifier; and a crossover network connected between the amplifier, and the first actuator and the second actuator. The crossover network is adapted to provide a first drive signal to the first actuator over a first frequency range and to provide a second drive signal to the second actuator over a second frequency range.

Abstract: Proposed is a procedure for carrying out a scanning probe microscopic or atomic force spectroscopic measurement within predetermined parameters, which said procedure encompasses the following steps: a determination of a value variance of at least one of the parameters, and control of an adjustment member in relation to said variance, so that the variance is at least partially compensated for.

Abstract: Provided are atomic force microscope probes, methods for making probes for use in atomic force microscopes and systems using such probes. The probes include at least a body portion and a cantilever portion. The cantilever portion may include a first surface and a second surface opposite the first surface. The cantilever portion further includes a first material arranged on the first surface, such that the cantilever portion twists about a center axis of the cantilever portion when the cantilever portion is heated. The first material may be arranged symmetrically or non-symmetrically on a portion of the first surface, or it may be arranged non-uniformly over the first surface. The cantilever portion of the probe may also include a second material arranged on the second surface of the cantilever portion. The first and second materials have a different thermal expansion than the material forming the cantilever portion.

Abstract: Faster and better methods for leveling arrays including software and user interface for instruments. A method comprising: (i) providing at least one array of cantilevers supported by at least one support structure, (ii) providing at least one substrate, (iii) providing at least one instrument to control the position of the array with respect to the substrate, (iv) leveling the array with respect to the substrate, wherein the leveling is performed via a user interface on the instrument which is adapted to have the user input positional information from the motors and piezoelectric extender when at least one cantilever deflects from the substrate. Uniform z-displacements can be achieved.

Abstract: A digital system for controlling the quality factor in a resonant device. The resonant device can be a a device that includes a cantilever within its system, such as an atomic force microscope. The quality factor can be digitally controlled to avoid noise effect in the analog components. A direct digital synthesizer implemented in a way that provides access to the output of the phase accumulator. That output is a number which usually drives a lookup table to produce a cosine or sine output wave. The output wave is created, but the number is also adjusted to form a second number that drives a second lookup table to create an adjustment factor to adjust the output from the cosine table. The adjusted digital signal than drives a DA converter which produces an output drive for the cantilever.

Abstract: A microcantilever system comprising a paddle, its use and a method of simultaneously acquiring the topography and measuring the tip-sample interactions of a sample with it.

Abstract: A surface shape of a member to be measured is measured by reflecting measuring light at a reflection surface of a probe and utilizing an atomic force exerting between the probe and utilizing an atomic force exerting between the probe and the member to be measured. In addition to a first scanner for driving the probe, a second scanner for moving a focus position of an optical system is provided. Position conversion data representing a correlation between amounts of control of the first scanner and the second scanner are obtained in advance. By synchronously driving the first scanner and the second scanner, the focus position of the optical system is caused to follow the probe to improve measurement accuracy.

Abstract: The scanning probe microscope applies a sum of an AC voltage (Uac) and a DC voltage (Udc) to its probe. The frequency of the AC voltage (Uac) substantially corresponds to the mechanical oscillation frequency of the probe, but its phase in respect to the mechanical oscillation varies periodically. The phase modulation has a frequency fmod. The microscope measures the frequency (f) or the amplitude (K) of a master signal (S) applied to the probe's actuator, or it measures the phase of the mechanical oscillation of the cantilever in respect to the master signal (S). The spectral component at frequency fmod of the measured signal is fed to a feedback loop controller, which strives to keep it zero by adjusting the DC voltage (Udc), thereby keeping the DC voltage at the contact voltage potential.

Abstract: An atomic force microscopy system includes an imaging probe having a first thermal displacement constant and a sample placement surface. At least a portion of the sample placement surface has a second thermal displacement constant. The sample placement surface is spaced apart from the imaging probe at a predetermined displacement. The sample placement surface is configured so that the second thermal displacement constant matches the first thermal displacement constant so that when the imaging probe and the sample placement surface are subject to a predetermined temperature, both the portion of the sample placement surface and the imaging prove are displaced by a same distance.

Abstract: The present disclosure relates an inspection instrument adapted to increase testing throughput in a manufacturing process. In one embodiment, the inspection instrument includes a base plate and a vertical frame, where the base plate and the vertical frame are configured to provide structural support of the inspection instrument, a first mounting mechanism coupled to the base plate, where the first mounting mechanism is configured to hold a sample for inspection, and a second mounting mechanism coupled to the vertical frame, where the second mounting mechanism is configured to hold a set of sensors and an optical system for inspecting the sample. The first mounting mechanism and the second mounting mechanism are decoupled from each other to reduce impact of movements of the sample to the set of sensors and the optical system.

Abstract: A The local probe microscopy apparatus (1) comprises a probe (3) with translation stages (5a, 5b) for controlling the position of the probe (3) relative to a sample surface. The probe (3) has a feedback mechanism (6, 5 7) for maintaining the deflection of the probe and a height measuring system (9) which includes means for compensating for environmental noise. The local probe microscopy apparatus is particularly suitable for use as a wafer inspection tool in a wafer fabrication plant where the inspection tool is liable to be exposed to significant mechanical vibration.

Abstract: A scanner device is provided which enables high-frequency scanning and can increase the speed of a scanning probe microscope. A scanner device (1) used for a scanning probe microscope includes a Z actuator (7) which scans an object to be scanned in a scanning direction, and a Z actuator holder (11) which holds the Z actuator (7). The Z actuator holder (11) holds the Z actuator (7) at a plurality of holding line parts which extend in the scanning direction and are separated from each other. For example, the Z actuator (7) has a rectangular cross-section, and the four edges of the Z actuator (7) are held by the Z actuator holder (11). The Z actuator (7) is pressed into a holding hole (29) of the Z actuator holder (11).

Abstract: Provided is a cantilever that is capable of bending and deforming in an active manner by itself. The cantilever includes: a lever portion having a proximal end that is supported by a main body part; and a resistor member that is formed in the cantilever and generates heat when a voltage is applied, to thereby deform the lever portion by thermal expansion due to the heat.

Abstract: A scanning probe microscope and method of operation for monitoring and assessing proper tracking between the tip and sample, as well as automating at least some aspects of AFM setup previously done manually. Preferably, local slopes corresponding to the acquired data are compared to determine a tracking metric that is self-normalizing.

Abstract: A controller for cantilever-based instruments, including atomic force microscopes, molecular force probe instruments, high-resolution profilometers and chemical or biological sensing probes. The controller samples the output of the photo-detector commonly used to detect cantilever deflection in these instruments with a very fast analog/digital converter (ADC). The resulting digitized representation of the output signal is then processed with field programmable gate arrays and digital signal processors without making use of analog electronics. Analog signal processing is inherently noisy while digital calculations are inherently “perfect” in that they do not add any random noise to the measured signal. Processing by field programmable gate arrays and digital signal processors maximizes the flexibility of the controller because it can be varied through programming means, without modification of the controller hardware.

Abstract: Improved actuation device useful in direct-write nanolithography and imaging including use of a pivot point for downward deflection of a cantilever with long travel path. A device comprising at least one holder, at least one cantilever, an extension of the said cantilever wherein the extension is integrated with an actuator, wherein the cantilever is adapted for actuated movement. The actuator can be electrostatic, thermal, or piezoelectric. The cantilever can comprise a tip, and material can be transferred from the tip to a surface.

Abstract: A new type of indenter is described. This device combines certain sensing and structural elements of atomic force microscopy with a module designed for the use of indentation probes, conventional diamond and otherwise, as well as unconventional designs, to produce high resolution and otherwise superior indentation measurements.

Abstract: A method comprising characterizing the dimensions of structures on a semiconductor device having dimensions less than approximately 100 nanometers (nm) using one of scanning probe microscopy (SPM) or profilometry.

Abstract: Techniques for atomic force microscope manipulation of living cells include functionalizing a nanoscale tip of a microscale cantilever with a first ligand for a first receptor associated with a surface of a first type of cell. The method further comprises, controlling the cantilever to cause the first ligand on the nanoscale tip to contact the first receptor on a surface of a living cell of the first type in a particular temporal pattern to induce a target response by the living cell. Other techniques for controlling an atomic force microscope comprising a nanoscale tip include controlling the cantilever to cause the nanoscale tip to contact a living cardiomyocyte at a predetermined pressure. The cantilever is also controlled to turn off vertical deflection feedback after contacting the cardiomyocyte and collecting deflection data that indicates a time series of nanoscale vertical deflections of the microscale cantilever caused by the living cardiomyocyte.

Abstract: Provided is a highly selective and non-destructive method and apparatus for the measurement of one or more target molecules within a target environment. The apparatus comprises of a modified AFM (atomic force microscope) tip to create a tapered nanoscale co-axial cable, and wherein the application of an alternating potential between the inner and outer electrodes of the co-axial cable creates a dielectrophoretic force for attracting molecules toward the tip-end which is pre-treated with one or more specific ligands.

Abstract: A magnetic head inspection method is provided with the step that an area smaller than a half of a scanning and measurement area of a magnetic probe in a cantilever unit of the MFM is set as a scanning and measurement area on a surface of a recording portion of the magnetic head that is scanned by the AFM, so as to greatly reduce the inspection time (tact time) of the AFM.

Abstract: Provided are an AFM measuring method and a system thereof. The tip of a cantilever is provided to a plurality of points on a substrate, to which incident light is radiated from a light source. Scattered light is generated between the tip of the cantilever and the substrate by the incident light and the intensity of the scattered light is measured. The measured intensity of the scattered light is input to a data processing unit so as to find a point where the intensity of the incident is highest. The tip of the cantilever is moved to the point where the intensity of the incident light is highest.

Abstract: A high-bandwidth SPM tip scanner is provided that additionally includes an objective that is vertically movable within the scan head to increase the depth of focus for the sensing light beam. Movable optics also are preferably provided to permit targeting of the sensing light beam on the SPM's probe and to permit the sensing light beam to track the probe during scanning. The targeting and tracking permit the impingement of a small sensing light beam spot on the probe under direct visual inspection of focused illumination beam of an optical microscope integrated into the SPM and, as a result, permits the use of a relatively small cantilever with a commensurately small resonant frequency. A high-bandwidth tip scanner constructed in this fashion has a fundamental resonant frequency greater than greater than 500 Hz and a sensing light beam spot minor diameter of less than 10 ?m.

Abstract: A method includes determining the point at which a tip of a probe based instrument contacts a sample and/or the area of that contact by dynamically oscillating a cantilever of the instrument in flexural and/or torsional modes. The method additionally includes using oscillation characteristics, such as amplitude, phase, and resonant frequency, to determine the status of the contact and to provide quantitative data. Static and quasi-static measurements, including contact stiffness and elastic modulus, can be obtained from the thus obtained data. Quasistatic measurements, such as creep and viscoelastic modulus, can be obtained by repeating the static measurements for a number of force profiles at different force application rates and correlating the resultant data using known theories.

Abstract: An apparatus for atomic force microscopy (AFM) comprises a first actuator configured to move a cantilever along an axis; a second actuator configured to move the cantilever along the axis; an amplifier; and a crossover network connected between the amplifier, and the first actuator and the second actuator. The crossover network is adapted to provide a first drive signal to the first actuator over a first frequency range and to provide a second drive signal to the second actuator over a second frequency range.

Abstract: In certain embodiments, a probe scans a surface to produce a first scan. The first scan is used to estimate a vertical offset for scanning the surface to produce a second scan. In certain embodiments, an AFM device engages a probe to a surface using a piezo voltage. The probe scans the surface to produce a first scan. The first scan is used to estimate a vertical offset such that the probe uses the piezo voltage to engage the surface for a second scan at a different vertical position.

Abstract: Method for producing a probe for atomic force microscopy with a silicon nitride cantilever and an integrated single crystal silicon tetrahedral tip with high resonant frequencies and low spring constants intended for high speed AFM imaging.

Abstract: A cantilever assembly (1) comprises a cantilever (10) having a cantilever tip (11). The cantilever is mounted to a rigid support (12,120,121) and is provided on its back side with an area (110) of a high reflectance material having a boundary (111) sloping towards the support (12). The extensions (c, ?c) of the area (110) and of the boundary (111) towards the support fulfil the condition c/?c?1 wherein c denotes the extension of the area (110) of the high reflectance material in the direction towards the support (12), and ?c denotes the extension of the sloped boundary (111) of the area (110) of the high reflectance material in the direction towards the support (12).

Abstract: A scanned-stylus atomic force microscope (AFM) employing the optical lever technique, and method of operating the same. The AFM of the invention includes a light source and a scanned optical assembly which guides light emitted from the light source onto a point on a cantilever during scanning thereof. A moving light beam is thus created which will automatically track the movement of the cantilever during scanning. The invention also allows the light beam to be used to measure, calibrate or correct the motion of the scanning mechanism, and further allows viewing of the sample and cantilever using an optical microscope.

Abstract: Various embodiments of the present invention are directed to microscopy cantilevers. Consistent with an example embodiment, aspects of the invention are directed to a cantilever having a body and a force sensor arrangement extending from an end of the body and including a tip near a free end of the force sensor arrangement. The force sensor arrangement exhibits a high temporal response to the tip's interaction with a sample, relative to the response of the cantilever. The force sensor arrangement's response is detected and used to characterize the sample.

Abstract: According to example embodiments, an atomic force microscope includes a probe tip, a cantilever including the probe tip, a displacement measurement device, and a movement device. A vibrating displacement of the cantilever changes according to a force between atoms of the probe tip and atoms of a surface of a sample. The displacement measurement device is configured to irradiate a beam emitted from a light source on the cantilever and to measure a displacement of the cantilever based on the beam reflected from the cantilever. The movement device is configured to move the cantilever and the displacement measurement device simultaneously when the sample is scanned.

Abstract: One inventive aspect is related to an atomic force microscopy probe. The probe comprises a tip configuration with two probe tips on one cantilever arm. The probe tips are electrically isolated from each other and of approximately the same height with respect to the cantilever arm. The outer surface of the tip configuration has the shape of a body with a base plane and an apex. The body is divided into two sub-parts by a gap located approximately symmetrically with respect to the apex and approximately perpendicular to the base plane. Another inventive aspect related to methods for producing such an AFM probe.

Abstract: Detection and characterization of laser-induced heat affected zones on polymer based devices, such as polymeric stents, are described where Nano Thermal Analysis may be used with atomic force microscopy to obtain the thermal behavior of materials with a spatial resolution of under, e.g., 100 nm. Heat may be applied locally to the measured polymeric stem via a probe tip and the resulting thermal-mechanical response can be measured.

Abstract: A coupling device for an atomic force microscope with acoustic sample excitation includes a sound generator, in particular an ultrasonic test head, and designed for coupling of sound waves generated using the sound generator into a sample body for the acoustic excitation of the sample body, where the coupling device has a liquid reservoir fillable and/or filled with a liquid in its inner space; the lower side of the sample body can be arranged and/or is arranged laterally displaceably on the liquid reservoir; the end of the sound generator formed for coupling the sound waves into the sample body is arranged in the inner space of the liquid reservoir and/or that sound waves can be coupled into the inner space with this end; and the spatial section of the inner space of the liquid reservoir disposed between this end and the lower side of the sample body is completely fillable and/or filled with the liquid.

Abstract: An object of the present invention is to provide an atomic force microscope apparatus allowing tracking errors to be made as close to zero as possible to reduce images obtained through high-speed scanning from being degraded. To accomplish the object of the present invention, the present invention provides an atomic force microscope apparatus imaging a surface topography of a sample in a contact mode, the apparatus including a cantilever having a probe interacting with the sample surface via an atomic force and being subjected to a deflection by the atomic force, laser light provision means for allowing first laser light to enter the cantilever, light detection means, a controller estimating the surface topography of the sample surface, and data storage means for recording the estimated surface topography.

Abstract: Provided is an atomic force microscope capable of increasing the phase detection speed of a cantilever vibration. The cantilever (5) is excited and the cantilever (5) and a sample are relatively scanned. Displacement of the cantilever (5) is detected by a sensor. An oscillator (27) generates an excitation signal of the cantilever (5) and generates a reference wave signal having a frequency based on the excitation signal and a fixed phase. According to vibration of the cantilever (5), a trigger pulse generation circuit (41) generates a trigger pulse signal having a pulse position changing in accordance with the vibration of the cantilever (5). According to the reference wave signal and the trigger pulse signal, a phase signal generation circuit (43) generates a signal corresponding to the level of the reference wave signal at the pulse position as a phase signal of vibration of the cantilever (5). As the reference wave signal, a saw tooth wave is used.

Abstract: An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface. Such a technique implemented in a commercially viable analytical instrument would be extremely useful. Various aspects of the experimental set-up have to be changed to create a commercial version. The invention addresses many of these issues thereby producing a version of the analytical technique that cab be made generally available to the scientific community.

Abstract: The proposed device is based on a carbon nanotube oscillator consisting of a finite length outer stationary nanotube and a finite length inner oscillating nanotube. Its main function is to measure changes in the characteristics of the motion of the carbon nanotube oscillating near a sample surface, and profile the roughness of this surface. The device operates in a non-contact mode, thus it can be virtually non-wear and non-fatigued system. It is an alternative to the existing atomic force microscope (AFM) tips used to scan surfaces to determine their roughness.

Abstract: A method of determining the position of a probe tip. An evanescent electromagnetic field is generated extending beyond an interface boundary between a first medium, having a first refractive index, and a second medium, having a second refractive index which is greater than the first refractive index, the interface boundary extending in a plane. A probe tip is positioned in the evanescent field in the first medium thereby causing propagating electromagnetic radiation to be produced as a result of the disruption of the evanescent field by the probe tip, and at least a portion of the propagating electromagnetic radiation is collected. The spatial intensity distribution of the collected radiation is detected with respect to an image plane. An at least one dimensional position of the probe tip in a probe tip plane is determined from the detected spatial intensity distribution, the probe tip plane being a plane which contains the probe tip and which is substantially parallel to the plane of the interface boundary.

Abstract: The invention is direct to a piezoelectric microcantilever for static contact and dynamic noncontact atomic force microscopy which may be carried out in solution. The piezoelectric microcantilever, which includes a piezoelectric layer and a non-piezoelectric layer is capable of self actuation and detection. The piezoelectric layer may be constructed from a lead magnesium niobate-lead titanate (Pb(Mg1/3Nb2/3)O3)0.65—(PbTiO3)0.35(PMN0.65-PT0.35) (PMN-PT), zirconate titanate (PZT)/SiO2 or from any lead-free piezoelectric materials such as doped sodium-potassium niobate-lithium niobate. The piezoelectric layers of the microcantilevers may have dielectric constants of from 1600-3000 and thicknesses below 10 ?m. Also disclosed are methods for fabricating microcantilever sensors and methods for atomic force microscopy employing the microcantilevers.

Abstract: A digital system for controlling the quality factor in a resonant device. The resonant device can be any mechanically driven resonant device, but more particularly can be a device that includes a cantilever within its system, such as an atomic force microscope. The quality factor can be digitally controlled to avoid noise effect in the analog components. One of the controls can use a direct digital synthesizer implemented in a way that provides access to the output of the phase accumulator. That output is a number which usually drives eight lookup table to produce a cosine or sign output wave. The output wave is created, but the number is also adjusted to form a second number of the drives a second lookup table to create an adjustment factor. The adjustment factor is used to adjusts the output from the cosine table, to create an adjusted digital signal. The adjusted digital signal than drives a DA converter which produces an output drive for the cantilever.

Abstract: An instrument includes a probe having a porous tip, a tip positioning apparatus to position the tip with respect to a sample material, a probe positioning apparatus to position the probe and sample material with respect to each other, and a controller. The controller controls the probe positioning apparatus in positioning the probe over the sample and controls the tip positioning apparatus in lowering the tip into the sample material to produce an interaction between the porous tip and the sample material.