Abstract: A general high-throughput screening (HTS) process using an atomic force microscope (AFM) to detect and measure molecular recognition events. The AFM is used to measure changes in molecular complex height, friction, shape, elasticity or any other relevant parameters that report a molecular recognition event. In addition, the force involved in molecular recognition and bonding is directly measured using the technique of force spectroscopy. In one embodiment, a flow chamber is used to introduce molecules and assay their effect on a molecular interaction occurring between molecules on the AFM probe and a surface. In some cases the surface may be an introduced microparticle. In a second embodiment, the sample is a solid phase array of molecules that is interrogated by a functionalized AFM probe, and the effects of introduced agents at each molecular address in the array is measured by force spectroscopy.

Abstract: The present invention provides a self-sensing tweezer device for micro and nano-scale manipulation, assembly, and surface modification, including: one or more elongated beams disposed in a first configuration; one or more oscillators coupled to the one or more elongated beams, wherein the one or more oscillators are operable for selectively oscillating the one or more elongated beams to form one or more “virtual” probe tips; and an actuator coupled to the one or more elongated beams, wherein the actuator is operable for selectively actuating the one or more elongated beams from the first configuration to a second configuration.

Abstract: Proposed is a procedure for carrying out a scanning probe microscopic or atomic force spectroscopic measurement within predetermined parameters, which said procedure encompasses the following steps: a determination of a value variance of at least one of the parameters, and control of an adjustment member in relation to said variance, so that the variance is at least partially compensated for.

Abstract: Provided is a surface analysis and measurement method based on the flow resistance of a fluid. The method comprises: spraying a fluid on the surface of a sample; identifying and determining if a flow resistance value of the fluid colliding with the sample surface is optimal for the measurement of the surface topography of the sample; setting the determined optimal flow resistance value to a reference value and moving the sample in the X-Y axes to allow the entire surface of the sample to be scanned; varying the position of the sample in the Z axis together with the X-Y axis movement to adjust varying flow resistance values of the fluid along the irregular surface topography of the sample to the set flow resistance value during scanning; and expressing the movement ranges of the sample in the X, Y and Z axes as numerical values and representing the numerical values as brightness values on a computer screen to display the surface topography of the sample.

Abstract: An object of the present invention is to provide an atomic force microscope apparatus allowing tracking errors to be made as close to zero as possible to reduce images obtained through high-speed scanning from being degraded. To accomplish the object of the present invention, the present invention provides an atomic force microscope apparatus imaging a surface topography of a sample in a contact mode, the apparatus including a cantilever having a probe interacting with the sample surface via an atomic force and being subjected to a deflection by the atomic force, laser light provision means for allowing first laser light to enter the cantilever, light detection means, a controller estimating the surface topography of the sample surface, and data storage means for recording the estimated surface topography.

Abstract: A dual tip probe for scanning probe epitaxy and a method of forming the dual tip probe are disclosed. The dual tip probe includes first and second tips disposed on a cantilever arm. The first and second tips can be a reader tip and a synthesis tip, respectively. The first tip can remain in contact with a substrate during writing and provide in situ characterization of the substrate and or structures written, while the second tip can perform in non-contact mode to write and synthesis nanostructures. This feature can allow the dual tip probe to detect errors in a printed pattern using the first tip and correct the errors using the second tip.

Abstract: The invention provides a stress micro mechanical system for measuring stress and strain in micro- and nano-fibers tubes, and wires as well as for measuring the interface adhesion force and stress in nanofibers and nanotubes embedded in a polymer matrix. A preferred system of the invention has a substrate for supporting a MEMS fabrication. The MEMS fabrication includes freestanding sample attachment points that are movable in a translation direction relative to one another when the substrate is moved and a sample is attached between the sample attachment points. An optical microscope images surfaces of the MEMS fabrication. Software conducts digital image correlation on obtained images to determine the movement of the surfaces at a resolution much greater than the hardware resolution of the optical microscope.

Abstract: Measurement apparatus having a cantilever and a fluid flow channel, the cantilever being positioned in the channel so that it projects in a direction parallel to the direction of fluid flow. In an associated method, the cantilever is positioned in a fluid flow channel such that the cantilever extends parallel with the direction of fluid flow in the channel. Fluid is caused to flow in the channel at a known velocity. The resonant frequency of the cantilever is measured at one or more velocities of fluid flow and calculating the spring constant of the cantilever using the measured resonant frequency or frequencies. If the spring constant of the cantilever is known, the measurement of resonant frequency of the cantilever is used to determine the velocity of the fluid flow.

Abstract: A frequency shift ?f obtained by an FM-AFM can be expressed by a simple linear coupling of a ?fLR derived from a long-range interaction force and a ?fSR derived from a short-range interaction force. Given this factor, a ?f curve on an atomic defect and a ?f curve on a target atom on the sample surface are each measured for only a relatively short range scale (S1 and S2), and a difference ?f curve of those two curves is obtained (S3). Since the difference ?f curve is derived only from a short-range interaction force, a known conversion operation is applied to this curve obtain an F curve which illustrates the relationship between the force and the distance Z, and then the short-range interaction force on the target atom is obtained from the F curve (S4). Since the range scale in measuring the ?f curve can be narrowed, the measurement time can be shortened, and since the conversion from the ?f curve into F curve is required only once, the computational time can also be shortened.

Abstract: A scanning probe microscope includes a plate moveable in an x-axis direction, a y-axis direction, and a z-axis direction, and a probe tip coupled to the plate. A plurality of actuators cooperate to move the probe tip with three degrees of freedom of movement.

Abstract: The invention relates to an atomic force microscope including a microtip placed on a flexible support connected to a microscope head facing a surface to be studied, which includes means for controlling the distance between the head and the surface for a given value and means for inhibiting vibration of the microtip.

Abstract: In a near-field scanning microscope using an aperture probe, the upper limit of the aperture formation is at most several ten nm in practice. In a near-field scanning microscope using a scatter probe, the resolution ability is limited to at most several ten nm because of the external illuminating light serving as background noise. Moreover, measurement reproducibility is seriously lowered by a damage or abrasion of a probe. Optical data and unevenness data of the surface of a sample can be measured at a nm-order resolution ability and a high reproducibility while damaging neither the probe nor the sample by fabricating a plasmon-enhanced near-field probe having a nm-order optical resolution ability by combining a nm-order cylindrical structure with nm-order microparticles and repeatedly moving the probe toward the sample and away therefrom at a low contact force at individual measurement points on the sample.

Abstract: An apparatus and technique for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work is described.

Abstract: The invention provides a lithographic method referred to as “dip pen” nanolithography (DPN). DPN utilizes a scanning probe microscope (SPM) tip (e.g., an atomic force microscope (AFM) tip) as a “pen,” a solid-state substrate (e.g., gold) as “paper,” and molecules with a chemical affinity for the solid-state substrate as “ink.” Capillary transport of molecules from the SPM tip to the solid substrate is used in DPN to directly write patterns consisting of a relatively small collection of molecules in submicrometer dimensions, making DPN useful in the fabrication of a variety of microscale and nanoscale devices. The invention also provides substrates patterned by DPN and kits for performing DPN. The invention further provides a method of performing AFM imaging in air. The method comprises coating an AFM tip with a hydrophobic compound, the hydrophobic compound being selected so that AFM imaging performed using the coated AFM tip is improved compared to AFM imaging performed using an uncoated AFM tip.

Abstract: The scanning probe microscope applies a sum of an AC voltage (Uac) and a DC voltage (Udc) to its probe. The frequency of the AC voltage (Uac) substantially corresponds to the mechanical oscillation frequency of the probe, but its phase in respect to the mechanical oscillation varies periodically. The phase modulation has a frequency fmod. The microscope measures the frequency (f) or the amplitude (K) of a master signal (S) applied to the probe's actuator, or it measures the phase of the mechanical oscillation of the cantilever in respect to the master signal (S). The spectral component at frequency fmod of the measured signal is fed to a feedback loop controller, which strives to keep it zero by adjusting the DC voltage (Udc), thereby keeping the DC voltage at the contact voltage potential.

Abstract: A method for exciting free torsional vibrations a spring cantilever, which is clamped in on one side and has a longitudinal extension, of an atomic force microscope (AFM) is disclosed. The invention provides by the one-sidedly clamped-in spring cantilever being placed at a distance over a surface between which and the spring cantilever there is an acoustic coupling medium, by the surface being set into oscillations which are oriented laterally to the surface and are polarized linearly along an oscillation direction, and by the polarization axis given by the oscillation direction being oriented perpendicular to the longitudinal extension of the spring cantilever.

Abstract: There is provided an atomic force microscope (AFM) with increase the speed and sensitivity of detection of the resonant frequency shift in a cantilever. An AFM (1) extracts a reference signal and a phase shift signal from a detection signal from a displacement sensor of the cantilever. The reference signal is restrained from a phase change in accordance with the resonant frequency shift. The phase shift signal has a phase shifted in accordance with the resonant frequency shift. The AFM (1) determines the phase difference of the phase shift signal from the reference signal, as the resonant frequency shift. The AFM (1) may detect the phase difference between a plus-minus inversion point on the reference signal and a corresponding plus-minus inversion point on the phase shift signal. The AFM (1) may adjust phase before phase detection. The phase adjustment may move the detection point for the resonant frequency shift defined on the oscillation waveforms to the plus-minus inversion point.

Abstract: The present invention relates to a method of using an atomic force microscope comprising exciting natural lower and higher vibration modes of a microlever (M) placed on a sample, and analyzing the variation of one variable of a first output signal (Ai cos(?it??i)) representative of the response of M to the excitation of the lower mode, with respect to the variation of a parameter influenced by one variable of a second output signal (Aj cos(?jt??j)) representative of the response of M to the excitation of the higher mode, and/or analyzing the variation of one variable of a second output signal (Aj cos(?jt??j)) representative of the response of M to the excitation of the higher mode, with respect to the variation of a parameter influenced by one variable of a first output signal (Ai cos(?it??i)) representative of the response of M to the excitation of the lower mode.

Abstract: A mechanical oscillator which defines a starting point of a cantilever at a front edge of a base and can determine the length of the cantilever without depending on an alignment accuracy and an etching amount, and a fabrication method of the mechanical oscillator. The mechanical oscillator, produced by processing a wafer, comprises a base (101) formed from a substrate supporting an SOI wafer and a structure to be a cantilever (102) which is formed from a silicon thin film of the SOI wafer and is horizontally protruding from the base (101), wherein a part of a buried oxide film (103) between the base (101) and the structure to be a cantilever (102) is removed, and a cantilever (104) starting from the front edge (105) of the base (101) is formed by directly jointing the structure to be a cantilever (102) to a part including at least the front edge (105) of the base (101) where the buried oxide film was removed.

Abstract: An atomic force microscopy probe configuration and a method for manufacturing the same are disclosed. In one aspect, the probe configuration includes a cantilever, and a planar tip attached to the cantilever. The cantilever only partially overlaps the planar tip, and extends along a longitudinal direction thereof. The planar tip is of a two-dimensional geometry having at least one corner remote from the cantilever, which corner during use contacts a surface to be scanned.

Abstract: A driving laser unit (11) irradiates a laser beam on a cantilever (5) to cause thermal expansion deformation. A driving-laser control unit (13) performs feedback control for the cantilever (5) by controlling intensity of the laser beam on the basis of displacement of the cantilever (5) detected by a sensor (9). A thermal-response compensating circuit (35) has a constitution equivalent to an inverse transfer function of a heat transfer function of the cantilever (5) and compensates for a delay in a thermal response of the cantilever (5) to the light irradiation. Moreover, the cantilever (5) may be excited by controlling the intensity of the laser beam. By controlling light intensity, a Q value of a lever resonance system is also controlled. It is possible to increase scanning speed of an atomic force microscope.

Abstract: A scanning probe apparatus for obtaining information of a sample or processing the sample with relative movement between the sample and the apparatus includes a sample stage for holding the sample, and a drive stage with a probe, a cantilever supporting the probe, a cantilever holding member for holding the cantilever, and a drive element for driving the probe in three directions perpendicular to each other. In addition, a movable portion surrounds the drive element and is positioned outside of the drive element, with the movable portion movable in a direction in which an inertial force generated during movement of the probe is canceled. The drive stage includes an optical path, through which light passes, provided inside of the drive stage.

Abstract: A microelectromechanical system comprises a deformable portion and at least one stress sensor fixedly attached to the deformable portion. The sensor itself comprises a base portion and a shunt portion juxtaposed on the deformable portion, and connections arranged to detect a change of a distribution of an electric current in the base and shunt portions. Such a system is suitable for many applications, in particular for forming a portion of an arm of an atomic force microscope or for entering into the constitution of a bio sensor.

Abstract: A surface shape of a member to be measured is measured by reflecting measuring light at a reflection surface of a probe and utilizing an atomic force exerting between the probe and utilizing an atomic force exerting between the probe and the member to be measured. In addition to a first scanner for driving the probe, a second scanner for moving a focus position of an optical system is provided. Position conversion data representing a correlation between amounts of control of the first scanner and the second scanner are obtained in advance. By synchronously driving the first scanner and the second scanner, the focus position of the optical system is caused to follow the probe to improve measurement accuracy.

Abstract: The amplitude control of a cantilever based on the van der Pol model is performed through a feedback using the measurement data on a deflection of the cantilever. A self-oscillating circuit integrates a deflection angle signal of a cantilever detected by a deflection angle measuring mechanism using an integrator, multiplies a resulting integral value by linear feedback gain Klin generated by a gain generator, and an output corresponding to the linear feedback signal is generated. Also, the self-oscillating circuit cubes the deflection angle signal using analog multipliers, integrates the resulting values using integrators, multiplies the resulting integral values by a nonlinear feedback gain Knon generated by a gain generator, and an output corresponding to the nonlinear feedback signal is generated. Furthermore, the self-oscillating circuit 40 adds the outputs together using an adder, and a voltage signal VC for a piezo element is generated.

Abstract: Provided is a probe microscope for measuring a surface potential of a sample, including a contact electrification mechanism (circuit (C)) for bringing an electroconductive probe device into contact with a surface of the sample and applying a voltage in the contact state to induce electrification on the surface of the sample, and a potential measuring mechanism (circuit (K)) for measuring the surface potential of the sample caused by the contact electrification mechanism in a non-contact state of the electroconductive probe device and the surface of the sample, wherein the electrification induced by the contact electrification mechanism and the measurement of the surface potential by the potential measuring mechanism alternate in time series while the voltage applied during the contact is gradually changed, thereby measuring a correlation between the applied voltage and the surface potential.

Abstract: A vibration-type cantilever holder holds a cantilever opposed to a sample. The holder supports a main body part of the cantilever at only its base end so that a probe at the free end of the cantilever can contact the sample. The holder has a cantilever-attaching stand on which the main body part is placed and fastened such that the cantilever is tilted at a predetermined angle with respect to the sample. A first vibration source is fastened to the cantilever-attaching stand and vibrates with a phase and an amplitude depending on a predetermined waveform signal, and the first vibration source is fastened at a first location to a holder main body. A second vibration source is fastened at a second location, which is spaced from the first location, to the holder main body and generates vibrations to offset vibrations traveling from the first vibration source to the cantilever-attaching stand and holder main body.

Abstract: A scanning probe microscope and method of operation for monitoring and assessing proper tracking between the tip and sample, as well as automating at least some aspects of AFM setup previously done manually. Preferably, local slopes corresponding to the acquired data are compared to determine a tracking metric that is self-normalizing.

Abstract: Provided are a structure of an apparatus for analysis, inspection, and measurement in which a support structure supporting a detection unit is resistant to disturbance, suppresses a reduction in resolution during large-sample measurement, and has high rigidity, and a probe microscope using the apparatus structure. The apparatus structure supporting the detection unit which is opposed to a sample which is located on a unit movable in at least one axis direction and is an object to be analyzed has an arch shape. In the apparatus structure having the arch shape and supporting the detection unit, a surface substantially perpendicular to a flat surface portion of a sample holder located immediately under the apparatus structure is formed. The detection unit is supported on the perpendicular surface. The arch-shaped apparatus structure is a curved structure consistent with a catenary curve.

Abstract: An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface. Such a technique implemented in a commercially viable analytical instrument would be extremely useful. Various aspects of the experimental set-up have to be changed to create a commercial version. The invention addresses many of these issues thereby producing a version of the analytical technique that cab be made generally available to the scientific community.

Abstract: A localized nanostructure growth apparatus that has a partitioned chamber is provided, where a first partition includes a scanning probe microscope (SPM) and a second partition includes an atomic layer deposition (ALD) chamber, where the first partition is hermetically isolated from the second partition, and at least one SPM probe tip of the SPM is disposed proximal to a sample in the ALD chamber. According to the invention, the hermetic isolation between the chambers prevents precursor vapor from damaging critical microscope components and ensuring that contaminants in the ALD chamber can be minimized.

Abstract: An SPM probe with an elongated support element and a cantilever projecting beyond the front face of the support element and carrying a scanning tip, with the cantilever arranged at a front face side of the support element of the probe, protruding there from a front face side flank, and with the support element having an essentially trapezoidal cross-section with a longer and a shorter transverse edge at the face side flank, and also with critical corners at one of the transverse edges of the face side flank that are closest to a sample during the scanning process, wherein the support element has an elongated raised portion extending in the longitudinal direction of the support element and of the cantilever, with the raised portion having an essentially trapezoidal cross-section, and with the cantilever arranged on the face side on a narrow transverse edge of the raised portion of the support element, and with the raised portion with the cantilever arranged preferably at the longer transverse edge of the face

Abstract: The invention relates to a method of using an atomic force microscope and to a microscope. The inventive method comprises the following steps consisting in at least performing bimodal excitation of a microlever (M) which is disposed on a sample and analysing at least: the variation in the oscillation amplitude (Ai) of an output signal (Ai cos(?it??i)) that is representative of the response from the microlever (M) to the excitation of one of the natural vibration modes thereof, in order to obtain topographic information in relation to the sample; and to the variation in the phase (?j) of an output signal (Aj cos(?jt??j)) that is representative of the response from the microlever (M) to the excitation of another natural vibration mode thereof, in order to obtain compositional information in relation to the sample. The inventive microscope is adapted to be used with the aforementioned method.

Abstract: The invention provides a method of detecting a chemical species with an oscillating cantilevered probe. A cantilevered beam is driven into oscillation with a drive mechanism coupled to the cantilevered beam. A free end of the oscillating cantilevered beam is tapped against a mechanical stop coupled to a base end of the cantilevered beam. An amplitude of the oscillating cantilevered beam is measured with a sense mechanism coupled to the cantilevered beam. A treated portion of the cantilevered beam is exposed to the chemical species, wherein the cantilevered beam bends when exposed to the chemical species. A second amplitude of the oscillating cantilevered beam is measured, and the chemical species is determined based on the measured amplitudes.

Abstract: A method includes determining the point at which a tip of a probe based instrument contacts a sample and/or the area of that contact by dynamically oscillating a cantilever of the instrument in flexural and/or torsional modes. The method additionally includes using oscillation characteristics, such as amplitude, phase, and resonant frequency, to determine the status of the contact and to provide quantitative data. Static and quasi-static measurements, including contact stiffness and elastic modulus, can be obtained from the thus obtained data. Quasistatic measurements, such as creep and viscoelastic modulus, can be obtained by repeating the static measurements for a number of force profiles at different force application rates and correlating the resultant data using known theories.

Abstract: Faster and better methods for leveling arrays including software and user interface for instruments. A method comprising: (i) providing at least one array of cantilevers supported by at least one support structure, (ii) providing at least one substrate, (iii) providing at least one instrument to control the position of the array with respect to the substrate, (iv) leveling the array with respect to the substrate, wherein the leveling is performed via a user interface on the instrument which is adapted to have the user input positional information from the motors and piezoelectric extender when at least one cantilever deflects from the substrate. Uniform z-displacements can be achieved.

Abstract: The invention relates to a method for examining a measurement object (2, 12), in which the measurement object (2, 12) is examined by means of scanning probe microscopy using a measurement probe (10) of a scanning probe measurement device, and in which at least one subsection (1) of the measurement object (2, 12) is optically examined by an optical measurement system in an observation region associated with the optical measurement system, wherein a displacement of the at least one subsection (1) of the measurement object (2, 12) out of the observation region which is brought about by the examination by means of scanning probe microscopy is corrected in such a way that the at least one displaced subsection (1) of the measurement object (2, 12) is arranged back in the observation region by means of a readjustment device which processes data signals that characterize the displacement.

Abstract: Improved actuation device useful in direct-write nanolithography and imaging including use of a pivot point for downward deflection of a cantilever with long travel path. A device comprising at least one holder, at least one cantilever, an extension of the said cantilever wherein the extension is integrated with an actuator, wherein the cantilever is adapted for actuated movement. The actuator can be electrostatic, thermal, or piezoelectric. The cantilever can comprise a tip, and material can be transferred from the tip to a surface.

Abstract: An alignment layer is tested using an AFM (Atomic Force Microscope) and a FT-IR (Fourier Transformation Infrared Spectroscope) under various process conditions so that inferiority of the alignment layer can be detected and optimum process conditions can be obtained, thereby minimizing the inferiority of the alignment layer by applying the optimum process conditions.

Abstract: One inventive aspect is related to an atomic force microscopy probe. The probe comprises a tip configuration with two probe tips on one cantilever arm. The probe tips are electrically isolated from each other and of approximately the same height with respect to the cantilever arm. The outer surface of the tip configuration has the shape of a body with a base plane and an apex. The body is divided into two sub-parts by a gap located approximately symmetrically with respect to the apex and approximately perpendicular to the base plane. Another inventive aspect related to methods for producing such an AFM probe.

Abstract: A scanning probe microscope is provided, which can be stably used for a long time even if excitation efficiency varies during scan. A cantilever (5) is excited, and the cantilever (5) and a sample are subjected to relative scanning. A second-harmonic component detection circuit (31) detects second-harmonic component amplitude of oscillation of the cantilever (5) as integral-multiple component amplitude. The second-harmonic component amplitude is amplitude of a second-harmonic component having a frequency twice as high as excitation frequency. An excitation intensity adjustment circuit (33) controls excitation intensity based on the detected second-harmonic component amplitude such that the second-harmonic component amplitude is kept constant.

Abstract: A high spatial resolution phase-sensitive technique employs a scanning near field ultrasound holography (SNFUH) methodology for imaging elastic as well as viscoelastic variations across a sample surface. SNFUH uses a near-field approach to measure time-resolved variations in ultrasonic oscillations at a sample surface. As such, it overcomes the spatial resolution limitations of conventional phase-resolved acoustic microscopy (i.e. holography) by eliminating the need for far-field acoustic lenses.

Abstract: A resist medium in which features are lithographically produced by scanning a surface of the medium with an AFM probe positioned in contact therewith. The resist medium comprises a substrate; and a polymer resist layer within which features are produced by mechanical action of the probe. The polymer contains thermally reversible crosslinkages. Also disclosed are methods that generally includes scanning a surface of the polymer resist layer with an AFM probe positioned in contact with the resist layer, wherein heating the probe and a squashing-type mechanical action of the probe produces features in the layer by thermally reversing the crosslinkages.