Abstract: A solid state nanopore device including two or more materials and a method for fabricating the same. The device includes a solid state insulating membrane having an exposed surface, a conductive material disposed on at least a portion of the exposed surface of the solid state membrane, and a nanopore penetrating an area of the conductive material and at least a portion of the solid state membrane. During fabrication a conductive material is applied on a portion of a solid state membrane surface, and a nanopore of a first diameter is formed. When the surface is exposed to an ion beam, material from the membrane and conductive material flows to reduce the diameter of the nanopore. A method for evaluating a polymer molecule using the solid state nanopore device is also described. The device is contacted with the polymer molecule and the molecule is passed through the nanopore, allowing each monomer of the polymer molecule to be monitored.
Type:
Grant
Filed:
February 14, 2003
Date of Patent:
August 21, 2007
Assignee:
President and Fellows of Harvard College
Inventors:
Jiali Li, Derek M. Stein, Gregor M. Schurmann, Gavin M. King, Jene Golovchenko, Daniel Branton, Michael Aziz
Abstract: Apparatus for an on-chip decoupling capacitor. The capacitor includes a bottom electrode that consist of nanostructures deposited over a planarized metal, a dielectric material deposited over the nanostructures, and a top electrode deposited over the dielectric material. The shape of the bottom electrode is tunable by modulating the diameter and/or the length of the nanostructures to produce an increase in capacitance without increasing the footprint of the on-chip decoupling capacitor.
Abstract: Nanowire fluid sensors are provided. The fluid sensors comprise a first electrode, a second electrode, and at least one nanowire between the first electrode and the second electrode. Each nanowire is connected at a first end to the first electrode and at a second end to the second electrode. Methods of fabricating and operating the fluid sensor are also provided.
Type:
Grant
Filed:
December 23, 2004
Date of Patent:
June 26, 2007
Assignee:
Hewlett-Packard Development Company, L.P.
Abstract: The present invention first obtains a nano-metal line by an e-beam lithography and an electroless plating, and imprints the line into a material with low-K to obtain a damascene metal line with low cost and high throughput, as a future solution for a metallization process for a general low-K metal damascene structure through CMP.
Type:
Grant
Filed:
August 23, 2005
Date of Patent:
May 8, 2007
Assignee:
National Tsing Hua University
Inventors:
Jen Fu Liu, Yung Jen Hsu, Jiann Heng Chen, Fon Shan Huang
Abstract: Pathways to rapid and reliable fabrication of nanocylinder arrays are provided. Simple methods are described for the production of well-ordered arrays of nanopores, nanowires, and other materials. This is accomplished by orienting copolymer films and removing a component from the film to produce nanopores, that in turn, can be filled with materials to produce the arrays. The resulting arrays can be used to produce nanoscale media, devices, and systems.
Type:
Grant
Filed:
March 22, 2001
Date of Patent:
March 13, 2007
Assignee:
University of Massachusetts
Inventors:
Mark Tuominen, Joerg Schotter, Thomas Thurn-Albrecht, Thomas P. Russell
Abstract: A hydrogen gas sensor and/or switch fabricated from arrays nanowires composed of metal or metal alloys that have stable metal hydride phases. The sensor and/or switch response times make it quite suitable for measuring the concentration of hydrogen in a flowing gas stream. The sensor and/or switch preferably operates by measuring the resistance of several metal nanowires arrayed in parallel in the presence of hydrogen gas. The nanowires preferably comprise gaps or break junctions that can function as a switch that closes in the presence of hydrogen gas.
Type:
Grant
Filed:
May 30, 2002
Date of Patent:
March 6, 2007
Assignee:
Regents of the University of California
Inventors:
Reginald Mark Penner, Erich C. Walter, Fred Favier
Abstract: A nanofeature particulate trap comprising a plurality of densely packed nanofeatures, such as nanotubes, and a particulate detector incorporating the nanofeature particulate trap are provided. A method of producing a nanotrap structure alone or integrated with a particulate detector is also provided.
Type:
Grant
Filed:
June 6, 2003
Date of Patent:
February 13, 2007
Assignee:
California Institute of Technology
Inventors:
Flavio Noca, Brian D. Hunt, Michael J. Bronikowski, Michael E. Hoenk, Robert S. Kowalczyk, Daniel S. Choi, Fei Chen