Abstract: The respective square cross-section permanent magnets of each of a plurality of spaced Halbach magnet arrays, attached to the bottom of movable X-Y stage and aligned with a given one of the X and Y axes, are spaced from one another parallel to the other one of the X and Y axes of by the width of the square cross-section cooperates with both a first set of a plurality of flat stationary electromagnet coils of wire and a second set of a plurality of flat stationary electromagnet coils of wire that substantially lie in proximate horizontal X, Y planes and, respectively, are angularly offset by +45.degree. and -45.degree. with respect to the given one of the X and Y horizontal axes to provide a lateral translational force on the stage with respect to the horizontal X and/or Y axes and/or a levitating translational force on the stage with respect to the vertical Z axis.
Abstract: An electrographic sensor unit and method for determining the position of a user selected position thereon. The electrographic sensor unit includes a layer of a conductive material having an electrical resistivity and a surface, at least three spaced apart contact points electrically interconnected with a layer of conductive material, a processor connected to the spaced apart contacts and disposed to selectively apply a signal to each of the contact points, and a probe assembly, that includes either a stylus of a flexible conductive layer spaced apart from the layer, coupled to the processor with the stylus disposed to be positioned by a user in vicinity of a user selected position on the surface of the layer, or that position being selected with a user's finger on the flexible layer and to receive signals from the layer when the contact points have signals selectively applied thereto.
Abstract: A system and method for controlling electron exposure on image specimens by adjusting a raster scan area in-between scan frame cycles. A small, zoomed-in, scan area and the surrounding area are flooded with positive charge for a number of frame cycles between scan frames to reduce the voltage differential between the scan area and surrounding area, thereby reducing the positive charge buildup which tends to obscure small features in scanned images. The peak current into a pixel element on the specimen is reduced by scanning the beam with a line period that is very short compared to regular video. Frames of image data may further be acquired non-sequentially, in arbitrarily programmable patterns. Alternatively, an inert gas can be injected into the scanning electron microscope at the point where the electron beam impinges the specimen to neutralize a charge build-up on the specimen by the ionization of the inert gas by the electron beam.
Type:
Grant
Filed:
January 16, 1997
Date of Patent:
February 9, 1999
Assignee:
Kla-Tencor Corporation
Inventors:
Neil Richardson, Farid Askary, Stefano E. Concina, Kevin M. Monahan, David L. Adler
Abstract: 53 byte length ATM compliant cells are transmitted over a digital optical fiber path to interconnect with a coaxial feeder cable TV system to support two-way digital services at a plurality of sites connected to the TV cable system. At the point of interconnection between the fiber optic path and the cable TV feeder subsystem, digital signals are converted to a UHF rf carrier frequency above the cutoff pass-band of the analog signal feeder amplifier carrying TV broadcast signals. This rf carrier conveys a high data rate digitally modulated signal limited to sections of feeder cable between the cable TV broadcast channel amplifiers. In-house access to this UHF carrier signal is via the normal TV cable tap and drop cable to a SIU, located near the subscriber's TV set. The feeder cable and the passive taps used in cable TV practice have a higher cutoff frequency than the feeder amplifiers themselves. This allows passage of an UHF signal over the feeder cable.
Abstract: The present invention provides an automatic probe card planarization system and method to planarize a first plane defined by a plurality of contact points of a probe card relative to a second plane defined by a top surface of a wafer supported on a prober, with the probe card intermediate the wafer and a tester with the probe card interfacing eclectically with the tester to test the performance of the wafer. The planarization is performed by interfacing the probe card to the wafer by individually interfacing three points fixed points on the tester with three points on the prober. On of the points on the prober being fixed, while the other two are height variable as a result of calculations by a processor. Additionally, a camera is used to measure the height of at least three selected contact points on the probe card relative to the plane of wafer, from which the position of the first plane relative to said second plane is calculated.
Type:
Grant
Filed:
January 29, 1997
Date of Patent:
January 19, 1999
Assignee:
Tokyo Electron Limited
Inventors:
Marian R. Bialobrodski, Marius R. Lupan
Abstract: The apparatus of this invention redirects light input to the apparatus without significant light loss, and preferably without increasing the light's etendue. The apparatus includes a light guide and a redirection member. The member has input, output and reflective surfaces. The member's input surface is joined to the light guide to define an interface, and the member's output surface is situated adjacent to a medium that can be another light guide or redirection member, a gas such as ambient air, or a vacuum, for example. The member is configured to redirect light traveling in the light guide from its reflective surface by a predetermined redirection angle.
Abstract: A secondary zinc air cell, or another selected metal air cell, employing a spouted/packed metal particle bed and an air electrode. More specifically, two embodiments of a cell, one that is capable of being hydraulically recharged, and a second that is capable of being either hydraulically or electrically recharged. Additionally, each cell includes a sloped bottom portion to cause stirring of the electrolyte/metal particulate slurry when the cell is being hydraulically emptied and refilled during hydraulically recharging of the cell.
Abstract: A high intensity discharge lamp without mercury is disclosed radiating a selected spectrum of which can be almost entirely in the visible range from an envelope that contains a sulfur containing substance. The lamp utilizes a signal source that generates an excitation signal that is externally coupled to the exterior surface of the envelope to excite the enclosed sulfur containing substance. Various embodiments of the lamp use electrodes adjacent the envelope to couple the excitation signal thereto with the face of the electrodes shaped to complement the shape of the exterior surface of the envelope. Two shapes discussed are spherical and cylindrical. To minimize filamentary discharges each envelope may include an elongated stem affixed to the exterior thereof whereby a rotational subsystem spins the envelope.
Type:
Grant
Filed:
April 7, 1995
Date of Patent:
October 20, 1998
Inventors:
George Gabor, Thomas Robert Orr, Charles Maurice Greene, Douglas Gordon Crawford, Samuel Maurice Berman
Abstract: This invention includes a pin mirror arranged to receive light, preferably from a laser source. The pin mirror has a reflective surface that diffracts and reflects the received light to generate a diffraction-limited spherical wavefront. The pin mirror can reflect the wavefront in a predetermined direction by angling the pin mirror's reflective surface with respect to the direction of travel of the light incident to the pin mirror. The capability of the pin mirror to generate a diffraction-limited spherical wavefront and to direct the wavefront in a predetermined direction provides the capability to test objects or systems with relatively high numerical apertures, and yet allows for a reduction in the number and criticality of the properties of optical elements that would otherwise be required in an interferometer.
Abstract: A method and inspection system to inspect a first pattern on a specimen for defects against a second pattern that is intended to be the same where the second pattern has known responses to at least one probe. The inspection is performed by applying at least one probe to a point of the first pattern on the specimen to generate at least two responses from the specimen. Then the first and second responses are detected from the first pattern, and each of those responses is then compared with the corresponding response from the same point of the second pattern to develop first and second response difference signals. Those first and second response difference signals are then processed together to unilaterally determine a first pattern defect list.
Abstract: A method and apparatus for detecting internal bio-deterioration in round wood used in various applications (e.g. utility poles, pier pilings, round wood beams, posts and poles in structures, and living trees). The method includes the steps of securing a pulsing transducer adjacent one point on the surface of the round wood and securing a receiving transducer substantially diametrically opposite to the pulsing transducer. The pulsing transducer transmits ultrasonic signals through the round wood, which propagate through possibly deteriorated areas within the round wood. The receiving transducer receives the propagating ultrasonic signals, and a plurality of acousto-ultrasonic parameters contained in the received ultrasonic signals are processed and analyzed. The processing step includes the step of storing the averaged signals, and processing the stored signals on a real time basis to determine the acousto-ultrasonic parameters in the time and frequency domains.
Type:
Grant
Filed:
September 7, 1994
Date of Patent:
September 8, 1998
Assignee:
The Regents of the University of California
Inventors:
Frank Carroll Beall, Richard Len Lemaster, Jacek Marek Biernacki
Abstract: An electronic format converter that can convert a high resolution computer graphics CRT signal to a quasi-television compatible proprietary signal. This subsequently can be recorded to a standard television video cassette recorder (VCR) or transmitted over a standard TV channel and re-converted back to HI-RES computer video with the same device upon playback of the VCR or receipt of the signal from the standard TV channel.
Abstract: A compact bearing ball, or rail, gun to magnetically accelerate ferro-magnetic BBs is disclosed. The gun comprises a main board containing a channel sized to allow smooth passage of a BB, a straight portion of that channel forming a barrel terminating at an edge of the main board. A plurality of wire coils are disposed perpendicular to the axis of the barrel collinear with that axis. Driver circuitry for inducing in the plurality of wire coils is provided to ensure a synchronized generation of magnetic fields in individual ones of the wire coils to accelerate ferro-magnetic BBs disposed within the channel of the main board through the channel and out of the barrel. In a preferred embodiment, the channel has a loading segment substantially perpendicular to the barrel for aligning ferro-magnetic BBs prior to acceleration through the barrel, along with a magnet at the intersection of the loading segment and the barrel for positioning a BB co-centric with the axis of said barrel prior to acceleration.
Abstract: A system for generating and processing synthetic and absolute real time remote environments for interaction with a user and her biological senses is comprised of seven modules. These modules store, retrieve and process data to generate an output which interfaces with the system user's biological senses. These modules also track user data to accurately place the user in the generated and processed model. Various embodiments of the system user sensory interface are provided including visual and aural input devices, a three dimensional chamber having interactive tactile output via matrix-addressed, electromechanically operated rods driving a flexible skin and a head mounted sensory interface having a selectable a see through mode and multidimensional sonic arrays.
Abstract: A method and apparatus for detecting internal bio-deterioration in round wood used in various applications (e.g. utility poles, pier pilings, round wood beams, posts and poles in structures, and living trees). The method includes the steps of securing a pulsing transducer adjacent one point on the surface of the round wood and securing a receiving transducer substantially diametrically opposite to the pulsing transducer. The pulsing transducer transmits ultrasonic signals through the round wood, which propagate through possibly deteriorated areas within the round wood. The receiving transducer receives the propagating ultrasonic signals, and a plurality of acousto-ultrasonic parameters contained in the received ultrasonic signals are processed and analyzed. The processing step includes the step of storing the averaged signals, and processing the stored signals on a real time basis to determine the acousto-ultrasonic parameters in the time and frequency domains.
Type:
Grant
Filed:
April 18, 1997
Date of Patent:
June 2, 1998
Assignee:
The Regents of the University of California
Inventors:
Frank Carroll Beall, Richard Len Lemaster, Jacek Marek Biernacki
Abstract: A multi-purpose controller for analog variables of one dimension which closely controls such variables to set point by making sequential corrections to the level of input to the system of the variable based on: system response time, relationship of controller output to the variable, deviation of the variable from set point, and change in system load as determined by combining change in error with change in system input. The controller has a self tuning capability and can provide generation of the set point according to a set of variable parameters. It can be configured as a stand alone controller, as an intelligent Input/Output device for another intelligent device, or be resident in another intelligent device such as a programmable controller, computer or other microprocessor based device.
Abstract: A method and apparatus for evoking epileptiform activity in patients with drug resistant epilepsy, as part of a presurgical evaluation procedure are disclosed. The apparatus includes a cranial helmet, for generating a DC magnetic field of a sufficient strength to evoke epileptiform activity, and means for localizing the regions of the patient's brain where said epileptiform activity has been evoked. In the preferred embodiment, the magnetic field strength varies between 1 milliTesla and 2 milliTesla, and is generated by two generally similar coils which are coaxially separated, and which are wound on corresponding thermoplastic members to form the helmet. The desired magnetic field strength is produced at about the middle of the distance between the two coils, in general registration with the hippocampus region of the brain. In an exemplary embodiment, the localizing means includes implantable Foramen Ovale electrodes for sensing the evoked and natural epileptic firings.
Type:
Grant
Filed:
March 29, 1994
Date of Patent:
April 28, 1998
Assignee:
The Regents of the University of California
Inventors:
Jon Paul Dobson, Heinz-Gregor Wieser, Michael David Fuller
Abstract: A method and apparatus for inspecting patterned transmissive substrates, such as photomasks, for unwanted particles and features occurring on the transmissive, opaque portions and at the transition regions of the opaque and transmissive portions of the substrate. A transmissive substrate is illuminated by a laser through an optical system comprised of a laser scanning system, individual transmitted and reflected light collection optics and detectors collect and generate signals representative of the light transmitted and reflected by the substrate as the substrate is scanned repeatedly in one axis in a serpentine pattern by a laser beam which is focused on the patterned substrate surface. The defect identification of the substrate is performed using only those transmitted and reflected light signals, and other signals derived from them, such as the second derivative of each of them.
Type:
Grant
Filed:
October 4, 1996
Date of Patent:
April 7, 1998
Assignee:
KLA Instruments Corporation
Inventors:
David Garth Emery, Zain Kahuna Saidin, Mark J. Wihl, Tao-Yi Fu, Marek Zywno, Damon F. Kvamme, Michael E. Fein
Abstract: An apparatus scans an electron beam across an optical phase shift mask and automatically inspects the mask to determine the features of the phase shift mask and classification of defects. An electron beam is directed at the surface of a mask for scanning that mask and detectors are provided to measure the secondary and backscattered charged particles from the surface of the mask. The mask is mounted on an x - y stage to provide it with at least one degree of freedom while the mask is being scanned by the electron beam. By analysis of various waveform features in each of the secondary and backscatter electron waveforms obtained from a phase shift mask, various physical features of the mask can be detected, as well as their size and position determined. The thickness of chromium layers can also be determined. In the inspection configuration, there is also a comparison technique for comparing the pattern on the substrate with a second pattern for error detection.
Type:
Grant
Filed:
February 26, 1996
Date of Patent:
February 10, 1998
Assignee:
KLA Instruments Corporation
Inventors:
Dan Meisburger, Alan D. Brodie, Zhong-Wei Chen, Jack Y. Jau