Patents Represented by Attorney Charles S. Guenzer
  • Patent number: 8307461
    Abstract: A microwave probe having a metal tip on the free end of a microcantilever. In one embodiment, a pyramidal pit is isotropically etched in a device wafer of monocrystalline silicon. Oxidation may sharpen the pit. Deposited metal forms the metal tip in the pit and a bottom shield. Other metal sandwiched between equally thick dielectric layers contact the tip and form a conduction path along the cantilever for the probe and detected signals. Further metal forms a top shield overlying the conduction path and the dielectrically isolated tip and having equal thickness to the bottom shield, thus producing together with the symmetric dielectric layers a balanced structure with reduced thermal bending. The device wafer is bonded to a handle wafer. The handle is formed and remaining silicon of the device wafer is removed to release the cantilever.
    Type: Grant
    Filed: January 20, 2011
    Date of Patent: November 6, 2012
    Assignee: PrimeNano, Inc.
    Inventors: Xinxin Li, Yongliang Yang
  • Patent number: 8284500
    Abstract: An object of the invention is to provide a laser line-generator that generates a straight line with the both end portions as bright as the central portion, and a laser line-generator module that integrates the laser line-generator with a laser light source. A columnar transparent medium has an entrance boundary surface 10 for taking in laser light and an exit surface 20 for emitting the taken laser light linearly. At least one of the entrance boundary surface 10 and the exit surface 20 is composed of a curved surface, and a curve forming the curved surface includes two or more inflection points F.
    Type: Grant
    Filed: June 8, 2009
    Date of Patent: October 9, 2012
    Assignee: Ayase Co., Ltd.
    Inventors: Chiaki Kojima, Ja Koo, Hiroyuki Imai
  • Patent number: 8266718
    Abstract: A microwave microscope including a probe tip electrode vertically positionable over a sample and projecting downwardly from the end of a cantilever. A transmission line connecting the tip electrode to the electronic control system extends along the cantilever and is separated from a ground plane at the bottom of the cantilever by a dielectric layer. The probe tip may be vertically tapped near or at the sample surface at a low frequency and the microwave signal reflected from the tip/sample interaction is demodulated at the low frequency. Alternatively, a low-frequency electrical signal is also a non-linear electrical element associated with the probe tip to non-linearly interact with the applied microwave signal and the reflected non-linear microwave signal is detected at the low frequency. The non-linear element may be semiconductor junction formed near the apex of the probe tip or be an FET formed at the base of a semiconducting tip.
    Type: Grant
    Filed: February 16, 2010
    Date of Patent: September 11, 2012
    Assignee: The Board of Trustees of Leland Stanford Junior University
    Inventors: Keji Lai, Michael Kelly, Zhi-Xun Shen
  • Patent number: 8242407
    Abstract: A thermal processing apparatus and method in which a first laser source, for example, a CO2 emitting at 10.6 ?m is focused onto a silicon wafer as a line beam and a second laser source, for example, a GaAs laser bar emitting at 808 nm is focused onto the wafer as a larger beam surrounding the line beam. The two beams are scanned in synchronism in the direction of the narrow dimension of the line beam to create a narrow heating pulse from the line beam when activated by the larger beam. The energy of GaAs radiation is greater than the silicon bandgap energy and creates free carriers. The energy of the CO2 radiation is less than the silicon bandgap energy so silicon is otherwise transparent to it, but the long wavelength radiation is absorbed by the free carriers.
    Type: Grant
    Filed: June 28, 2010
    Date of Patent: August 14, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash Mayur, Aaron Hunter, Bruce Adams, Joseph Michael Ranish
  • Patent number: 8231736
    Abstract: A cleaning process for recovering an anodized aluminum part is particularly useful when the part has been exposed to a fluorine-containing plasma in etch reactor. The part is bathed in an agitated solution of a fluoride acid, such as ammonium fluoride, which converts aluminum fluoride to a soluble fluoride. The part is rinsed in water. The pores of the cleaned anodization may be resealed by a submerging the part in hot agitated deionized water.
    Type: Grant
    Filed: August 27, 2007
    Date of Patent: July 31, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Jennifer Y. Sun, Senh Thach, Xi Zhu, Li Xu, Anisul Khan
  • Patent number: 8216933
    Abstract: A method of depositing a bilayer of tungsten over tungsten nitride by a plasma sputtering process in which krypton is used as the sputter working gas during the tungsten deposition. Argon may be used as the sputtering working gas during the reactive sputtering deposition of tungsten nitride. The beneficial effect of reduction of tungsten resistivity is increased when the thickness of the tungsten layer is less than 50 nm and further increased when less than 35 nm. The method may be used in forming a gate stack including a polysilicon layer over a gate oxide layer over a silicon gate region of a MOS transistor in which the tungsten nitride acts as a barrier. A plasma sputter chamber in which the invention may be practiced includes gas sources of krypton, argon, and nitrogen.
    Type: Grant
    Filed: August 31, 2010
    Date of Patent: July 10, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Wei D. Wang, Srinivas Gandikota, Kishore Lavu
  • Patent number: 8182661
    Abstract: A sputter target assembly particularly useful for a large panel plasma sputter reactor having a target assembly sealed both to the main processing chamber and a vacuum pumped chamber housing a moving magnetron. The target assembly to which target tiles are bonded includes an integral plate with parallel cooling holes drilled parallel to the principal faces. The ends of the holes may be sealed and vertically extending slots arranged in two staggered groups on each side and machined down to respective pairs of cooling holes on opposite sides of the backing plate in pairs. Four manifolds tubes are sealed to the four groups of slots and provide counter-flowing coolant paths.
    Type: Grant
    Filed: July 27, 2005
    Date of Patent: May 22, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Yoshiaki Tanase, Makoto Inagawa, Akihiro Hosokawa
  • Patent number: 8178819
    Abstract: The thermal processing device includes a stage, a continuous wave electromagnetic radiation source, a series of lenses, a translation mechanism, a detection module, a three-dimensional auto-focus, and a computer system. The stage is configured to receive a substrate thereon. The continuous wave electromagnetic radiation source is disposed adjacent the stage, and is configured to emit continuous wave electromagnetic radiation along a path towards the substrate. The series of lenses is disposed between the continuous wave electromagnetic radiation source and the stage, and are configured to condense the continuous wave electromagnetic radiation into a line of continuous wave electromagnetic radiation on a surface of the substrate. The translation mechanism is configured to translate the stage and the line of continuous wave electromagnetic radiation relative to one another. The detection module is positioned within the path, and is configured to detect continuous wave electromagnetic radiation.
    Type: Grant
    Filed: March 14, 2005
    Date of Patent: May 15, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Dean C. Jennings, Mark Yam, Abhilash J. Mayur, Vernon Behrens, Paul A. O'Brien, Leonid M. Tertitski, Alexander Goldin
  • Patent number: 8133360
    Abstract: When a magnetron is scanned about the back of a target in a selected complex path having radial components, the erosion profile has a form depending upon the selection of paths. A radial erosion rate profile for a given magnetron is measured. Periodically during scanning, an erosion profile is calculated from the measured erosion rate profile, the time the magnetron spends at different radii, and the target power. The calculated erosion profile may be used to indicate when erosion has become excessive at any location prompting target replacement or to adjust the height of the magnetron above the target for repeated scans. In another aspect of the invention, the magnetron height is dynamically adjusted during a scan to compensate for erosion. The compensation may be based on the calculated erosion profile or on feedback control of the present value of the target voltage for a constant-power target supply.
    Type: Grant
    Filed: December 20, 2007
    Date of Patent: March 13, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Keith A. Miller, Daniel C. Lubben
  • Patent number: 8114256
    Abstract: A control system and method for controlling two motors determining the azimuthal and circumferential position of a magnetron rotating about the central axis of the sputter chamber in back of its target sputtering and capable of a nearly arbitrary scan path, e.g., with a planetary gear mechanism. A system controller periodically sends commands to the motion controller which closely controls the motors. Each command includes a command ticket, which may be one of several values. The motion controller accepts only commands having a command ticket of a different value from the immediately preceding command. One command selects a scan profile stored in the motion controller, which calculates motor signals from the selected profile. Another command instructs a dynamic homing command which interrogates sensors of the position of two rotating arms to determine if the arms in the expected positions. If not, the arms are rehomed.
    Type: Grant
    Filed: November 30, 2007
    Date of Patent: February 14, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Yu Chang, William Kuang, Ronald D Dedore, Jitendra R. Bhimjiyani, Wesley W Zhang
  • Patent number: 8021514
    Abstract: A plasma processing chamber particularly useful for pre-treating low-k dielectric films and refractory metal films subject to oxidation prior to deposition of other layers. A remote plasma source (RPS) excites a processing gas into a plasma and delivers it through a supply tube to a manifold in back of a showerhead faceplate. The chamber is configured for oxidizing and reducing plasmas in the same or different processes when oxygen and hydrogen are selectively supplied to the RPS. The supply tube and showerhead may be formed of dielectric oxides which may be passivated by a water vapor plasma from the remote plasma source. In one novel process, a protective hydroxide coating is formed on refractory metals by alternating neutral plasmas of hydrogen and oxygen.
    Type: Grant
    Filed: July 11, 2007
    Date of Patent: September 20, 2011
    Assignee: Applied Materials, Inc.
    Inventors: Xinyu Fu, Jick M. Yu
  • Patent number: 8021527
    Abstract: A magnetron actuator for moving a magnetron in a nearly arbitrary radial and azimuthal path in the back of a target in a plasma sputter reactor. The magnetron includes two coaxial rotary shafts extending along the chamber central axis and coupled to two independently controllable rotary actuators. An epicyclic gear mechanism or a frog-leg structure mechanically couple the shafts to the magnetron to control its radial and azimuthal position. A vertical actuator moves the shafts vertically in tandem to vary the magnetron's separation from the target's back surface and compensate for erosion of the front surface. The rotary actuators may be separately coupled to the shafts or a rotatable ring gear may be coupled to the shafts through respectively fixed and orbiting idler gears. Two radially spaced sensors detect reflectors attached to the inner and outer arms of the epicyclic gear mechanism for homing of the controller.
    Type: Grant
    Filed: October 25, 2007
    Date of Patent: September 20, 2011
    Assignee: Applied Materials, Inc.
    Inventors: Keith A. Miller, Michael Allen Flanigan, Hari Ponnekanti
  • Patent number: 8003534
    Abstract: An apparatus and method for holding a semiconductor device in a wafer. A bar is connected to the wafer. A first sidewall comprises a first end and a second, and is connected to the bar at its first end. A first tab comprises a first end and a second end, and is connected to the second end of the first sidewall at its first end and connected to the first side of the semiconductor device at its second end. The thickness of the first tab is less than the thickness of the bar and the thickness of the first sidewall.
    Type: Grant
    Filed: December 28, 2010
    Date of Patent: August 23, 2011
    Assignee: Applied Nanostructures, Inc.
    Inventor: Ami Chand
  • Patent number: 7972441
    Abstract: A method and apparatus for oxidizing materials used in semiconductor integrated circuits, for example, for oxidizing silicon to form a dielectric gate. An ozonator is capable of producing a stream of least 70% ozone. The ozone passes into an RTP chamber through a water-cooled injector projecting into the chamber. Other gases such as hydrogen to increase oxidation rate, diluent gas such as nitrogen or O2, enter the chamber through another inlet. The chamber is maintained at a low pressure below 20 Torr and the substrate is advantageously maintained at a temperature less than 800° C. Alternatively, the oxidation may be performed in an LPCVD chamber including a pedestal heater and a showerhead gas injector in opposition to the pedestal.
    Type: Grant
    Filed: April 5, 2005
    Date of Patent: July 5, 2011
    Assignee: Applied Materials, Inc.
    Inventors: Yoshitaka Yokota, Sundar Ramamurthy, Vedapuram Achutharaman, Cory Czarnik, Mehran Behdjat, Christopher Olsen
  • Patent number: 7972470
    Abstract: An asymmetrically grounded susceptor used in a plasma processing chamber for chemical vapor deposition onto large rectangular panels supported on and grounded by the susceptor. A plurality of grounding straps are connected between the periphery of the susceptor to the grounded vacuum chamber to shorten the grounding paths for RF electrons. Flexible straps allow the susceptor to vertically move. The straps provide a conductance to ground which is asymmetric around the periphery. The straps may be evenly spaced but have different thicknesses or different shapes or be removed from available grounding point and hence provide different RF conductances. The asymmetry is selected to improve the deposition uniformity and other qualities of the PECVD deposited film.
    Type: Grant
    Filed: July 10, 2007
    Date of Patent: July 5, 2011
    Assignee: Applied Materials, Inc.
    Inventors: Gaku Furuta, Soo Young Choi, Young-Jin Choi
  • Patent number: 7928381
    Abstract: A non-dispersive electrostatic energy analyzer for electrons and other charged particles having a generally coaxial structure of a sequentially arranged sections of an electrostatic lens to focus the beam through an iris and preferably including an ellipsoidally shaped input grid for collimating a wide acceptance beam from a charged-particle source, an electrostatic high-pass filter including a planar exit grid, and an electrostatic low-pass filter. The low-pass filter is configured to reflect low-energy particles back towards a charged particle detector located within the low-pass filter. Each section comprises multiple tubular or conical electrodes arranged about the central axis. The voltages on the lens are scanned to place a selected energy band of the accepted beam at a selected energy at the iris. Voltages on the high-pass and low-pass filters remain substantially fixed during the scan.
    Type: Grant
    Filed: May 19, 2006
    Date of Patent: April 19, 2011
    Assignee: Apparati, Inc.
    Inventors: Michael A. Kelly, Charles E. Bryson, III, Warren Wu
  • Patent number: 7913544
    Abstract: The present invention is directed to scanning probes in which a cantilever contacts a stylus via an integrated stylus base pad, and methods for fabricating such probes. The probe offer many advantages over other types of scanning probes with respect to eliminating the need for a soft, reflective coating in some applications and providing for the simple fabrication of sharp stylus tips, flexibility with respect to functionalizing the tip, and minimal thermal drift due to reduced bimorph effect. The advantage of these features facilitates the acquisition of high resolution images of samples in general, and particularly in liquids.
    Type: Grant
    Filed: November 15, 2007
    Date of Patent: March 29, 2011
    Assignee: Applied NanoStructures, Inc.
    Inventor: Ami Chand
  • Patent number: 7884445
    Abstract: An apparatus and method for holding a semiconductor device in a wafer. A bar is connected to the wafer. A first sidewall comprises a first end and a second, and is connected to the bar at its first end. A first tab comprises a first end and a second end, and is connected to the second end of the first sidewall at its first end and connected to the first side of the semiconductor device at its second end. The thickness of the first tab is less than the thickness of the bar and the thickness of the first sidewall.
    Type: Grant
    Filed: November 22, 2006
    Date of Patent: February 8, 2011
    Assignee: Applied Nanostructures, Inc.
    Inventor: Ami Chand
  • Patent number: 7854974
    Abstract: Tubular silicon members advantageously formed by extrusion from a silicon melt or by fixing together silicon staves in a barrel shape. A silicon-based wafer support tower is particularly useful for batch-mode thermal chemical vapor deposition and other high-temperature processes, especially reflow of silicate glass at above 1200° C. The surfaces of the silicon tower are bead blasted to introduce sub-surface damage, which produces pits and cracks in the surface, which anchor subsequently deposited layer of, for example, silicon nitride, thereby inhibiting peeling of the nitride film. Wafer support portions of the tower are preferably composed of virgin polysilicon. The invention can be applied to other silicon parts in a deposition or other substrate processing reactor, such as tubular sleeves and reactor walls. The tower parts are preferably pre-coated with silicon nitride or polysilicon prior to chemical vapor deposition of these materials, or with silicon nitride prior to reflow of silica.
    Type: Grant
    Filed: September 18, 2006
    Date of Patent: December 21, 2010
    Assignee: Integrated Materials, Inc.
    Inventors: Ranaan Y. Zehavi, James E. Boyle
  • Patent number: 7736437
    Abstract: A baffled liner cover supported at the top of a liner surrounding a wafer support tower for semiconductor thermal processing. The cover may present a continuous horizontal surface for preventing particles from falling within the liner but present horizontal extending gas passageways in a baffle assembly to allow the flow of processing gas through the cover. In one embodiment, the baffle assembly includes a cup-shaped member disposed in a central aperture of a top plate having an open top, a continuous bottom, horizontal holes through the sides, and a flange around sides defining a convolute annular passage. Alternatively, the planar top plate may included slanted holes therethrough or vertical holes occupying a small fraction of the surface area. The liner and cover may be composed of quartz, silicon carbide, or preferably silicon.
    Type: Grant
    Filed: October 30, 2006
    Date of Patent: June 15, 2010
    Assignee: Integrated Materials, Incorporated
    Inventors: Tom L. Cadwell, Michael Sklyar