Abstract: The reactive ion etching resistance of radiation sensitive resist composition is enhanced by adding at least one organometallic compound to a radiation sensitive polymer. The resist composition can be patterned and used as mask for patterning an underlying layer.
Type:
Grant
Filed:
July 12, 1999
Date of Patent:
August 20, 2002
Assignee:
International Business Machines Corporation
Inventors:
Marie Angelopoulos, Ari Aviram, Edward D. Babich, Timothy Allan Brunner, Thomas Benjamin Faure, C. Richard Guarnieri, Ranee W. Kwong, Karen E. Petrillo
Abstract: An organic-inorganic perovskite having alternating layers of an inorganic anion layer and an organic cation layer is provided. More particularly, the inorganic anion layer of the organic-inorganic perovskite has a trivalent or higher valent metal halide framework and the organic cation layer has a plurality of organic cations capable of templating the metal-deficient inorganic anion layers within the perovskite structure. Methods of preparing the organic-inorganic perovskite according to the present invention are also provided.
Type:
Grant
Filed:
February 7, 2000
Date of Patent:
August 6, 2002
Assignee:
International Business Machines Corporaiton
Abstract: Disclosed is vapor deposited BARC and method of preparing tunable and removable antireflective coatings based on amorphous carbon films. These films can be hydrogenated, fluorinated, nitrogenated carbon films. Such films have an index of refraction and an extinction coefficient tunable from about 1.4 to about 2.1 and from about 0.1 to about 0.6, respectively, at UV and DUV wavelengths, in particular 365, 248 and 193 nm. Moreover, the films produced by the present invention can be deposited over device topography with high conformality, and they are etchable by oxygen and/or a fluoride ion etch process. Because of their unique properties, these films can be used to form a tunable and removable antireflective coating at UV and DUV wavelengths to produce near zero reflectance at the resist/BARC coating interface. This BARC greatly improves performance of semiconductor chips.
Type:
Grant
Filed:
June 4, 1997
Date of Patent:
August 6, 2002
Assignee:
International Business Machines Corporation
Inventors:
Katherina E. Babich, Alessandro Cesare Callegari, Julien Fontaine, Alfred Grill, Christopher V. Jahnes, Vishnubhai Vitthalbhai Patel
Abstract: Integrated circuit fabrication technique for constructing novel MEMS devices, specifically band-pass filter resonators, in a manner compatible with current integrated circuit processing, and completely encapsulated to optimize performance and eliminate environmental corrosion. The final devices may be constructed of single-crystal silicon, eliminating the mechanical problems associated with using polycrystalline or amorphous materials. However, other materials may be used for the resonator. The final MEMS device lies below the substrate surface, enabling further processing of the integrated circuit, without protruding structures. The MEMS device is about the size of a SRAM cell, and may be easily incorporated into existing integrated circuit chips. The natural frequency of the device may be altered with post-processing or electronically controlled using voltages and currents compatible with integrated circuits.
Type:
Grant
Filed:
January 30, 2001
Date of Patent:
August 6, 2002
Assignee:
International Business Machines Corporation
Abstract: A method for fabricating an object to attenuate thermal sensation when handling the object at non-body temperature, and an object fabricated in accord with the method. There is first provided a substrate which has a first surface subject to handling. There is then formed upon the first surface of the substrate a coating. The coating has an optimal density, an optimal thermal conductivity and an optimal thickness such that when the substrate having the coating formed thereupon is equilibrated at a non-body temperature differing from a body temperature and the coating is subsequently contacted with a body at the body temperature during handling, the temperature of the surface of the coating at a contact point of the body with the coating changes precipitously to a temperature near the body temperature and subsequently returns towards the non-body temperature at a rate which permits handling of the coating at the location of the first surface of the substrate by the body with attenuated thermal sensation.
Type:
Grant
Filed:
November 7, 1997
Date of Patent:
August 6, 2002
Assignee:
International Business Machines Corporation
Inventors:
David Andrew Lewis, Lawrence Shungwei Mok
Abstract: Information presentation system comprises a computer device having a display terminal for providing a graphical user interface (GUI), capable of generating a cluster of items comprising graphical or textual elements for display thereof according to a fractal appearance. Each item in a cluster represents information having a degree of relatedness with information represented by other items in a cluster. A control mechanism is provided for controlling the spatial extent, nesting and arrangement of items within a cluster according to a specified criteria, which spatial extent and arrangement is controlled to provide optimal display and conserve screen display space on the display terminal. Users may manually enter a criteria for organizing and adjusting the spatial extent of a cluster in order to provide continuous display space on the computer display terminal.
Type:
Grant
Filed:
April 23, 1999
Date of Patent:
July 30, 2002
Assignee:
Internation Business Machines Corporation
Inventors:
Dimitri Kanevsky, Clifford A. Pickover, Alexander Zlatsin
Abstract: A process of removing residual slurry resulting from chemical mechanical polishing of a workpiece in which the workpiece is contacted with a composition of a supercritical fluid, said supercritical fluid including supercritical, carbon dioxide and a co-solvent, and a surfactant.
Type:
Grant
Filed:
January 5, 2001
Date of Patent:
July 30, 2002
Assignee:
International Business Machines Corporation
Inventors:
John Michael Cotte, Donald J. Delehanty, Kenneth John McCullough, Wayne Martin Moreau, John P. Simons, Charles J. Taft, Richard P. Volant
Abstract: There is provided a method for applying solder to an element on a surface of a substrate. The method comprises the steps of (a) placing a mold over the surface, where the mold includes a conduit that contains the solder, and (b) heating the solder to a molten state so that the solder flows from the conduit onto the element. The conduit enjoys two degrees of horizontal freedom with respect to the surface such that the conduit becomes substantially aligned with the element when the solder is in the molten state. There is also provided a system for applying solder to an element on a surface of a substrate.
Type:
Grant
Filed:
July 25, 2001
Date of Patent:
July 30, 2002
Assignee:
International Business Machines Corporation
Abstract: Reflective spatial light modulator array is described incorporating liquid crystal devices, mirrors, a semiconductor substrate, electrical circuits, and a reflector/absorber layer for blocking light. The invention overcomes the problem of shielding light from semiconductor devices, high optical throughput and contrast, pixel storage capacitance to hold the voltage across the liquid crystal device and precise control of the liquid crystal device thickness without spacers obscuring the mirrors.
Type:
Grant
Filed:
July 29, 1998
Date of Patent:
July 23, 2002
Assignee:
International Business Machines Corporation
Inventors:
Evan George Colgan, James McKell Edwin Harper, Frank Benjamin Kaufman, Margaret Paggi Manny, Robert Lee Melcher, James Louis Speidell
Abstract: A method for passivating copper, aluminum, or other refractory metal films using ammonia-free silicon nitride and structures produced by the method. A thin film transistor for use in a liquid crystal display and a method of constructing the same, wherein the transistor has a gate, a source and a drain, and a gate insulator between the gate and an active silicon layer. The improvement is a layer of the ammonia-free silicon nitride deposited between the copper,aluminum, or other refractory metal gate and the gate insulator. Further,. the gate is copper, aluminum, or another refractory metal and is deposited directly on the substrate. The layer of ammonia-free silicon nitride is also deposited on portions of the substrate adjacent the gate and the gate line extending therefrom. The layer is made in a plasma-enhanced chemical vapor deposition process wherein the gas mixture comprises one part silane to 135 parts nitrogen to 100 parts helium and 100 parts hydrogen.
Type:
Grant
Filed:
September 8, 2000
Date of Patent:
July 16, 2002
Assignee:
International Business Machines Corporation
Inventors:
John Batey, Peter M. Fryer, Jun Hyung Souk
Abstract: The present invention relates to an electroluminescent device comprising an anode, a cathode and an emitting layer. The emitting layer comprises a self-assembling organic-inorganic hybrid material containing an organic component and an inorganic component. The organic component comprises a dye that fluoresces in the visible range. In addition, an optically inert component may replace a portion of the organic dye component to increase fluorescence.
Type:
Grant
Filed:
July 8, 1999
Date of Patent:
July 16, 2002
Assignee:
International Business Machines Corporation
Inventors:
Konstantinos Chondroudis, David Brian Mitzi
Abstract: A method for reducing the computation time and improving the productivity in designing high-performance microprocessor chips that have no failures—due to crosstalk noise. The technique allows a very fast calculation of tables of frequency-dependent circuit parameters needed for accurate crosstalk prediction on lossy on-chip interconnections. These tables of parameters are the basis for CAD tools that perform crosstalk checking on >10K critical nets on typical microprocessor chips. A fast table generation allows for rapid incorporation of design or processing changes and transition to more advanced technologies.
Type:
Grant
Filed:
February 11, 1999
Date of Patent:
July 9, 2002
Assignee:
International Business Machines Corporation
Inventors:
Allan H. Dansky, Alina Deutsch, Gerard V. Kopcsay, Phillip J. Restle, Howard H. Smith
Abstract: A stand for a portable personal computer including a base including a front side, a back side, a right side, a left side, and a bottom surface. The stand includes at least one stand member interconnectable with the base. The at least one stand member is positionable in a deployed position and a stowed position. In the deployed position the at least one stand member supports at least one portion of the bottom surface of the base at an elevated level with respect to a surface that the portable personal computer is supported by. The at least one stand member engages a surface of the base in the stowed position.
Type:
Grant
Filed:
April 5, 2000
Date of Patent:
July 2, 2002
Assignee:
International Business Machines Corporation
Inventors:
Thomas Mario Cipolla, George Liang-Tai Chiu
Abstract: In accordance with the first object of this invention soluble derivatives of sexithiophene in which terminal carbons are substituted with various polar groups such as phosphonic esters, phosphonic acids, phosphonates, carboxylic acids, carboxylates, amines, amides, carbamates, and alcohols, each separated from the terminal thiophene rings by one or more methylene groups, are synthesized. An TFT device in accordance with the second objective of this invention employs films of the above sexithiophene derivatives as the semiconducting component. These organic semiconductors are dissolved in common organic solvents and applied to the surface of a substrate using inexpensive, low-temperature solution-based processing such as spin-coating, dip-coating, drop-casting, or microcontact printing.
Type:
Grant
Filed:
July 12, 2000
Date of Patent:
July 2, 2002
Assignee:
International Business Machines Corporation
Inventors:
Ali Afzali-Ardakani, Tricia Lynn Breen, Cherie Renee Kagan
Abstract: An interlayer dielectric for preventing Cu ion migration in semiconductor structure containing a Cu region is provided. The interlayer dielectric of the present invention comprises a dielectric material that has a dielectric constant of 3.0 or less and an additive which is highly-capable of binding Cu ions, yet is soluble in the dielectric material. The presence of the additive in the low k dielectric allows for the elimination of conventional inorganic barrier materials such as SiO2 or Si3N4.
Type:
Grant
Filed:
August 10, 1999
Date of Patent:
July 2, 2002
Assignee:
International Business Machines Corporation
Inventors:
Stephan Alan Cohen, Claudius Feger, Jeffrey Curtis Hedrick, Jane Margaret Shaw
Abstract: A method for fabricating an object to attenuate thermal sensation when handling the object at non-body temperature, and an object fabricated in accord with the method. There is first provided a substrate which has a first surface subject to handling. There is then formed upon the first surface of the substrate a coating. The coating has an optimal density, an optimal thermal conductivity and an optimal thickness such that when the substrate having the coating formed thereupon is equilibrated at a non-body temperature differing from a body temperature and the coating is subsequently contacted with a body at the body temperature during handling, the temperature of the surface of the coating at a contact point of the body with the coating changes precipitously to a temperature near the body temperature and subsequently returns towards the non-body temperature at a rate which permits handling of the coating at the location of the first surface of the substrate by the body with attenuated thermal sensation.
Type:
Grant
Filed:
February 8, 2001
Date of Patent:
July 2, 2002
Assignee:
International Business Machines Corporation
Inventors:
David Andrew Lewis, Lawrence Shungwei Mok
Abstract: A structure is described having an optical element having a cylindrical shape adapted for rolling in contact with a surface of a material, a source of electromagnetic radiation coupled into one portion of the cylinder to interact with the surface, and exiting at another portion of the optical element for detection. An apparatus is described for applying electromagnetic radiation to a surface having a cylindrical roller formed from a material transmissive to the electromagnetic radiation; the cylindrical roller adapted for rolling on the surface; and the cylindrical roller adapted for receiving the electromagnetic radiation for reflecting the electromagnetic radiation therein and for directing the electromagnetic radiation towards a detector for detection. The structure and apparatus is directed for use with in-line or real-time process monitoring technology.
Type:
Grant
Filed:
October 30, 1997
Date of Patent:
June 11, 2002
Assignee:
International Business Machines Corporation
Abstract: A flex or TAB product suitable for chip carrier applications wherein the flex reliability problems caused by copper dendrite growth and lead bending during power and thermal cycling are reduced by application of special coatings to lead areas of the flex tape.
Type:
Grant
Filed:
June 24, 1996
Date of Patent:
June 11, 2002
Assignee:
International Business Machines Corporation
Inventors:
Claudius Feger, Teresita Ordonez Graham, Kurt Rudolph Grebe, Alphonso Philip Lanzetta, John Joseph Liutkus, Linda Carolyn Matthew, Michael Jon Palmer, Nelson Russell Tanner, Ho-Ming Tong, Charles Haile Wilson, Helen Li Yeh
Abstract: A process of drying a semiconductor wafer which includes at least one microelectric structure disposed thereon which includes contacting a water-containing thin film-covered semiconductor wafer with a composition which includes liquid or supercritical carbon dioxide and a surfactant.
Type:
Grant
Filed:
June 27, 2001
Date of Patent:
June 4, 2002
Assignee:
International Business Machines Corporation
Inventors:
John Michael Cotte, Dario L. Goldfarb, Kenneth John McCullough, Wayne Martin Moreau, Keith R. Pope, John P. Simons, Charles J. Taft
Abstract: The invention relates to a process for forming an integrated circuit device comprising (i) a substrate; (ii) metallic circuit lines positioned on the substrate and (iii) a dielectric material positioned on the circuit lines. The dielectric material comprises porous organic polysilica.
Type:
Grant
Filed:
January 27, 1999
Date of Patent:
June 4, 2002
Assignee:
International Business Machines Corporation
Inventors:
Craig Jon Hawker, James Lupton Hedrick, Andreas Heise, David Mecerreyes, Robert Dennis Miller, Olof Mikael Trollsås