Abstract: In a method for programming an antifuse element which includes a pair of conductive electrodes separated by an insulating layer a predetermined number of voltage pulses are first applied across the electrodes of the antifuse and the current drawn by the antifuse is simultaneously measured. When the measured current indicates that the antifuse dielectric has ruptured, a second step includes continuing to apply pulses and calculating the difference in current sensed between successive measurements. In a third step, a predetermined number of additional pulses are applied after the difference in current between successive pulses falls below a predetermined threshold. In a fourth step, an additional predetermined number of pulses are applied and the current drawn at the end of the sequence is measured. If it is greater than the current drawn at the beginning of the sequence by a predetermined threshold, the third step is repeated. If not, the programming process ends.