Abstract: A method of reducing sound-induced vibrations in pellicles used in lithographic production of microelectronic features comprises providing a pellicle for protecting a photomask, monitoring background sound in the vicinity, or vibration, of the pellicle, providing opposing sound waves to the background sound, and causing the opposing sound waves to strike the pellicle to substantially cancel vibrations due to the background sound or vibration. When the background sound strikes the pellicle on one surface of the pellicle, the opposing sound waves may strike the pellicle on the opposing surface of the pellicle, and may be provided with substantially the same frequency and amplitude in the same phase to the background sound. Alternatively, opposing sound waves may strike the pellicle on the same surface of the pellicle as the background sound waves, may be provided with substantially the same frequency and amplitude in opposing phase to the background sound.

Abstract: A computer memory structure for parallel computing has a first level of hierarchy comprising a plane. The plane contains a thread which represents an independent flow of control managed by a program structure, a heap portion for data structure, a stack portion for function arguments, and local variables and global data accessible by any part of the program structure. The memory structure further has a second level of hierarchy comprising a space. The space contains two or more of the planes, with the planes in the space containing the program structure. The space further contains common data accessible by the program structure between each of the planes. A third level of hierarchy in the memory structure comprises two or more of the spaces. The spaces contain the same or different program structures, and common data accessible by the program structure between each of the spaces.

Abstract: A process for controlling focus parameters in a lithographic process used in manufacture of microelectronic circuits. The process comprises initially providing a lithographic mask having a target mask portion containing a measurable dimension sensitive to defocus, projecting an energy beam through the target mask portion onto a first location of a substrate at a first focus setting, and lithographically forming a first target on the substrate corresponding to the first focus setting, the first target containing a measurable dimension sensitive to defocus. The process then includes projecting an energy beam through the target mask portion onto a second location of the substrate at a second focus setting, lithographically forming a second target on the substrate corresponding to the second focus setting, the second target containing a measurable dimension sensitive to defocus, and measuring the defocus sensitive dimension for each of the first and second targets on the substrate.

Abstract: A device for depositing and retrieving coins comprises a generally conical-shaped, upstanding body having an exterior tapering to a larger diameter from top to bottom and a header portion at the lop of the body for depositing the objects. A downwardly and outwardly spiraling ramp, below the header portion, extends at least once around the exterior of the body. The ramp cooperates with the exterior of the body on the inside and a lip on the outside to guide the objects as they roll downwardly by gravity. The ramp may include an upwardly extending portion at the lower end of the generally conical-shaped body for launching the objects through the air into the open tray, and/or a staircase portion on the spiraling ramp. A tray adjacent the bottom of the body receives the coins from the ramp.

Abstract: A method of processing greensheets for use as microelectronic substrates comprises providing a greensheet having a width, a length and a thickness, bonding to the greensheet, within the greensheet width and length, a frame adapted to constrain movement of the greensheet within the frame, processing the greensheet and bonded frame, and removing the frame from the processed greensheet. The processing of the greensheet and bonded frame may include punching vias in the greensheet, filling the vias in the greensheet with conductive material, patterning the greensheet by applying conductive paste to the vias and greensheet surface, stacking the patterned greensheet and bonded frame with at least one other patterned greensheet and bonded frame, and laminating the greensheets. The frame is preferably removed from the processed greensheet after laminating the greensheets, and before the laminated greensheets are subsequently sintered.

Abstract: A method of determining redistribution of objects among three or more containers in a network comprises determining an initial set of objects in each of the containers, identifying neighboring pairs of containers, determining a cost of moving objects between each of the neighboring pairs of containers, determining a desired change in occupancy of each container, and subsequently determining a desired total size of a set of objects to be moved between each identified neighboring pair of containers by solving a set of simultaneous linear equations. The objects are redistributed among the neighboring pairs of containers in accordance with the solution. The objects may be clock sinks and the containers clock nets on a chip, or the objects may be circuits to be placed in an integrated circuit and the containers regions of the chip, or the objects may be data files and the containers individual network server computers.

Abstract: The present invention prevents unauthorized access and modifications to programs and non-executable files, particularly a dialer program, stored on a personal computer system (PC) by providing a protected storage area on a hard drive of the PC wherein access to the protected storage area is controlled by the owner/user of the PC. Attempts to add, remove, or modify any of the programs and non-executable files in the protected storage area will result in an interrupt prompting the user to supply a valid password or other acknowledgement. A preferred embodiment includes a protected memory area as a part of the computer's internal random access memory (RAM) such that upon initialization of a program, the program and non-executable files are copied into the protected memory area from the protected storage area. The protected memory area may also be password protected to provide additional safeguards against unauthorized access.

Abstract: A system, operable on a plurality of different computer operating systems, for providing web browser access to the operating system desktop having icons displayed on a screen thereof, wherein the desktop icons provide links to executable programs of and information displayable by the operating system. The process comprises first determining, for each icon to be accessed, an executable program linked to the icon, a data file used by the program, and the location of the program and data file. Then the process comprises constructing a web page of the accessed icons and linked programs and data file by assigning a HTML tag to the program and data file of each icon. The HTML tag may include an optional parameter for use by the executable program. The web page is viewable on a web browser such that the HTML tags are displayed on the web page and executable by the web browser to execute the programs on the operating system.

Abstract: A method of etching a deep, high aspect ratio opening in a silicon substrate includes etching the substrate with a first plasma formed using a first gaseous mixture including a bromine containing gas, an oxygen containing gas and a first fluorine containing gas. The etching process with the first gaseous mixture produces a sidewall passivating deposit, which builds up near the opening entrance. To reduce this buildup, and to increase the average etching rate, the sidewall passivating deposit is periodically thinned by forming a second plasma using a mixture containing silane and a second fluorine containing gas. The substrate remains in the same plasma reactor chamber during the entire process and the plasma is continuously maintained during the thinning step. Holes of a depth greater than 40 times the width may be produced using repeated cycles of etching and thinning.

Abstract: A process and system for updating desired inter- or intra-net addresses at a client computer. There is provided a plurality of client computers, a database accessible by each of the client computers, a network server through which the client computers may access files on a network, and a database accessible by the network server. The client computer database includes a list of addresses for accessing desired files on the network. The network server database includes a list of addresses for the desired files on the network and addresses of the client computers that have accessed the desired files on the network. The process comprises updating in the network server database at least one of the addresses for the desired files on the network and transferring from the network server database to the database of the client computers having addresses in the network server database the updated at least one of the addresses for the desired files on the network.

Abstract: A heat exchanger and method of making a heat exchanger which includes providing a header having openings adapted to receive a plurality of tubes. The tubes are inserted into the header openings, then, substantially uncured fluid sealing material is applied to at least the inner surfaces of the header openings. The inner surfaces of the header openings and the outer surfaces of the tubes are connected by the sealing material. The method further includes curing the sealing material after the tubes are inserted into the header openings. The sealing material thus provides a flexible, bonded, liquid tight, tube-to-header joint.

Abstract: A beverage infusion device comprises a handle and a support member extending from the handle having a pair of flat legs spaced apart by a predetermined width. Attached to each side of the flat legs is a flexible porous member, for example, a pouch of filter material having an unfolded width greater than the width of the support legs. Each porous member contains an infusible beverage preparation and is supported by the support legs in a folded position wherein, upon immersion of the porous members in a liquid, the porous members expand and become spaced to facilitate infusion of a beverage preparation therein into the liquid. In the folded position, the porous members may have a plurality of folds across its width, for example, folds adjacent the first and second ends and an unfolded portion therebetween. The first and second ends of the porous member are preferably heat bonded to the support legs.

Abstract: A system and method of determining alignment error between lithographically produced integrated circuit fields on the same and different lithographic levels comprises creating a first and second level field layers each having a plurality of integrated circuit fields and associated set of metrology structures adjacent and outside each integrated circuit field. In each level, a metrology structure associated with one integrated circuit field is located to nest with another metrology structure associated with an adjacent circuit field when both are properly aligned on the same lithographic level. Overlay metrology structures are provided on one level to nest with metrology structures of another level when the integrated circuit fields are properly aligned on different lithographic levels.

Abstract: A method of playing a dice game with a plurality of players comprises selecting a first shooter, and designating players into first and second groups. Players in the first group then bet money, in sequence, in favor of the first shooter winning, based on the dice throw, and players in the second group then bet, in sequence, against the first shooter winning. The first shooter rolls the dice, and the first shooter wins or loses based on a designated set of winning and a designated set of losing numbers. If the first shooter wins, the losing second group players' money is dispersed to the first player group in the sequence and based on the amount bet by each of the players in the first player group. If the first shooter loses, the losing first group players' money is dispersed to the second player group in a similar sequence.

Abstract: A method of processing greensheets for use as microelectronic substrates comprises providing a greensheet having a width, a length and a thickness, bonding to the greensheet, within the greensheet width and length, a frame adapted to constrain movement of the greensheet within the frame, processing the greensheet and bonded frame, and removing the frame from the processed greensheet. The processing of the greensheet and bonded frame may include punching vias in the greensheet, filling the vias in the greensheet with conductive material, patterning the greensheet by applying conductive paste to the vias and greensheet surface, stacking the patterned greensheet and bonded frame with at least one other patterned greensheet and bonded frame, and laminating the greensheets. The frame is preferably removed from the processed greensheet after laminating the greensheets, and before the laminated greensheets are subsequently sintered.

Abstract: A vacuum valve assembly for use in a vacuum processing chamber includes a seat defining an opening in the vacuum valve, with the seat having a sealing face adjacent the opening and normal to the direction of the opening; and a gate having a sealing face adapted to mate with the seat sealing face, the gate being movable toward and away from the seat sealing face to seal and open the vacuum valve opening. A continuous elastomeric seal extends around the vacuum valve opening between the gate sealing face and the seat sealing face of sufficient size such that when the gate is positioned to seal the vacuum valve opening, there exists a gap between the gate sealing face and the seat sealing face. A purge gas port system, disposed in the seat or in the gate, has an inlet for a purge gas, an essentially continuous outlet extending around the vacuum valve opening and adjacent the elastomeric seal and gap, and a manifold system connecting the inlet and the outlet.

Abstract: A receptor positioning device for taking dental bitewing radiographs of teeth inside a patient's mouth includes a rigid, fixed structure having a collimation plate defining a substantially rectangular opening. A receptor holding member is adapted to receive a receptor, and an elongated arm is adapted to receive and couple to the collimation plate. The elongated arm extends towards and couples with a rear portion of the receptor holding member, opposite the collimation plate, such that an unobstructed path is defined between the substantially rectangular opening of the collimation plate and the receptor. A biting surface is fixedly attached to a distal end of the elongated arm and adjacent to the receptor holding member such that the receptor is positioned behind the teeth on which the radiographs are being taken while the biting surface is gripped by the teeth on the opposite side of the patient's mouth.

Abstract: A method for employing a plurality of reusable reticles in an integrated circuit manufacturing process employing lithographic exposure of a semiconductor wafer. Initially there is provided a matrix of a plurality of reticles, each matrix comprising a plurality of tuples of reticles, each reticle tuple comprising one or more reticles. The method then includes defining at least one set of valid groups of reticles in the matrix for use in a desired lithographic exposure process, defining a set of conditions for determining availability of all reticles in the valid groups in the lithographic exposure process, and comparing the availability conditions to the reticles in the set of valid groups and eliminating valid groups which do not meet the availability conditions, leaving non-eliminated valid groups.

Abstract: A pre-charge circuit for a memory device having a sense amplifier shared between right and left banks of memory cells and a method of pre-charging the shared sense amplifier. The circuit is operated according to the method of the invention such that the sense amplifier is always pre-charged from the side that was previously active. The circuit includes right and left bank isolation transistor pairs connected between the shared sense amplifiers and the right and left banks. The isolation transistor pairs are controlled by a flip flop having a left bank state and a right bank state and complementary left and right outputs that turn off the left isolation transistor pair and turn on the right pair during row operations to the right and vice-versa.