Abstract: There is provided a MISFET which suppresses a short-channel effect in a deep submicron region and has a low parasitic resistance, a low parasitic capacitance, and a small drain junction leakage current. A shallow concave is formed in a channel forming portion and an extension region forming portion of a MISFET, shallow ion implantation for forming an extension region is performed to a bottom surface of the shallow concave. Deep ion implantation for forming a source/drain region is performed to a silicon substrate adjacent to the concave, and the position of a peak concentration of the shallow ion implantation is caused to coincide with the position of a peak concentration of the deep ion implantation, so that a MISFET which suppresses a short-channel effect and has a low source/drain parasitic resistance, a low source/drain parasitic capacitance, and a small drain junction leakage current generated by SALICIDE steps can be provided.
Abstract: Embodiments of the invention provide a mechanism for using name spaces in graphical user interface (GUI) page definitions. A name space designation is assigned to each control mechanism that generates definitional statements for the GUI. In one embodiment, a page control is assigned a name space designation and assigns a name space designation for each of the controls that are used to generate the page. The name space designation can be used to uniquely identify a control. The name attributes including the name space designation may be sent to a client's browser where it may be incorporated by the browser into a name-value pair when transferring data back to the control.
Abstract: An alignment system for a lithographic apparatus includes a detection system arranged in a path of at least a portion of an alignment radiation. The alignment system also includes a position determining unit in communication with the detection system. The position determining unit is adapted to measure a position of at least one alignment mark on a substrate. The substrate is overlaid with a layer of deposited material. A calculating unit is coupled to the position determining unit. The calculating unit calculates a corrected position of the alignment mark on the basis of the position of the at least one alignment mark being measured and a model of a process apparatus involved in a deposition of the layer of deposited material. The model taking into account an amount of deposition of the layer of deposited material.
Type:
Grant
Filed:
April 13, 2004
Date of Patent:
April 12, 2005
Assignee:
ASML Netherlands B.V.
Inventors:
Everhardus Cornelis Mos, Maurits Van Der Schaar
Abstract: The invention relates to a noise suppressor unit (1) for installing and mounting a common mode choke for a noise suppressor onto a circuit board (3). The noise suppressor unit (1) comprises a circuit board holder (7), onto which the toroid (4) is positioned, the toroid being coiled with at least two coils (5), the circuit board holder (7) comprising connecting plates (8), wherein one coil end (6) at the most is or more coil ends (6) are connected to each connecting plate (8) and wherein the connecting plates (8) are intended to be surface mounted to mounting surface areas in the circuit board (3), and wherein the connecting plates (8) are electrically insulated from each other, and lifting means (9) for an assembly head or the like of an automatic assembly machine for placing the noise suppressor unit (1) onto the circuit board (3) by the automatic assembly machine.
Abstract: A lithographic projection apparatus includes a conduit that supplies utilities to a movable component in a vacuum chamber such as an object table, associated motor or sensor. The conduit comprises flexible metal bellows preventing out-gassing of the conduit due to the vacuum in the vacuum chamber while allowing movement of the movable component in at least a first degree of freedom.
Type:
Grant
Filed:
November 27, 2002
Date of Patent:
April 12, 2005
Assignee:
ASML Netherlands B.V.
Inventors:
Hernes Jacobs, Piet Vosters, Sven Antoin Johan Hol, Harmen Klaas Van Der Schoot, Robert Johannes Petrus Van Diesen, David William Callan
Abstract: A method of limiting the quality of service of data transmission in a wireless telecommunications system, in which the quality of service of data transmission is defined by means of quality of service parameters. Subscriber-specific maximum values are defined for the quality of service parameters and stored in a database comprising subscriber data. When the terminal requests connection establishment defined with quality of service parameters, the subscriber-specific maximum values are checked in the database and they are compared with the quality of service parameters requested by the terminal. Depending on whether the quality of service parameters requested by the terminal are within the limits defined by the maximum values of the parameters or whether at least one quality of service parameter requested by the terminal exceeds the maximum value defined for said parameter, either a connection is established or connection establishment is rejected.
Abstract: The present application discloses a storage case/hanger combination that enables a storage case for storing relatively thin articles to be hung for display while still enabling the case to be opened for permitting users to inspect the case. The combination comprises a storage case including a pair of cover portions interconnected for movement relative to one another between a closed position closing an interior space of the case and an open position opening an interior space of the case. A plurality of pages are mounted within the interior space of the case. Each of these pages includes at least one pocket for receiving a relatively thin article therein. The pages may be configured to receive various thin articles, including but not limited to, CDs, DVDs, floppy disks, collectible cards (e.g., sports cards), stamps, etc. The combination also includes a hanger for hanging the case.
Abstract: A wireless telecommunications system comprises a radio network layer for carrying mobile-specific signaling, and a transport layer for establishing user channels between system nodes over a transport network. The transport network is visible to the radio network layer only via a primitive interface through which it can request transport services. The invisibility of the transport network to the radio network layer makes the radio network layer independent of the underlying transport network and enables the use of different transport network technologies. The radio network layer signaling procedures and connections are mapped with the underlying transport layer signaling procedures and connections by using binding information at one end of the connection leg, which is exchanged between the network and transport layers through a primitive interface, and used to “identify” the radio network layer and the transport layer connection setup signaling carried out between the nodes.
Abstract: A cast wheel rim including a light-metal body which at least partially encompasses at least one shaped part forming a cast-in core and having a mean specific weight smaller than that of the light metal used for the body, wherein the shaped part is comprised of a pressed body made of a porous silicate material.
Abstract: An analytical database system provides access to all of the data collected by an entity in interactive time. The analytical database system transforms relational database data. The relational database is denormalized and inverted such that the data fields of tables in the relational database are stored in separate files that contain a row number field and a single data field. At least one of the files, that contains repeating data values that are stored in successive rows, is compressed. The files include files with partition values and files with analytical data. Processing of the files is distributed by creating sub-rowsets of the files and by assigning the sub-rowsets to servers. The partial result sets are merged into a complete result set.
Abstract: A method of scheduling one or more maintenance actions in at least a part of a substrate processing system is provided. According to an embodiment, the method includes determining a gap in the flow of substrates in a part of the substrate processing system and scheduling one or more maintenance actions to be performed in another part of the substrate processing during a period associated with the gap. An increase of productivity of substrate processing can be achieved through a reduction in downtime in a substrate processing system by appropriate scheduling of maintenance actions.
Abstract: A system to construct a manifold from an original material. A first progressive die implements a first set of stamping stages on the original material to generate a shaped material. A second die implements at least one of a second set of stamping stages on the shaped material to generate a finished manifold. The second die is physically separate from the first die.
Abstract: An electro-thermosensitive transfer printer is provided with a gravure endless ribbon including a conductive thin film belt having a large number of gravure cells on its right side and an electric resistor layer laminated on its back side; and a resistive ribbon thermal print head including an electric insulating plate body coming into contact with the surface of the electric resistor layer, a heat-radiating plate embedded in the plate body, sliding along the surface of the electric resistor layer, and a large number of signal electrodes embedded in the plate body, sliding along the surface of the electric resistor layer. The signal electrodes are arrayed so that each of them is opposite to each of the gravure cells.
Abstract: A positioning device comprising a first part (1) which is movable relatively to a second part (2) in an X-direction and a Y-direction, said first part (1) comprising a carrier (5) on which a system of magnets (3) is arranged according to a pattern of rows (7) and columns (8) extending parallel to the X-direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row (7) and each column (8) rotates 90° counter-clockwise. The second part (2) comprises an electric coil system (4) with two types of electric coils (C1, C2), one type having an angular offset of +45°, and the other type having an offset of ?45° with respect to the X-direction. The magnet configuration causes a very strong magnetic field.
Abstract: A high-performance and low-cost image-forming optical system with a reduced number of constituent optical elements that is made compact and thin by folding an optical path using reflecting surfaces arranged to minimize the number of reflections. The image-forming optical system has a first prism and a second prism between a stop and an image plane. The first prism includes an entrance surface, a first reflecting surface, a second reflecting surface, and an exit surface. The first reflecting surface and the exit surface are the identical surface. The second prism includes an entrance surface, a first reflecting surface, a second reflecting surface, and an exit surface. In the second prism, the second reflecting surface and the entrance surface are the identical surface.
Abstract: The use of forms of hyaluronic acid having a molecular weight less than about 750,000 daltons selected from the group consisting of hyaluronic acid and pharmaceutically acceptable salts thereof is provided for the same purposes known for using recombinant GM-CSF or G-CSF.
Type:
Grant
Filed:
March 12, 1997
Date of Patent:
April 5, 2005
Assignee:
The Governors of the University of Alberta
Abstract: MEMS Device Having Contact and Standoff Bumps and Related Methods. According to one embodiment, a movable MEMS component suspended over a substrate is provided. The component can include a structural layer having a movable electrode separated from a substrate by a gap. The component can also include at least one standoff bump attached to the structural layer and extending into the gap for preventing contact of the movable electrode with conductive material when the component moves.
Abstract: A substrate provided with an alignment mark in a substantially transmissive process layer overlying the substrate, said mark comprising at least one relatively high reflectance area(s) for reflecting radiation of an alignment beam of radiation, and relatively low reflectance areas for reflecting less radiation of the alignment beam, wherein the high reflectance area(s) is (are) segmented in first and second directions both directions being substantially perpendicular with respect to each other so that the high reflectance areas comprise predominantly rectangular segments.
Abstract: In a lithographic apparatus having a movable object table in vacuum, an interferometer-based alignment system for detecting the position of that object table has a passive part in vacuum and an active part outside the vacuum chamber. The active part contains the beam generator, e.g. a laser, and the electronic detectors whilst the passive part contains the illumination and imaging optics. The two parts are coupled by optical fibers. The interferometer may make use of different diffraction orders from measurement and reference gratings and the order separation may be included in the passive part.
Abstract: A detector detects, in read data, a servo address mark of a type indicated by a register. Every time a SAM is detected during a self servo process, a CPU carries out tracking control in accordance with corresponding servo data. The CPU causes a head to write a corresponding type of additional servo data item in a disk at a position offset from the position of servo data containing the detected SAM, by a predetermined distance in a circumferential direction of the disk. Every time sets of servo data, each consisting of various types of data items, are written in the disk, the head is moved by a predetermined pitch in a radial direction of the disk.