Patents Assigned to ASM Technology Singapore PTE Ltd.
  • Patent number: 10338006
    Abstract: A method for automated alignment of electronic components with respect to one or more inspection devices for inspecting the electronic components, each electronic component having a plurality of side surfaces. The method comprises: positioning each electronic component relative to an imaging device; determining, by the imaging device, an angular offset and a linear offset between each side surface of the electronic component and the one or more inspection devices; positioning each electronic component relative to the inspection devices; effecting alignment between each side surface and the one or more inspection devices in accordance with the respective angular and linear offsets; and inspecting each side surface after effecting alignment between the side surface and the inspection devices.
    Type: Grant
    Filed: June 15, 2017
    Date of Patent: July 2, 2019
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Chi Wah Cheng, Kai Fung Lau, Hoi Shuen Tang
  • Patent number: 10324126
    Abstract: A method for aligning probe pins with respect to positions of electronic devices comprises conducting contact stamping on a first electronic device with the probe pins to form first probe marks on lead pads of the first electronic device, capturing an image of the first electronic device, determining positions of the first probe marks on the first electronic device using the captured image, calculating an offset using the positions of the first probe marks, adjusting relative positions between a subsequent plurality of electronic devices and the probe pins using the offset, and contacting lead pads of the subsequent plurality of electronic devices with the probe pins for testing said electronic devices. The first probe marks are configured to have greater visibility as compared with second probe marks formed when contacting the lead pads of the subsequent plurality of electronic devices with the probe pins, so as to improve the accuracy of the offset calculated.
    Type: Grant
    Filed: June 10, 2016
    Date of Patent: June 18, 2019
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD.
    Inventors: Yu Sze Cheung, Hon Kam Ng, Chun Shing Yip
  • Patent number: 10312214
    Abstract: An atomization mechanism for cooling a bond head comprises an atomization module and a conduit. In use, the atomization module receives gas and liquid from a gas supply and a liquid supply respectively to form an atomized spray and the conduit conveys the atomized spray from the atomization module to a spray inlet located at the bond head to receive the atomized spray into the bond head for cooling the bond head.
    Type: Grant
    Filed: September 8, 2016
    Date of Patent: June 4, 2019
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Yi Kei Law, Chuek Wah Tang, Pak Kin Leung, Gary Peter Widdowson, Wing Chiu Lai, Kin Fung Yu, Jiang Wen Deng
  • Patent number: 10311597
    Abstract: The invention provides an apparatus for determining a bonding position of a die. The apparatus includes a bond head for picking up and bonding the die. The apparatus further includes a plurality of cameras positioned and configured for capturing at least a first image including a first side surface of the die, a second image including a second side surface of the die and a third image including the first and second side surfaces of the die. Further, the invention provides a method of determining a bonding position of a die. The method captures at least a first image including a first side surface of the die, a second image including a second side surface of the die and a third image including the first and second side surfaces of the die. The method further determines a bonding position of the die based on the captured images.
    Type: Grant
    Filed: June 2, 2017
    Date of Patent: June 4, 2019
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Kui Kam Lam, Shun Ming Fung, Chi Keung Leung, Wing Kin Lam, Yuet Cheung
  • Patent number: 10307867
    Abstract: An apparatus for cutting a substrate comprises first and second lasers, and first and second optical fibers each having an input end and an output end opposite to the input end, wherein the input ends of the first and second optical fibers are connected to the first and second lasers respectively. The output ends of the first and second optical fibers are movable relative to the substrate and are configured to image first and second laser beams onto the substrate simultaneously for cutting the substrate.
    Type: Grant
    Filed: November 5, 2014
    Date of Patent: June 4, 2019
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Franz Hollinger, Karel Maykel Richard Van Der Stam, Dick Verhaart, Guido Martinus Henricus Knippels
  • Patent number: 10199350
    Abstract: An apparatus for heating a substrate during die bonding is disclosed. The apparatus comprises: a substrate carrier configured to hold the substrate; a heating device configured to heat the substrate; a first actuator for effecting relative motion between the substrate carrier and the heating device such that the substrate is relatively indexed with respect to the heating device; a second actuator for effecting relative motion between the substrate carrier and the heating device such that the heating device contacts the substrate to heat different portions of the substrate. In particular, the second actuator is operative to separate the heating device from the substrate in order for the first actuator to relatively index the substrate across the heating device. A method of heating a substrate during die bonding is also disclosed.
    Type: Grant
    Filed: May 25, 2012
    Date of Patent: February 5, 2019
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Ming Yeung Luke Wan, Chi Wai Cheung, Chin Tung So
  • Patent number: 10197781
    Abstract: A method of scanning a surface of an object using a confocal imaging system comprises the steps of obtaining first, second and third confocal images of the surface of the object when the object is illuminated respectively by light rays having first, second and third spectral waveforms, and using a camera to capture responsive signals from the object illuminated by the first, second and third spectral waveforms. The first, second and third spectral waveforms are distinguishable from one another and each spectral waveform has overlapping portions relative to another spectral waveform. Thereafter, heights of a plurality of points on the surface of the object corresponding to the plurality of points on each confocal image are determined based on said captured responsive signals.
    Type: Grant
    Filed: December 29, 2016
    Date of Patent: February 5, 2019
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Jiangwen Deng, Wui Fung Sze, Lei Song
  • Patent number: 10192761
    Abstract: A pick arm for a pick and place apparatus for semiconductor devices, the pick arm comprising first and second ends along a longitudinal axis of the pick arm, and a pick tool located at the first end of the pick arm for picking up semiconductor devices. The pick arm further comprises a winged part extending in a direction transverse to the longitudinal axis between the first and second ends of the pick arm, wherein the winged part comprising a sloping surface. The sloping surface is inclined between a top portion and a bottom portion of the winged part such that the sloping surface is nearer to the longitudinal axis at the top portion than at the bottom portion of the winged part.
    Type: Grant
    Filed: February 9, 2017
    Date of Patent: January 29, 2019
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Kin Fung Yu, Yu Xing Cao, Wing Chiu Lai, Kai Siu Lam, Gary Peter Widdowson, Ying Zhuo Liu
  • Patent number: 10192847
    Abstract: A bond head comprises an insulation block, a heater plate attached to the insulation block and a collet located on the heater plate for holding a semiconductor device. The heater plate is operative to heat the semiconductor device that is held by the collet. A flow generation plate that is detachably mounted between the insulation block and the heater plate is configured to direct cooling gas from the insulation block onto the heater plate so as to rapidly cool the heater plate.
    Type: Grant
    Filed: June 12, 2014
    Date of Patent: January 29, 2019
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Lu Ma, Cheuk Wah Tang, Pak Kin Leung
  • Patent number: 10187636
    Abstract: For aligning an image sensor relative to a lens module prior to fixing the image sensor to the lens module, an exposure of the image sensor is turned on and the image sensor is moved to different distances relative to the lens module. At certain predetermined distances between the image sensor and the lens module, a calibration pattern is illuminated and two or more pictures of the calibration pattern which is focused through the lens module are captured with the image sensor to produce at least two pictures of the calibration pattern captured at different distances, the at least two pictures being superimposed onto a calibration image. The exposure of the image sensor is then turned off and the pictures of the calibration pattern are analyzed for determining an alignment between the lens module and the image sensor.
    Type: Grant
    Filed: January 8, 2016
    Date of Patent: January 22, 2019
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Chi Shing Wong, Fan Leuk Lai, Po Lam Au, Jiangwen Deng, Wing Hong Leung
  • Patent number: 10186549
    Abstract: A method for bonding a matrix of light-emitting elements onto a substrate includes forming conductive material on bond pads of the substrate in a matrix arrangement. Separately, a plurality of light-emitting elements is also picked up and placed onto a temporary carrier in the said matrix arrangement. The temporary carrier containing the plurality of light-emitting elements is then held with a bond head, and is moved by the bond head to establish contact between electrodes on the plurality of light-emitting elements and the conductive material on the substrate. When heat is applied to the light-emitting elements while exerting a compressive force with the bond head against the conductive material, conductive joints are formed between the light-emitting elements and the substrate.
    Type: Grant
    Filed: September 20, 2017
    Date of Patent: January 22, 2019
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Yiu Ming Cheung, Ming Li, Zetao Ma, Kai Ming Yeung
  • Patent number: 10163845
    Abstract: Disclosed is a method of measuring a free air ball size during a wire bonding process of a wire bonder, which comprises a position sensor and a bonding tool for forming an electrical connection between a semiconductor device and a substrate using a bonding wire. Specifically, the method comprises the steps of: forming a free air ball from a wire tail of the bonding wire; using the position sensor to determine a positional difference between a first and a second position of the bonding tool with respect to a reference position, wherein the first position of the bonding tool is a position of the bonding tool with respect to the reference position when the free air ball contacts a conductive surface; and measuring the free air ball size based on the positional difference of the bonding tool as determined by the position sensor. A wire bonder configured to perform such a method is also disclosed.
    Type: Grant
    Filed: July 1, 2014
    Date of Patent: December 25, 2018
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Keng Yew Song, Yi Bin Wang, Zuo Cheng Shen, Jia Le Luo, Qing Le Tan
  • Patent number: 10151774
    Abstract: Disclosed are an electrical contact for contacting an electrical component, an apparatus for testing an electrical component and a method of assembling an apparatus comprising an electrical contact for testing an electrical component.
    Type: Grant
    Filed: June 10, 2015
    Date of Patent: December 11, 2018
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Yu Sze Cheung, Kai Fung Lau
  • Patent number: 10134650
    Abstract: A wafer cutting apparatus comprises a wafer positioning device for holding a wafer that is substantially covered with an opaque material such as molding compound and that has an exposed peripheral area, and for displacing the wafer relative to a wafer inspection system comprising a camera having a field of view. To perform visual data acquisition of said dicing street portions, the wafer is displaced such that a center of the camera's field of view follows a path along the exposed peripheral area of the wafer. A processing unit analyzes the visual data acquired for detecting or calculating locations and directions of the dicing streets. A wafer cutting tool cuts the wafer along straight lines between the dicing street portions which have been detected or calculated by the processing unit.
    Type: Grant
    Filed: February 19, 2016
    Date of Patent: November 20, 2018
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Guido Knippels, Geert Ubink, Jianfei Yang, Eric Meng Meng Tan, Marcel Boeren
  • Patent number: 10115579
    Abstract: During the manufacture of a semiconductor package, a semiconductor wafer including a plurality of bond pads on a surface of the wafer is provided and the surface of the wafer is covered with a dielectric material to form a dielectric layer over the bond pads. Portions of the dielectric layer corresponding to positions of the bond pads are removed to form a plurality of wells, wherein each well is configured to form a through-hole between top and bottom surfaces of the dielectric layer for exposing each bond pad. A conductive material is then deposited into the wells to form a conductive layer between the bond pads and a top surface of the dielectric layer. Thereafter, the semiconductor wafer is singulated to form a plurality of semiconductor packages.
    Type: Grant
    Filed: November 17, 2017
    Date of Patent: October 30, 2018
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Chun Ho Fan, Teng Hock Kuah
  • Patent number: 10115620
    Abstract: Disclosed is an apparatus for handling electronic components and a method of adjusting the position of at least one handling device of an apparatus for handling electronic components.
    Type: Grant
    Filed: August 31, 2015
    Date of Patent: October 30, 2018
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Yu Sze Cheung, Chi Wah Cheng, Chi Fung Chan
  • Patent number: 10093491
    Abstract: A pick-and-place apparatus has a rotary turret and a plurality of pick arms arranged on the rotary turret for picking up and placing electronic devices during pick and place operations. A transmission stator and a transmission rotor are mounted on the rotary turret with an air gap between the transmission stator and the transmission rotor such that the transmission rotor is rotatable relative to the transmission stator. At least one motor for actuating at least one pick arm during the pick and place operations is operatively coupled to the transmission rotor. The transmission stator and the transmission rotor are configured to transmit data signals wirelessly across the air gap for driving the at least one motor to actuate the at least one pick arm.
    Type: Grant
    Filed: July 17, 2017
    Date of Patent: October 9, 2018
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Shing Wai Tam, Chak Tong Sze, Wing Sze Chan, Chuen Hong Lo, Sung Yeung
  • Patent number: 10096568
    Abstract: Disclosed is a die bonding tool comprising: a rigid body; and a collet having a die-holding portion; wherein the collet is mechanically coupled to the rigid body by a flexible element which is configured to angularly deflect relative to the rigid body on application of a torque to the collet and/or to a die held by the collet. Also disclosed is a die bonding system comprising the die bonding tool, and an adhesive dispenser for a die bonding system.
    Type: Grant
    Filed: September 18, 2014
    Date of Patent: October 9, 2018
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Kwok Yuen Cheung, Kwok Wah Tong, Jin Hui Meng, Wan Yin Yau, Man Kit Chow
  • Patent number: 10096498
    Abstract: An apparatus for radiatively scribing a planar semiconductor substrate along a scribelane that extends between opposing rows of semiconductor devices on a target surface of the substrate. The scribelane extends parallel to a first direction parallel to a second direction, these first and second directions lying respectively parallel to X and Y axes of a Cartesian coordinate system. Such an apparatus may include an illuminator for producing an array of light beams; a projection system for focusing the light beams onto the target surface; an actuator system for causing relative displacement of a substrate holder with respect to light beams parallel to an XY plane; and an adjustable spatial filter located between the illuminator and the substrate holder, and including motorized plates whose position is adjustable so as to at least partially block selectable light beams of the light beam array.
    Type: Grant
    Filed: October 14, 2014
    Date of Patent: October 9, 2018
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Ivo Libertus Adrianus Johannes Maria Pullens, Wilhelmus Hubertus Smits, Gerardus Johannes Verhaart, Karel Maykel Richard Van Der Stam, Guido Martinus Henricus Knippels
  • Patent number: 10091919
    Abstract: An apparatus for securing electronic devices on a carrier for storing electronic devices during transportation of the electronic devices on the carrier has a guiding track for guiding motion of the carrier when the carrier receives electronic devices. A magnetic track located adjacent to the guiding track attracts the electronic devices onto the carrier with a magnetic attraction force. In particular, the magnetic track has a support surface facing the carrier that has a smaller width than a width of a portion of the magnetic track that is spaced from the support surface.
    Type: Grant
    Filed: February 23, 2017
    Date of Patent: October 2, 2018
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Yan Yiu Lam, Shing Kai Yip, Yu Sze Cheung