Patents Assigned to ASM Technology Singapore PTE Ltd.
  • Patent number: 9620477
    Abstract: Disclosed is a wire bonder comprising: a processor; a bond head coupled to the processor, the processor being configured to control motion of the bond head; a bonding tool mounted to the bond head, the bonding tool being drivable by the bond head to form an electrical interconnection between a semiconductor die and a substrate to which the semiconductor die is mounted using a bonding wire; and a measuring device coupled to the bond head, the measuring device being operable to measure a deformation of a bonding portion of the bonding wire as the bonding tool is driven by the bond head to connect the bonding wire to the semiconductor die via the bonding portion.
    Type: Grant
    Filed: January 23, 2014
    Date of Patent: April 11, 2017
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Keng Yew Song, Wai Wah Lee, Yi Bin Wang
  • Patent number: 9606171
    Abstract: A test handler comprises a main rotary turret and a loading station operative to convey electronic components to functional modules of the main rotary turret. An auxiliary rotary turret incorporating multiple carrier modules then receives electronic components from the functional modules of the main rotary turret. Multiple testing stations located along a periphery of the auxiliary turret are operative to receive electronic components from the carrier modules for testing while the loading station is concurrently conveying electronic components to the functional modules of the main rotary turret, so that the impact of transfer time is reduced or eliminated in a test process cycle of the test handler.
    Type: Grant
    Filed: January 28, 2015
    Date of Patent: March 28, 2017
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Yu Sze Cheung, Kai Fung Lau
  • Patent number: 9592574
    Abstract: A method of scribing a substrate along a scribeline includes causing a laser beam to impinge on the major surface, the point of impingement of the beam constituting a light spot, the substrate being positioned with respect to the laser beam such that the light spot is disposed proximal to the scribeline. The substrate and laser beam are moved relative to one another, such that the light spot is caused to translate substantially along the scribeline, whereby localized energy is transferred from the laser beam to the substrate along the course of the scribeline. The positioning of the light spot with respect to the scribeline is monitored by imaging a flash of light produced during the relative motion. Image recognition software is used to analyze the image and determine momentary position information. The momentary position information is used to regulate a laser beam position setpoint.
    Type: Grant
    Filed: February 11, 2013
    Date of Patent: March 14, 2017
    Assignee: ASM TECHNOLOGY SINGAPORE PTE. LTD.
    Inventors: Guido Martinus Henricus Knippels, Hans Peter Chall, Ivo Libertus Adrianus Maria Pullens, Garrit Willem Ubink
  • Patent number: 9583366
    Abstract: A method of feeding underfill material to fill a space between a semiconductor die and a substrate onto which the semiconductor die has been bonded, the method comprises positioning a stencil over the semiconductor die. The stencil has an elongated slot extending adjacent to an edge of the semiconductor die. Underfill material is printed through the slot such that the underfill material falls through the slot onto the substrate next to the edge of the semiconductor die. Thereafter, the underfill material is heated such that the underfill material flows across the space between the semiconductor die and the substrate from the edge of the semiconductor die to an opposite edge thereof through capillary action.
    Type: Grant
    Filed: March 16, 2015
    Date of Patent: February 28, 2017
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Qinglong Zhang, John Hon Shing Lau, Ming Li, Michael Zahn, Yiu Ming Cheung
  • Patent number: 9561914
    Abstract: An apparatus for conveying electronic devices comprises a track for conveying a plurality of electronic devices in a row towards a pick-up position on the track where the electronic devices are removed by a pick-up device. A guiding portion located over the track has a first restraining mechanism formed in the guiding portion that is operative to restrain and secure a first electronic device at a first position next to the pick-up position and a second restraining mechanism formed in the guiding portion that is operative to restrain and secure a second electronic device at a second position away from the pick-up position which is immediately subsequent to the first position. The first and second electronic devices are configured to be released and conveyed towards the pick-up position when the first and second restraining mechanisms respectively are deactivated. A corresponding method is also provided.
    Type: Grant
    Filed: October 13, 2015
    Date of Patent: February 7, 2017
    Assignee: ASM TECHNOLOGY SINGAPORE PTE. LTD
    Inventors: Shing Kai Yip, Yu Sze Cheung, Chi Wah Cheng
  • Patent number: 9519152
    Abstract: There is provided an apparatus for alignment of a thin-film transistor (TFT) panel and a barrier panel of a three-dimensional (3D) display. The apparatus comprises at least one light source for illuminating pixels in at least one region of the TFT panel and for illuminating at least one region of an exposure pattern of the barrier panel; a pattern recognition system for detecting light emitted from the at least one light source that is reflected by or transmitted through the 3D display, to generate alignment data relating to an alignment between the detected illuminated pixels of the TFT panel and the exposure pattern of the barrier panel; and a positioning mechanism for adjusting the relative position between the barrier panel and the TFT panel in relation to the alignment data. The at least one light source comprises at least one invisible light source which emits invisible light outside the visible region of the electromagnetic spectrum.
    Type: Grant
    Filed: December 6, 2013
    Date of Patent: December 13, 2016
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Chi Shing Wong, Man Lai Chau, Yuet Wu, Jiang Wen Deng, Wing Hong Leung
  • Patent number: 9519007
    Abstract: A handling system for testing electronic components comprises a rotary turret and pick heads mounted on the rotary turret, each pick head being configured to hold a respective electronic component provided by a supply source. A carrier system which is positionable adjacent to the rotary turret is configured to carry a plurality of electronic components. The carrier system is receivable by a testing station that is operative to simultaneously test a plurality of the electronic components which have been arranged on the carrier system. The pick heads or other transfer mechanism may transfer the electronic components onto the carrier system prior to testing the same at the testing station and remove electronic components from the carrier system after testing the same at the testing station.
    Type: Grant
    Filed: January 30, 2013
    Date of Patent: December 13, 2016
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Chi Wah Cheng, Wang Lung Tse, Chi Kit Cheung, Cho Tao Cheung
  • Patent number: 9508570
    Abstract: A singulation apparatus and method including: at least one chuck station to which a workpiece is securable, the at least one chuck station being configured to move along a feed direction; a bridge extending above the at least one chuck station, the bridge having a first side and a second side opposite the first side; a first cutting device with members mounted to the bridge and being independently movable along the first side, transversely to the feed direction; and a second cutting device with members mounted to the bridge and being independently movable along the second side, transversely to the feed direction, the first and second cutting devices being configured and arranged for cutting the workpiece.
    Type: Grant
    Filed: October 21, 2013
    Date of Patent: November 29, 2016
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Chi Wah Cheng, Eric Lap Kei Chow, Joseph Hoi Shuen Tang, Chun Kit Liu
  • Patent number: 9510460
    Abstract: For aligning an electronic component to a required orientation, the electronic component is picked up and it is inspected while it is being held to determine its initial orientation. A précising mechanism is then rotated to correspond to the initial orientation of the electronic component. After the electronic component is secured on the précising mechanism in the initial orientation, the précising mechanism is rotated to align the electronic component to the required orientation. Thereafter, the electronic component that has been aligned to the required orientation may be picked up for further testing and/or processing.
    Type: Grant
    Filed: September 17, 2014
    Date of Patent: November 29, 2016
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Yu Sze Cheung, Yan Yiu Lam
  • Patent number: 9502374
    Abstract: A capillary is utilized to form the wedge wire bond comprised in a wire interconnection. A wire holding device is located above a wire clamp and the capillary to secure the wire while the wire clamp is open and not clamping onto the wire. The wire clamp and the capillary may be lifted relative to the wire in a direction away from the wedge wire bond and towards the wire holding device so as to pay out a length of wire from the capillary. At a predetermined height of the capillary, the wire clamp is closed to clamp onto the wire, and thereafter, the capillary and wire clamp may be moved further away from the wedge wire bond to cause the wire to break away from the wedge wire bond and to form the wire tail with a desired length extending from the capillary.
    Type: Grant
    Filed: October 24, 2012
    Date of Patent: November 22, 2016
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD.
    Inventors: Keng Yew Song, Wai Wah Lee, Yi Bin Wang, Wen Hua Guo, Xin Wei Zhang
  • Patent number: 9490156
    Abstract: A transfer device for holding an object comprises: i) a housing; ii) at least one inlet conduit having an inlet for gas; iii) a plurality of sets of outlet conduits, each set of outlet conduits being in fluid communication with the at least one inlet conduit and having a plurality of outlets for directing the gas out of the outlet conduits. The respective outlets of the sets of outlet conduits are arranged in a direction along the housing surface and away from a center region relative to the respective sets of outlet conduits, so that a laminar gas flow that flows along the housing surface generates a pressure differential which creates a force towards the center region to hold the object against the housing surface.
    Type: Grant
    Filed: May 16, 2014
    Date of Patent: November 8, 2016
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Sathish Kumar Balakrishnan, Kumaresh Govindan Radhakrishnan, Wen Ge Tu, HongLiang Lu, Lian Hok Tan
  • Patent number: 9487881
    Abstract: An apparatus is disclosed for electroplating an inside wall of a transfer mold, the transfer mold being suitable for use in semiconductor device encapsulation. Specifically, the apparatus comprises a fixture, as well as a through-hole in the fixture for receiving an electrode to electroplate the inside wall of the transfer mold. In particular, the through-hole is configured to receive the electrode in a slide-fit to form a mutual interference fit for securing the electrode to the fixture. Upon fitting the electrode into the through-hole, the apparatus can then be used to electroplate the inside wall of the transfer mold by introducing the electrode into the space adjacent to the inside wall of the transfer mold. A device for use as an electrode in the apparatus is also disclosed.
    Type: Grant
    Filed: July 18, 2011
    Date of Patent: November 8, 2016
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Shu Chuen Ho, Kai Fat Yip, Eng Cheng Chng, Yew Lan Ngo, Saravana Ranganathan Damodaran
  • Patent number: 9484241
    Abstract: Disclosed is a device for holding a plurality of semiconductor devices during thermocompression bonding, comprising: a body; a plurality of support surfaces at a first side of the body, each support surface being configured for holding at least one semiconductor device during thermocompression bonding; and a plurality of internal conduits within the body, each internal conduit extending from an opening of a respective one of the support surfaces at the first side of the body to an opening at a second side of the body. In particular, the openings at the second side of the body are configured to be connected to separate pneumatic paths to be in fluid communication therewith, each pneumatic path having an independently controlled pneumatic suction force so that the openings of the support surfaces at the first side of the body are operative to selectively hold the one or more semiconductor devices against the support surfaces at the first side of the body or to release the same therefrom.
    Type: Grant
    Filed: July 29, 2013
    Date of Patent: November 1, 2016
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Man Chung Chan, Chun Ho Fan
  • Patent number: 9465383
    Abstract: Disclosed is an apparatus for handling electronic components. The apparatus comprises: i) a rotary device and a plurality of pick heads arranged circumferentially around the rotary device, each pick head being operable to hold an electronic component; ii) a position-determining device for determining an arrangement of the electronic components as held by the respective pick heads; iii) a fiducial mark arranged in a position that is indicative of the arrangement of the electronic components, as determined by the position-determining device; iv) a first imaging device arranged relative to the fiducial mark; and v) at least one handling device for handling the electronic components.
    Type: Grant
    Filed: June 23, 2014
    Date of Patent: October 11, 2016
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Hing Suen Siu, Yu Sze Cheung, Chi Wah Cheng, Chung Yan Lau
  • Patent number: 9461013
    Abstract: Disclosed is a wire spool system for a wire bonding apparatus, comprising: a wire reel arranged to receive a wire; a wire guide for feeding a free end of the wire to a bond head of the wire bonding apparatus; and a tensioning mechanism for tensioning the wire to define a wire path between the wire reel and the wire guide. The wire spool system comprises an imaging module comprising a camera having an image sensor. The imaging module also comprises an image processing unit. The camera is positioned to image, by said image sensor, at least a portion of the wire path to generate image data. The image processing unit is configured to process the image data to determine a geometry and/or a change in geometry of the at least a portion of the wire path.
    Type: Grant
    Filed: November 21, 2014
    Date of Patent: October 4, 2016
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Chi Wah Cheng, Hon Kam Ng
  • Patent number: 9449877
    Abstract: A method of singulating a semiconductor wafer with laser energy while the semiconductor wafer is supported on a mounting tape during singulation comprises the step of depositing a coating material onto a portion of the mounting tape adjacent to a perimeter of the semiconductor wafer to form a protective layer over the mounting tape. The semiconductor wafer is then cut with a laser beam such that the laser beam at least partially impinges upon the protective layer during cutting of the semiconductor wafer. After singulation of the semiconductor wafer, the protective layer is removed from the mounting tape.
    Type: Grant
    Filed: September 17, 2014
    Date of Patent: September 20, 2016
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Frank Ernst, Rogier Evertsen, Raph Pieters, Mark Müller, Guido Knippels
  • Patent number: 9446524
    Abstract: A wire clamp includes a clamp body; a pair of arms coupled to the clamp body; and a piezoelectric actuator having a longitudinal axis extending between a first end and a second end, the actuator being coupled to the pair of arms at the first end and to the clamp body at the second end. The second end of the actuator is coupled to the clamp body by a preload mechanism for applying a preload force along the longitudinal axis, and the preload mechanism comprises at least one wedge having an inclined surface which is slidable over a mating inclined surface.
    Type: Grant
    Filed: November 14, 2013
    Date of Patent: September 20, 2016
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Yue Zhang, Chong Hao Chen, Zheng Yu Lin
  • Patent number: 9427893
    Abstract: Disclosed is a platen for a molding press for encapsulating semiconductor dies on a substrate, the platen comprising: a first mold chase having a first mold chase surface; the platen being operable to cooperate with a further platen having a second mold chase with a second mold chase surface to clamp a substrate, which is held against a substrate-facing surface relating to either the first or second mold chase surface, between the first and second mold chase surfaces to define at least one mold cavity with respect to the substrate; wherein the platen further comprises a rotational mounting device on which either the first or second mold chase is rotatable about at least one axis passing through the center of the substrate-facing surface to adjust the relative arrangement of the first and second mold chase surfaces. Also disclosed is a molding press comprising the platen, and the further platen cooperating with the platen.
    Type: Grant
    Filed: September 18, 2014
    Date of Patent: August 30, 2016
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Jian Xiong Su, Teng Hock Kuah, Shu Chuen Ho, Jiapei Ding, Ravindra Raghavendra
  • Patent number: 9387991
    Abstract: An apparatus for arranging integrated circuit receiving tubes, the apparatus including a reverse mechanism, a detection element and a discharge mechanism. In use, the reverse mechanism receives a tube and the detection element determines an orientation of the received tube. The reverse mechanism moves to allow the discharge mechanism to receive the tube from itself. If the orientation of the received tube differs from a desired orientation, the movement of the reverse mechanism changes the orientation of the tube before allowing the discharge mechanism to receive the tube. Otherwise, the orientation of the tube is maintained notwithstanding the movement of the reverse mechanism, and is subsequently received by the discharge mechanism. This helps to automatically ensure that all the tubes are received by the discharge mechanism in the same orientation.
    Type: Grant
    Filed: October 10, 2014
    Date of Patent: July 12, 2016
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Wang Lung Tse, Chun Shing Wong, Cho Wai Leung, Ka Wing Yeung
  • Patent number: 9346205
    Abstract: A substrate having a plurality of protrusion members on its surface is molded by a molding system comprising first and second molds cooperating to apply a clamping force onto the substrate for molding, and a middle plate located between the first and second molds such that the substrate is clamped between the middle plate and the first mold during molding. A plurality of molding cavities is located on the second mold and through-holes formed in the middle plate correspond to positions of the molding cavities, such that each through-hole is sized and configured for inserting a protrusion member of the substrate to enable each protrusion member to be in communication with a molding cavity of the second mold. Molding compound is molded onto the protrusion members by the molding cavities during molding.
    Type: Grant
    Filed: October 14, 2009
    Date of Patent: May 24, 2016
    Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
    Inventors: Shu Chuen Ho, Teng Hock Eric Kuah, Ji Yuan Hao, Ee Ling Chiw, See Yap Ong