Abstract: Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.

Abstract: Methods and systems are provided for handling materials, including materials used in semiconductor manufacturing systems. The methods and systems include linear semiconductor processing facilities for vacuum-based semiconductor processing and handling, as well as linkable or extensible semiconductor processing facilities that can be flexibly configured to meet a variety of constraints.

Abstract: A gripper apparatus for removing and replacing objects such as containers or vials in an array of containers has a gripper head which extends downward from a support arm, a planetary gear assembly mounted in the gripper head including at least three planet gears, and at least one gripping pin extending downward from each planet gear and projecting beyond a lower end of the gripper head. A drive motor drives the planetary gear assembly to rotate the planet gears in opposite directions, moving the pins inward and outward along predetermined paths to grip and carry an object and release the object when in a desired location.

Abstract: A system and method that does trustworthy multi-objective structural synthesis of analog circuits, and extracts expert analog circuit knowledge from the resulting tradeoffs. The system defines a space of thousands of possible topologies via a hierarchically organized combination of designer-trusted analog building blocks, the resulting topologies are guaranteed trustworthy. The system can perform a search based on a multi-objective evolutionary algorithm that uses an age-layered population structure to balance exploration vs. exploitation, with operators that make the search space a hybrid between vector-based and tree-based representations. A scheme employing average ranking on Pareto fronts is used to handle a high number of objectives. Good initial topology sizings are quickly generated via multi-gate constraint satisfaction.

Abstract: A method for finding the process, voltage, temperature, parasitics, and power settings (PVTPP) corner at which an electrical circuit design has the worst-case optimum simulated output performance. The method uses a global optimization process in a series of iterations that aim to uncover the PVTPP corner at which the ECD has the worst-case output value. By using the present method, a designer does not have to simulate the ECD at each and every PVTPP corner, which can same considerable time or compute effort. Examples using Model-Building Optimization are provided.

Abstract: Disclosed is a mobile robotic arm workcell. A robotic arm is mounted on a superstructure that carries all the equipment associated with the workcell's task. Thus, the workcell is self-contained needing only power. The workcell may be moved by activating air bearings that are pressurized by an air compressor that is also mounted on the superstructure. Power is received via power contacts that engage a power rail. Guidance is provided a guide system. The guide system may include guide rails engaged by guide carriages. Propulsion is provided by a drive system that may engage the guide system or the factory floor.

Abstract: A cleaning system which includes an enclosure and having a door with a transparent window. The door is opened and closed to load and unload products to be cleaned. An operator puck on the outside of the enclosure couples magnetically to another actuator puck on the inside of the enclosure. This coupling allows an operator to move and direct the inside puck to actuate spray or air blast functions, without opening the enclosure. The outside operator puck includes one or more switches which turn on the various electronic components such as the liquid pump, light, or air blast valve. The cleaning system enables a user to efficiently direct cleaning action to parts inside to minimize the cleaning time, and to prevent exposure of chemicals. The cleaning fluid is cycled out of the enclosure continuously, and into a “trap” box, through a pump and back into the cleaner box in a closed loop cycle.

Abstract: Modular wafer transport and handling facilities are combined in a variety of ways deliver greater levels of flexibility, utility, efficiency, and functionality in a vacuum semiconductor processing system. Various processing and other modules may be interconnected with tunnel-and-cart transportation systems to extend the distance and versatility of the vacuum environment. Other improvements such as bypass thermal adjusters, buffering aligners, batch processing, multifunction modules, low particle vents, cluster processing cells, and the like are incorporated to expand functionality and improve processing efficiency.

Abstract: This invention comprises a system and a method for inspecting the inside of delayed petroleum coking vessels to determine deformations, detect and determine the severity of other defects and visually observe the inside of the inspected vessel.

Abstract: An automated system for transporting items between variable endpoints includes a guidance system for identifying the endpoints and at least one autonomous mobile robot interacting with the guidance system for automatically moving items between the endpoints. The at least one robot is configured to (a) collect an item to be transported at a source end point, (b) travel to a destination endpoint utilizing the guidance system to locate the destination endpoint, (c) deliver the item to the destination endpoint, and (d) repeat (a) through (c) for a given set of items. The guidance system is dynamically reconfigurable to identify new endpoints.

Abstract: A system is provided for processing container-grown plants positioned in a given area. The system includes a processing station positioned in the area for processing the container-grown plants. It also includes one or more autonomous mobile container handling robots configured to: (i) travel to a source location in the area and pick up a container-grown plant, (ii) transport the container-grown plant to the processing station where a process is performed on the container-grown plant, (iii) transport the container-grown plant from the processing station to a destination location in the area, (iv) deposit the container-grown plant at the destination location, and (v) repeat (i) through (iv) for a set of container-grown plants in the source location.

Abstract: A component position detector for determining if a first component is properly attached to a second component. The component position detector can be a steering wheel airbag position detector that provides for a convenient and cost-effective apparatus and/or process for determining whether or not a steering wheel airbag is properly attached to a steering wheel. Such a steering wheel airbag position detector can include a jig that has a scan position, the scan position located on a front side of a steering wheel. In addition, the position detector can include a sensor rigidly attached to the jig, the sensor operable to perform a two-dimensional scan across a gap between the steering wheel and a steering wheel airbag and/or horn pad attached to the steering wheel.

Abstract: A reticle manipulating device comprising a housing capable of having a controlled environment wherein at least one processing module is connected to the housing and capable of processing a reticle. A transport apparatus is connected to the housing for transporting the reticle between the at least one module to another portion of the housing. At least one module is removably connectable to the housing and at least one module has an interface adapted for removably coupling the module to the housing. One module being selectable for connection to the housing from a number of different interchangeable module each having a different predetermined characteristic and being capable of connection to the housing.

Abstract: A system of moving magnets for sealing a container may include a plurality of moveable magnets disposed near a perimeter of a container door and a rotatable linkage hub positioned within the perimeter of the container door. In addition, the system may include a plurality of control linkages connecting each of the plurality of moveable magnets to the linkage hub so that rotating the linkage hub causes the control linkages to move the moveable magnets between a sealed position and an open position. Alternatively, the moveable magnets may be connected to each other by a magnet positioning mechanism to physically move the magnets along a path near the perimeter. A plurality of static magnets may be disposed near an opening sized to receive the container door and positioned to form a magnetic seal with the moveable magnets when the moveable magnets are positioned at the sealed position.

Abstract: Systems and methods for monitoring safety procedures for an industrial facility. A user interface for a safety operator interfaces with a database containing safety documents for components installed and in use in the industrial facility. The user interface also interfaces with a safety calculation module that calculates the risk level for specific potential consequences if specific safety procedures are not implemented. Whenever a potentially unsafe situation occurs, the risk levels associated with the potential consequences of the unsafe situation are presented to the safety operator along with contingencies which may be implemented to alleviate the risks. Past potentially unsafe situations are also presented to the safety operator by way of a time line such that a historical record of the safety of the facility can be taken in at a glance.

Abstract: A method and apparatus are set forth for modeling a coloring process in moving web manufacturing through dye response gain adaptation using measured sheet color spectrum; and dye response shape adaptation using measured color spectrum of the production sheet. The adaptation of colorant (dye) response gain uses the measured sheet color spectrum value at the value of maximum light absorbance of the dye. The adaptation of dye response spectrum uses the measured sheet color reflectance spectrum and sample sheet color spectrum with a corresponding response shape calculated using a formula to adapt the current sheet condition dye response shape using the dye response from the sample sheet on the assumption of a constant ratio of absorption change to dye concentration change.

Abstract: There is described apparatus and methods for transporting and processing substrates including wafers as to efficiently produce at reasonable costs improved throughput as compared to systems in use today. A linear transport chamber includes linear tracks and robot arms riding on the linear tracks to linearly transfer substrates along the sides of processing chambers for feeding substrates into a controlled atmosphere through a load lock and then along a transport chamber as a way of reaching processing chambers. A four-axis robot arm is disclosed, capable of linear translation, rotation and articulation, and z-motion.

Abstract: Method and apparatus for prefeeding corrugated boards to a box finishing machine wherein a stack of rectangular boards are moved to a first conveyor with the long dimension of the boards extending transverse to the direction of movement of said first conveyor. The stack is then rotated to place the long dimension of the boards in alignment with the direction of movement of said first conveyor, and then moving the rotated stack to a second conveyor for feeding to a box finishing machine with the long dimension of the boards in alignment with the direction or path of movement of the boards through the box finishing machine. The stack is transferred to the first conveyor from an elevator which contains a supply of boards larger than the stack. Three different types of apparatus are disclosed for rotating the stack. One is a plurality of conveyor belts whose speeds may be varied to rotate the boards. Another is a turntable with a set of belt conveyors and a set of rollers.

Abstract: In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.

Abstract: A cryogenic refrigerator has a refrigeration cylinder and at least two displacers. Each displacer reciprocates in the refrigeration cylinder and moves refrigeration gas through the refrigeration cylinder. A regenerator cools the refrigeration gas, and gas control valves admit high pressure gas into the refrigeration cylinder and exhaust gas from the refrigeration cylinder. The refrigerator also has linear motors operatively connected to displacers, and the linear motors drive the displacers in reciprocating movement. A position sensor is provided to determine a parameter of the displacers during reciprocation. A controller is operatively connected to the linear motors to control the linear motors. The controller controls a parameter of the two displacers during reciprocation. The parameter can be stroke length, stroke speed, stroke phase or another parameter of the displacer for temperature control of the cryogenic refrigerator. The cryogenic refrigerator may also include a device to remove vibration.