Abstract: A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality of sensors consisting of two sensors for each one of the plurality of entrances, each sensor capable of detecting a presence of the substantially circular wafer, at a predetermined location within the interior, wherein the plurality of sensors are arranged so that at least two of the plurality of sensors detect the wafer for any position of the wafer entirely within the interior, wherein a first one of the two sensors is positioned to detect the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances, and a second one of the two sensors is positioned immediately outside a diameter of the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances.

Abstract: In accordance to an aspect of the disclosed embodiments, a substrate transport apparatus is provided. The substrate transport apparatus includes a frame defining a chamber, at least one stator module embedded at least partly into a peripheral wall of the chamber, the at least one stator module defining an axis of rotation. The substrate transport apparatus further includes at least one rotor substantially concentrically disposed relative to the at least one stator module about the axis of rotation, the at least one rotor being configured to interface with the at least one stator module and being suspended by a respective one of the at least one stator module substantially without contact within the chamber. The substrate transport apparatus further includes at least one substrate transport arm connected to the at least one rotor and having at least one end effector configured to hold at least one substrate.

Abstract: A workpiece handling module including a first housing member and a second housing member pivotally movable relative to the first member forming a housing having an access side and a second side opposite the access side and side walls, a first portion of the side walls is carried by the first member and a second portion of the side walls is carried by the second member, and at least one of the first and second housing members includes at least one sealable opening for allowing ingress and egress of workpieces to and from an interior chamber formed by the first and second housing members in a closed configuration, and the second portion of the side walls adjacent the access side and carried by the second member is greater than the first portion of the side walls adjacent the access side and carried by the first member.

Abstract: A sensor system for use with an automated guided vehicle (AGV) includes a plurality of sensor units electronically coupled to a sensor control module via parallel communications. Each sensor unit may include a sensor array having a plurality of sensor elements, a conditioning circuit having one or more filter/amplifiers, and a conversion circuit. The sensor control module may be configured to communicate with other AGV components via serial communications. The sensor system is capable of obtaining and storing sensor readings with or without associated offset values and can use the sensor readings to determine the center of a magnetic field using methods that require relatively little processing power. A method of calibrating the sensor system may include determining and storing offset values for a plurality of sensor elements and may be performed with the sensor system installed or uninstalled to the AGV.

Abstract: A load lock is provided for a semiconductor substrate processing system having a transport robot mounted therein. The load lock transport supplies substrates directly to a processing chamber without the need for a central transport robot. The load lock transport is a dual element robot designed for minimum clearance and space and operates within a matching load lock chamber of minimum volume.

Abstract: A security system for detecting physical intrusion in a monitored area including a plurality of radio units arranged in a network around the monitored area to determine received signal strength and pass variations thereof through the radio units to a base station.

Abstract: An end effector having a first arm and a second arm extending from an end effector support body is provided. The first arm and the second arm each have support extensions for supporting a peripheral region of a substrate on opposing sides of a diameter of the substrate. The height of support contacts on opposing sides of the diameter is different relative to a horizontal datum plane. In one embodiment, the end effector includes additional arms extending from the end effector support body. A system for supporting a substrate is provided also.

Abstract: In accordance with one aspect of the exemplary embodiments, a substrate transport apparatus is provided comprising a drive mechanism, a movable arm assembly connected to the drive mechanism, an end effector connected to the arm assembly. A chuck for holding a substrate is mounted on the end effector and having a movable edge gripper with a contact surface and an edge of the substrate may be gripped by actuating the movable edge gripper to engage the substrate with the contact surface. The apparatus further comprising a motion sensor for providing a signal to actuate the movable edge gripper to close and open the moveable edge gripper for capturing and releasing the substrate.

Abstract: Aspects of the invention provide apparatuses, systems, and methods for supporting cable redundancy in a network connecting a network controller (101) and an I/O device (109) (an adapter). An adapter includes a first port (407) and a second port (409) for receiving the same messages from a scanner (301) over a first and second transmission media (353, 355), respectively. A connection manager module (423) instructs a switching module (419) to direct the output data contained in the first message to a data structure (421) when the first transmission medium is operational and to direct the output data contained in the second message to the data structure when the first transmission medium is non-operational. Also, the adapter formats a message from input data.

Abstract: An apparatus including a controller, a transport in communication with the controller having a movable portion and a transport path and a multi-dimensional position measurement device in communication with the controller, the multi-dimensional position measurement device including a plurality of transformers and at least one element attached to the movable portion, wherein the multi-dimensional position measurement device is configured so that a circuit is completed in at least one plurality of transformers as the at least one element passes proximate to the at least one of the plurality of transformers and the controller is configured to calculate a multi-dimensional position of the movable object based on an output of the at least one of the plurality of transformers, wherein the multi-dimensional position includes at least a gap between the movable portion and the plurality of transformers.

Abstract: A static formal verification tool is used to test properties for a circuit design, where the properties are written in a verification language, such as SystemVerilog, that allows local variables. The use of local variables presents implementation challenges for static formal verification tools because it requires multiple instances of the local variables to be tracked during the verification process. To deal with local variables, the static formal verification tool translates a property containing local variables into an optimized, statically allocated data structure that does not need multiple representation of different instances of the local variables. The formal verification is then performed using the data structure. This reduces the verification complexity and makes the size of the problem representation predictable.

Abstract: A robot has a robot arm, a support structure, and a movable platform. The platform includes a cantilevered member coupled to a guide of the support structure such that motion of the platform is directed along a first direction. The robot further includes first and second timing belts having portions that extend along the first direction and that are disposed on opposite sides of the cantilevered member, and first and second shafts movable with the movable platform. The shafts are coupled to the respective timing belts, to the robot arm such that rotation of the first shaft imparts angular motion to the robot arm and rotation of the second shaft imparts radial motion. The robot also includes a third timing belt to which the platform is coupled and by which it is moved. Motors are provided that impart movement to the timing belts.

Abstract: An automated guided vehicle is equipped with a stabilization system for precisely locating, leveling, or otherwise positioning the AGV and its payload with respect to a. work piece. The stabilization system includes one or more extension members that extend away from the AGV to engage the ground or a locating assembly installed in the ground. Each extension member may be part of a locating assembly or a leveling assembly. The locating assembly extension member may extend at least partially into an opening of another locating assembly to align the two locating assemblies. The locating assembly may also be configured to provide a leveling function.

Abstract: A lubrication system is provided for delivering coherent packets of a lubricant to a cutting surface of a machine tool. The system includes a nozzle for delivering a coherent packet of lubricant to the cutting surface, a pump for providing the lubricant to the nozzle via a supply line, and a controller configured to control the pump to provide the nozzle with a desired volume of lubricant. The coherent packet of lubricant has a volume substantially equal to the desired volume provided by the pump. The nozzle may be movable, and the controller may be configured to position and orient the movable nozzle. The controller may be an integrated controller configured to control both the operation of the lubrication system and the operation of the machine tool.

Abstract: In a robotic tool coupler, a rotating cam member having a plurality of surfaces formed therein urges a plurality of ball members in one tool coupling unit radially to contact an angled surface in the other tool coupling unit. Further rotation of the cam member exerts a radial force through the ball members onto the angled surface. A component of that force is directed by the angled surface toward the opposite tool coupling unit, locking the two units together. The cam member may include a failsafe surface and/or a failsafe lobe to maintain the two units locked together in the event of a loss of power to positively actuate the cam member.

Abstract: A storage and retrieval system is provided. The storage and retrieval system having a frame and a shuttle movable within the frame, the shuttle having a carriage extending at least partially between a top and bottom of the frame. At least one tension member extends between a first and second ends of the frame and is coupled to the shuttle. At least one drive member extends between the first and second ends of the frame and is coupled to the shuttle. The at least one drive member and the at least one tension member project from opposite sides of the shuttle towards respective first and second ends of the frame and effect stabilization of the carriage against at least rotation relative to the frame. The at least one tension member crosses the at least one drive member and the at least one drive member effects movement of the shuttle.

Abstract: Systems and methods of automatically dispensing tablets are disclosed. The systems and methods of the invention provide a highly secure, highly accurate and rapid means of dispensing tablets. The system includes an automatic dispensing tablet dispensing system as shown in the Figures and provides a means of lowering errors while preventing unauthorized tampering by non-authorized personnel. Moreover, the invention relates to systems and methods for packaging vials, packaging items from totes, and packaging items from totes with vials.

Abstract: A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality of sensors consisting of two sensors for each one of the plurality of entrances, each sensor capable of detecting a presence of the substantially circular wafer, at a predetermined location within the interior, wherein the plurality of sensors are arranged so that at least two of the plurality of sensors detect the wafer for any position of the wafer entirely within the interior, wherein a first one of the two sensors is positioned to detect the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances, and a second one of the two sensors is positioned immediately outside a diameter of the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances.

Abstract: An executable circuit design is used to generate waveforms, from which behaviors of the circuit are captured. The behaviors and various combinations thereof can then be saved in a database, along with descriptions and other metadata about them, thereby generating a behavioral index of the circuit design code. Behavioral indexing of circuit designs allows a user to maintain an indexed behavior database, track changes in behaviors as the circuit design's executable description evolves, and figure out how the executable description can be reused in different projects. When applied to digital design development, it facilities the current design and verification effort, as well as design reuse down the line.

Abstract: Methods and systems are provided for handling materials, including materials used in semiconductor manufacturing systems. The methods and systems include linear semiconductor processing facilities for vacuum-based semiconductor processing and handling, as well as linkable or extensible semiconductor processing facilities that can be flexibly configured to meet a variety of constraints.