Abstract: A substrate processing apparatus including a transport chamber having an end and defining more than one substantially linear substrate transport zone where each transport zone extends longitudinally along the transport chamber between opposing walls of the transport chamber and at least one of the more than one substantially linear substrate transport zones is configured as a supply zone for enabling transport of substrates from the end and at least one of the more than one substantially linear substrate transport zones is configured as a return zone for enabling transport of substrates to the end, and at least one substrate transport located in and movably mounted to the transport chamber for transporting substrates along the more than one substantially linear substrate transport zone, where each substrate transport zone is configured to allow the at least one substrate transport to move from one transport zone to another transport zone.

Abstract: A process chamber with integrated pumping including a process chamber, refrigerators and arrays, or pumping surface, that are integral to the process chamber.

Abstract: An automatic load transfer device is provided for automated material handling systems of the type having a tow AGV pulling a train of trailers along a predetermined path between stations. The device has a base positioned adjacent to the path with spaced apart rails that support a movable carriage which shifts between retracted and extended positions. A conveyor having a plurality of side-by-side fingers with moving conveyor elements is supported on the carriage by a lift which shifts the conveyor between lowered and raised positions. The carriage, conveyor elements, and lift have separate drives that are operably connected with a controller which sequentially activates the same to load and/or unload loads onto and/or from the trailers.

Abstract: A container or array of containers that is are sealed with a peelable seal is transported via a conveyor along a processing path toward a desealing station at which an adhesive surface having a width substantially the same as or greater than the width of the seal is pressed against the upper surface of the peelable seal. A collection rod applies a downward pressure on the adhesive surface, pressing it against the seal and keeping the container or container array in position on the conveyor as the plate moves with the conveyor. As the leading edge of the seal passes the collection rod, the adhesive surface is rolled upward, away from the plane of the seal, pulling up on the leading edge of the seal to separate it from the container or container array while the container or container array is held down by the roller. The removed seal is then discarded.

Abstract: A method and apparatus are set forth for controlling an actuator in a moving web manufacturing process, comprising measuring a plurality of actuator profiles and in response generating nominal response models thereof; generating a multivariable profile prediction based on the nominal response models; generating a multivariate control target based at least one of the actuator profiles; and adjusting control of the actuator by minimizing error between the multivariate control target and said multivariate profile prediction.

Abstract: A method for decelerating a motor in a computer numerical controlled machine tool is provided. The method includes calculating a present rate of deceleration DP, for a motor of a motor drive system, based on a present speed SP of the motor, a reference speed SR of the motor, and a reference rate of deceleration DR of the motor. The method also includes decelerating the motor from SP according to DP. The motor drive system comprises a maximum power rating that defines a maximum power, generated by the motor while decelerating, that can be dissipated without overloading the motor drive system. DR is a rate of deceleration such that power, generated by the motor while decelerating from SR according to DR, is equal to the maximum power rating. Power, generated while decelerating the motor from SP according to DP, is equal to or less than the maximum power rating.

Abstract: An apparatus for gripping a substrate on its peripheral edge including a substrate support having proximate and distal ends, at least one distal rest pad disposed at the distal end, the at least one distal rest pad includes a back stop portion and is configured to support the peripheral edge of the substrate, at least one proximate rest pad disposed at the proximate end, the at least one proximate rest pad being configured to support the peripheral edge of the substrate, and an active contact member assembly disposed at the proximate end, the active contact member assembly including a pusher member, a contact member and a rotatable coupling member that are reciprocably movable towards the distal end for urging the substrate against the back stop portion, the contact member being rotatably secured to the pusher member and free to rotate about an axis of the rotatable coupling member.

Abstract: Methods and systems are provided for a vacuum-based semiconductor handling system. The system may be a linear system with a four-link robotic SCARA arm for moving materials in the system. The system may include one or more vertically stacked load locks or vertically stacked process modules.

Abstract: Linear semiconductor handling systems provide more balanced processing capacity using various techniques to provide increased processing capacity to relatively slow processes. This may include use of hexagonal vacuum chambers to provide additional facets for slow process modules, use of circulating process modules to provide more processing capacity at a single facet of a vacuum chamber, or the use of wide process modules having multiple processing sites. This approach may be used, for example, to balance processing capacity in a typical process that includes plasma enhanced chemical vapor deposition steps and bevel etch steps.

Abstract: A substrate processing apparatus is presented having a transport chamber defining substantially linear substrate transport paths, a linear array of substrate holding modules, each communicably connected to the chamber. The substrate transport has at least one transporter capable of holding and moving the substrate on more than one substantially linear substrate transport paths. The transport chamber having different transport tubes at least one of which is sealable at both ends of the transport tube and configured to hold an isolated atmosphere different from that of the transport tubes, each of the different transport tubes having one of the substrate transport paths located therein different from another of the transport paths located in another of the transport tubes, and being communicably connected to each other, where at least one of the transport tubes is configured to provide uninterrupted transit of the substrate transport through the transport tubes.

Abstract: A usage status notification method and corresponding medication storage device (e.g., mobile medication dispensing cart, medication cabinet, nurse server, etc.) are provided. To generate the usage status notification, the status of one or more components of the medication storage device may be monitored. An in-use notification signal may be generated if it is determined that the medication storage device is in use at a certain point in time (e.g., when a user is logged into the medication storage device). An available notification signal may be generated if it is determined that the medication storage device is available for use at a certain point in time (e.g., when a user is logged out of the medication storage device). Other types of usage status signals may also be provided.

Abstract: For application to analog, mixed-signal, and custom digital circuits, a system and method to do: global statistical optimization (GSO), global statistical characterization (GSC), global statistical design (GSD), and block-specific design. GSO can perform global yield optimization on hundreds of variables, with no simplifying assumptions. GSC can capture and display mappings from design variables to performance, across the whole design space. GSC can handle hundreds of design variables in a reasonable time frame, e.g., in less than a day, for a reasonable number of simulations, e.g., less than 100,000. GSC can capture design variable interactions and other possible nonlinearities, explicitly capture uncertainties, and intuitively display them. GSD can support the user's exploration of design-to-performance mappings with fast feedback, thoroughly capturing design variable interactions in the whole space, and allow for more efficiently created, more optimal designs.

Abstract: A substrate transport apparatus including a drive section having at least one drive shaft and at least two scara arms operably coupled to the at least one drive shaft, the at least one drive shaft being a common drive shaft for the at least two scara arms effecting extension and retraction of the at least two scara arms, wherein the at least two scara arms are coupled to each other so that, with the at least one drive shaft coupled to the at least two scara arms, rotation of the drive shaft effects extension and retraction of one of the at least two scara arms substantially independent of motion of another of the at least two scara arms.

Abstract: A system is provided for sensing, orienting, and transporting wafers in an automated wafer handling process that reduces the generation of particles and contamination so that the wafer yield is increased. The system includes a robotic arm for moving a wafer from one station to a destination station, and an end-effector connected to an end of the robotic arm for receiving the wafer. The end-effector includes a mechanism for gripping the wafer, a direct drive motor for rotating the wafer gripping mechanism, and at least one sensor for sensing the location and orientation of the wafer. A control processor is provided for calculating the location of the center and the notch of the wafer based on measurements by the sensor(s). Then, the control processor generates an alignment signal for rotating the wafer gripping mechanism so that the wafer is oriented at a predetermined position on the end-effector while the robotic arm is moving to another station.

Abstract: Transient thermal simulation of semiconductor chips uses region-wise variable spatial grids and variable temporal intervals, enabling spatio-temporal thermal analysis of semiconductor chips. Temperature rates of change across a die and/or package of an integrated circuit are computed and tracked versus time. Critical time interval(s) for temperature evaluation are determined. Temperatures of elements, components, devices, and interconnects are updated based on a 3D full chip temperature analysis. Respective power dissipations are updated, as a function of the temperatures, with an automated interface to one or more circuit simulation tools. Subsequently new temperatures are determined as a function of the power dissipations. User definable control and observation parameters enable flexible and efficient transient thermal analysis. The parameters relate to power sources, monitoring, reporting, error tolerances, and output snapshots.

Abstract: One aspect of the invention relates to an assembly comprising a plurality of bins with a plurality of lids associated therewith. Each of the bins has a lock assembly that includes a catch operable to lock the lid in its closed position and a mechanical indicator responsive to the catch. Another aspect of the invention relates to an automated dispensing cabinet that includes a control computer and a plurality of drawers having a plurality of row assemblies therein. Each row assembly has bins that include a tabbed lid, a lock assembly with a catch operable to engage and disengage the tab, and an indicator responsive to the lock assembly. Methods for dispensing from and restocking the remote dispensing systems are also given, as well as a method for indicating which item is to be dispensed from one of a plurality of bins.

Abstract: An apparatus is provided that includes a processor configured to operate a software application, which is configured to receive selection of a number of discrete groups into which to divide a plurality of identified products. The products are located at respective storage locations in a collection of storage locations. The software application is therefore configured to divide the identified products into discrete groups such that the areas of the resulting groups of products at respective storage locations are substantially non-overlapping. The software application is further configured to assign the groups of products to respective workstation computers, each of which is configured to generate and transmit, for each of one or more of the products of a respective group, a signal to an associated RFID tag to thereby direct the RFID tag to generate a notification signal. A method and a computer program product for managing inventory are also provided.

Abstract: A substrate transport apparatus including a peripheral wall having an inner surface that defines a substrate transport chamber capable of holding an isolated atmosphere, at least one substantially ring shaped motor having at least one stator module located within the peripheral wall, between the inner surface and an adjacent outer surface of the peripheral wall and at least one rotor suspended substantially without contact within the transport chamber such that a surface of the peripheral wall encompassed by the ring shaped motor is configured for attachment thereto of a predetermined device and at least one substrate transport arm connected to the at least one rotor and having at least one end effector configured to hold at least one substrate.

Abstract: A system, method, apparatus and computer program product are provided for capturing human-readable text displayed on a unit dose package. In particular, identification information associated with a unit dose package may be used to determine a location and/or a format in which human-readable text, such as an expiration date or lot number associated with the corresponding unit dose medication, is displayed on the unit dose package. Once the location and/or format of the human-readable text has been determined, this information can be used in order to scan the unit dose medication and translate the human-readable text into machine-readable text using, for example, optical character recognition.

Abstract: A method and system for performing multi-objective optimization of a multi-parameter design having several variables and performance metrics. The optimization objectives include the performance values of surrogate models of the performance metrics and the uncertainty in the surrogate models. The uncertainty is always maximized while the performance metrics can be maximized or minimized in accordance with the definitions of the respective performance metrics. Alternatively, one of the optimization objectives can be the value of a user-defined cost function of the multi-parameter design, the cost function depending from the performance metrics and/or the variables. In this case, the other objective is the uncertainty of the cost function, which is maximized. The multi-parameter designs include electrical circuit designs such as analog, mixed-signal, and custom digital circuits.