Abstract: An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.

Abstract: Systems and methods for determining and displaying a time to overload of a motor in a computer numerical controlled (CNC) machine tool are provided. A method includes monitoring a fuse level of a motor in a CNC machine tool and calculating a time to overload of the motor based on the fuse level. The method further includes displaying the time to overload on a user interface based on the fuse level of the motor and a load acting on the motor.

Abstract: A collector device includes a collector connected to a positioner, such as a robot arm. The positioner can automatically move the collector in multiple dimensions to collect objects into the collector according to a specified collection pattern. By moving the collector in multiple dimensions, the positioner provides for objects to be arranged in the collector according to a specified pattern. The positioner can also move the collector so that the collected objects are transferred to a second collector for shipping, storage, and the like.

Abstract: A method of controlling the motion of a moveable door includes determining the direction that the door is moving with respect to its anticipated closed position, and based on the direction, regulating an amount of force that is available to the door for its motion. The method may further include monitoring the position of the door as it is moving, and adjusting the motion of the door and regulating the amount of force available to the door for its motion, based on the calculated difference between the door's position as detected during monitoring and its expected position.

Abstract: A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.

Abstract: A method for proximity-aware circuit design where a set of layout constraint values that satisfy predetermined performance or yield goals is determined in accordance with a layout effect model. One of the layout constraint values is then selected as a constraint input to layout design, and a design layout is performed with the selected layout constraint value to provide a semiconductor circuit design for the semiconductor circuit. The set of layout constraint values can be determined by varying an instance parameter of the layout effect model to determine a set of instance parameters that satisfy the at least one predetermined performance or yield goal in accordance with the layout effect model, and determining layout constraints associated with each instance parameter of the set of instance parameters, thus providing a number of candidates in a design space that can be evaluated according to performance and/or yield tradeoffs.

Abstract: Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.

Abstract: A substrate aligner providing minimal substrate transporter extend and retract motions to quickly align substrate without back side damage while increasing the throughput of substrate processing. In one embodiment, the aligner having an inverted chuck connected to a frame with a substrate transfer system capable of transferring substrate from chuck to transporter without rotationally repositioning substrate. The inverted chuck eliminates aligner obstruction of substrate fiducials and along with the transfer system, allows transporter to remain within the frame during alignment. In another embodiment, the aligner has a rotatable sensor head connected to a frame and a substrate support with transparent rest pads for supporting the substrate during alignment so transporter can remain within the frame during alignment. Substrate alignment is performed independent of fiducial placement on support pads.

Abstract: A dual arm robot assembly has two arms each having a set of joint/link pairs that, in conjunction with an actuator assembly, define at least three degrees of freedom to provide independent horizontal translation and rotation of a distalmost link. A vertical motion mechanism is also provided.

Abstract: In the field of functional verification of digital designs in systems that use an abstraction for portions of a circuit design to perform the verification proof, a tool is described for resolving inconsistencies between the design and abstractions for the design. The tool provides information to a user about intermediate steps in the verification process. In response, the user may provide insight about the design to allow the tool to adjust the verification analysis of the design. The information provided to the user, including possible conflicts between the design and its abstractions, may include visualization techniques to facilitate the user's understating of any inconsistencies.

Abstract: A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.

Abstract: A semiconductor workpiece processing apparatus having a first chamber, a transport vehicle, and another chamber. The first chamber is capable of being isolated from an outside atmosphere. The transport vehicle is located in the first chamber and is movably supported from the first chamber for moving linearly relative to the first chamber. The transport vehicle includes a base, and an integral semiconductor workpiece transfer arm movably mounted to the base and capable of multi-access movement relative to the base. The other chamber is communicably connected to the first chamber via a closable opening of the first chamber. The opening is sized to allow the transport vehicle to transit between the first chamber and the other chamber through the opening.

Abstract: A positioning block and method for spacing riser bus bars includes an insulating material body forming recesses along a longitudinal axis of the block, each recess for receiving an electric riser bus bar therein. A binding feature is formed adjacent to at least one wall of the recesses for securing the riser bus bar within the recess. A locator feature is formed between the walls of each recess for aligning the riser bus bar within the recess.

Abstract: Systems and methods which provide an adjustable tine clamp configuration are shown. Embodiments provide an adjustable support member configuration which is adapted to maintain a desired geometry of tines throughout an adjustable range. The adjustable support members are preferably adjustable to provide selectable clamping widths, such as to accommodate manipulation of goods of different sizes and shapes. Embodiments utilize parallel links coupled to pivoting tine supports to maintain proper tine geometry throughout the full range of adjustment. Such parallel links are further preferably utilized to actuate associated tines in operation of the adjustable tine clamp. Embodiments further implement a short stroke actuator configuration to facilitate very rapid production cycles.

Abstract: A programming interface for a hardware system includes an embedded layer for programmatic access to a physical realization of hardware, a simulation system for simulation of the hardware, and a diagnostics engine that analyzes and compares feedback data from the simulation system and the physical realization. The programming interface may be usefully employed, for example, in the design, purchase, and deployment of robotics for semiconductor manufacturing.

Abstract: An automatic guided vehicle (AGV) and method has at least one AGV with a drive assembly, a rechargeable power source on-board the AGV configured to supply power to the drive assembly, and a controller on-board the AGV. The controller on-board the AGV is configured to substantially continuously monitor at least two conditions including an operating condition of the AGV, a state of charge of the power source, and an electrical power supplied for recharging the rechargeable power source, wherein the controller determines when the rechargeable power source of the AGV is to be recharged, and controls a recharging process of the power source based upon at least one of the monitored conditions.

Abstract: Techniques in which an optimal set of clock gating elements is determined for a selected circuit design. Those clock gating elements are coupled to selected flip-flops, with the effect that those selected flip-flops will consume less dynamic power during operation of the logic circuit. The selected set of clock gating elements provides an optimal savings in overall power consumption after modification of that selected circuit design.

Abstract: A sensing mechanism includes a magnetic source, a magnetic flux sensor, a sensor backing on which the magnetic source and flux sensor are mounted, and a ferromagnetic target, where the magnetic source, magnetic flux sensor, and ferromagnetic target are positioned to form a magnetic circuit from the magnetic source to the target, from the target to the sensor, and returning to the magnetic source through the sensor backing.

Abstract: A substrate processing apparatus has a substrate transport apparatus for transporting substrates, a sensor, and a control system. The processing apparatus is adapted to effect relative movement between the substrate and the sensor. The processing apparatus is further adapted to determine a position of the substrate by sensing the substrate with the sensor.

Abstract: A method of optimizing clock-gated circuitry in an integrated circuit (IC) design is provided. A plurality of signals which feed into enable inputs of a plurality of clock gates is determined, where the clock gates gate a plurality of sequential elements in the IC design. Combinational logic which is shared among the plurality of signals is identified. The clock-gated circuitry is transformed into multiple levels of clock-gating circuitry based on the shared combinational logic.